Nanotechnology and Advanced Motion Controlled Positioning Systems



Nano-precision
Motion Control
Products &
Systems

Hexapods

Air Bearing Stages

Linear Stages

Rotary Stages

Vacuum Stages

Custom Stages

Motion Controllers

Project
Requirements
Form

Air Bearing Motion Systems

ALIO has development leading edge True NANO ™ air bearing motion system for a wide range of applications in manufacturing, inspection/repair and metrology. With several patent pending designs for Planar and  Nano Z ™ ALIO is well positioned for the next application demands of TRUE NANO ™ precision in PV, Semiconductor, Ink Jet Deposition and Optical inspection

 

 







planar_air_bearing_metrology_system_laser_sensor

Patent pending Air Bearing Planar with patent pending NANO Z ™ and Nano Rotary, 4 axis system with Precitec laser sensor

 

 

System Travel

300 mm x 300 mm

500 mm x 500 mm

1 meter x 1 meter

Drive System

Advanced Ceramic Servo Motor or Ironless Core Linear Motor

Feedback System

Non Contact Optical Encoder or Laser Interferometer Feedback

Resolution - Linear Encoder

5 nanometers with 4096x Interpolation

Resolution - Laser Interferometer

38 picometers with 4096x Interpolation

Load

Load Capacity is Sized for the Application (Please Consult the Factory)

Accuracy - Linear Encoder (XY)

Better Than +/- 0.5 um

Better Than +/- 0.75 um

Better Than +/- 1.0 um

Accuracy - Laser Interferometer (XY)

+/- 10 ppm Standard, +/- 1.5 ppm Compensated

Repeatability - Linear Encoder (XY)

+/- 50 nm

+/- 60 nm

+/- 80 nm

Repeatability - Laser Interferometer (XY)

+/- 10 nm

+/- 20 nm

+/- 30 nm

Straightness

+/- 0.5 um

+/- 1.0 um

+/- 1.5 um

Flatness (XY, Dependant on the Granite)

< +/- 0.5 um

< +/- 0.5 um

< +/- 1.0 um

Pitch/Roll

< 1 arc-second

Yaw

1 arc-second

Orthogonality

1 arc-second

 



NANO Z ™

Increased demands for True NANO ™ metrology and process lead ALIO to design and manufacture the NANO Z™ patent pending Z lift air bearing stage to exceed all past design issues of tip and tilt while increasing the accuracy to less than 100 nanometers with standard Renishaw Invar encoders. The counterbalance NANO Z™ can easily hold heavy vacuum wafer chucks and still excel with nano precision over 24 mm of travel.









NANO_PRECISION_Z_air_bearing_STAGE_with_mechanical_XY_STAGE_ using_NEWWAY_LINEAR_AIR_BEARIINGS

NANO Z™ stage shown on the ALIO TRUE NANO POSTIONING™ XY Mechanical Bearing Stage












 

 

 

Three_AXIS_AIR_BEARING_METROLOGY_SYSTEM_NEWWAY_LINEAR_AIRBEARINGS

 

3-AXIS AIR BEARING METROLOGY SYSTEM with LASER Interferometer feedback and NEWWAY linear air beainings

 


 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

updated: 02/ 24/2010

 


Data Sheets

CERAMIC SERVO MOTORS

AI-D4-5000E-AB

AI-D4-10000E-AB

AI-D4-10000E-AB-XY

AI-D4-20000E-AB

AI-L12-xyz00-AB

Dual HR4-40000-AB

Dual HR4-60000-AB

LINEAR SERVO MOTOR

Linear AI-LM-5000

Linear AI-LM-10000

Linear AI-LM-20000

Linear AI-LM-30000

Linear AI-LM-40000

CUSTOM AIR BEARINGS

AI-D4-15000E-AB-OPT

XY PLANARS

300 mm

500mm

1M

Air Bearing Brochure