| Model | AI-VC-600-Z-SCB-ATRAK |
| Stage | Vertical Z Stage |
| Travel | 6 mm (+/- 3 mm) |
| Dimensions (Length x Width x Height) | 73.6 mm x 60 mm x 59 mm |
| Drive | Voice Coil Motor (VC) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Crossed Roller Bearings |
| Counterbalance | Spring Counterbalance |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Linear Displacement Accuracy | +/- 2.0 µm |
| Bidirectional Linear Repeatability | +/- 75 nm |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
| Straightness In X | +/- 5 µm |
| Flatness [2] | +/- 5 µm |
| Max Payload Capability | 350 g |
| Force | 15 N |
| Assembly Mass | 620 g |
| Model | AI-LM-17000-("PAYLOAD")-Z-MCB-BASE | ||||
| Stage | Vertical Z Stage | ||||
| Travel | 170 mm (+/- 85 mm) | ||||
| Payload Options | 20 N, 30 N, 40 N, 50 N, or 60 N | ||||
| Dimensions (Length x Width x Height) | 262 mm x 50 mm x 340 mm | ||||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||||
| Feedback | Non-Contact Optical Linear Encoder | ||||
| Bearings | Crossed Roller Bearings | ||||
| Counterbalance | Magnetic Spring (Constant Force) | ||||
| Cables | High Flex, 10M Cycle, 3m Length | ||||
| Structure | Anodized Aluminum 6061-T6 | ||||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
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| Operating Temperature | 0°C to 50°C | ||||
| Humidity | 10% to 80% Non-Condensing | ||||
| Performance Specifications [1] | (STD) | ULTRA | NANO | ||
| Linear Displacement Accuracy | +/- 5 µm | +/- 2.0 µm | +/- 0.4 µm | ||
| Bidirectional Linear Repeatability | +/- 75 nm | +/- 50 nm | |||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
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| Straightness | +/- 5.0 µm | +/- 2.0 µm | +/- 1.5 µm | ||
| Flatness [2] | +/- 5.0 µm | +/- 2.0 µm | +/- 1.5 µm | ||
| Pitch | 18 arc-sec | ||||
| Yaw | 18 arc-sec | ||||
| Roll | 18 arc-sec | ||||
| Max Velocity [3] | 1 m/s | ||||
| Max Acceleration [3] | 2.0 G | ||||
| Payload (Nominal) | 20 N | 30 N | 40 N | 50 N | 60 N |
| Minimum To Maximum Payload Range | 15-25 N | 25-35 N | 35-45 N | 45-55 N | 55-65 N |
| Assembly Mass | 13.8 kg | ||||
| Model | AI-LM-5000-("PAYLOAD")-Z-MCB-("ORIENTATION") | |||||
| Stage | Vertical Z Stage | |||||
| Travel | 50 mm (+/- 25 mm) | |||||
| Payload Options | 30 N, 50 N, 60 N, 70 N, 80 N, or 90 N | |||||
| Dimensions (Length x Width x Height) | 182 mm x 106 mm x 176 mm | |||||
| Drive | Direct Drive (Ironless Core Linear Motor) | |||||
| Feedback | Non-Contact Optical Linear Encoder | |||||
| Bearings | Crossed Roller Bearings | |||||
| Counterbalance | Magnetic Spring (Constant Force) | |||||
| Cables | High Flex, 10M Cycle, 3m Length | |||||
| Structure | Anodized Aluminum 6061-T6 Optional: Stainless Steel |
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| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
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| Operating Temperature | 0°C to 50°C | |||||
| Humidity | 10% to 80% Non-Condensing | |||||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |||
| Linear Displacement Accuracy | +/- 7 µm | +/- 1.0 µm | +/- 0.4 µm | |||
| Bidirectional Linear Repeatability | +/- 100 nm | +/- 75 nm | ||||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
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| Straightness | +/- 6.0 µm | +/- 3.0 µm | ||||
| Flatness [2] | +/- 6.0 µm | +/- 3.0 µm | ||||
| Pitch | 15 arc-sec | |||||
| Yaw | 15 arc-sec | |||||
| Roll | 15 arc-sec | |||||
| Max Velocity [3] | 0.05 m/s | |||||
| Payload (Nominal) | 30 N, 50 N, 60 N, 70 N, 80 N, or 90 N | 50 N | 60 N | 70 N | 80 N | 90 N |
| Minimum To Maximum Payload Range | 24-36 N | 44-56 N | 54-66 N | 64-76 N | 74-86 N | 84-96 N |
| Assembly Mass | 7.1 kg | |||||
| Moving Mass | 3.3 kg | |||||
| Model | AI-LM-5000-("PAYLOAD")-Z-MCB-("ORIENTATION") | |||||
| Stage | Vertical Z Stage | |||||
| Travel | 50 mm (+/- 25 mm) | |||||
| Payload Options | 2 N, 8 N, 14 N, 19 N, or 24 N | |||||
| Dimensions (Length x Width x Height) | 165 mm x 96 mm x 156 mm | |||||
| Drive | Direct Drive (Ironless Core Linear Motor) | |||||
| Feedback | Non-Contact Optical Linear Encoder | |||||
| Bearings | Crossed Roller Bearings | |||||
| Counterbalance | Magnetic Spring (Constant Force) | |||||
| Cables | High Flex, 10M Cycle, 3m Length | |||||
| Structure | Anodized Aluminum 6061-T6 Optional: Stainless Steel |
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| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
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| Operating Temperature | 0°C to 50°C | |||||
| Humidity | 10% to 80% Non-Condensing | |||||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |||
| Linear Displacement Accuracy | +/- 7 µm | +/- 1.0 µm | +/- 0.4 µm | |||
| Bidirectional Linear Repeatability | +/- 75 nm | +/- 45 nm | ||||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
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| Straightness | +/- 5.0 µm | +/- 2.5 µm | ||||
| Flatness [2] | +/- 5.0 µm | +/- 2.5 µm | ||||
| Pitch | 14 arc-sec | |||||
| Yaw | 14 arc-sec | |||||
| Roll | 14 arc-sec | |||||
| Max Velocity [3] | 0.1 m/s | |||||
| Payload (Nominal) | -- | 2 N | 8 N | 14 N | 19 N | 24 N |
| Minimum To Maximum Payload Range | -- | 0-6 N | 4-12 N | 10-18 N | 15-23 N | 18-30 N |
| Assembly Mass | 5.2 kg | |||||
| Moving Mass | 2.1 kg | |||||
| Model | AI-LM-2400-("PAYLOAD")-Z-MCB-("ORIENTATION") | |||||
| Stage | Vertical Z Stage | |||||
| Travel | 24 mm (+/-12 mm) | |||||
| Payload Options | 2 N, 8 N, 14 N, 19 N, or 24 N | |||||
| Dimensions (Length x Width x Height) | 165 mm x 96 mm x 130 mm | |||||
| Drive | Direct Drive (Ironless Core Linear Motor) | |||||
| Feedback | Non-Contact Optical Linear Encoder | |||||
| Bearings | Crossed Roller Bearings | |||||
| Counterbalance | Magnetic Spring (Constant Force) | |||||
| Cables | High Flex, 10M Cycle, 3m Length | |||||
| Structure | Anodized Aluminum 6061-T6 Optional: Stainless Steel |
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| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
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| Operating Temperature | 0°C to 50°C | |||||
| Humidity | 10% to 80% Non-Condensing | |||||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |||
| Linear Displacement Accuracy | +/- 5 µm | +/- 0.7 µm | +/- 0.3 µm | |||
| Bidirectional Linear Repeatability | +/- 75 nm | +/- 45 nm | ||||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
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| Straightness | +/- 3.0 µm | +/- 2.0 µm | ||||
| Flatness [2] | +/- 3.0 µm | +/- 2.0 µm | ||||
| Pitch | 10 arc-sec | |||||
| Yaw | 10 arc-sec | |||||
| Roll | 10 arc-sec | |||||
| Max Velocity [3] | 0.1 m/s | |||||
| Payload (Nominal) | -- | 2 N | 8 N | 14 N | 19 N | 24 N |
| Minimum To Maximum Payload Range | -- | 0-6 N | 4-12 N | 10-18 N | 15-23 N | 18-30 N |
| Assembly Mass | 4.6 kg | |||||
| Moving Mass | 2 kg | |||||
| Model | AI-VC-600-Z-SCB | ||
| Stage | Vertical Z Stage | ||
| Travel | 6 mm (+/- 3 mm) | ||
| Dimensions (Length x Width x Height) | 80 mm x 60 mm x 70 mm | ||
| Drive | Voice Coil Motor (VC) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Counterbalance | Spring Counterbalance | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
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| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | Depending on specific Application - Ask ALIO | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
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| Max Velocity [3] | 0.3 m/s | ||
| Max Peak Acceleration [3] | 4.0 G | ||
| Max Payload Capability | 2.5 kg | ||
| Assembly Mass | 0.9 kg | ||
| Model | AI-LM-2500-Z-MCB-15N | ||
| Stage | Vertical Z Stage | ||
| Travel | 25 mm (+/- 12.5 mm) | ||
| Dimensions (Length x Width x Height) | 56 mm x 88 mm x 144 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Counterbalance | Magnetic Spring (Constant Force) | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 Optional: Stainless Steel |
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| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
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| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | Depending on specific Application - Ask ALIO | ||
| Max Payload [6] | 15N | ||
| Payload Range [6] | 7.5 - 15 N | ||
| Max Velocity | 0.1 m/s | ||
| Max Acceleration | 0.5 G | ||
| Assembly Mass | 1.9 kg | ||
| Model | AI-LM-2500-Z-MCB-7N | ||
| Stage | Vertical Z Stage | ||
| Travel | 25 mm (+/- 12.5 mm) | ||
| Dimensions (Length x Width x Height) | 56 mm x 88 mm x 144 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Counterbalance | Magnetic Spring (Constant Force) | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 Optional: Stainless Steel |
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| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
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| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | Depending on specific Application - Ask ALIO | ||
| Max Payload [6] | 7.5 N | ||
| Payload Range [6] | 2.5 - 7.5 N | ||
| Max Velocity | 0.1 m/s | ||
| Max Acceleration | 0.5 G | ||
| Assembly Mass | 1.9 kg | ||
| Model | AI-LM-2500-Z-MCB-2N | ||
| Stage | Vertical Z Stage | ||
| Travel | 25 mm (+/- 12.5 mm) | ||
| Dimensions (Length x Width x Height) | 56 mm x 88 mm x 144 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Counterbalance | Magnetic Spring (Constant Force) | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 Optional: Stainless Steel |
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| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
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| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | Depending on specific Application - Ask ALIO | ||
| Max Payload [6] | 2.5 N | ||
| Payload Range [6] | 0 - 2.5 N | ||
| Max Velocity | 0.1 m/s | ||
| Max Acceleration | 0.5 G | ||
| Assembly Mass | 1.9 kg | ||
