Hybrid Hexapod - Linear Motor Tripod with Yaw Rotary Stage (4 DOF)


Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: Fit

Aperture / Open Center: Good Fit

Precision: Best Fit

Throughput: Best Fit

ALIO - Tripod Yaw

Product Specifications

StageLinear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z40 mm (+ 40 mm/- 0 mm)
Travel - Pitch & Roll  +/- 12  deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)399 mm x 359 mm x 250.5 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications(STD)
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.01 arc-sec
Yaw Resolution0.02 arc-sec
Max Linear Velocity [10]0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]720 deg/s
Assembly Mass18 kg
Max Payload [11]5 kg

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