ModelAI-LM-420RA
StageRotary Stage
Travel +/- 5 deg
Diameter420 mm
Dimensions (Length x Width x Height)490 mm x 420 mm x 40 mm
Thru330 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Rotary Encoder
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 1.0 arc-sec
Bidirectional Angular Repeatability +/- 0.4 arc-sec +/- 0.3 arc-sec +/- 0.2 arc-sec
Resolution [2]Standard: 0.005 arc-sec (Analog)
Optional: 0.002 - 5.0 arc-sec (Digital)
Axial Runout +/- 1.5 µmN/A
Radial Runout +/- 1.5 µmN/A
Wobble +/- 2.5 arc-secN/A
Max Velocity [3]900 deg/s
Max Acceleration [3]800000 deg/s²
Max Load (Axial)40 kg
Max Load (Radial)20 kg
Assembly Mass8.7 kg
ModelAI-LM-200RA
StageRotary Stage
Travel +/- 7.5 deg
Diameter200 mm
Dimensions (Length x Width x Height)270 mm x 200 mm x 36 mm
Thru100 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Rotary Encoder
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 1.0 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec +/- 0.4 arc-sec +/- 0.2 arc-sec
Resolution [2]Standard: 0.01 arc-sec (Analog)
Optional: 0.003 - 10.0 arc-sec (Digital)
Axial Runout +/- 2.0 µmN/A
Radial Runout +/- 2.0 µmN/A
Wobble +/- 4.0 arc-secN/A
Max Velocity [3]1500 deg/s
Max Acceleration [3]2000000 deg/s²
Max Load (Axial)40 kg
Max Load (Radial)20 kg
Assembly Mass4 kg
ModelAI-TM-312RA
StageRotary Stage
Travel360 deg continuous
Diameter312 mm
Dimensions (Length x Width x Height)332 mm x 312 mm x 80 mm
Aperture / Thru75 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
SensorsIntegrated Home
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec +/- 0.4 arc-sec +/- 0.2 arc-sec
Axial Runout +/- 5.0 µm +/- 2.5 µm +/- 1.5 µm
Radial Runout +/- 5.0 µm +/- 2.5 µm +/- 1.5 µm
Wobble +/- 7.5 arc-sec +/- 5.0 arc-sec +/- 2.5 arc-sec
Resolution [2]Standard: 0.007 arc-sec (Analog)
Optional: 0.002 - 7.0 arc-sec (Digital)
Max Velocity [3]2400 deg/s
Max Acceleration [3]30000 deg/s²
Max Load (Axial)50 kg
Max Load (Radial)33 kg
Assembly Mass19 kg
ModelAI-TM-208RA
StageRotary Stage
Travel360 deg continuous
Diameter208 mm
Dimensions (Length x Width x Height)228 mm x 208 mm x 110 mm
Aperture / Thru75 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
SensorsIntegrated Home
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec +/- 0.4 arc-sec +/- 0.3 arc-sec
Axial Runout +/- 5.0 µm +/- 2.5 µm +/- 1.5 µm
Radial Runout +/- 5.0 µm +/- 2.5 µm +/- 1.5 µm
Wobble +/- 8.0 arc-sec +/- 5.0 arc-sec +/- 2.5 arc-sec
Resolution [2]Standard: 0.01 arc-sec (Analog)
Optional: 0.003 - 10.0 arc-sec (Digital)
Max Velocity [3]5500 deg/s
Max Acceleration [3]170000 deg/s²
Max Load (Axial)40 kg
Max Load (Radial)27 kg
Assembly Mass11 kg
ModelAI-TM-125R-AB
StageRotary Stage
Travel360 deg continuous
Diameter125 mm
Dimensions (Length x Width x Height)145 mm x 145 mm x 150 mm
Aperture / Thru19 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications 
Axial Runout (Standard)0.5 µm
Radial Runout (Standard)0.5 µm
Axial Stiffness [7]263 N/µm
Radial Stiffness [7]87 N/µm
Tilt Stiffness [7]0.18 Nm/µrad
Resolution (Standard) [8]Standard: 0.02 arc-sec (Analog)
Optional: 0.021 - 21.0 arc-sec (Digital)
Max Velocity [6]1800 deg/s
Max Axial Load [7]37 kg
Max Radial Load [7]14 kg
Assembly Mass9.6 kg
ModelAI-6D-250XY-92Z
StageHybrid Hexapod  (6 DOF)
Travel - XY250mm (+/- 125mm)
Travel - Z92mm (+ 92mm/ - 0mm) 
Travel - Pitch & Roll  +/- 20 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)435 mm x 435 mm x 707.5 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
Optional: Magnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications 
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.02 arc-sec
Yaw Resolution ~0.01 arc-sec
Max Linear Velocity [10]0.3 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]180 deg/s
Assembly Mass130 kg
Max Payload [11]35 kg
ModelAI-TRI-LM-9200
StageLinear Motor Tripod (3 DOF)
Travel - Z92 mm (+ 92 mm/- 0 mm)
Travel - Pitch & Roll  +/- 20 deg
Dimensions (Length x Width x Height)435 mm x 380 mm x 482.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)
Linear Resolution Standard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Pitch And Roll Resolution ~0.02 arc-sec
Max Linear Velocity [10]0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Payload [11]35 kg
Assembly Mass52 kg
ModelAI-LM-20000-Z-ABCB
StageVertical Z Stage
Travel200mm (+/- 100mm)
Dimensions (Length x Width x Height)230mm x 50mm x 484mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceAir Bearing Pneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 3.0 µm +/- 2.0 µm +/- 1.5 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Max Velocity [3]0.25 m/s
Max Peak Acceleration [3]2.5 G
Max Payload Capability25 kg
Assembly Mass9.3 kg
ModelAI-LM-15000-Z-ABCB-HF
StageVertical Z Stage
Travel150mm (+/- 75mm)
Dimensions (Length x Width x Height)215mm x 50mm x 353mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceAir Bearing Pneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 0.7 µm +/- 0.4 µm
Bidirectional Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 2.5 µm +/- 1.5 µm +/- 1.2 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Max Velocity [3]0.25 m/s
Max Peak Acceleration [3]4.0 G
Max Payload Capability25 kg
Assembly Mass6.5 kg
ModelAI-LM-15000-Z-ABCB
StageVertical Z Stage
Travel150mm (+/- 75mm)
Dimensions (Length x Width x Height)200mm x 50mm x 353mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceAir Bearing Pneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 0.7 µm +/- 0.4 µm
Bidirectional Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 2.5 µm +/- 1.5 µm +/- 1.2 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Max Velocity [3]0.25 m/s
Max Peak Acceleration [3]2.5 G
Max Payload Capability25 kg
Assembly Mass5.6 kg
ModelAI-LM-10000-Z-ABCB-HF
StageVertical Z Stage
Travel100mm (+/- 50mm)
Dimensions (Length x Width x Height)215mm x 50mm x 323mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceAir Bearing Pneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 0.7 µm +/- 0.3 µm
Bidirectional Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 2.5 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch [2] +/- 10.0 arc-sec
Yaw +/- 10.0 arc-sec
Roll +/- 6.0 arc-sec
Max Velocity [3]0.25 m/s
Max Peak Acceleration [3]4.5 G
Max Payload Capability25 kg
Assembly Mass5.9 kg
ModelAI-BSD-5000-Z
StageVertical Z Stage
Travel50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)175 mm x 100 mm 229 mm
MotorFrameless Torque Motor, Precision Ball Screw
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
BrakeStandard: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: No Brake
CounterbalanceStandard: None Needed
Optional: Pneumatic Counterbalance to Increase Payload Capability
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional Linear Repeatability +/- 125 nm+/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 4.0 µm +/- 2.0 µm
Pitch +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.1 m/s
Max Acceleration [3]1.0 G
Max Payload Capability20 kg
Max Payload Capability (With Pneuboost)50 kg
Assembly Mass7.6 kg
ModelAI-BSD-3200-Z
StageVertical Z Stage
Travel32 mm (+/- 16 mm)
Dimensions (Length x Width x Height)175 mm x 100 mm x 202 mm
MotorFrameless Torque Motor, Precision Ball Screw
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
BrakeStandard: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: No Brake
CounterbalanceStandard: None Needed
Optional: Pneumatic Counterbalance to Increase Payload Capability
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional Linear Repeatability +/- 125 nm+/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.1 m/s
Max Acceleration [3]1.0 G
Max Payload Capability20 kg
Max Payload Capability (With Pneuboost)50 kg
Assembly Mass6.9 kg
ModelAI-BSD-2400-Z
StageVertical Z Stage
Travel24 mm (+/- 12 mm)
Dimensions (Length x Width x Height)175 mm x 100 mm x 188 mm
MotorFrameless Torque Motor, Precision Ball Screw
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
BrakeStandard: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: No Brake
CounterbalanceStandard: None Needed
Optional: Pneumatic Counterbalance to Increase Payload Capability
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3 µm +/- 0.8 µm +/- 0.4 µm
Bidirectional Linear Repeatability +/- 125 nm+/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2 µm +/- 0.8 µm +/- 0.4 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.1 m/s
Max Acceleration [3]1.0 G
Max Payload Capability20 kg
Max Payload Capability (With Pneuboost)50 kg
Assembly Mass6.6 kg
ModelAI-LM-7000-50N-Z-CB
StageVertical Z Stage
Travel70 mm (+ 70 mm/- 0 mm)
Dimensions (Length x Width x Height)175 mm x 125 mm x 250 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional Linear Repeatability +/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 4.0 µm +/- 2.0 µm
Pitch +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.25 m/s
Max Acceleration [3]1.0 G
Max Payload Capability30 kg
Force50 N
Assembly Mass13.0 kg
ModelAI-LM-100000-UII
StageCartesian Gantry
Travel - X And/Or Travel - Y1000 mm (+/- 500 mm)
Dimensions (Length x Width x Height)1300 mm x 1507 mm x 320 mm
Max. Sample Width (Inner Width)1134 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]STDPRCSNULTRA
Linear Displacement Accuracy +/- 40 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 16 µm +/- 5 µm
Flatness [2] +/- 35 µm +/- 10 µm
Pitch30 arc-sec
Yaw30 arc-sec
Roll30 arc-sec
Max Velocity With AC Drive [3]2.5 m/s
Max Velocity With 48VDC Drive [3]0.5 m/s
Max Acceleration With AC Drive [3]1.3 G
Max Acceleration With 48VDC Drive [3]0.3 G
Max (Vertical) Payload Capability 25 kg
Max (Horizontal) Payload Capability 30 kg
Assembly Mass84 kg
Configurable Options 
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific RequirementsY Axis Top Down Mounting (Face Mounting Shown)
Large or Small Cable Tracks
Mix and Match Travel
Risers Available (Custom Height)
Multiple Cable Routing and Connectorization Options
Customer Cable Routing Available
Granite, Optical Table, and Breadboard Bases
Single Axis Versions Available
Z Axis Options Available
X and X' Controlled Yaw Available
Various Material Options Available
Inch Spacing Versions Available (see page 3)
*Increased Gap between X and X' stages
without Increased Y Travel
ModelAI-LM-90000-UII
StageCartesian Gantry
Travel - X And/Or Travel - Y900 mm (+/- 450 mm)
Dimensions (Length x Width x Height)1200 mm x 1407 mm x 320 mm
Max. Sample Width (Inner Width)1034 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]STDPRCSNULTRA
Linear Displacement Accuracy +/- 36 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 14 µm +/- 5 µm
Flatness [2] +/- 28 µm +/- 10 µm
Pitch30 arc-sec
Yaw30 arc-sec
Roll30 arc-sec
Max Velocity With AC Drive [3]2.5 m/s
Max Velocity With 48VDC Drive [3]0.5 m/s
Max Acceleration With AC Drive [3]1.4 G
Max Acceleration With 48VDC Drive [3]0.3 G
Max (Vertical) Payload Capability 25 kg
Max (Horizontal) Payload Capability 30 kg
Assembly Mass73 kg
Configurable Options 
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific RequirementsY Axis Top Down Mounting (Face Mounting Shown)
Large or Small Cable Tracks
Mix and Match Travel
Risers Available (Custom Height)
Multiple Cable Routing and Connectorization Options
Customer Cable Routing Available
Granite, Optical Table, and Breadboard Bases
Single Axis Versions Available
Z Axis Options Available
X and X' Controlled Yaw Available
Various Material Options Available
Inch Spacing Versions Available (see page 3)
*Increased Gap between X and X' stages
without Increased Y Travel
ModelAI-LM-80000-UII
StageCartesian Gantry
Travel - X And/Or Travel - Y800 mm (+/- 400 mm)
Dimensions (Length x Width x Height)1100 mm x 1307 mm x 320 mm
Max. Sample Width (Inner Width)934 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]STDPRCSNULTRA
Linear Displacement Accuracy +/- 32 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 12 µm +/- 5 µm
Flatness [2] +/- 24 µm +/- 10 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll25 arc-sec
Max Velocity With AC Drive [3]2.5 m/s
Max Velocity With 48VDC Drive [3]0.5 m/s
Max Acceleration With AC Drive [3]1.5 G
Max Acceleration With 48VDC Drive [3]0.3 G
Max (Vertical) Payload Capability 25 kg
Max (Horizontal) Payload Capability 30 kg
Assembly Mass63 kg
Configurable Options 
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific RequirementsY Axis Top Down Mounting (Face Mounting Shown)
Large or Small Cable Tracks
Mix and Match Travel
Risers Available (Custom Height)
Multiple Cable Routing and Connectorization Options
Customer Cable Routing Available
Granite, Optical Table, and Breadboard Bases
Single Axis Versions Available
Z Axis Options Available
X and X' Controlled Yaw Available
Various Material Options Available
Inch Spacing Versions Available (see page 3)
*Increased Gap between X and X' stages
without Increased Y Travel
ModelAI-LM-70000-UII
StageCartesian Gantry
Travel - X And/Or Travel - Y700 mm (+/- 350 mm)
Dimensions (Length x Width x Height)1000 mm x 1207 mm x 320 mm
Max. Sample Width (Inner Width)834 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]STDPRCSNULTRA
Linear Displacement Accuracy +/- 28 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 10 µm +/- 4 µm
Flatness [2] +/- 20 µm +/- 8 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll25 arc-sec
Max Velocity With AC Drive [3]2.5 m/s
Max Velocity With 48VDC Drive [3]0.5 m/s
Max Acceleration With AC Drive [3]1.6 G
Max Acceleration With 48VDC Drive [3]0.4 G
Max (Vertical) Payload Capability 25 kg
Max (Horizontal) Payload Capability 30 kg
Assembly Mass54 kg
Configurable Options 
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific RequirementsY Axis Top Down Mounting (Face Mounting Shown)
Large or Small Cable Tracks
Mix and Match Travel
Risers Available (Custom Height)
Multiple Cable Routing and Connectorization Options
Customer Cable Routing Available
Granite, Optical Table, and Breadboard Bases
Single Axis Versions Available
Z Axis Options Available
X and X' Controlled Yaw Available
Various Material Options Available
Inch Spacing Versions Available (see page 3)
*Increased Gap between X and X' stages
without Increased Y Travel
ModelAI-LM-60000-UII
StageCartesian Gantry
Travel - X And/Or Travel - Y600 mm (+/- 300 mm)
Dimensions (Length x Width x Height)900 mm x 1107 mm x 320 mm
Max. Sample Width (Inner Width)734 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]STDPRCSNULTRA
Linear Displacement Accuracy +/- 24 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 16 µm +/- 8 µm
Pitch20 arc-sec
Yaw20 arc-sec
Roll20 arc-sec
Max Velocity With AC Drive [3]2.5 m/s
Max Velocity With 48VDC Drive [3]0.5 m/s
Max Acceleration With AC Drive [3]1.8 G
Max Acceleration With 48VDC Drive [3]0.4 G
Max (Vertical) Payload Capability 25 kg
Max (Horizontal) Payload Capability 30 kg
Assembly Mass45 kg
Configurable Options 
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific RequirementsY Axis Top Down Mounting (Face Mounting Shown)
Large or Small Cable Tracks
Mix and Match Travel
Risers Available (Custom Height)
Multiple Cable Routing and Connectorization Options
Customer Cable Routing Available
Granite, Optical Table, and Breadboard Bases
Single Axis Versions Available
Z Axis Options Available
X and X' Controlled Yaw Available
Various Material Options Available
Inch Spacing Versions Available (see page 3)
*Increased Gap between X and X' stages
without Increased Y Travel
ModelAI-LM-50000-UII
StageCartesian Gantry
Travel - X And/Or Travel - Y500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)800 mm x 1007 mm x 320 mm
Max. Sample Width (Inner Width)634 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]STDPRCSNULTRA
Linear Displacement Accuracy +/- 20 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 6 µm +/- 4 µm
Flatness [2] +/- 12 µm +/- 8 µm
Pitch20 arc-sec
Yaw20 arc-sec
Roll20 arc-sec
Max Velocity With AC Drive [3]2.5 m/s
Max Velocity With 48VDC Drive [3]0.5 m/s
Max Acceleration With AC Drive [3]2 G
Max Acceleration With 48VDC Drive [3]0.4 G
Max (Vertical) Payload Capability 25 kg
Max (Horizontal) Payload Capability 30 kg
Assembly Mass38 kg
Configurable Options 
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific RequirementsY Axis Top Down Mounting (Face Mounting Shown)
Large or Small Cable Tracks
Mix and Match Travel
Risers Available (Custom Height)
Multiple Cable Routing and Connectorization Options
Customer Cable Routing Available
Granite, Optical Table, and Breadboard Bases
Single Axis Versions Available
Z Axis Options Available
X and X' Controlled Yaw Available
Various Material Options Available
Inch Spacing Versions Available (see page 3)
*Increased Gap between X and X' stages
without Increased Y Travel
ModelAI-LM-40000-UII
StageCartesian Gantry
Travel - X And/Or Travel - Y400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)700 mm  907 mm x 320 mm
Max. Sample Width (Inner Width)534 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]STDPRCSNULTRA
Linear Displacement Accuracy +/- 16 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 10 µm +/- 6 µm
Pitch20 arc-sec
Yaw20 arc-sec
Roll20 arc-sec
Max Velocity With AC Drive [3]2.0  m/s
Max Velocity With 48VDC Drive [3]0.5 m/s
Max Acceleration With AC Drive [3]2.2 G
Max Acceleration With 48VDC Drive [3]0.5 G
Max (Vertical) Payload Capability 25 kg
Max (Horizontal) Payload Capability 30 kg
Assembly Mass33 kg
Configurable Options 
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific RequirementsY Axis Top Down Mounting (Face Mounting Shown)
Large or Small Cable Tracks
Mix and Match Travel
Risers Available (Custom Height)
Multiple Cable Routing and Connectorization Options
Customer Cable Routing Available
Granite, Optical Table, and Breadboard Bases
Single Axis Versions Available
Z Axis Options Available
X and X' Controlled Yaw Available
Various Material Options Available
Inch Spacing Versions Available (see page 3)
*Increased Gap between X and X' stages
without Increased Y Travel
ModelAI-LM-30000-UII
StageCartesian Gantry
Travel - X And/Or Travel - Y300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)600 mm x 807 mm x 320 mm
Max. Sample Width (Inner Width)434 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]STDPRCSNULTRA
Linear Displacement Accuracy +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 10 µm +/- 6 µm
Pitch20 arc-sec
Yaw20 arc-sec
Roll20 arc-sec
Max Velocity With AC Drive [3]2.0  m/s
Max Velocity With 48VDC Drive [3]0.5 m/s
Max Acceleration With AC Drive [3]2.5 G
Max Acceleration With 48VDC Drive [3]0.5 G
Max (Vertical) Payload Capability 25 kg
Max (Horizontal) Payload Capability 30 kg
Assembly Mass30 kg
Configurable Options 
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific RequirementsY Axis Top Down Mounting (Face Mounting Shown)
Large or Small Cable Tracks
Mix and Match Travel
Risers Available (Custom Height)
Multiple Cable Routing and Connectorization Options
Customer Cable Routing Available
Granite, Optical Table, and Breadboard Bases
Single Axis Versions Available
Z Axis Options Available
X and X' Controlled Yaw Available
Various Material Options Available
Inch Spacing Versions Available (see page 3)
*Increased Gap between X and X' stages
without Increased Y Travel
ModelAI-LM-20000-UII
StageCartesian Gantry
Travel - X And/Or Travel - Y200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)500 mm x 707 mm x 320 mm
Max. Sample Width (Inner Width)334 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]STDPRCSNULTRA
Linear Displacement Accuracy +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 10 µm +/- 6 µm
Pitch20 arc-sec
Yaw20 arc-sec
Roll20 arc-sec
Max Velocity With AC Drive [3]2.0  m/s
Max Velocity With 48VDC Drive [3]0.5 m/s
Max Acceleration With AC Drive [3]2.5 G
Max Acceleration With 48VDC Drive [3]0.5 G
Max (Vertical) Payload Capability 25 kg
Max (Horizontal) Payload Capability 30 kg
Assembly Mass28 kg
Configurable Options
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific RequirementsY Axis Top Down Mounting (Face Mounting Shown)
Large or Small Cable Tracks
Mix and Match Travel
Risers Available (Custom Height)
Multiple Cable Routing and Connectorization Options
Customer Cable Routing Available
Granite, Optical Table, and Breadboard Bases
Single Axis Versions Available
Z Axis Options Available
X and X' Controlled Yaw Available
Various Material Options Available
Inch Spacing Versions Available (see page 3)
*Increased Gap between X and X' stages
without Increased Y Travel
ModelAI-LM-200000-UII-XB
StageLinear Stage
Travel2000 mm (+/- 1000 mm)
Dimensions (Length x Width x Height)2366 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy+/- 200 µm+/- 10 µm+/- 5 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 50 µm +/- 25 µm +/- 10 µm
Flatness [2] +/- 200 µm +/- 50 µm +/- 15 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-LM-150000-UII-XB
StageLinear Stage
Travel1500 mm (+/- 750 mm)
Dimensions (Length x Width x Height)1866 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy+/-75 µm +/-10 µm +/- 5 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness+/- 40 µm +/- 25 µm +/- 10 µm
Flatness [2]+/- 175 µm +/- 35 µm +/- 15 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-LM-100000-UII-XB
StageLinear Stage
Travel1000 mm (+/- 500 mm)
Dimensions (Length x Width x Height)1366 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy +/- 40 µm +/-10 µm +/- 5 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 30 µm +/- 20 µm+/- 10 µm
Flatness [2] +/- 150 µm +/- 20 µm+/- 15 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-LM-80000-UII-XB
StageLinear Stage
Travel800 mm (+/- 400 mm)
Dimensions (Length x Width x Height)1166 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy +/- 32 µm +/- 5 µm +/- 3 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 26 µm+/- 18 µm+/- 10 µm
Flatness [2] +/- 100 µm+/- 18 µm+/- 12 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-LM-70000-UII-XB
StageLinear Stage
Travel700 mm (+/- 350 mm)
Dimensions (Length x Width x Height)1066 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy +/- 28 µm +/- 5 µm +/- 3 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 24 µm+/- 18 µm+/- 10 µm
Flatness [2] +/- 75 µm+/- 18 µm+/- 12 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-LM-60000-UII-XB
StageLinear Stage
Travel600 mm (+/- 300 mm)
Dimensions (Length x Width x Height)966 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy +/- 24 µm +/- 5 µm +/- 2 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 20 µm+/- 15 µm+/- 10 µm
Flatness [2] +/- 50 µm+/- 18 µm+/- 12 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-LM-50000-UII-XB
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)866 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy +/- 20 µm +/- 5 µm +/- 2 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 20 µm +/- 15 µm +/- 10 µm
Flatness [2] +/- 40 µm +/- 15 µm +/- 10 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-LM-40000-UII-XB
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)766 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy +/- 16 µm +/- 5 µm +/- 2 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 18 µm +/- 13 µm +/- 10 µm
Flatness [2] +/- 30 µm +/- 15 µm +/- 10 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-XBS-55000-UII
StageLinear Stage
Travel550 mm (+/- 275 mm)
Dimensions (Length x Width x Height)913 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)958 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 24 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass40 kg
ModelAI-XBS-50000-UII
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)863 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)908 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 24 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass38 kg
ModelAI-XBS-45000-UII
StageLinear Stage
Travel450 mm (+/- 225 mm)
Dimensions (Length x Width x Height)813 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)858 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 24 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass36 kg
ModelAI-XBS-40000-UII
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)763 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)808 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 20 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass34 kg
ModelAI-XBS-35000-UII
StageLinear Stage
Travel350 mm (+/- 175 mm)
Dimensions (Length x Width x Height)713 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)758 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 16 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass32 kg
ModelAI-XBS-30000-UII
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)663 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)708 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 12 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass29 kg
ModelAI-XBS-25000-UII
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)613 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)658 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 10 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass28 kg
ModelAI-XBS-20000-UII
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)563 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)608 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 8 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch [2] +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass27 kg
ModelAI-XBS-15000-UII
StageLinear Stage
Travel150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)513 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)558 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 6 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch [2] +/- 12 arc-sec
Yaw +/- 12 arc-sec
Roll +/- 12 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass25 kg
ModelAI-XBS-10000-UII
StageLinear Stage
Travel100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)463 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)508 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 5 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch [2] +/- 12 arc-sec
Yaw +/- 12 arc-sec
Roll +/- 12 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass24 kg
ModelAI-SBS-50000-UII
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)793 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)815 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)865 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 24 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass15.5 kg
ModelAI-SBS-45000-UII
StageLinear Stage
Travel450 mm (+/- 225 mm)
Dimensions (Length x Width x Height)743 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)765 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)815 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 24 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass15 kg
ModelAI-SBS-40000-UII
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)693 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)715 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)765 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 20 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass14.5 kg
ModelAI-SBS-35000-UII
StageLinear Stage
Travel350 mm (+/- 175 mm)
Dimensions (Length x Width x Height)643 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)665 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)715 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 16 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass13.5 kg
ModelAI-SBS-30000-UII
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)593 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)615 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)665 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 12 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass13 kg
ModelAI-SBS-25000-UII
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)543 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)565 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)615 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 10 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass12.5 kg
ModelAI-SBS-20000-UII
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)493 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)515 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)565 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 8 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch [2] +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass12 kg
ModelAI-SBS-15000-UII
StageLinear Stage
Travel150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)443 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)465 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)515 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 6 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch [2] +/- 12 arc-sec
Yaw +/- 12 arc-sec
Roll +/- 12 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass11.5 kg
ModelAI-SBS-10000-UII
StageLinear Stage
Travel100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)393 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)415 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)465 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 5 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch [2] +/- 12 arc-sec
Yaw +/- 12 arc-sec
Roll +/- 12 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass11 kg
ModelAI-SBS-5000-UII
StageLinear Stage
Travel50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)343 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)365 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)415 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 5 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch [2] +/- 12 arc-sec
Yaw +/- 12 arc-sec
Roll +/- 12 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass11 kg
ModelAI-LM-100000-UII-WL
StageLinear Stage
Travel1000 mm (+/- 500 mm)
Dimensions (Length x Width x Height)1320 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 40 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 10 µm +/- 5 µm
Flatness [2] +/- 10 µm +/- 5 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass41 kg
ModelAI-LM-80000-UII-WL
StageLinear Stage
Travel800 mm (+/- 400 mm)
Dimensions (Length x Width x Height)1120 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 32 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass37 kg
ModelAI-LM-70000-UII-WL
StageLinear Stage
Travel700 mm (+/- 350 mm)
Dimensions (Length x Width x Height)1020 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 28 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch20 arc-sec
Yaw20 arc-sec
Roll12 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass35 kg
ModelAI-LM-60000-UII-WL
StageLinear Stage
Travel600 mm (+/- 300 mm)
Dimensions (Length x Width x Height)920 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 24 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass32 kg
ModelAI-LM-50000-UII-WL
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)820 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 20 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass31 kg
ModelAI-LM-40000-UII-WL
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)720 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 16 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass27 kg
ModelAI-LM-30000-UII-WL
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)620 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass25 kg
ModelAI-LM-25000-UII-WL
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)570 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 10 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass24 kg
ModelAI-LM-20000-UII-WL
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)520 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 8 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass23 kg
ModelAI-LM-15000-UII-WL
StageLinear Stage
Travel150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)470 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 6 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll6 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass22 kg
ModelAI-LM-10000-UII-WL
StageLinear Stage
Travel100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)420 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll6 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass20 kg
ModelAI-LM-100000-UII-W
StageLinear Stage
Travel1000 mm (+/- 500 mm)
Dimensions
(Length x Width x Height)
1220 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 40 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 10 µm +/- 5 µm
Flatness [2] +/- 10 µm +/- 5 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass41 kg
ModelAI-LM-80000-UII-W
StageLinear Stage
Travel800 mm (+/- 400 mm)
Dimensions
(Length x Width x Height)
1020 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 32 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass37 kg
ModelAI-LM-70000-UII-W
StageLinear Stage
Travel700 mm (+/- 350 mm)
Dimensions
(Length x Width x Height)
920 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 28 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch20 arc-sec
Yaw20 arc-sec
Roll12 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass35 kg
ModelAI-LM-60000-UII-W
StageLinear Stage
Travel600 mm (+/- 300 mm)
Dimensions
(Length x Width x Height)
820 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 24 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass32 kg
ModelAI-LM-50000-UII-W
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions
(Length x Width x Height)
720 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 20 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass31 kg
ModelAI-LM-40000-UII-W
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
620 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 16 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass27 kg
ModelAI-LM-30000-UII-W
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
520 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass25 kg
ModelAI-LM-25000-UII-W
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
470 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 10 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass24 kg
ModelAI-LM-20000-UII-W
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
420 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass23 kg
ModelAI-LM-15000-UII-W
StageLinear Stage
Travel150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
370 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 6 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll6 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass22 kg
ModelAI-LM-10000-UII-W
StageLinear Stage
Travel100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
320 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll6 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass20 kg
ModelAI-LM-100000-UII-SN
StageLinear Stage
Travel1000 mm (+/- 500 mm)
Dimensions
(Length x Width x Height)
1180 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 40 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 10 µm +/- 5 µm
Flatness [2] +/- 10 µm +/- 5 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass11 kg
ModelAI-LM-90000-UII-SN
StageLinear Stage
Travel900 mm (+/- 450 mm)
Dimensions
(Length x Width x Height)
1080 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 36 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 10 µm +/- 5 µm
Flatness [2] +/- 10 µm +/- 5 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass10 kg
ModelAI-LM-80000-UII-SN
StageLinear Stage
Travel800 mm (+/- 400 mm)
Dimensions
(Length x Width x Height)
980 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 32 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass9 kg
ModelAI-LM-70000-UII-SN
StageLinear Stage
Travel700 mm (+/- 350 mm)
Dimensions
(Length x Width x Height)
880 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 28 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch20 arc-sec
Yaw20 arc-sec
Roll12 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass8 kg
ModelAI-LM-60000-UII-SN
StageLinear Stage
Travel600 mm (+/- 300 mm)
Dimensions
(Length x Width x Height)
780 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 24 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass7 kg
ModelAI-LM-50000-UII-SN
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions
(Length x Width x Height)
680 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 20 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass6 kg
ModelAI-LM-40000-UII-SN
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
580 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 16 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass5 kg
ModelAI-LM-30000-UII-SN
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
480 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass4 kg
ModelAI-LM-25000-UII-SN
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
430 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 10 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass3.4 kg
ModelAI-LM-20000-UII-SN
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
380 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass2.9 kg
ModelAI-LM-15000-UII-SN
StageLinear Stage
Travel150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
330 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 6 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll6 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass2.5 kg
ModelAI-LM-10000-UII-SN
StageLinear Stage
Travel100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
280 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll6 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass2.1 kg
ModelAI-LM-100000-UII-S
StageLinear Stage
Travel1000 mm (+/- 500 mm)
Dimensions
(Length x Width x Height)
1220 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 40 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 10 µm +/- 5 µm
Flatness [2] +/- 10 µm +/- 5 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass23.5 kg
ModelAI-LM-80000-UII-S
StageLinear Stage
Travel800 mm (+/- 400 mm)
Dimensions
(Length x Width x Height)
1020 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 32 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass20 kg
ModelAI-LM-70000-UII-S
StageLinear Stage
Travel700 mm (+/- 350 mm)
Dimensions
(Length x Width x Height)
920 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 28 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch20 arc-sec
Yaw20 arc-sec
Roll12 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass18.5 kg
ModelAI-LM-60000-UII-S
StageLinear Stage
Travel600 mm (+/- 300 mm)
Dimensions
(Length x Width x Height)
820 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 24 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass16.5 kg
ModelAI-LM-50000-UII-S
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions
(Length x Width x Height)
720 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 20 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass15 kg
ModelAI-LM-40000-UII-S
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
620 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 16 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass13 kg
ModelAI-LM-30000-UII-S
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
520 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass12 kg
ModelAI-LM-25000-UII-S
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
470 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 10 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass11 kg
ModelAI-LM-20000-UII-S
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
420 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass10 kg
ModelAI-LM-15000-UII-S
StageLinear Stage
Travel150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
370 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 6 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll6 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass9 kg
ModelAI-LM-10000-UII-S
StageLinear Stage
Travel100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
320 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll6 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass8 kg
ModelAI-LM-70000-UII
StageLinear Stage
Travel700 mm (+/- 350 mm)
Dimensions
(Length x Width x Height)
920 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 28 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch [2] +/- 10 arc-sec
Yaw +/- 10 arc-sec
Roll +/- 6 arc-sec
Max Velocity
[3]
5.5 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass23 kg
ModelAI-LM-60000-UII
StageLinear Stage
Travel600 mm (+/- 300 mm)
Dimensions
(Length x Width x Height)
820 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 24 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch [2] +/- 9 arc-sec
Yaw +/- 9 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
5 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass21 kg
ModelAI-LM-50000-UII
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions
(Length x Width x Height)
720 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 20 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch [2] +/- 9 arc-sec
Yaw +/- 9 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
4.5 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass19 kg
ModelAI-LM-40000-UII
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
620 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 16 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 9 arc-sec
Yaw +/- 9 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
4 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass17 kg
ModelAI-LM-30000-UII
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
520 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 9 arc-sec
Yaw +/- 9 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
3.5 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass15 kg
ModelAI-LM-25000-UII
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
470 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 10 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 7.5 arc-sec
Yaw +/- 7.5 arc-sec
Roll +/- 4 arc-sec
Max Velocity
[3]
3.5 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass14 kg
ModelAI-LM-20000-UII
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
420 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball
Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch [2] +/- 7.5 arc-sec
Yaw +/- 7.5 arc-sec
Roll +/- 4 arc-sec
Max Velocity
[3]
3 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass13 kg
ModelAI-LM-15000-UII
StageLinear Stage
Travel150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
370 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 6 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch [2] +/- 5 arc-sec
Yaw +/- 5 arc-sec
Roll +/- 3 arc-sec
Max Velocity
[3]
2.5 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass12 kg
ModelAI-LM-10000-UII
StageLinear Stage
Travel100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
320 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch [2] +/- 5 arc-sec
Yaw +/- 5 arc-sec
Roll +/- 3 arc-sec
Max Velocity
[3]
2 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass11 kg
ModelAI-LM-300x200-XY
StageMonolithic XY Stage
(Asymmetrical)
Travel - X300 mm (+/- 150 mm)
Travel - Y200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
500 mm x 336 mm x 100mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 5 µm +/- 2 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Orthogonality20 arc-sec5 arc-sec1 arc-sec
Max Velocity
[3]
1 m/s
Max
Acceleration [3]
0.7 G
Max Payload
Capability
30 kg
Assembly Mass28 kg
ModelAI-SLM-395x320-XY
StageMonolithic XY Stage
(Asymmetrical)
Travel - X395 mm
Travel - Y320 mm
Dimensions
(Length X Width X Height)
672 mm x 525 mm x 145 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
STDULTRANANO
Linear
Displacement Accuracy
+/- 5.0 µm+/- 2.0 µm+/- 1.0 µm
Bidirectional
Linear Repeatability
+/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness+/- 5.0 µm+/- 2.0 µm+/- 1.0 µm
Flatness [2]+/- 10.0 µm+/- 5.0 µm+/- 2.0 µm
Pitch [2]+/- 18.0 arc-sec+/- 18.0 arc-sec+/- 10.0 arc-sec
Yaw+/- 18.0 arc-sec+/- 18.0 arc-sec+/- 10.0 arc-sec
Roll+/- 10.0 arc-sec+/- 10.0 arc-sec+/- 10.0 arc-sec
Orthogonality+/- 20.0 arc-sec+/- 5.0 arc-sec+/- 2.0 arc-sec
Max Velocity
[3]
1.5 m/s
Max Peak
Acceleration [3]
0.59 G
Max Payload
Capability
200 kg
Assembly Mass98 kg
ModelAI-LM-160x100-XY
StageMonolithic XY Stage
(Asymmetrical)
Travel - X160 mm (+/- 80 mm)
Travel - Y100 mm (+/- 50 mm)
Dimensions
(Length X Width X Height)
275 mm x 175 mm x 80 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm +/- 0.7 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1.0 µm +/- 0.7 µm +/- 0.4 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 7.5 arc-sec
Yaw +/- 7.5 arc-sec
Roll +/- 4.0 arc-sec
Orthogonality +/- 10.0 arc-sec +/- 2.5 arc-sec +/- 0.5 arc-sec
Max Velocity
[3]
1 m/s
Max Peak
Acceleration [3]
1.5 G
Max Payload
Capability
25 kg
Assembly Mass11.4 kg
ModelAI-VBS-20000
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
492 mm x 154 mm x 50 mm
Brake OptionsStandard: No Brake

Optional: Pneumatic Release, Spring Engage Brake (-PBRK)

Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk)
Dimensions (Length x Width x Height)
524 mm x 154 mm x 50 mm
(-Ebrk)
Dimensions (Length x Width x Height)
571 mm x 154 mm x 50 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 4 µm +/- 1.0 µm +/- 0.4 µm
Backlash0 nm
Bidirectional
Linear Repeatability
 +/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 4 µm +/- 3 µm
Flatness [2] +/- 5.0 µm +/- 3.0 µm
Pitch [2]+/- 15 arc-sec
Yaw+/- 15 arc-sec
Roll+/- 15 arc-sec
Max Velocity
[3]
0.3 m/s
Max Peak
Acceleration [3]
1.0 G
Max Payload
Capability

W/ Axis Oriented Horizontal
25 kg
Max Payload
Capability

W/ Axis Oriented Vertical
12 kg
Assembly Mass8 kg
ModelAI-VBS-15000
StageLinear Stage
Travel150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
370 mm x 120 mm x 50 mm
Brake OptionsStandard: No Brake

Optional: Pneumatic Release, Spring Engage Brake (-PBRK)

Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk)
Dimensions (Length x Width x Height)
404 mm x 120 mm x 50 mm
(-Ebrk)
Dimensions (Length x Width x Height)
452 mm x 120 mm x 50 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm +/- 1.0 µm +/- 0.4 µm
Backlash0 nm
Bidirectional
Linear Repeatability
 +/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.5 µm +/- 2.5 µm +/- 1.5 µm
Flatness [2] +/- 4.0 µm +/- 2.0 µm
Pitch [2]+/- 15 arc-sec
Yaw+/- 15 arc-sec
Roll+/- 15 arc-sec
Max Velocity
[3]
0.3 m/s
Max Peak
Acceleration [3]
1.0 G
Max Payload
Capability

W/ Axis Oriented Horizontal
25 kg
Max Payload
Capability

W/ Axis Oriented Vertical
12 kg
Assembly Mass4.6 kg
ModelAI-VBS-10000
StageLinear Stage
Travel100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
295 mm x 120 mm x 50 mm
Brake OptionsStandard: No Brake

Optional: Pneumatic Release, Spring Engage Brake (-PBRK)

Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk)
Dimensions (Length x Width x Height)
329 mm x 120 mm x 50 mm
(-Ebrk)
Dimensions (Length x Width x Height)
377 mm x 120 mm x 50 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm +/- 1.0 µm +/- 0.3 µm
Backlash0 nm
Bidirectional
Linear Repeatability
 +/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.5 µm +/- 1.5 µm +/- 1.2 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2]+/- 15 arc-sec
Yaw+/- 15 arc-sec
Roll+/- 15 arc-sec
Max Velocity
[3]
0.3 m/s
Max Peak
Acceleration [3]
1.0 G
Max Payload
Capability

W/ Axis Oriented Horizontal
25 kg
Max Payload
Capability

W/ Axis Oriented Vertical
12 kg
Assembly Mass3.8 kg
ModelAI-CM-25000-250-XY
StageMonolithic XY Stage with
Open Center
Travel250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)468.5 mm x 468.5 mm x 80 mm
Aperture /
Thru
250 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.2 µm +/- 0.7 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 1.2 µm +/- 0.7 µm
Flatness [2] +/- 4.0 µm +/- 3.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Orthogonality+/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.1 m/s
Bot Axis Max
Velocity [3]
0.6 m/s
Top Axis Max
Peak Acceleration [3]
1.0 G
Bot Axis Max
Peak Acceleration [3]
0.3 G
Max Payload
Capability
25 kg
Assembly Mass33 kg
ModelAI-CM-30000-XY
StageMonolithic XY Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
500 mm x 500 mm x 100 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 6.0 µm +/- 1.0 µm +/- 0.6 µm
Bidirectional
Linear Repeatability
 +/- 30
ResolutionStandard:
~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 10.0 µm +/- 2.0 µm +/- 1.0 µm
Flatness [2] +/- 8.0 µm +/- 5.0 µm
Pitch [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 18.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
0.7 m/s
Bot Axis Max
Velocity [3]
0.3
Top Axis Max
Peak Acceleration [3]
0.4 G
Bot Axis Max
Peak Acceleration [3]
0.1
Max Payload
Capability
35 kg
Assembly Mass69 kg
ModelAI-CM-25000-XY
StageMonolithic XY Stage
Travel250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
400 mm x 400 mm x 100 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 30
ResolutionStandard:
~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 2.0 µm +/- 1.0 µm
Flatness [2] +/- 6.0 µm +/- 4.0 µm
Pitch [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 18.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
0.8 m/s
Bot Axis Max
Velocity [3]
0.5
Top Axis Max
Peak Acceleration [3]
0.6 G
Bot Axis Max
Peak Acceleration [3]
0.2 G
Max Payload
Capability
25 kg
Assembly Mass48 kg
ModelAI-LM-30000
StageLinear Stage
Travel 300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
506 mm x 178 mm x 55 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.0 µm +/- 0.6 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 4.5 µm +/- 3.0 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm
Pitch Y [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 10.0 arc-sec
Max Velocity
[3]
2.4 m/s
Max
Acceleration [3]
4.0 G
Max Payload
Capability
50 kg
Assembly Mass15.2 kg
ModelAI-LM-25000
StageLinear Stage
Travel 250 mm (+ /-125 mm)
Dimensions
(Length x Width x Height)
404 mm x 154 mm x 55 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 3.0 µm +/- 2.0 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm
Pitch Y [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 10.0 arc-sec
Max Velocity
[3]
2.5 m/s
Max
Acceleration [3]
5.0 G
Max Payload
Capability
40 kg
Assembly Mass9.4 kg
ModelAI-LM-20000
StageLinear Stage
Travel 200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
340 mm x 154 mm x 46 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.0 µm +/- 2.0 µm +/- 1.5 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch Y [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Max Velocity
[3]
2.4 m/s
Max
Acceleration [3]
6.0 G
Max Payload
Capability
30 kg
Assembly Mass7.8 kg
ModelAI-LM-15000
StageLinear Stage
Travel 150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
275 mm x 120 mm x 45 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 0.7 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.5 µm +/- 1.5 µm +/- 1.2 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch Y [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Max Velocity
[3]
2.1 m/s
Max
Acceleration [3]
6.0 G
Max Payload
Capability
25 kg
Assembly Mass4.4 kg
ModelAI-LM-10000
StageLinear Stage
Travel 100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
244 mm x 120 mm x 45 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 0.7 µm +/- 0.3 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.5 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch Y [2] +/- 10.0 arc-sec
Yaw +/- 10.0 arc-sec
Roll +/- 6.0 arc-sec
Max Velocity
[3]
1.8 m/s
Max
Acceleration [3]
7.0 G
Max Payload
Capability
25 kg
Assembly Mass4 kg
ModelAI-LM-40000-400-XY
StageMonolithic XY Stage with Open Center
Travel 400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
650 mm x 650 mm x 120 mm
Aperture /
Thru
400 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 16.0 µm +/- 2.5 µm +/- 1.5 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 10.0 µm +/- 2.5 µm +/- 1.5 µm
Flatness [2] +/- 12.0 µm +/- 5.0 µm
Pitch [2] +/- 20.0 arc-sec
Yaw +/- 20.0 arc-sec
Roll +/- 20.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.8 m/s
Bot Axis Max
Velocity [3]
1.0 m/s
Top Axis Max
Peak Acceleration [3]
1.8 G
Top Axis Max
Peak Acceleration [3]
0.6 G
Max Payload
Capability
50 kg
Assembly Mass104 kg
ModelAI-LM-35000-350-XY
StageMonolithic XY Stage with Open Center
Travel350 mm (+/- 175 mm)
Dimensions
(Length x Width x Height)
550 mm x 550 mm x 120 mm
Aperture /
Thru
350 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 10.0 µm +/- 2.0 µm +/- 1.5 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 2.0 µm +/- 1.5 µm
Flatness [2] +/- 10.0 µm +/- 4.0 µm
Pitch [2] +/- 20.0 arc-sec
Yaw +/- 20.0 arc-sec
Roll +/- 20.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.8 m/s
Bot Axis Max
Velocity [3]
1.1 m/s
Top Axis Max
Peak Acceleration [3]
2.0 G
Top Axis Max
Peak Acceleration [3]
0.8 G
Max Payload
Capability
50 kg
Assembly Mass64 kg
ModelAI-LM-30000-300-XY
StageMonolithic XY Stage with Open Center
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
500 mm x 500 mm x 120 mm
Aperture /
Thru
300 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8.0 µm +/- 1.5 µm +/- 1.0 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5.0 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 6.0 µm +/- 3.0 µm
Pitch [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 18.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.7 m/s
Bot Axis Max
Velocity [3]
1.2 m/s
Top Axis Max
Peak Acceleration [3]
2.0 G
Top Axis Max
Peak Acceleration [3]
1.0 G
Max Payload
Capability
50 kg
Assembly Mass58 kg
ModelAI-LM-25000-250-XY
StageMonolithic XY Stage with Open Center
Travel 250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)460 mm x 460 mm x 95 mm
Aperture / Thru250 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 6.0 µm +/- 1.5 µm +/- 1.0 µm
Bidirectional Linear Repeatability +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm
Pitch [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 18.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max Velocity [3]1.9 m/s
Bot Axis Max Velocity [3]1.3 m/s
Top Axis Max Peak Acceleration [3]3.0 G
Top Axis Max Peak Acceleration [3]1.4 G
Max Payload Capability40 kg
Assembly Mass37 kg
ModelAI-LM-20000-200-XY
StageMonolithic XY Stage with Open Center
Travel 200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
392 mm x 392 mm x 80 mm
Aperture /
Thru
200 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 6.0 µm +/- 1.5 µm +/- 0.8 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.0 µm +/- 1.5 µm +/- 0.8 µm
Flatness [2] +/- 4.0 µm +/- 2.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
2 m/s
Bot Axis Max
Velocity [3]
1.1 m/s
Top Axis Max
Peak Acceleration [3]
4.0 G
Top Axis Max
Peak Acceleration [3]
1.4 G
Max Payload
Capability
30 kg
Assembly Mass23 kg
ModelAI-LM-15000-150-XY
StageMonolithic XY Stage with Open Center
Travel 150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
326.5 mm x 326.5 mm x 68 mm
Aperture /
Thru
150 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 4.0 µm +/- 1.2 µm +/- 0.6 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.0 µm +/- 1.2 µm +/- 0.6 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.7 m/s
Bot Axis Max
Velocity [3]
1.0  m/s
Top Axis Max
Peak Acceleration [3]
4.0 G
Top Axis Max
Peak Acceleration [3]
1.4 G
Max Payload
Capability
25 kg
Assembly Mass14 kg
ModelAI-LM-10000-100-XY
StageMonolithic XY Stage with Open Center
Travel100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
230 mm x 230 mm x 64 mm
Aperture /
Thru
100 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 4.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.0 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch [2] +/- 10.0 arc-sec
Yaw +/- 10.0 arc-sec
Roll +/- 10.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.4 m/s
Bot Axis Max
Velocity [3]
0.8 m/s
Top Axis Max
Peak Acceleration [3]
4.0 G
Top Axis Max
Peak Acceleration [3]
1.6 G
Max Payload
Capability
25 kg
Assembly Mass6.5 kg
ModelAI-LM-45000-XY
StageMonolithic XY Stage
Travel450 mm (+/- 225 mm)
Dimensions
(Length x Width x Height)
650 mm x 650 mm x 115 mm
DriveDirect Drive (Ironless Core
Linear Motor)
FeedbackNon-Contact Optical Linear
Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12.0 µm +/- 1.5 µm +/- 1.0 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 16.0 µm +/- 8.0 µm
Pitch [2] +/- 20.0 arc-sec
Yaw +/- 20.0 arc-sec
Roll +/- 14.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.7 m/s
Bot Axis Max
Velocity [3]
1 m/s
Top Axis Max
Peak Acceleration [3]
1.4 G
Bot Axis Max
Peak Acceleration [3]
0.5 G
Max Payload
Capability
80 kg
Assembly Mass135 kg
ModelAI-LM-40000-XY
StageMonolithic XY Stage
Travel400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
650 mm x 650 mm x 115 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12.0 µm +/- 1.5 µm +/- 1.0 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 16.0 µm +/- 8.0 µm
Pitch [2] +/- 20.0 arc-sec
Yaw +/- 20.0 arc-sec
Roll +/- 14.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.6 m/s
Bot Axis Max
Velocity [3]
1 m/s
Top Axis Max
Peak Acceleration [3]
1.4 G
Bot Axis Max
Peak Acceleration [3]
0.5 G
Max Payload
Capability
80 kg
Assembly Mass135 kg
ModelAI-LM-35000-XY
StageMonolithic XY Stage
Travel 350 mm (+/- 175 mm)
Dimensions
(Length x Width x Height)
500 mm x 500 mm x 115 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8.0 µm +/- 1.5 µm +/- 0.8 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 1.5 µm +/- 0.8 µm
Flatness [2] +/- 8.0 µm +/- 4.0 µm
Pitch [2] +/- 20.0 arc-sec
Yaw +/- 20.0 arc-sec
Roll +/- 14.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.7 m/s
Bot Axis Max
Velocity [3]
1.1 m/s
Top Axis Max
Peak Acceleration [3]
1.9 G
Bot Axis Max
Peak Acceleration [3]
0.7 G
Max Payload
Capability
50 kg
Assembly Mass75 kg
ModelAI-LM-30000-XY
StageMonolithic XY Stage
Travel 300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
500 mm x 500 mm x 115 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.0 µm +/- 0.6 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.0 µm +/- 1.0 µm +/- 0.6 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm
Pitch [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 10.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.6 m/s
Bot Axis Max
Velocity [3]
1 m/s
Top Axis Max
Peak Acceleration [3]
1.9 G
Bot Axis Max
Peak Acceleration [3]
0.7 G
Max Payload
Capability
50 kg
Assembly Mass75 kg
ModelAI-LM-25000-XY
StageMonolithic XY Stage
Travel 250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
400 mm x 400 mm x 115 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.0 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm
Pitch [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 10.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.5 m/s
Bot Axis Max
Velocity [3]
0.9 m/s
Top Axis Max
Peak Acceleration [3]
1.9 G
Bot Axis Max
Peak Acceleration [3]
0.7 G
Max Payload
Capability
40 kg
Assembly Mass52 kg
ModelAI-LM-20000-XY-HF
StageMonolithic XY Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
336 mm x 336 mm x 90 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1.5 µm +/- 1.0 µm +/- 0.4 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
2.0 m/s
Bot Axis Max
Velocity [3]
1.2 m/s
Top Axis Max
Peak Acceleration [3]
5.6 G
Bot Axis Max
Peak Acceleration [3]
2 G
Max Payload
Capability
30 kg
Assembly Mass28 kg
ModelAI-LM-20000-XY
StageMonolithic XY Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
336 mm x 336 mm x 90 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1.5 µm +/- 1.0 µm +/- 0.4 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.7 m/s
Bot Axis Max
Velocity [3]
1 m/s
Top Axis Max
Peak Acceleration [3]
3.0 G
Bot Axis Max
Peak Acceleration [3]
1.3 G
Max Payload
Capability
30 kg
Assembly Mass28 kg
ModelAI-LM-16000-XY
StageMonolithic XY Stage
Travel 160 mm (+/- 80 mm)
Dimensions
(Length x Width x Height)
275 mm x 275 mm x 80 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 0.7 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1.5 µm +/- 0.7 µm +/- 0.4 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.5 m/s
Bot Axis Max
Velocity [3]
1 m/s
Top Axis Max
Peak Acceleration [3]
3.0 G
Bot Axis Max
Peak Acceleration [3]
1.3 G
Max Payload
Capability
25 kg
Assembly Mass16 kg
ModelAI-LM-10000-XY
StageMonolithic XY Stage
Travel100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
244 mm x 244 mm x 80 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 0.7 µm +/- 0.3 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1.0 µm +/- 0.7 µm +/- 0.3 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch [2] +/- 10.0 arc-sec
Yaw +/- 10.0 arc-sec
Roll +/- 6.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.4 m/s
Bot Axis Max
Velocity [3]
0.8 m/s
Top Axis Max
Peak Acceleration [3]
4.0 G
Bot Axis Max
Peak Acceleration [3]
1.6 G
Max Payload
Capability
25 kg
Assembly Mass13 kg