Hybrid Hexapod - Linear Motor Tripod (3 DOF)


Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: Good Fit

Precision: Best Fit

Throughput: Best Fit

ALIO - Tripod

Product Specifications

StageLinear Motor Tripod (3 DOF)
Travel - Z55 mm (+ 55 mm/- 0 mm)
Travel - Pitch & Roll  +/- 20 deg
Dimensions (Length x Width x Height)363.8 mm x 339.9 mm x 308.6 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)
Linear Resolution Standard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Pitch And Roll Resolution ~0.02 arc-sec
Max Linear Velocity [10]0.2 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Payload [11]10 kg
Assembly Mass15.6 kg

Contact ALIO.

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