Air Bearing Systems

ALIO Industries has development leading edge 6-D Nano Positioning™ air bearing motion system for a wide range of applications in manufacturing, inspection/repair and metrology. With several patent pending designs for Planar and Nano Z™ ALIO is well positioned for the next generation application demands of TRUE NANO™ precision in PV, Semiconductor, Ink Jet Deposition, Lithography and Optical Inspection.

The ALIO Industries Nano-Precision Planar Air Bearing System has raised the bar to a new level of performance for air bearing motion. This engineered system was designed to exceed today’s demanding requirements in semiconductor wafer, flat panel display, nano-manufacturing and optical inspection.

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Planar Air Bearing System

Patent Pending 2 Axis planar air bearing system has set the mark in the world of 6-D Nano Positioning™. With 300 mm to over 3 meters of X and Y travel this product family has no equal for True Nano ™ precision. NIST traceable laser data has measured this product over meters with nanometer precision in all 6 degrees of freedom of a moving member. Expect standard flatness of < 1 µm/meter with less than < 1 arc second of pitch, yaw and roll. Standard repeatability < 60 nm with optional 10 nm capable in the product family.

 

Linear Air Bearings

Single axis linear air bearings are available in horizontal or vertical orientation as shown. The linear product family of air bearings utilizes ironless linear servo motors with variable forces depending on customer needs. These product family standard designs are from 25 mm to 3 meters of travel each with nano precision.

 

Patented NANO Z®

Increased demands for True NANO® metrology and process led ALIO to design and manufacture the NANO Z® patent pending Z lift air bearing stage to exceed all past design issues of tip and tilt while increasing the accuracy to less than 100 nanometers with standard Renishaw Invar encoders. The counterbalanced NANO Z® can easily hold heavy vacuum wafer chucks and still excel with nano-precision over 24 mm of travel.

 

Rotary Air Bearing Stages and Spindles

ALIO’s nano precision rotary air bearing product family ranges from 100mm and up with variable torque options to meet a broad range of applications. This growing product line has excellent axial and radial run-out specifications for extreme precision needs.