Custom Motion Systems

ALIO Industries offers significant value added by customizing our core technology to fit our OEM customer’s needs as well as pushing the envelope for new world nano-precision applications. ALIO’s on-going focus on exceeding OEM requirements helps our customers become leaders in their industry.

Customers approach ALIO for unique applications due to our long track record of successfully delivering complex prototypes that meet or exceed specifications the first time.

ALIO’s unwavering focus on honesty and integrity help customers understand the complex nature of precision applications. ALIO informs the customer of what they need to know and not just what they want to hear.

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Application: Nano Metrology

Stage: AI-DLM-30000-300-XY, 300mm XY Travel with 300mm Open Center

ALIO has taken our industry-leading, near air-bearing performance open center metrology stages, to the next level. This crossed roller bearing 300mm XY Nano Metrology® stage is dual motor driven (per axis) with 300mm open center has unmatched motion performance with 3-Sigma, 6-D (linear, straightness, flatness, pitch, yaw and roll) bi-directional repeatability of less than +/- 250nm. In other words, the volumetric bi-directional repeatability of any XY point is within a sphere of 500nm or less.

Application: Micro Assembly

Stage: Dual Integrated Stacked XY Axes (X, Y, x’, y’) with 110mm Square Opening

This high-speed production application requires 150mm x 100mm base XY axis travel (lower XY motion) with 110mm square opening with a stacked 4mm X’Y’ travel (top XY motion) with 110mm square open x’y’ stage. This configuration allows for fast XY motion with micro adjustment by the top X’Y’ axes.
Customer: DWFritz Automation, Portland, OR

Application: Optical Diamond Turning

Stages: AI-LM-20000-XY with AI-LM-20000-T100 and Counter Balance

ALIO’s Nano Precision® XY metrology stage coupled with an air counterbalanced vertical stage via a high rigidity angle bracket allows Carnegie Mellon University to improve their diamond turning efforts.

Application: Fiber/Optical Assembly (Private Label)

Stages: AI-LM-10000-XY with AI-VC-2400-Z-CB

ALIO’s metrology grade XY stage is the foundation for this exceptional three-axis alignment platform. ALIO’s unique design of the Z axis provides a completely linear based vertical solution with near air bearing performance. This Z stage with a high force linear motor, linear encoder, linear high-precision crossed roller bearings and integrated linear air counterbalance exceeds any mechanical based vertical axis on the market and some air bearing options. One major advantage to this unique solution allows for the customer’s payload to be mounted directly on the top of the stage in-line with the motor, encoder, bearings and counterbalance thus minimizing overhanging brackets thus greatly reducing potential Abbé errors. ALIO’s linear Z axis is 5 times to an order of magnitude more precise than old school z-wedge solutions.

Application: 4-Axis Protein Crystallography

Stages: AI-LM-20000-T100, AI-TM-125R-AB with Rotary Coupling, AI-D4-2500-T010 and AI-D2-1200-T010

One of the significant advantages of ALIO is we are a solutions provider. This means we are not locked into one type of motor, encoder or bearing. Every component of a system has advantages and disadvantages. ALIO’s extensive knowledge based on years of testing provides us the expertise to configure properly for the customer’s performance requirements. This system uses 3 different motor types, 3 different encoder configurations and 2 different bearings. ALIO then couples this right-sized solution to an industry leading controller. The result is a 4-axis protein crystallography system at Argonne National Lab with submicron run-out.

Application: UHV Mass Spectrometry

Stages: AI-168R-Q-UHV, AI-HR4-10000E-100-XY-UHV and AI-D8-2500E-Z-UHV

ALIO’s vacuum expertise and broad stages selections allows the opportunity to couple four UHV (10-10 Torr) stages to provide a nano-precision™ solution. This R-XY-Z stack once again uses a pure linear based Z solution vs. the legacy z-wedge design.

Application: Metrology, HV (10-7 Torr)

Stages: AI-D4-15000E-150-HV, AI-200R-Q-HV and AI-D8-10000-HV with Counter Balance

AWE (UK) is one of the many ALIO customers utilizing ALIO’s custom solutions. The base XY stage is an ALIO metrology platform with a 200mm UHV rotary (wafer) stage. The 100mm linear Z stage coupled with a constant force spring counterbalance allows for extended high load motion.

Application: Spherical Micro-Focus Station

Stages: AI-LM-10000-XY, AI-LM-5000 with Counter Balance, AI-TM-154R and AI-TM-80R

This 5-Axis EPICS couple motion system provides XYZ motion with complex dual rotary motion. As Diamond Light Source did not wish to use an air counterbalance for safety concerns, ALIO supplied a constant force spring solution.

Application: Fiber/Optical Assembly (Private Label)

Stages: AI-HR4-10000E-100, AI-80R-Q, AI-TRI-HR2-SS

There are many times when a hexapod is not the correct solution. ALIO offers full kinematic solutions that move exactly like a hexapod but in many instances with improved performance. Solutions such as this use the same parallel kinematic software but can offer improvements via:

  • Longer travel
  • Higher stiffness
  • Straightness of travel
  • Flatness of travel
  • Repeatability
  • Accuracy