Model	AI-LM-100000-AB8
Stage	Air Bearing Linear Stage
Travel	1000 mm (+/- 500 mm)
Dimensions (Length x Width x Height)	1387.6 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	26 kg

Model	AI-LM-80000-AB8
Stage	Air Bearing Linear Stage
Travel	800 mm (+/- 400 mm)
Dimensions (Length x Width x Height)	1184.4 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	23 kg

Model	AI-LM-60000-AB8
Stage	Air Bearing Linear Stage
Travel	600 mm (+/- 300 mm)
Dimensions (Length x Width x Height)	981.2 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	20 kg

Model	AI-LM-50000-AB8
Stage	Air Bearing Linear Stage
Travel	500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)	879.6 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	18.5 kg

Model	AI-LM-40000-AB8
Stage	Air Bearing Linear Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	778 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	17 kg

Model	AI-LM-30000-AB8
Stage	Air Bearing Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	676.4 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	15.5 kg

Model	AI-LM-20000-AB8
Stage	Air Bearing Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	574.8 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	14 kg

Model	AI-LM-15000-AB8
Stage	Air Bearing Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	524 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	13 kg

Model	AI-LM-10000-AB8
Stage	Air Bearing Linear Stage
Travel	50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)	473.2 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	12.5 kg

Model	AI-LM-100000-AB-BR
Stage	Box Rail Air Bearing Linear Stage
Travel	1000 mm (+/- 500 mm)
Dimensions (Length x Width x Height)	1320.8 mm x 317.5 mm x 100.84 mm
Dimensions Moving Plate (Length x Width)	317.5 mm x 266.7 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Payload Capacity	100 kg
Assembly Mass	29 kg

Model	AI-LM-80000-AB
Stage	Air Bearing Linear Stage
Travel	800 mm (+/- 400 mm)
Dimensions (Length x Width x Height)	1032 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	14.3 kg

Model	AI-LM-60000-AB
Stage	Air Bearing Linear Stage
Travel	600 mm (+/- 300 mm)
Dimensions (Length x Width x Height)	828.8 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	11.7 kg

Model	AI-LM-50000-AB
Stage	Air Bearing Linear Stage
Travel	500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)	727.2 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	10.4 kg

Model	AI-LM-40000-AB
Stage	Air Bearing Linear Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	625.6 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	9.1 kg

Model	AI-LM-30000-AB
Stage	Air Bearing Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	524 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	7.8 kg

Model	AI-LM-20000-AB
Stage	Air Bearing Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	422.4 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	6.5 kg

Model	AI-LM-15000-AB
Stage	Air Bearing Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	371.6 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	5.9 kg

Model	AI-LM-10000-AB
Stage	Air Bearing Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	320.8 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	5.2 kg

Model	AI-LM-5000-AB
Stage	Air Bearing Linear Stage
Travel	50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)	270 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	4.6 kg

Model		AI-HH-60XY-15Z-56RT-LM
Stage		Hybrid Hexapod
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		170 mm x 163.5 mm x 224.5 mm
Drives		Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.03 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	150 mm/s
	Z	15 mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	30 deg/s
	Roll	360 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>1000 deg/s²
Max Payload		5 kg
Assembly Mass		9.022 kg

Model		AI-HH-60XY-15Z-56R
Stage		Hybrid Hexapod
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		174 mm x 176.3 mm x 201 mm
Drives		Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.03 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	100 mm/s
	Z	15 mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	30 deg/s
	Roll	360 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>1000 deg/s²
Max Payload		5 kg
Assembly Mass		5.7 kg

Model		AI-HH-30D-200XY-62Z-80R-LM
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		571 mm x 401 mm x 322.2 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 30 nm
	Z	+/- 200 nm
	Pitch And Roll	+/- 1 arc-sec
	Yaw	+/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	100  mm/s
	Z	15  mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>2000 deg/s²
Max Payload		5-10 kg
Assembly Mass		30 kg

Model		AI-HH-30D-200XY-62Z-80R-CM
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		510 mm x 336.5 mm x 293.2 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 30 nm
	Z	+/- 200 nm
	Pitch And Roll	+/- 1 arc-sec
	Yaw	+/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	50  mm/s
	Z	15  mm/s
Max Linear Acceleration [3]	XY	0.1 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>2000 deg/s²
Max Payload		5 kg
Assembly Mass		14 kg

Model		AI-HH-30D-100XY-62Z-80R-LM
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		415.8 mm x 295.5 mm x 312.2 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 30 nm
	Z	+/- 200 nm
	Pitch And Roll	+/- 1 arc-sec
	Yaw	+/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	100  mm/s
	Z	15  mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>2000 deg/s²
Max Payload		5-10 kg
Assembly Mass		15.29 kg

Model		AI-HH-30D-60XY-62Z-80R-BSD
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		199 mm x 208 mm x 285.2 mm
Drives		XY, Pitch & Roll: Frameless Torque Motor with Precision Ball Screw Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm
	Z	+/- 200 nm
	Pitch And Roll	#colspan# +/- 1 arc-sec
	Yaw	#colspan# +/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec		Pitch And Roll
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	YawPitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	50  mm/s
	Z	15  mm/s
Max Linear Acceleration [3]	XY	0.1 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>2000 deg/s²
Max Payload		5-10 kg
Assembly Mass

Model		AI-HH-200XY-60Z-154RA
Stage		Hybrid Hexapod
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		60 mm (+ 60 mm/- 0 mm)
Travel - Pitch & Roll		+/- 14 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		443.2 mm x 410.1 mm x 378 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw Yaw: Torque Motor
Brake		Pneumatic Release, Spring Lock
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	10 nm	7 nm	4 nm
	Radial Runout	10 nm	7 nm	4 nm
	Wobble	20 arc-sec	10 arc-sec	6 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.02 arc-sec
	Yaw	~0.01 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	500  mm/s
	Z	30  mm/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	60 deg/s
	Yaw	1800 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>3600 deg/s²
Max Payload		20 kg
Assembly Mass		57 kg

Model		AI-HH-200XY-15Z-56RT-CM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		336.5 mm  x 275 mm x 202.7 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc/sec	5 arc/sec	1 arc/sec
	XZ & YZ	250 arc/sec	200 arc/sec	50 arc/sec
Max Linear Velocity [3]	XY	50 mm/s
	Z	15 mm/s
MAX LINEAR ACCELERATION [3]	XY	0.1 G
	Z	0.3 G
Max Angular Velocity [3]	PITCH AND ROLL	30 deg/s
	YAW	3000 deg/s
MAX ANGULAR ACCELERATION [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		16.3 kg

Model		AI-HH-100XY-15Z-56RT-LM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		296 mm x 244 mm x 215.2 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc/sec	5 arc/sec	1 arc/sec
	XZ & YZ	250 arc/sec	200 arc/sec	50 arc/sec
Max Linear Velocity [3]	XY	150 mm/s
	Z	15 mm/s
MAX LINEAR ACCELERATION [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	PITCH AND ROLL	30 deg/s
	YAW	3000 deg/s
MAX ANGULAR ACCELERATION [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		8.9 kg

Model		AI-HH-60XY-15Z-56RT-LM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		165 mm  x 215.2 mm x 222.7 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	150 mm/s
	Z	15 mm/s
MAX LINEAR ACCELERATION [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	PITCH AND ROLL	30 deg/s
	YAW	3000 deg/s
MAX ANGULAR ACCELERATION [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		7.3 kg

Model		AI-HH-60XY-15Z-56RT-BSD
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		171 mm x 177 mm x 191.7 mm
Drives		XY, Pitch & Roll: Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	#colspan#  < 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	100 mm/s
	Z	15 mm/s
MAX LINEAR ACCELERATION [3]	XY	0.3 G
	Z	#colspan#0.3 G
Max Angular Velocity [3]	PITCH AND ROLL	30 deg/s
	YAW	3000 deg/s
MAX ANGULAR ACCELERATION [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		6 kg

Model		AI-HH-300XY-206Z-154R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		300 mm (+/- 150 mm)
Travel - Z		206 mm (+ 206 mm/- 0 mm)
Travel - Pitch & Roll		+/- 18 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		504.2 mm x 500 mm x 660 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	10 µm	7 µm	4 µm
	Radial Runout	10 µm	7 µm	4 µm
	Wobble	20 arc-sec	10 arc-sec	6 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	~0.01 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		20 kg
Assembly Mass		122 kg

Model		AI-HH-300XY-106Z-154R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		300 mm (+/- 150 mm)
Travel - Z		106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll		+/- 18 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		504.2
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	10 µm	7 µm	4 µm
	Radial Runout	10 µm	7 µm	4 µm
	Wobble	20 arc-sec	10 arc-sec	6 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	~0.01 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	#colspan#180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		10 kg
Assembly Mass		105 kg

Model		AI-HH-300XY-106Z-104R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		300 mm (+/- 150 mm)
Travel - Z		106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll		+/- 18 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		504.2 mm x 500 mm x 519.9 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	12 µm	9 µm	6 µm
	Radial Runout	12 µm	9 µm	6 µm
	Wobble	25 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	0.02 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		7.5 kg
Assembly Mass		105 kg

Model		AI-HH-200XY-40Z-104R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		200 mm(+/- 100 mm)
Travel - Z		20 mm (+ 20 mm/- 0 mm)
Travel - Pitch & Roll		+/- 11 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		399 mm x 359 mm x 318.9 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	12 µm	9 µm	6 µm
	Radial Runout	12 µm	9 µm	6 µm
	Wobble	25 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	0.02 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		5 kg
Assembly Mass		46 kg

Model		AI-HH-150XY-40Z-104R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		150 mm (+/- 75 mm)
Travel - Z		20 mm (+ 20 mm/- 0 mm)
Travel - Pitch & Roll		+/- 11 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		399 mm x 350 mm x 308.9 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	9 µm	6 µm
	Radial Runout	12 µm	9 µm	6 µm
	Wobble	25 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	#colspan#~0.01 arc-sec
	Yaw	0.02 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.4 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		5 kg
Assembly Mass		34 kg

Model		AI-HH-100XY-24Z-56R-MS
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		262.5 mm x 246 mm x 250.8 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Magnetic Spring (Constant Force)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	#colspan#  < 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
Pitch And Roll	~0.02 arc-sec
Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.5 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		2.5 kg
Assembly Mass		20 kg

Model		AI-HH-100XY-24Z-56R-CM,MS
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		262.5 mm x 246 mm x 218.8 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.02 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.05 m/s
Max Linear Acceleration [3]		0.1 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		2.5 kg
Assembly Mass		13.1 kg

Model		AI-HH-100XY-24Z-56R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll		+/- 11 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		244 mm x 244 mm x 233.8 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.02 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.05 m/s
Max Linear Acceleration [3]		0.5 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		2.5 kg
Assembly Mass		18.4 kg

Model		AI-HH-100XY-6Z-56R-CM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll		+/- 3 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		200 mm x 184 mm x 200.5 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.03 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.05 m/s
Max Linear Acceleration [3]		0.1 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		2 kg
Assembly Mass		10 kg

Model		AI-HH-100XY-6Z-56R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll		+/- 3 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		244 mm x 244 mm x 220.5 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.03 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.4 m/s
Max Linear Acceleration [3]		0.5 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		2 kg
Assembly Mass		17.2 kg

Model	AI-LM-20000-Z-ABCB
Stage	Vertical Z Stage
Travel	200mm (+/- 100mm)
Dimensions (Length x Width x Height)	230mm x 50mm x 484mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 3.0 µm	+/- 2.0 µm	+/- 1.5 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	2.5 G
Max Payload Capability	25 kg
Assembly Mass	9.3 kg

Model	AI-LM-15000-Z-ABCB-HF
Stage	Vertical Z Stage
Travel	150mm (+/- 75mm)
Dimensions (Length x Width x Height)	215mm x 50mm x 353mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	4.0 G
Max Payload Capability	25 kg
Assembly Mass	6.5 kg

Model	AI-LM-15000-Z-ABCB
Stage	Vertical Z Stage
Travel	150mm (+/- 75mm)
Dimensions (Length x Width x Height)	200mm x 50mm x 353mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	2.5 G
Max Payload Capability	25 kg
Assembly Mass	5.6 kg

Model	AI-LM-10000-Z-ABCB-HF
Stage	Vertical Z Stage
Travel	100mm (+/- 50mm)
Dimensions (Length x Width x Height)	215mm x 50mm x 323mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	4.5 G
Max Payload Capability	25 kg
Assembly Mass	5.9 kg

Model	AI-LM-10000-Z-ABCB
Stage	Vertical Z Stage
Travel	100mm (+/- 50mm)
Dimensions (Length x Width x Height)	183.5mm x 50mm x 323mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	3.5 G
Max Payload Capability	12 kg
Assembly Mass	4.7 kg

Model	AI-LM-6000-Z-ABCB
Stage	Vertical Z Stage
Travel	60mm (+/- 30mm)
Dimensions (Length x Width x Height)	183.5mm x 45mm x 220mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	2.5 G
Max Payload Capability	10 kg
Assembly Mass	2.9 kg

Model	AI-BSD-5000-Z
Stage	Vertical Z Stage
Travel	50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)	175 mm x 100 mm 229 mm
Motor	Frameless Torque Motor, Precision Ball Screw
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Brake	Standard: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: No Brake
Counterbalance	Standard: None Needed Optional: Pneumatic Counterbalance to Increase Payload Capability
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 125 nm		+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.1 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	20 kg
Max Payload Capability (With Pneuboost)	50 kg
Assembly Mass	7.6 kg

Model	AI-BSD-3200-Z
Stage	Vertical Z Stage
Travel	32 mm (+/- 16 mm)
Dimensions (Length x Width x Height)	175 mm x 100 mm x 202 mm
Motor	Frameless Torque Motor, Precision Ball Screw
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Brake	Standard: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: No Brake
Counterbalance	Standard: None Needed Optional: Pneumatic Counterbalance to Increase Payload Capability
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 125 nm		+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.1 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	20 kg
Max Payload Capability (With Pneuboost)	50 kg
Assembly Mass	6.9 kg

Model	AI-BSD-2400-Z
Stage	Vertical Z Stage
Travel	24 mm (+/- 12 mm)
Dimensions (Length x Width x Height)	175 mm x 100 mm x 188 mm
Motor	Frameless Torque Motor, Precision Ball Screw
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Brake	Standard: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: No Brake
Counterbalance	Standard: None Needed Optional: Pneumatic Counterbalance to Increase Payload Capability
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.8 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 125 nm		+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2 µm	+/- 0.8 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.1 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	20 kg
Max Payload Capability (With Pneuboost)	50 kg
Assembly Mass	6.6 kg

Model	AI-LM-17000-("PAYLOAD")-Z-MCB-BASE
Stage	Vertical Z Stage
Travel	170 mm (+/- 85 mm)
Payload Options	20 N, 30 N, 40 N, 50 N, or 60 N
Dimensions (Length x Width x Height)	262 mm x 50 mm x 340 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)		ULTRA		NANO
Linear Displacement Accuracy	+/- 5 µm		+/- 2.0 µm		+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 75 nm				+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm		+/- 2.0 µm		+/- 1.5 µm
Flatness [2]	+/- 5.0 µm		+/- 2.0 µm		+/- 1.5 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	18 arc-sec
Max Velocity [3]	1 m/s
Max Acceleration [3]	2.0 G
Payload (Nominal)	20 N	30 N	40 N	50 N	60 N
Minimum To Maximum Payload Range	15-25 N	25-35 N	35-45 N	45-55 N	55-65 N
Assembly Mass	13.8 kg

Model	AI-LM-5000-("PAYLOAD")-Z-MCB-("ORIENTATION")
Stage	Vertical Z Stage
Travel	50 mm (+/- 25 mm)
Payload Options	30 N, 50 N, 60 N, 70 N, 80 N, or 90 N
Dimensions (Length x Width x Height)	182 mm x 106 mm x 176 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)		ULTRA		NANO
Linear Displacement Accuracy	+/- 7 µm		+/- 1.0 µm		+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 100 nm				+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm		+/- 3.0 µm
Flatness [2]	+/- 6.0 µm		+/- 3.0 µm
Pitch	15 arc-sec
Yaw	15 arc-sec
Roll	15 arc-sec
Max Velocity [3]	0.05 m/s
Payload (Nominal)	30 N, 50 N, 60 N, 70 N, 80 N, or 90 N	50 N	60 N	70 N	80 N	90 N
Minimum To Maximum Payload Range	24-36 N	44-56 N	54-66 N	64-76 N	74-86 N	84-96 N
Assembly Mass	7.1 kg
Moving Mass	3.3 kg

Model	AI-LM-5000-("PAYLOAD")-Z-MCB-("ORIENTATION")
Stage	Vertical Z Stage
Travel	50 mm (+/- 25 mm)
Payload Options	2 N, 8 N, 14 N, 19 N, or 24 N
Dimensions (Length x Width x Height)	165 mm x 96 mm x 156 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)		ULTRA		NANO
Linear Displacement Accuracy	+/- 7 µm		+/- 1.0 µm		+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 75 nm				+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm		+/- 2.5 µm
Flatness [2]	+/- 5.0 µm		+/- 2.5 µm
Pitch	14 arc-sec
Yaw	14 arc-sec
Roll	14 arc-sec
Max Velocity [3]	0.1 m/s
Payload (Nominal)	--	2 N	8 N	14 N	19 N	24 N
Minimum To Maximum Payload Range	--	0-6 N	4-12 N	10-18 N	15-23 N	18-30 N
Assembly Mass	5.2 kg
Moving Mass	2.1 kg

Model	AI-LM-2400-("PAYLOAD")-Z-MCB-("ORIENTATION")
Stage	Vertical Z Stage
Travel	24 mm (+/-12 mm)
Payload Options	2 N, 8 N, 14 N, 19 N, or 24 N
Dimensions (Length x Width x Height)	165 mm x 96 mm x 130 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)		ULTRA		NANO
Linear Displacement Accuracy	+/- 5 µm		+/- 0.7 µm		+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 75 nm				+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm		+/- 2.0 µm
Flatness [2]	+/- 3.0 µm		+/- 2.0 µm
Pitch	10 arc-sec
Yaw	10 arc-sec
Roll	10 arc-sec
Max Velocity [3]	0.1 m/s
Payload (Nominal)	--	2 N	8 N	14 N	19 N	24 N
Minimum To Maximum Payload Range	--	0-6 N	4-12 N	10-18 N	15-23 N	18-30 N
Assembly Mass	4.6 kg
Moving Mass	2 kg

Model	AI-LM-7000-50N-Z-CB
Stage	Vertical Z Stage
Travel	70 mm (+ 70 mm/- 0 mm)
Dimensions (Length x Width x Height)	175 mm x 125 mm x 250 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.25 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	30 kg
Force	50 N
Assembly Mass	13.0 kg

Model	AI-LM-6000-50N-Z-CB
Stage	Vertical Z Stage
Travel	60 mm (+ 60 mm/- 0 mm)
Dimensions (Length x Width x Height)	175 mm x 125 mm x 235 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch	+/- 12 arc-sec
Yaw	+/- 12 arc-sec
Roll	+/- 12 arc-sec
Max Velocity [3]	0.25 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	20 kg
Force	50 N
Assembly Mass	12.3 kg

Model	AI-VC-2400-120N-Z-CB
Stage	Vertical Z Stage
Travel	24 mm (+ 24 mm/- 0 mm)
Dimensions (Length x Width x Height)	175 mm x 125 mm x 170 mm
Motor	Voice Coil Motor (VC)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.8 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2 µm	+/- 0.8 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch	+/- 10 arc-sec
Yaw	+/- 10 arc-sec
Roll	+/- 10 arc-sec
Max Velocity [3]	0.25 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	16 kg
Force	120 N
Assembly Mass	8.0 kg

Model	AI-LM-5000-15N-Z-CB
Stage	Vertical Z Stage
Travel	50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)	165 mm x 96 mm x 136 mm
Drive	Direct Drive Ironless Core Linear Motor
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 8.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 5.0 µm	+/- 2.5 µm
Flatness [2]	+/- 5.0 µm	+/- 2.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Max Velocity [3]	0.2 m/s
Max Peak Acceleration [3]	1.5 G
Max Payload Capability	10 kg
Force	15 N
Assembly Mass	4.4 kg

Model	AI-LM-3000-47N-Z-CB
Stage	Vertical Z Stage
Travel	30 mm (+/- 15 mm)
Dimensions (Length x Width x Height)	165 mm x 96 mm x 136 mm
Drive	Direct Drive Ironless Core Linear Motor
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6.0 µm	+/- 0.8 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 4.0 µm	+/- 2.0 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch [2]	+/- 10.0  arc-sec
Yaw	+/- 10.0  arc-sec
Roll	+/- 10.0  arc-sec
Max Velocity [3]	0.2 m/s
Max Peak Acceleration [3]	3.0 G
Max Payload Capability	10 kg
Force	47 N
Assembly Mass	4.4 kg

Model	AI-VC-2400-11N-Z-CB
Stage	Vertical Z Stage
Travel	24 mm (+/- 12 mm)
Dimensions (Length x Width x Height)	165 mm x 96 mm x 98 mm
Drive	Voice Coil Motor (VC)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 3.0 µm	+/- 2.0 µm
Flatness [2]	+/- 3.0 µm	+/- 2.0 µm
Pitch [2]	+/- 10.0  arc-sec
Yaw	+/- 10.0  arc-sec
Roll	+/- 10.0  arc-sec
Max Velocity [3]	0.1 m/s
Max Peak Acceleration [3]	1.0 G
Max Payload Capability	10 kg
Force	11 N
Assembly Mass	3.6 kg

Model	AI-VC-600-24N-Z-CB
Stage	Vertical Z Stage
Travel	6 mm (+/- 3 mm)
Dimensions (Length x Width x Height)	165 mm x 96 mm x 98 mm
Drive	Voice Coil Motor (VC)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 1.5 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0  arc-sec
Yaw	+/- 10.0  arc-sec
Roll	+/- 10.0  arc-sec
Max Velocity [3]	0.1 m/s
Max Peak Acceleration [3]	2.5 G
Max Payload Capability	10 kg
Force	24 N
Assembly Mass	3.6 kg

Model	AI-LM-300x200-XY
Stage	Monolithic XY Stage (Asymmetrical)
Travel - X	300 mm (+/- 150 mm)
Travel - Y	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	500 mm x 336 mm x 100mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 5 µm	+/- 2 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	10 arc-sec
Orthogonality	20 arc-sec	5 arc-sec	1 arc-sec
Max Velocity [3]	1 m/s
Max Acceleration [3]	0.7 G
Max Payload Capability	30 kg
Assembly Mass	28 kg

Model	AI-SLM-395x320-XY
Stage	Monolithic XY Stage (Asymmetrical)
Travel - X	395 mm
Travel - Y	320 mm
Dimensions (Length X Width X Height)	672 mm x 525 mm x 145 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	STD	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 2.0 µm	+/- 1.0 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm	+/- 2.0 µm	+/- 1.0 µm
Flatness [2]	+/- 10.0 µm	+/- 5.0 µm	+/- 2.0 µm
Pitch [2]	+/- 18.0 arc-sec	+/- 18.0 arc-sec	+/- 10.0 arc-sec
Yaw	+/- 18.0 arc-sec	+/- 18.0 arc-sec	+/- 10.0 arc-sec
Roll	+/- 10.0 arc-sec	+/- 10.0 arc-sec	+/- 10.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 2.0 arc-sec
Max Velocity [3]	1.5 m/s
Max Peak Acceleration [3]	0.59 G
Max Payload Capability	200 kg
Assembly Mass	98 kg

Model	AI-LM-160x100-XY
Stage	Monolithic XY Stage (Asymmetrical)
Travel - X	160 mm (+/- 80 mm)
Travel - Y	100 mm (+/- 50 mm)
Dimensions (Length X Width X Height)	275 mm x 175 mm x 80 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.0 µm	+/- 0.7 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 7.5 arc-sec
Yaw	+/- 7.5 arc-sec
Roll	+/- 4.0 arc-sec
Orthogonality	+/- 10.0 arc-sec	+/- 2.5 arc-sec	+/- 0.5 arc-sec
Max Velocity [3]	1 m/s
Max Peak Acceleration [3]	1.5 G
Max Payload Capability	25 kg
Assembly Mass	11.4 kg

Model	AI-VBS-20000
Stage	Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	492 mm x 154 mm x 50 mm
Brake Options	Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	524 mm x 154 mm x 50 mm
(-Ebrk) Dimensions (Length x Width x Height)	571 mm x 154 mm x 50 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4 µm	+/- 1.0 µm	+/- 0.4 µm
Backlash	0 nm
Bidirectional Linear Repeatability	+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5 µm	+/- 4 µm	+/- 3 µm
Flatness [2]	+/- 5.0 µm	+/- 3.0 µm
Pitch [2]	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	1.0 G
Max Payload Capability W/ Axis Oriented Horizontal	25 kg
Max Payload Capability W/ Axis Oriented Vertical	12 kg
Assembly Mass	8 kg

Model	AI-VBS-15000
Stage	Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	370 mm x 120 mm x 50 mm
Brake Options	Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	404 mm x 120 mm x 50 mm
(-Ebrk) Dimensions (Length x Width x Height)	452 mm x 120 mm x 50 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 1.0 µm	+/- 0.4 µm
Backlash	0 nm
Bidirectional Linear Repeatability	+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.5 µm	+/- 2.5 µm	+/- 1.5 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch [2]	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	1.0 G
Max Payload Capability W/ Axis Oriented Horizontal	25 kg
Max Payload Capability W/ Axis Oriented Vertical	12 kg
Assembly Mass	4.6 kg

Model	AI-VBS-10000
Stage	Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	295 mm x 120 mm x 50 mm
Brake Options	Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	329 mm x 120 mm x 50 mm
(-Ebrk) Dimensions (Length x Width x Height)	377 mm x 120 mm x 50 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 1.0 µm	+/- 0.3 µm
Backlash	0 nm
Bidirectional Linear Repeatability	+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	1.0 G
Max Payload Capability W/ Axis Oriented Horizontal	25 kg
Max Payload Capability W/ Axis Oriented Vertical	12 kg
Assembly Mass	3.8 kg

Model	AI-VBS-6000
Stage	Linear Stage
Travel	60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)	225 mm x 120 mm x 50 mm
Brake Options	Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	259 mm x 120 mm x 50 mm
(-Ebrk) Dimensions (Length x Width x Height)	307 mm x 120 mm x 50 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.7 µm	+/- 0.3 µm
Backlash	0 nm
Bidirectional Linear Repeatability	+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.5 µm	+/- 1.5 µm
Pitch [2]	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	1.0 G
Max Payload Capability W/ Axis Oriented Horizontal	20 kg
Max Payload Capability W/ Axis Oriented Vertical	12 kg
Assembly Mass	3 kg

Model	AI-CM-25000-250-XY
Stage	Monolithic XY Stage with Open Center
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	468.5 mm x 468.5 mm x 80 mm
Aperture / Thru	250 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.2 µm	+/- 0.7 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 1.2 µm	+/- 0.7 µm
Flatness [2]	+/- 4.0 µm	+/- 3.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.1 m/s
Bot Axis Max Velocity [3]	0.6 m/s
Top Axis Max Peak Acceleration [3]	1.0 G
Bot Axis Max Peak Acceleration [3]	0.3 G
Max Payload Capability	25 kg
Assembly Mass	33 kg

Model	AI-CM-20000-200-XY
Stage	Monolithic XY Stage with Open Center
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	332.5 mm x 332.5 mm x 65 mm
Aperture / Thru	200 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.2 µm	+/- 0.7 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 1.2 µm	+/- 0.7 µm
Flatness [2]	+/- 4.0 µm	+/- 3.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1 m/s
Bot Axis Max Velocity [3]	0.6 m/s
Top Axis Max Peak Acceleration [3]	1.0 G
Bot Axis Max Peak Acceleration [3]	0.4 G
Max Payload Capability	15 kg
Assembly Mass	11.4 kg

Model	AI-CM-15000-150-XY
Stage	Monolithic XY Stage with Open Center
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	282.5 mm x 282.5 mm x 52 mm
Aperture / Thru	150 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 5.0 µm	+/- 2.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.9 m/s
Bot Axis Max Velocity [3]	0.5 m/s
Top Axis Max Peak Acceleration [3]	1.2 G
Bot Axis Max Peak Acceleration [3]	0.4 G
Max Payload Capability	12 kg
Assembly Mass	7.4 kg

Model	AI-CM-10000-100-XY
Stage	Monolithic XY Stage with Open Center
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	229.5 mm x 229.5 mm x 52 mm
Aperture / Thru	100 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.8 m/s
Bot Axis Max Velocity [3]	0.5 m/s
Top Axis Max Peak Acceleration [3]	1.6 G
Bot Axis Max Peak Acceleration [3]	0.6 G
Max Payload Capability	12 kg
Assembly Mass	5.6 kg

Model	AI-CM-5000-050-XY
Stage	Monolithic XY Stage with Open Center
Travel	60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)	179.5 mm x 179.5 mm x 45 mm
Aperture / Thru	50 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Flatness [2]	+/- 2.5 µm	+/- 1.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.8 m/s
Bot Axis Max Velocity [3]	0.5 m/s
Top Axis Max Peak Acceleration [3]	3.0 G
Bot Axis Max Peak Acceleration [3]	1.0 G
Max Payload Capability	10 kg
Assembly Mass	3.2 kg

Model	AI-CM-3000-030-XY
Stage	Monolithic XY Stage with Open Center
Travel	30 mm (+/- 15 mm)
Dimensions (Length x Width x Height)	140 mm x 140 mm x 45 mm
Aperture / Thru	30 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 0.5 µm	+/- 0.3 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.8 m/s
Bot Axis Max Velocity [3]	0.5 m/s
Top Axis Max Peak Acceleration [3]	5.0 G
Bot Axis Max Peak Acceleration [3]	1.8 G
Max Payload Capability	8 kg
Assembly Mass	1.9 kg

Model	AI-CM-30000-XY
Stage	Monolithic XY Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	500 mm x 500 mm x 100 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6.0 µm	+/- 1.0 µm	+/- 0.6 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 10.0 µm	+/- 2.0 µm	+/- 1.0 µm
Flatness [2]	+/- 8.0 µm	+/- 5.0 µm
Pitch [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 18.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.7 m/s
Bot Axis Max Velocity [3]	0.3
Top Axis Max Peak Acceleration [3]	0.4 G
Bot Axis Max Peak Acceleration [3]	0.1
Max Payload Capability	35 kg
Assembly Mass	69 kg

Model	AI-CM-25000-XY
Stage	Monolithic XY Stage
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	400 mm x 400 mm x 100 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm	+/- 2.0 µm	+/- 1.0 µm
Flatness [2]	+/- 6.0 µm	+/- 4.0 µm
Pitch [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 18.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.8 m/s
Bot Axis Max Velocity [3]	0.5
Top Axis Max Peak Acceleration [3]	0.6 G
Bot Axis Max Peak Acceleration [3]	0.2 G
Max Payload Capability	25 kg
Assembly Mass	48 kg

Model	AI-CM-20000-XY
Stage	Monolithic XY Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	275 mm x 275 mm x 60 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 1.0 µm	+/- 0.4 µm
Flatness [2]	+/- 4.0 µm	+/- 3.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1 m/s
Bot Axis Max Velocity [3]	0.6
Top Axis Max Peak Acceleration [3]	1.0 G
Bot Axis Max Peak Acceleration [3]	0.4 G
Max Payload Capability	15 kg
Assembly Mass	12 kg

Model	AI-CM-15000-XY
Stage	Monolithic XY Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	225 mm x 225 mm x 60 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.8 m/s
Bot Axis Max Velocity [3]	0.5 m/s
Top Axis Max Peak Acceleration [3]	1.0 G
Bot Axis Max Peak Acceleration [3]	0.4 G
Max Payload Capability	12 kg
Assembly Mass	8.5 kg

Model	AI-CM-10000-XY
Stage	Monolithic XY Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	184 mm x 184 mm x 60 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 1.0 µm	+/- 0.3 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.7 m/s
Bot Axis Max Velocity [3]	0.5 m/s
Top Axis Max Peak Acceleration [3]	1.2 G
Bot Axis Max Peak Acceleration [3]	0.6 G
Max Payload Capability	12 kg
Assembly Mass	5.8 kg

Model	AI-CM-6000-XY
Stage	Monolithic XY Stage
Travel	60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)	125 mm x125 mm x 60 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 0.7 µm	+/- 0.3 µm
Flatness [2]	+/- 2.5 µm	+/- 1.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.9 m/s
Bot Axis Max Velocity [3]	0.6
Top Axis Max Peak Acceleration [3]	3.0 G
Bot Axis Max Peak Acceleration [3]	1.2 G
Max Payload Capability	10 kg
Assembly Mass	2.9 kg

Model	AI-CM-3000-XY
Stage	Monolithic XY Stage
Travel	30 mm (+/- 15 mm)
Dimensions (Length x Width x Height)	112 mm x 112 mm x 50 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.0 µm	+/- 0.5 µm	+/- 0.2 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.7 m/s
Bot Axis Max Velocity [3]	0.5
Top Axis Max Peak Acceleration [3]	4.0 G
Bot Axis Max Peak Acceleration [3]	2.0 G
Max Payload Capability	8 kg
Assembly Mass	1.6 kg

Model	AI-CM-30000
Stage	Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	506 mm x 120 mm x 48 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6.0 µm	+/- 1.0 µm	+/- 0.6 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 8.0 µm	+/- 6.0 µm	+/- 4.0 µm
Flatness [2]	+/- 8.0 µm	+/- 5.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Max Velocity [3]	Depending on application - Ask ALIO
Max Acceleration [3]	Depending on application - Ask ALIO
Max Payload Capability	Depending on application - Ask ALIO
Assembly Mass	Depending on application - Ask ALIO

Model	AI-CM-25000
Stage	Linear Stage
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	404 mm x 154 mm x 48 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm	+/- 4.0 µm	+/- 3.0 µm
Flatness [2]	+/- 6.0 µm	+/- 4.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Max Velocity [3]	Depending on application - Ask ALIO
Max Acceleration [3]	Depending on application - Ask ALIO
Max Payload Capability	Depending on application - Ask ALIO
Assembly Mass	Depending on application - Ask ALIO

Model	AI-CM-20000
Stage	Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	279 mm x 120 mm x 32 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm	+/- 4.0 µm	+/- 3.0 µm
Flatness [2]	+/- 5.0 µm	+/- 3.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Max Velocity [3]	1.4 m/s
Max Acceleration [3]	2.0 G
Max Payload Capability	12 kg
Assembly Mass	3.2 kg

Model	AI-CM-15000
Stage	Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	229 mm x 120 mm x 32 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.5 µm	+/- 2.5 µm	+/- 1.5 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Max Velocity [3]	1.1 m/s
Max Acceleration [3]	1.8 G
Max Payload Capability	12 kg
Assembly Mass	2.5 kg

Model	AI-CM-10000
Stage	Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	190 mm x 120 mm x 32 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Max Velocity [3]	1 m/s
Max Acceleration [3]	2.0 G
Max Payload Capability	12 kg
Assembly Mass	2.2 kg

Model	AI-CM-6000
Stage	Linear Stage
Travel	60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)	130 mm x 120 mm x 32 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.5 µm	+/- 1.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Max Velocity [3]	0.9 m/s
Max Acceleration [3]	3.0 G
Max Payload Capability	10 kg
Assembly Mass	1.4 kg

Model	AI-CM-3000
Stage	Linear Stage
Travel	30 mm (+/- 15 mm)
Dimensions (Length x Width x Height)	104 mm x 120 mm x 32 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Max Velocity [3]	0.7 m/s
Max Acceleration [3]	4.0 G
Max Payload Capability	8 kg
Assembly Mass	1.1 kg

Model	AI-LM-30000
Stage	Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	506 mm x 178 mm x 55 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.6 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm	+/- 4.5 µm	+/- 3.0 µm
Flatness [2]	+/- 5.0 µm	+/- 2.0 µm
Pitch Y [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 10.0 arc-sec
Max Velocity [3]	2.4 m/s
Max Acceleration [3]	4.0 G
Max Payload Capability	50 kg
Assembly Mass	15.2 kg

Model	AI-LM-25000
Stage	Linear Stage
Travel	250 mm (+ /-125 mm)
Dimensions (Length x Width x Height)	404 mm x 154 mm x 55 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 3.0 µm	+/- 2.0 µm
Flatness [2]	+/- 5.0 µm	+/- 2.0 µm
Pitch Y [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 10.0 arc-sec
Max Velocity [3]	2.5 m/s
Max Acceleration [3]	5.0 G
Max Payload Capability	40 kg
Assembly Mass	9.4 kg

Model	AI-LM-20000
Stage	Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	340 mm x 154 mm x 46 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 2.0 µm	+/- 1.5 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch Y [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Max Velocity [3]	2.4 m/s
Max Acceleration [3]	6.0 G
Max Payload Capability	30 kg
Assembly Mass	7.8 kg

Model	AI-LM-15000
Stage	Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	275 mm x 120 mm x 45 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch Y [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Max Velocity [3]	2.1 m/s
Max Acceleration [3]	6.0 G
Max Payload Capability	25 kg
Assembly Mass	4.4 kg

Model	AI-LM-10000
Stage	Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	244 mm x 120 mm x 45 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch Y [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Max Velocity [3]	1.8 m/s
Max Acceleration [3]	7.0 G
Max Payload Capability	25 kg
Assembly Mass	4 kg

Model	AI-LM-6000
Stage	Linear Stage
Travel	60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)	168 mm x 120 mm x 40 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch Y [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Max Velocity [3]	1.2 m/s
Max Acceleration [3]	5.0 G
Max Payload Capability	20 kg
Assembly Mass	2.2 kg

Model	AI-LM-40000-400-XY
Stage	Monolithic XY Stage with Open Center
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	650 mm x 650 mm x 120 mm
Aperture / Thru	400 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 16.0 µm	+/- 2.5 µm	+/- 1.5 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 10.0 µm	+/- 2.5 µm	+/- 1.5 µm
Flatness [2]	+/- 12.0 µm	+/- 5.0 µm
Pitch [2]	+/- 20.0 arc-sec
Yaw	+/- 20.0 arc-sec
Roll	+/- 20.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.8 m/s
Bot Axis Max Velocity [3]	1.0 m/s
Top Axis Max Peak Acceleration [3]	1.8 G
Top Axis Max Peak Acceleration [3]	0.6 G
Max Payload Capability	50 kg
Assembly Mass	104 kg

Model	AI-LM-35000-350-XY
Stage	Monolithic XY Stage with Open Center
Travel	350 mm (+/- 175 mm)
Dimensions (Length x Width x Height)	550 mm x 550 mm x 120 mm
Aperture / Thru	350 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 10.0 µm	+/- 2.0 µm	+/- 1.5 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm	+/- 2.0 µm	+/- 1.5 µm
Flatness [2]	+/- 10.0 µm	+/- 4.0 µm
Pitch [2]	+/- 20.0 arc-sec
Yaw	+/- 20.0 arc-sec
Roll	+/- 20.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.8 m/s
Bot Axis Max Velocity [3]	1.1 m/s
Top Axis Max Peak Acceleration [3]	2.0 G
Top Axis Max Peak Acceleration [3]	0.8 G
Max Payload Capability	50 kg
Assembly Mass	64 kg

Model	AI-LM-30000-300-XY
Stage	Monolithic XY Stage with Open Center
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	500 mm x 500 mm x 120 mm
Aperture / Thru	300 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 8.0 µm	+/- 1.5 µm	+/- 1.0 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 6.0 µm	+/- 3.0 µm
Pitch [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 18.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.7 m/s
Bot Axis Max Velocity [3]	1.2 m/s
Top Axis Max Peak Acceleration [3]	2.0 G
Top Axis Max Peak Acceleration [3]	1.0 G
Max Payload Capability	50 kg
Assembly Mass	58 kg

Model	AI-LM-25000-250-XY
Stage	Monolithic XY Stage with Open Center
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	460 mm x 460 mm x 95 mm
Aperture / Thru	250 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6.0 µm	+/- 1.5 µm	+/- 1.0 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 5.0 µm	+/- 2.0 µm
Pitch [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 18.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.9 m/s
Bot Axis Max Velocity [3]	1.3 m/s
Top Axis Max Peak Acceleration [3]	3.0 G
Top Axis Max Peak Acceleration [3]	1.4 G
Max Payload Capability	40 kg
Assembly Mass	37 kg

Model	AI-LM-20000-200-XY
Stage	Monolithic XY Stage with Open Center
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	392 mm x 392 mm x 80 mm
Aperture / Thru	200 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6.0 µm	+/- 1.5 µm	+/- 0.8 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 1.5 µm	+/- 0.8 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	2 m/s
Bot Axis Max Velocity [3]	1.1 m/s
Top Axis Max Peak Acceleration [3]	4.0 G
Top Axis Max Peak Acceleration [3]	1.4 G
Max Payload Capability	30 kg
Assembly Mass	23 kg

Model	AI-LM-15000-150-XY
Stage	Monolithic XY Stage with Open Center
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	326.5 mm x 326.5 mm x 68 mm
Aperture / Thru	150 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4.0 µm	+/- 1.2 µm	+/- 0.6 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 1.2 µm	+/- 0.6 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.7 m/s
Bot Axis Max Velocity [3]	1.0  m/s
Top Axis Max Peak Acceleration [3]	4.0 G
Top Axis Max Peak Acceleration [3]	1.4 G
Max Payload Capability	25 kg
Assembly Mass	14 kg

Model	AI-LM-10000-100-XY
Stage	Monolithic XY Stage with Open Center
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	230 mm x 230 mm x 64 mm
Aperture / Thru	100 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 10.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.4 m/s
Bot Axis Max Velocity [3]	0.8 m/s
Top Axis Max Peak Acceleration [3]	4.0 G
Top Axis Max Peak Acceleration [3]	1.6 G
Max Payload Capability	25 kg
Assembly Mass	6.5 kg

Model	AI-LM-45000-XY
Stage	Monolithic XY Stage
Travel	450 mm (+/- 225 mm)
Dimensions (Length x Width x Height)	650 mm x 650 mm x 115 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 12.0 µm	+/- 1.5 µm	+/- 1.0 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 16.0 µm	+/- 8.0 µm
Pitch [2]	+/- 20.0 arc-sec
Yaw	+/- 20.0 arc-sec
Roll	+/- 14.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.7 m/s
Bot Axis Max Velocity [3]	1 m/s
Top Axis Max Peak Acceleration [3]	1.4 G
Bot Axis Max Peak Acceleration [3]	0.5 G
Max Payload Capability	80 kg
Assembly Mass	135 kg

Model	AI-LM-40000-XY
Stage	Monolithic XY Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	650 mm x 650 mm x 115 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 12.0 µm	+/- 1.5 µm	+/- 1.0 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 16.0 µm	+/- 8.0 µm
Pitch [2]	+/- 20.0 arc-sec
Yaw	+/- 20.0 arc-sec
Roll	+/- 14.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.6 m/s
Bot Axis Max Velocity [3]	1 m/s
Top Axis Max Peak Acceleration [3]	1.4 G
Bot Axis Max Peak Acceleration [3]	0.5 G
Max Payload Capability	80 kg
Assembly Mass	135 kg

Model	AI-LM-35000-XY
Stage	Monolithic XY Stage
Travel	350 mm (+/- 175 mm)
Dimensions (Length x Width x Height)	500 mm x 500 mm x 115 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 8.0 µm	+/- 1.5 µm	+/- 0.8 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 1.5 µm	+/- 0.8 µm
Flatness [2]	+/- 8.0 µm	+/- 4.0 µm
Pitch [2]	+/- 20.0 arc-sec
Yaw	+/- 20.0 arc-sec
Roll	+/- 14.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.7 m/s
Bot Axis Max Velocity [3]	1.1 m/s
Top Axis Max Peak Acceleration [3]	1.9 G
Bot Axis Max Peak Acceleration [3]	0.7 G
Max Payload Capability	50 kg
Assembly Mass	75 kg

Model	AI-LM-30000-XY
Stage	Monolithic XY Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	500 mm x 500 mm x 115 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.6 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 1.0 µm	+/- 0.6 µm
Flatness [2]	+/- 5.0 µm	+/- 2.0 µm
Pitch [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 10.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.6 m/s
Bot Axis Max Velocity [3]	1 m/s
Top Axis Max Peak Acceleration [3]	1.9 G
Bot Axis Max Peak Acceleration [3]	0.7 G
Max Payload Capability	50 kg
Assembly Mass	75 kg

Model	AI-LM-25000-XY
Stage	Monolithic XY Stage
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	400 mm x 400 mm x 115 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 5.0 µm	+/- 2.0 µm
Pitch [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 10.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.5 m/s
Bot Axis Max Velocity [3]	0.9 m/s
Top Axis Max Peak Acceleration [3]	1.9 G
Bot Axis Max Peak Acceleration [3]	0.7 G
Max Payload Capability	40 kg
Assembly Mass	52 kg

Model	AI-LM-20000-XY-HF
Stage	Monolithic XY Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	336 mm x 336 mm x 90 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.5 µm	+/- 1.0 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	2.0 m/s
Bot Axis Max Velocity [3]	1.2 m/s
Top Axis Max Peak Acceleration [3]	5.6 G
Bot Axis Max Peak Acceleration [3]	2 G
Max Payload Capability	30 kg
Assembly Mass	28 kg

Model	AI-LM-20000-XY
Stage	Monolithic XY Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	336 mm x 336 mm x 90 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.5 µm	+/- 1.0 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.7 m/s
Bot Axis Max Velocity [3]	1 m/s
Top Axis Max Peak Acceleration [3]	3.0 G
Bot Axis Max Peak Acceleration [3]	1.3 G
Max Payload Capability	30 kg
Assembly Mass	28 kg

Model	AI-LM-16000-XY
Stage	Monolithic XY Stage
Travel	160 mm (+/- 80 mm)
Dimensions (Length x Width x Height)	275 mm x 275 mm x 80 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.5 µm	+/- 0.7 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.5 m/s
Bot Axis Max Velocity [3]	1 m/s
Top Axis Max Peak Acceleration [3]	3.0 G
Bot Axis Max Peak Acceleration [3]	1.3 G
Max Payload Capability	25 kg
Assembly Mass	16 kg

Model	AI-LM-10000-XY
Stage	Monolithic XY Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	244 mm x 244 mm x 80 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.0 µm	+/- 0.7 µm	+/- 0.3 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.4 m/s
Bot Axis Max Velocity [3]	0.8 m/s
Top Axis Max Peak Acceleration [3]	4.0 G
Bot Axis Max Peak Acceleration [3]	1.6 G
Max Payload Capability	25 kg
Assembly Mass	13 kg

Model	AI-LM-6000-XY
Stage	Monolithic XY Stage
Travel	60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)	152.5 mm x 152.5 mm x 80 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.0 µm	+/- 0.5 µm	+/- 0.2 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.2 m/s
Bot Axis Max Velocity [3]	0.7 m/s
Top Axis Max Peak Acceleration [3]	5.0 G
Bot Axis Max Peak Acceleration [3]	2.0 G
Max Payload Capability	20 kg
Assembly Mass	4.7 kg

Model	AI-LM-3000-XY
Stage	Monolithic XY Stage
Travel	30 mm ( +/- 15 mm)
Dimensions (Length x Width x Height)	108 mm x 108 mm x 65 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 1.0 µm	+/- 0.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.0 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 6.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.2 m/s
Bot Axis Max Velocity [3]	0.7 m/s
Top Axis Max Peak Acceleration [3]	11.0 G
Bot Axis Max Peak Acceleration [3]	4.0 G
Max Payload Capability	10 kg
Assembly Mass	2.3 kg