Hybrid Hexapod - Linear Motor Tripod with Yaw Rotary Stage (4 DOF)
Scanning / Smooth Continuous Movement: Best Fit
Step and Settle: Best Fit
No Movement on Power Loss: Fit
Aperture / Open Center: Good Fit
Precision: Best Fit
Throughput: Best Fit
| Model | AI-TRI-LM-10600-104R |
| Stage | Linear Motor Tripod with Yaw Rotary Stage (4 DOF) |
| Travel - Z | 106 mm (+ 106 mm/- 0 mm) |
| Travel - Pitch & Roll | +/- 18 deg |
| Travel - Yaw | 360 deg continuous |
| Dimensions (Length x Width x Height) | 504.2 mm x 462.8 mm x 460 mm |
| Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
| Bearings | Crossed Roller Bearings |
| Counterbalance | Pneumatic Cylinder |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications | (STD) |
| Linear Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
| Pitch And Roll Resolution | ~0.01 arc-sec |
| Yaw Resolution | 0.02 arc-sec |
| Max Linear Velocity [10] | 0.2 m/s |
| Max Angular Velocity (Pitch & Roll) [10] | 90 deg/s |
| Max Angular Velocity (Yaw) [10] | 720 deg/s |
| Assembly Mass | 30 kg |
| Max Payload [11] | 7 kg |
