ModelAI-HH-60XY-15Z-56RT-LM
StageHybrid Hexapod 
Travel - XY60 mm (+/- 30 mm)
Travel - Z15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)170 mm x 163.5 mm x 224.5 mm
DrivesFrameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm +/- 70 nm
Z +/- 100 nm +/- 70 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.04 arc-sec
Yaw0.03 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]XY150 mm/s
Z15 mm/s
Max Linear Acceleration [3]XY0.3 G
Z0.3 G
Max Angular Velocity [3]Pitch And Roll30 deg/s
Roll360 deg/s
Max Angular Acceleration [3]Pitch And Roll>1000 deg/s²
Yaw>1000 deg/s²
Max Payload5 kg
Assembly Mass9.022 kg
ModelAI-HH-60XY-15Z-56R
StageHybrid Hexapod 
Travel - XY60 mm (+/- 30 mm)
Travel - Z15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)174 mm x 176.3 mm x 201 mm
DrivesFrameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm +/- 70 nm
Z +/- 100 nm +/- 70 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.04 arc-sec
Yaw0.03 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]XY100 mm/s
Z15 mm/s
Max Linear Acceleration [3]XY0.3 G
Z0.3 G
Max Angular Velocity [3]Pitch And Roll30 deg/s
Roll360 deg/s
Max Angular Acceleration [3]Pitch And Roll>1000 deg/s²
Yaw>1000 deg/s²
Max Payload5 kg
Assembly Mass5.7 kg
ModelAI-HH-30D-200XY-62Z-80R-LM
StageHybrid Hexapod (Angulares® )
Travel - XY200 mm (+/- 100 mm)
Travel - Z62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll  +/- 30 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)571 mm x 401 mm x 322.2 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
Rotary BrakeStandard: No Brake
Optional: Pneumatic Release, Spring Engage Brake (B)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 30 nm
Z +/- 200 nm
Pitch And Roll +/- 1 arc-sec
Yaw +/- 0.5 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout12 µm10 µm5 µm
Radial Runout12 µm10 µm5 µm
Wobble20 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.15 arc-sec
Yaw0.04 arc-sec
Max Linear Velocity [3]XY100  mm/s
Z15  mm/s
Max Linear Acceleration [3]XY0.3 G
Z0.3 G
Max Angular Velocity [3]Pitch And Roll20 deg/s
Roll>3000 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1000 deg/s²
YAW>2000 deg/s²
Max Payload5-10 kg
Assembly Mass30 kg
ModelAI-HH-30D-200XY-62Z-80R-CM
StageHybrid Hexapod (Angulares® )
Travel - XY200 mm (+/- 100 mm)
Travel - Z62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll  +/- 30 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)510 mm x 336.5 mm x 293.2 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
Rotary BrakeStandard: No Brake
Optional: Pneumatic Release, Spring Engage Brake (B)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 30 nm
Z +/- 200 nm
Pitch And Roll +/- 1 arc-sec
Yaw +/- 0.5 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout12 µm10 µm5 µm
Radial Runout12 µm10 µm5 µm
Wobble20 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.15 arc-sec
Yaw0.04 arc-sec
Max Linear Velocity [3]XY50  mm/s
Z15  mm/s
Max Linear Acceleration [3]XY0.1 G
Z0.3 G
Max Angular Velocity [3]Pitch And Roll20 deg/s
Roll>3000 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1000 deg/s²
YAW>2000 deg/s²
Max Payload5 kg
Assembly Mass14 kg
ModelAI-HH-30D-100XY-62Z-80R-LM
StageHybrid Hexapod (Angulares® )
Travel - XY100 mm (+/- 50 mm)
Travel - Z62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll  +/- 30 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)415.8 mm x 295.5 mm x 312.2 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
Rotary BrakeStandard: No Brake
Optional: Pneumatic Release, Spring Engage Brake (B)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 30 nm
Z +/- 200 nm
Pitch And Roll +/- 1 arc-sec
Yaw +/- 0.5 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout12 µm10 µm5 µm
Radial Runout12 µm10 µm5 µm
Wobble20 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.15 arc-sec
Yaw0.04 arc-sec
Max Linear Velocity [3]XY100  mm/s
Z15  mm/s
Max Linear Acceleration [3]XY0.3 G
Z0.3 G
Max Angular Velocity [3]Pitch And Roll20 deg/s
Roll>3000 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1000 deg/s²
YAW>2000 deg/s²
Max Payload5-10 kg
Assembly Mass15.29 kg
ModelAI-HH-30D-60XY-62Z-80R-BSD
StageHybrid Hexapod (Angulares® )
Travel - XY60 mm (+/- 30 mm)
Travel - Z62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll  +/- 30 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)199 mm x 208 mm x 285.2 mm
DrivesXY, Pitch & Roll: Frameless Torque Motor with Precision Ball Screw
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
Rotary BrakeStandard: No Brake
Optional: Pneumatic Release, Spring Engage Brake (B)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm
Z +/- 200 nm
Pitch And Roll#colspan# +/- 1 arc-sec
Yaw#colspan# +/- 0.5 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-secPitch And Roll
Yaw RunoutAxial Runout12 µm10 µm5 µm
Radial Runout12 µm10 µm5 µm
Wobble20 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
YawPitch And Roll~0.15 arc-sec
Yaw0.04 arc-sec
Max Linear Velocity [3]XY50  mm/s
Z15  mm/s
Max Linear Acceleration [3]XY0.1 G
Z0.3 G
Max Angular Velocity [3]Pitch And Roll20 deg/s
Roll>3000 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1000 deg/s²
YAW>2000 deg/s²
Max Payload5-10 kg
Assembly Mass 
ModelAI-HH-200XY-60Z-154RA
StageHybrid Hexapod 
Travel - XY200 mm (+/- 100 mm)
Travel - Z60 mm (+ 60 mm/- 0 mm)
Travel - Pitch & Roll  +/- 14 deg
Travel - Yaw360 deg continous
Dimensions (Length x Width x Height)443.2 mm x 410.1 mm x 378 mm
DrivesXY: Direct Drive (Ironless Core Linear Motor)
Pitch & Roll: Frameless Torque Motor with Precision Ball Screw
Yaw: Torque Motor
BrakePneumatic Release, Spring Lock
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm +/- 70 nm
Z +/- 100 nm +/- 70 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout10 nm7 nm4 nm
Radial Runout10 nm7 nm4 nm
Wobble20 arc-sec10 arc-sec6 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.02 arc-sec
Yaw~0.01 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]XY500  mm/s
Z30  mm/s
Max Linear Acceleration [3]0.3 G
Max Angular Velocity [3]Pitch And Roll60 deg/s
Yaw1800 deg/s
Max Angular Acceleration [3]Pitch And Roll>1000 deg/s²
Yaw>3600 deg/s²
Max Payload20 kg
Assembly Mass57 kg
ModelAI-HH-200XY-15Z-56RT-CM
StageHybrid Hexapod (6 DOF)
Travel - XY200 mm (+/- 100 mm)
Travel - Z15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continous
Dimensions (Length x Width x Height)336.5 mm  x 275 mm x 202.7 mm
DrivesXY: Direct Drive (Ironless Core Linear Motor)
Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm +/- 70 nm
Z +/- 100 nm +/- 70 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.04 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc/sec5 arc/sec1 arc/sec
XZ & YZ250 arc/sec200 arc/sec50 arc/sec
Max Linear Velocity [3]XY50 mm/s
Z15 mm/s
MAX LINEAR ACCELERATION [3]XY0.1 G
Z0.3 G
Max Angular Velocity [3]PITCH AND ROLL30 deg/s
YAW3000 deg/s
MAX ANGULAR ACCELERATION [3]PITCH AND ROLL>1000 deg/s²
YAW>7200 deg/s²
Max Payload5 kg
Assembly Mass16.3 kg
ModelAI-HH-100XY-15Z-56RT-LM
StageHybrid Hexapod (6 DOF)
Travel - XY100 mm (+/- 50 mm)
Travel - Z15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continous
Dimensions (Length x Width x Height)296 mm x 244 mm x 215.2 mm
DrivesXY: Direct Drive (Ironless Core Linear Motor)
Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm +/- 70 nm
Z +/- 100 nm +/- 70 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.04 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc/sec5 arc/sec1 arc/sec
XZ & YZ250 arc/sec200 arc/sec50 arc/sec
Max Linear Velocity [3]XY150 mm/s
Z15 mm/s
MAX LINEAR ACCELERATION [3]XY0.3 G
Z0.3 G
Max Angular Velocity [3]PITCH AND ROLL30 deg/s
YAW3000 deg/s
MAX ANGULAR ACCELERATION [3]PITCH AND ROLL>1000 deg/s²
YAW>7200 deg/s²
Max Payload5 kg
Assembly Mass8.9 kg
ModelAI-HH-60XY-15Z-56RT-LM
StageHybrid Hexapod (6 DOF)
Travel - XY60 mm (+/- 30 mm)
Travel - Z15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continous
Dimensions (Length x Width x Height)165 mm  x 215.2 mm x 222.7 mm
DrivesXY: Direct Drive (Ironless Core Linear Motor)
Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm +/- 70 nm
Z +/- 100 nm +/- 70 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.04 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]XY150 mm/s
Z15 mm/s
MAX LINEAR ACCELERATION [3]XY0.3 G
Z0.3 G
Max Angular Velocity [3]PITCH AND ROLL30 deg/s
YAW3000 deg/s
MAX ANGULAR ACCELERATION [3]PITCH AND ROLL>1000 deg/s²
YAW>7200 deg/s²
Max Payload5 kg
Assembly Mass7.3 kg
ModelAI-HH-60XY-15Z-56RT-BSD
StageHybrid Hexapod (6 DOF)
Travel - XY60 mm (+/- 30 mm)
Travel - Z15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continous
Dimensions (Length x Width x Height)171 mm x 177 mm x 191.7 mm
DrivesXY, Pitch & Roll: Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm +/- 70 nm
Z +/- 100 nm +/- 70 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll#colspan#  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.04 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]XY100 mm/s
Z15 mm/s
MAX LINEAR ACCELERATION [3]XY0.3 G
Z#colspan#0.3 G
Max Angular Velocity [3]PITCH AND ROLL30 deg/s
YAW3000 deg/s
MAX ANGULAR ACCELERATION [3]PITCH AND ROLL>1000 deg/s²
YAW>7200 deg/s²
Max Payload5 kg
Assembly Mass6 kg
ModelAI-HH-300XY-206Z-154R
StageHybrid Hexapod (6 DOF)
Travel - XY300 mm (+/- 150 mm)
Travel - Z206 mm (+ 206 mm/- 0 mm)
Travel - Pitch & Roll  +/- 18 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)504.2 mm x 500 mm x 660 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.5 arc-sec +/- 0.3 arc-sec
Yaw +/- 0.5 arc-sec +/- 0.3 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z < 20  nm
Pitch And Roll  < 0.08 arc-sec
Yaw  < 0.08 arc-sec
Yaw RunoutAxial Runout10 µm7 µm4 µm
Radial Runout10 µm7 µm4 µm
Wobble20 arc-sec10 arc-sec6 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.01 arc-sec
Yaw~0.01 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.5 m/s
Max Linear Acceleration [3]0.3 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload20 kg
Assembly Mass122 kg
ModelAI-HH-300XY-106Z-154R
StageHybrid Hexapod (6 DOF)
Travel - XY300 mm (+/- 150 mm)
Travel - Z106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll  +/- 18 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)504.2
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.5 arc-sec +/- 0.3 arc-sec
Yaw +/- 0.5 arc-sec +/- 0.3 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z  < 20  nm
Pitch And Roll  < 0.08 arc-sec
Yaw  < 0.08 arc-sec
Yaw RunoutAxial Runout10 µm7 µm4 µm
Radial Runout10 µm7 µm4 µm
Wobble20 arc-sec10 arc-sec6 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.01 arc-sec
Yaw~0.01 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.5 m/s
Max Linear Acceleration [3]0.3 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll#colspan#180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload10 kg
Assembly Mass105 kg
ModelAI-HH-300XY-106Z-104R
StageHybrid Hexapod (6 DOF)
Travel - XY300 mm (+/- 150 mm)
Travel - Z106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll  +/- 18 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)504.2 mm x 500 mm x 519.9 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.5 arc-sec +/- 0.3 arc-sec
Yaw +/- 0.5 arc-sec +/- 0.3 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z  < 20  nm
Pitch And Roll  < 0.08 arc-sec
Yaw  < 0.08 arc-sec
Yaw RunoutAxial Runout12 µm9 µm6 µm
Radial Runout12 µm9 µm6 µm
Wobble25 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.01 arc-sec
Yaw0.02 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.5 m/s
Max Linear Acceleration [3]0.3 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload7.5 kg
Assembly Mass105 kg
ModelAI-HH-200XY-40Z-104R
StageHybrid Hexapod (6 DOF)
Travel - XY200 mm(+/- 100 mm)
Travel - Z20 mm (+ 20 mm/- 0 mm)
Travel - Pitch & Roll  +/- 11 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)399 mm x 359 mm x 318.9 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.5 arc-sec +/- 0.3 arc-sec
Yaw +/- 0.5 arc-sec +/- 0.3 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z  < 20  nm
Pitch And Roll  < 0.08 arc-sec
Yaw  < 0.08 arc-sec
Yaw RunoutAxial Runout12 µm9 µm6 µm
Radial Runout12 µm9 µm6 µm
Wobble25 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.01 arc-sec
Yaw0.02 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.5 m/s
Max Linear Acceleration [3]0.3 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload5 kg
Assembly Mass46 kg
ModelAI-HH-150XY-40Z-104R
StageHybrid Hexapod (6 DOF)
Travel - XY150 mm (+/- 75 mm)
Travel - Z20 mm (+ 20 mm/- 0 mm)
Travel - Pitch & Roll  +/- 11 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)399 mm x 350 mm x 308.9 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.5 arc-sec +/- 0.3 arc-sec
Yaw +/- 0.5 arc-sec +/- 0.3 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY< 20  nm
Z< 20  nm
Pitch And Roll< 0.1 arc-sec
Yaw< 0.1 arc-sec
Yaw RunoutAxial Runout12 µm9 µm6 µm
Radial Runout12 µm9 µm6 µm
Wobble25 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll#colspan#~0.01 arc-sec
Yaw0.02 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.5 m/s
Max Linear Acceleration [3]0.4 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload5 kg
Assembly Mass34 kg
ModelAI-HH-100XY-24Z-56R-MS
StageHybrid Hexapod (6 DOF)
Travel - XY100 mm (+/- 50 mm)
Travel - Z12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)262.5 mm x 246 mm x 250.8 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z#colspan#  < 20  nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.02 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.5 m/s
Max Linear Acceleration [3]0.5 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload2.5 kg
Assembly Mass20 kg
ModelAI-HH-100XY-24Z-56R-CM,MS
StageHybrid Hexapod (6 DOF)
Travel - XY100 mm (+/- 50 mm)
Travel - Z12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)262.5 mm x 246 mm x 218.8 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)

Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder

Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z  < 20  nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.02 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.05 m/s
Max Linear Acceleration [3]0.1 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload2.5 kg
Assembly Mass13.1 kg
ModelAI-HH-100XY-24Z-56R
StageHybrid Hexapod (6 DOF)
Travel - XY100 mm (+/- 50 mm)
Travel - Z12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll  +/- 11 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)244 mm x 244 mm x 233.8 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)

Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder

Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z  < 20  nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.02 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.05 m/s
Max Linear Acceleration [3]0.5 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload2.5 kg
Assembly Mass18.4 kg
ModelAI-HH-100XY-6Z-56R-CM
StageHybrid Hexapod (6 DOF)
Travel - XY100 mm (+/- 50 mm)
Travel - Z6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll  +/- 3 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)200 mm x 184 mm x 200.5 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z  < 20  nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096
Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.03 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.05 m/s
Max Linear Acceleration [3]0.1 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload2 kg
Assembly Mass10 kg
ModelAI-HH-100XY-6Z-56R
StageHybrid Hexapod (6 DOF)
Travel - XY100 mm (+/- 50 mm)
Travel - Z6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll  +/- 3 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)244 mm x 244 mm x 220.5 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z  < 20  nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.03 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.4 m/s
Max Linear Acceleration [3]0.5 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload2 kg
Assembly Mass17.2 kg
ModelAI-LM-20000-Z-ABCB
StageVertical Z Stage
Travel200mm (+/- 100mm)
Dimensions (Length x Width x Height)230mm x 50mm x 484mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceAir Bearing Pneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 3.0 µm +/- 2.0 µm +/- 1.5 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Max Velocity [3]0.25 m/s
Max Peak Acceleration [3]2.5 G
Max Payload Capability25 kg
Assembly Mass9.3 kg
ModelAI-LM-15000-Z-ABCB-HF
StageVertical Z Stage
Travel150mm (+/- 75mm)
Dimensions (Length x Width x Height)215mm x 50mm x 353mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceAir Bearing Pneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 0.7 µm +/- 0.4 µm
Bidirectional Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 2.5 µm +/- 1.5 µm +/- 1.2 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Max Velocity [3]0.25 m/s
Max Peak Acceleration [3]4.0 G
Max Payload Capability25 kg
Assembly Mass6.5 kg
ModelAI-LM-15000-Z-ABCB
StageVertical Z Stage
Travel150mm (+/- 75mm)
Dimensions (Length x Width x Height)200mm x 50mm x 353mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceAir Bearing Pneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 0.7 µm +/- 0.4 µm
Bidirectional Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 2.5 µm +/- 1.5 µm +/- 1.2 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Max Velocity [3]0.25 m/s
Max Peak Acceleration [3]2.5 G
Max Payload Capability25 kg
Assembly Mass5.6 kg
ModelAI-LM-10000-Z-ABCB-HF
StageVertical Z Stage
Travel100mm (+/- 50mm)
Dimensions (Length x Width x Height)215mm x 50mm x 323mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceAir Bearing Pneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 0.7 µm +/- 0.3 µm
Bidirectional Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 2.5 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch [2] +/- 10.0 arc-sec
Yaw +/- 10.0 arc-sec
Roll +/- 6.0 arc-sec
Max Velocity [3]0.25 m/s
Max Peak Acceleration [3]4.5 G
Max Payload Capability25 kg
Assembly Mass5.9 kg
ModelAI-LM-10000-Z-ABCB
StageVertical Z Stage
Travel100mm (+/- 50mm)
Dimensions (Length x Width x Height)183.5mm x 50mm x 323mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceAir Bearing Pneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 0.7 µm +/- 0.3 µm
Bidirectional Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 2.5 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch [2] +/- 10.0 arc-sec
Yaw +/- 10.0 arc-sec
Roll +/- 6.0 arc-sec
Max Velocity [3]0.25 m/s
Max Peak Acceleration [3]3.5 G
Max Payload Capability12 kg
Assembly Mass4.7 kg
ModelAI-LM-6000-Z-ABCB
StageVertical Z Stage
Travel60mm (+/- 30mm)
Dimensions (Length x Width x Height)183.5mm x 45mm x 220mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceAir Bearing Pneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 0.5 µm +/- 0.2 µm
Bidirectional Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 2.5 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch [2] +/- 10.0 arc-sec
Yaw +/- 10.0 arc-sec
Roll +/- 6.0 arc-sec
Max Velocity [3]0.25 m/s
Max Peak Acceleration [3]2.5 G
Max Payload Capability10 kg
Assembly Mass2.9 kg
ModelAI-BSD-5000-Z
StageVertical Z Stage
Travel50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)175 mm x 100 mm 229 mm
MotorFrameless Torque Motor, Precision Ball Screw
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
BrakeStandard: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: No Brake
CounterbalanceStandard: None Needed
Optional: Pneumatic Counterbalance to Increase Payload Capability
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional Linear Repeatability +/- 125 nm+/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 4.0 µm +/- 2.0 µm
Pitch +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.1 m/s
Max Acceleration [3]1.0 G
Max Payload Capability20 kg
Max Payload Capability (With Pneuboost)50 kg
Assembly Mass7.6 kg
ModelAI-BSD-3200-Z
StageVertical Z Stage
Travel32 mm (+/- 16 mm)
Dimensions (Length x Width x Height)175 mm x 100 mm x 202 mm
MotorFrameless Torque Motor, Precision Ball Screw
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
BrakeStandard: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: No Brake
CounterbalanceStandard: None Needed
Optional: Pneumatic Counterbalance to Increase Payload Capability
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional Linear Repeatability +/- 125 nm+/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.1 m/s
Max Acceleration [3]1.0 G
Max Payload Capability20 kg
Max Payload Capability (With Pneuboost)50 kg
Assembly Mass6.9 kg
ModelAI-BSD-2400-Z
StageVertical Z Stage
Travel24 mm (+/- 12 mm)
Dimensions (Length x Width x Height)175 mm x 100 mm x 188 mm
MotorFrameless Torque Motor, Precision Ball Screw
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
BrakeStandard: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: No Brake
CounterbalanceStandard: None Needed
Optional: Pneumatic Counterbalance to Increase Payload Capability
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3 µm +/- 0.8 µm +/- 0.4 µm
Bidirectional Linear Repeatability +/- 125 nm+/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2 µm +/- 0.8 µm +/- 0.4 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.1 m/s
Max Acceleration [3]1.0 G
Max Payload Capability20 kg
Max Payload Capability (With Pneuboost)50 kg
Assembly Mass6.6 kg
ModelAI-LM-17000-("PAYLOAD")-Z-MCB-BASE
StageVertical Z Stage
Travel170 mm (+/- 85 mm)
Payload Options20 N, 30 N, 40 N, 50 N, or 60 N
Dimensions (Length x Width x Height)262 mm x 50 mm x 340 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 2.0 µm +/- 0.4 µm
Bidirectional Linear Repeatability +/- 75 nm +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5.0 µm +/- 2.0 µm +/- 1.5 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm +/- 1.5 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll18 arc-sec
Max Velocity [3]1 m/s
Max Acceleration [3]2.0 G
Payload (Nominal)20 N30 N40 N50 N60 N
Minimum To Maximum Payload Range15-25 N25-35 N35-45 N45-55 N55-65 N
Assembly Mass13.8 kg
ModelAI-LM-5000-("PAYLOAD")-Z-MCB-("ORIENTATION")
StageVertical Z Stage
Travel50 mm (+/- 25 mm)
Payload Options30 N, 50 N, 60 N, 70 N, 80 N, or 90 N
Dimensions (Length x Width x Height)182 mm x 106 mm x 176 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Stainless Steel
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 7 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional Linear Repeatability +/- 100 nm +/- 75 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 3.0 µm
Flatness [2] +/- 6.0 µm +/- 3.0 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll15 arc-sec
Max Velocity [3]0.05 m/s
Payload (Nominal)30 N, 50 N, 60 N, 70 N, 80 N, or 90 N50 N60 N70 N80 N90 N
Minimum To Maximum Payload Range24-36 N44-56 N54-66 N64-76 N74-86 N84-96 N
Assembly Mass7.1 kg
Moving Mass3.3 kg
ModelAI-LM-5000-("PAYLOAD")-Z-MCB-("ORIENTATION")
StageVertical Z Stage
Travel50 mm (+/- 25 mm)
Payload Options2 N, 8 N, 14 N, 19 N, or 24 N
Dimensions (Length x Width x Height)165 mm x 96 mm x 156 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Stainless Steel
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 7 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional Linear Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5.0 µm +/- 2.5 µm
Flatness [2] +/- 5.0 µm +/- 2.5 µm
Pitch14 arc-sec
Yaw14 arc-sec
Roll14 arc-sec
Max Velocity [3]0.1 m/s
Payload (Nominal) --2 N8 N14 N19 N24 N
Minimum To Maximum Payload Range --0-6 N4-12 N10-18 N15-23 N18-30 N
Assembly Mass5.2 kg
Moving Mass2.1 kg
ModelAI-LM-2400-("PAYLOAD")-Z-MCB-("ORIENTATION")
StageVertical Z Stage
Travel24 mm (+/-12 mm)
Payload Options2 N, 8 N, 14 N, 19 N, or 24 N
Dimensions (Length x Width x Height)165 mm x 96 mm x 130 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Stainless Steel
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 0.7 µm +/- 0.3 µm
Bidirectional Linear Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.0 µm +/- 2.0 µm
Flatness [2] +/- 3.0 µm +/- 2.0 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll10 arc-sec
Max Velocity [3]0.1 m/s
Payload (Nominal) --2 N8 N14 N19 N24 N
Minimum To Maximum Payload Range --0-6 N4-12 N10-18 N15-23 N18-30 N
Assembly Mass4.6 kg
Moving Mass2 kg
ModelAI-LM-7000-50N-Z-CB
StageVertical Z Stage
Travel70 mm (+ 70 mm/- 0 mm)
Dimensions (Length x Width x Height)175 mm x 125 mm x 250 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional Linear Repeatability +/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 4.0 µm +/- 2.0 µm
Pitch +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.25 m/s
Max Acceleration [3]1.0 G
Max Payload Capability30 kg
Force50 N
Assembly Mass13.0 kg
ModelAI-LM-6000-50N-Z-CB
StageVertical Z Stage
Travel60 mm (+ 60 mm/- 0 mm)
Dimensions (Length x Width x Height)175 mm x 125 mm x 235 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional Linear Repeatability +/- 75 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch +/- 12 arc-sec
Yaw +/- 12 arc-sec
Roll +/- 12 arc-sec
Max Velocity [3]0.25 m/s
Max Acceleration [3]1.0 G
Max Payload Capability20 kg
Force50 N
Assembly Mass12.3 kg
ModelAI-VC-2400-120N-Z-CB
StageVertical Z Stage
Travel24 mm (+ 24 mm/- 0 mm)
Dimensions (Length x Width x Height)175 mm x 125 mm x 170 mm
MotorVoice Coil Motor (VC)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3 µm +/- 0.8 µm +/- 0.4 µm
Bidirectional Linear Repeatability +/- 75 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2 µm +/- 0.8 µm +/- 0.4 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch +/- 10 arc-sec
Yaw +/- 10 arc-sec
Roll +/- 10 arc-sec
Max Velocity [3]0.25 m/s
Max Acceleration [3]1.0 G
Max Payload Capability16 kg
Force120 N
Assembly Mass8.0 kg
ModelAI-LM-5000-15N-Z-CB
StageVertical Z Stage
Travel50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)165 mm x 96 mm x 136 mm
DriveDirect Drive Ironless Core Linear Motor
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 8.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional Linear Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X +/- 5.0 µm +/- 2.5 µm
Flatness [2] +/- 5.0 µm +/- 2.5 µm
Pitch [2] +/- 12.0 arc-sec
Yaw +/- 12.0 arc-sec
Roll +/- 12.0 arc-sec
Max Velocity [3]0.2 m/s
Max Peak Acceleration [3]1.5 G
Max Payload Capability10 kg
Force15 N
Assembly Mass4.4 kg
ModelAI-LM-3000-47N-Z-CB
StageVertical Z Stage
Travel30 mm (+/- 15 mm)
Dimensions (Length x Width x Height)165 mm x 96 mm x 136 mm
DriveDirect Drive Ironless Core Linear Motor
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 6.0 µm +/- 0.8 µm +/- 0.5 µm
Bidirectional Linear Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X +/- 4.0 µm +/- 2.0 µm
Flatness [2] +/- 4.0 µm +/- 2.0 µm
Pitch [2] +/- 10.0  arc-sec
Yaw +/- 10.0  arc-sec
Roll +/- 10.0  arc-sec
Max Velocity [3]0.2 m/s
Max Peak Acceleration [3]3.0 G
Max Payload Capability10 kg
Force47 N
Assembly Mass4.4 kg
ModelAI-VC-2400-11N-Z-CB
StageVertical Z Stage
Travel24 mm (+/- 12 mm)
Dimensions (Length x Width x Height)165 mm x 96 mm x 98 mm
DriveVoice Coil Motor (VC)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5.0 µm +/- 0.7 µm +/- 0.3 µm
Bidirectional Linear Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X +/- 3.0 µm +/- 2.0 µm
Flatness [2] +/- 3.0 µm +/- 2.0 µm
Pitch [2] +/- 10.0  arc-sec
Yaw +/- 10.0  arc-sec
Roll +/- 10.0  arc-sec
Max Velocity [3]0.1 m/s
Max Peak Acceleration [3]1.0 G
Max Payload Capability10 kg
Force11 N
Assembly Mass3.6 kg
ModelAI-VC-600-24N-Z-CB
StageVertical Z Stage
Travel6 mm (+/- 3 mm)
Dimensions (Length x Width x Height)165 mm x 96 mm x 98 mm
DriveVoice Coil Motor (VC)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 0.5 µm +/- 0.2 µm
Bidirectional Linear Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 1.5 µm +/- 1.0 µm
Pitch [2] +/- 10.0  arc-sec
Yaw +/- 10.0  arc-sec
Roll +/- 10.0  arc-sec
Max Velocity [3]0.1 m/s
Max Peak Acceleration [3]2.5 G
Max Payload Capability10 kg
Force24 N
Assembly Mass3.6 kg
ModelAI-LM-300x200-XY
StageMonolithic XY Stage
(Asymmetrical)
Travel - X300 mm (+/- 150 mm)
Travel - Y200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
500 mm x 336 mm x 100mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 5 µm +/- 2 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Orthogonality20 arc-sec5 arc-sec1 arc-sec
Max Velocity
[3]
1 m/s
Max
Acceleration [3]
0.7 G
Max Payload
Capability
30 kg
Assembly Mass28 kg
ModelAI-SLM-395x320-XY
StageMonolithic XY Stage
(Asymmetrical)
Travel - X395 mm
Travel - Y320 mm
Dimensions
(Length X Width X Height)
672 mm x 525 mm x 145 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
STDULTRANANO
Linear
Displacement Accuracy
+/- 5.0 µm+/- 2.0 µm+/- 1.0 µm
Bidirectional
Linear Repeatability
+/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness+/- 5.0 µm+/- 2.0 µm+/- 1.0 µm
Flatness [2]+/- 10.0 µm+/- 5.0 µm+/- 2.0 µm
Pitch [2]+/- 18.0 arc-sec+/- 18.0 arc-sec+/- 10.0 arc-sec
Yaw+/- 18.0 arc-sec+/- 18.0 arc-sec+/- 10.0 arc-sec
Roll+/- 10.0 arc-sec+/- 10.0 arc-sec+/- 10.0 arc-sec
Orthogonality+/- 20.0 arc-sec+/- 5.0 arc-sec+/- 2.0 arc-sec
Max Velocity
[3]
1.5 m/s
Max Peak
Acceleration [3]
0.59 G
Max Payload
Capability
200 kg
Assembly Mass98 kg
ModelAI-LM-160x100-XY
StageMonolithic XY Stage
(Asymmetrical)
Travel - X160 mm (+/- 80 mm)
Travel - Y100 mm (+/- 50 mm)
Dimensions
(Length X Width X Height)
275 mm x 175 mm x 80 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm +/- 0.7 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1.0 µm +/- 0.7 µm +/- 0.4 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 7.5 arc-sec
Yaw +/- 7.5 arc-sec
Roll +/- 4.0 arc-sec
Orthogonality +/- 10.0 arc-sec +/- 2.5 arc-sec +/- 0.5 arc-sec
Max Velocity
[3]
1 m/s
Max Peak
Acceleration [3]
1.5 G
Max Payload
Capability
25 kg
Assembly Mass11.4 kg
ModelAI-VBS-20000
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
492 mm x 154 mm x 50 mm
Brake OptionsStandard: No Brake

Optional: Pneumatic Release, Spring Engage Brake (-PBRK)

Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk)
Dimensions (Length x Width x Height)
524 mm x 154 mm x 50 mm
(-Ebrk)
Dimensions (Length x Width x Height)
571 mm x 154 mm x 50 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 4 µm +/- 1.0 µm +/- 0.4 µm
Backlash0 nm
Bidirectional
Linear Repeatability
 +/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 4 µm +/- 3 µm
Flatness [2] +/- 5.0 µm +/- 3.0 µm
Pitch [2]+/- 15 arc-sec
Yaw+/- 15 arc-sec
Roll+/- 15 arc-sec
Max Velocity
[3]
0.3 m/s
Max Peak
Acceleration [3]
1.0 G
Max Payload
Capability

W/ Axis Oriented Horizontal
25 kg
Max Payload
Capability

W/ Axis Oriented Vertical
12 kg
Assembly Mass8 kg
ModelAI-VBS-15000
StageLinear Stage
Travel150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
370 mm x 120 mm x 50 mm
Brake OptionsStandard: No Brake

Optional: Pneumatic Release, Spring Engage Brake (-PBRK)

Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk)
Dimensions (Length x Width x Height)
404 mm x 120 mm x 50 mm
(-Ebrk)
Dimensions (Length x Width x Height)
452 mm x 120 mm x 50 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm +/- 1.0 µm +/- 0.4 µm
Backlash0 nm
Bidirectional
Linear Repeatability
 +/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.5 µm +/- 2.5 µm +/- 1.5 µm
Flatness [2] +/- 4.0 µm +/- 2.0 µm
Pitch [2]+/- 15 arc-sec
Yaw+/- 15 arc-sec
Roll+/- 15 arc-sec
Max Velocity
[3]
0.3 m/s
Max Peak
Acceleration [3]
1.0 G
Max Payload
Capability

W/ Axis Oriented Horizontal
25 kg
Max Payload
Capability

W/ Axis Oriented Vertical
12 kg
Assembly Mass4.6 kg
ModelAI-VBS-10000
StageLinear Stage
Travel100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
295 mm x 120 mm x 50 mm
Brake OptionsStandard: No Brake

Optional: Pneumatic Release, Spring Engage Brake (-PBRK)

Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk)
Dimensions (Length x Width x Height)
329 mm x 120 mm x 50 mm
(-Ebrk)
Dimensions (Length x Width x Height)
377 mm x 120 mm x 50 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm +/- 1.0 µm +/- 0.3 µm
Backlash0 nm
Bidirectional
Linear Repeatability
 +/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.5 µm +/- 1.5 µm +/- 1.2 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2]+/- 15 arc-sec
Yaw+/- 15 arc-sec
Roll+/- 15 arc-sec
Max Velocity
[3]
0.3 m/s
Max Peak
Acceleration [3]
1.0 G
Max Payload
Capability

W/ Axis Oriented Horizontal
25 kg
Max Payload
Capability

W/ Axis Oriented Vertical
12 kg
Assembly Mass3.8 kg
ModelAI-VBS-6000
StageLinear Stage
Travel60 mm (+/- 30 mm)
Dimensions
(Length x Width x Height)
225 mm x 120 mm x 50 mm
Brake OptionsStandard: No Brake

Optional: Pneumatic Release, Spring Engage Brake (-PBRK)

Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk)
Dimensions (Length x Width x Height)
259 mm x 120 mm x 50 mm
(-Ebrk)
Dimensions (Length x Width x Height)
307 mm x 120 mm x 50 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm +/- 0.7 µm +/- 0.3 µm
Backlash0 nm
Bidirectional
Linear Repeatability
 +/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.5 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 2.5 µm +/- 1.5 µm
Pitch [2]+/- 15 arc-sec
Yaw+/- 15 arc-sec
Roll+/- 15 arc-sec
Max Velocity
[3]
0.3 m/s
Max Peak
Acceleration [3]
1.0 G
Max Payload Capability

W/ Axis Oriented Horizontal
20 kg
Max Payload Capability

W/ Axis Oriented Vertical
12 kg
Assembly Mass3 kg
ModelAI-CM-25000-250-XY
StageMonolithic XY Stage with
Open Center
Travel250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)468.5 mm x 468.5 mm x 80 mm
Aperture /
Thru
250 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.2 µm +/- 0.7 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 1.2 µm +/- 0.7 µm
Flatness [2] +/- 4.0 µm +/- 3.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Orthogonality+/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.1 m/s
Bot Axis Max
Velocity [3]
0.6 m/s
Top Axis Max
Peak Acceleration [3]
1.0 G
Bot Axis Max
Peak Acceleration [3]
0.3 G
Max Payload
Capability
25 kg
Assembly Mass33 kg
ModelAI-CM-20000-200-XY
StageMonolithic XY Stage with
Open Center
Travel200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)332.5 mm x 332.5 mm x 65 mm
Aperture /
Thru
200 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.2 µm +/- 0.7 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 1.2 µm +/- 0.7 µm
Flatness [2] +/- 4.0 µm +/- 3.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Orthogonality+/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1 m/s
Bot Axis Max
Velocity [3]
0.6 m/s
Top Axis Max
Peak Acceleration [3]
1.0 G
Bot Axis Max
Peak Acceleration [3]
0.4 G
Max Payload
Capability
15 kg
Assembly Mass11.4 kg
ModelAI-CM-15000-150-XY
StageMonolithic XY Stage with
Open Center
Travel150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)282.5 mm x 282.5 mm x 52 mm
Aperture /
Thru
150 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 4.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Orthogonality+/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
0.9 m/s
Bot Axis Max
Velocity [3]
0.5 m/s
Top Axis Max
Peak Acceleration [3]
1.2 G
Bot Axis Max
Peak Acceleration [3]
0.4 G
Max Payload
Capability
12 kg
Assembly Mass7.4 kg
ModelAI-CM-10000-100-XY
StageMonolithic XY Stage with
Open Center
Travel100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)229.5 mm x 229.5 mm x 52 mm
Aperture /
Thru
100 mm
MotorDirect Drive (Ironless Core
Linear Motor)
FeedbackNon-Contact Optical Linear
Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m
Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 4.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.0 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 12.0 arc-sec
Yaw +/- 12.0 arc-sec
Roll +/- 12.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
0.8 m/s
Bot Axis Max
Velocity [3]
0.5 m/s
Top Axis Max
Peak Acceleration [3]
1.6 G
Bot Axis Max
Peak Acceleration [3]
0.6 G
Max Payload
Capability
12 kg
Assembly Mass5.6 kg
ModelAI-CM-5000-050-XY
StageMonolithic XY Stage with
Open Center
Travel60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)179.5 mm x 179.5 mm x 45 mm
Aperture /
Thru
50 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 0.7 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.0 µm +/- 0.7 µm +/- 0.4 µm
Flatness [2] +/- 2.5 µm +/- 1.5 µm
Pitch [2] +/- 12.0 arc-sec
Yaw +/- 12.0 arc-sec
Roll +/- 12.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
0.8 m/s
Bot Axis Max
Velocity [3]
0.5 m/s
Top Axis Max
Peak Acceleration [3]
3.0 G
Bot Axis Max
Peak Acceleration [3]
1.0 G
Max Payload
Capability
10 kg
Assembly Mass3.2 kg
ModelAI-CM-3000-030-XY
StageMonolithic XY Stage with
Open Center
Travel30 mm (+/- 15 mm)
Dimensions (Length x Width x Height)140 mm x 140 mm x 45 mm
Aperture /
Thru
30 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 0.5 µm +/- 0.3 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.0 µm +/- 0.5 µm +/- 0.3 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch [2] +/- 12.0 arc-sec
Yaw +/- 12.0 arc-sec
Roll +/- 12.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
0.8 m/s
Bot Axis Max
Velocity [3]
0.5 m/s
Top Axis Max
Peak Acceleration [3]
5.0 G
Bot Axis Max
Peak Acceleration [3]
1.8 G
Max Payload
Capability
8 kg
Assembly Mass1.9 kg
ModelAI-CM-30000-XY
StageMonolithic XY Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
500 mm x 500 mm x 100 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 6.0 µm +/- 1.0 µm +/- 0.6 µm
Bidirectional
Linear Repeatability
 +/- 30
ResolutionStandard:
~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 10.0 µm +/- 2.0 µm +/- 1.0 µm
Flatness [2] +/- 8.0 µm +/- 5.0 µm
Pitch [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 18.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
0.7 m/s
Bot Axis Max
Velocity [3]
0.3
Top Axis Max
Peak Acceleration [3]
0.4 G
Bot Axis Max
Peak Acceleration [3]
0.1
Max Payload
Capability
35 kg
Assembly Mass69 kg
ModelAI-CM-25000-XY
StageMonolithic XY Stage
Travel250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
400 mm x 400 mm x 100 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 30
ResolutionStandard:
~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 2.0 µm +/- 1.0 µm
Flatness [2] +/- 6.0 µm +/- 4.0 µm
Pitch [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 18.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
0.8 m/s
Bot Axis Max
Velocity [3]
0.5
Top Axis Max
Peak Acceleration [3]
0.6 G
Bot Axis Max
Peak Acceleration [3]
0.2 G
Max Payload
Capability
25 kg
Assembly Mass48 kg
ModelAI-CM-20000-XY
StageMonolithic XY Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
275 mm x 275 mm x 60 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 4.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30
ResolutionStandard:
~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 1.0 µm +/- 0.4 µm
Flatness [2] +/- 4.0 µm +/- 3.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1 m/s
Bot Axis Max
Velocity [3]
0.6
Top Axis Max
Peak Acceleration [3]
1.0 G
Bot Axis Max
Peak Acceleration [3]
0.4 G
Max Payload
Capability
15 kg
Assembly Mass12 kg
ModelAI-CM-15000-XY
StageMonolithic XY Stage
Travel150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
225 mm x 225 mm x 60 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30
ResolutionStandard:
~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.0 µm +/- 1.0 µm +/- 0.4 µm
Flatness [2] +/- 4.0 µm +/- 2.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
0.8 m/s
Bot Axis Max
Velocity [3]
0.5 m/s
Top Axis Max
Peak Acceleration [3]
1.0 G
Bot Axis Max
Peak Acceleration [3]
0.4 G
Max Payload
Capability
12 kg
Assembly Mass8.5 kg
ModelAI-CM-10000-XY
StageMonolithic XY Stage
Travel100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
184 mm x 184 mm x 60 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 1.0 µm +/- 0.3 µm
Bidirectional
Linear Repeatability
 +/- 30
ResolutionStandard:
~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.0 µm +/- 1.0 µm +/- 0.3 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 12.0 arc-sec
Yaw +/- 12.0 arc-sec
Roll +/- 12.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
0.7 m/s
Bot Axis Max
Velocity [3]
0.5 m/s
Top Axis Max
Peak Acceleration [3]
1.2 G
Bot Axis Max
Peak Acceleration [3]
0.6 G
Max Payload
Capability
12 kg
Assembly Mass5.8 kg
ModelAI-CM-6000-XY
StageMonolithic XY Stage
Travel60 mm (+/- 30 mm)
Dimensions
(Length x Width x Height)
125 mm x125 mm x 60 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed
Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized
Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 0.7 µm +/- 0.3 µm
Bidirectional
Linear Repeatability
 +/- 30
ResolutionStandard:
~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.0 µm +/- 0.7 µm +/- 0.3 µm
Flatness [2] +/- 2.5 µm +/- 1.5 µm
Pitch [2] +/- 12.0 arc-sec
Yaw +/- 12.0 arc-sec
Roll +/- 12.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
0.9 m/s
Bot Axis Max
Velocity [3]
0.6
Top Axis Max
Peak Acceleration [3]
3.0 G
Bot Axis Max
Peak Acceleration [3]
1.2 G
Max Payload
Capability
10 kg
Assembly Mass2.9 kg
ModelAI-CM-3000-XY
StageMonolithic XY Stage
Travel30 mm (+/- 15 mm)
Dimensions
(Length x Width x Height)
112 mm x 112 mm x 50 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized
Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 0.5 µm +/- 0.2 µm
Bidirectional
Linear Repeatability
 +/- 30
ResolutionStandard:
~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1.0 µm +/- 0.5 µm +/- 0.2 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch [2] +/- 12.0 arc-sec
Yaw +/- 12.0 arc-sec
Roll +/- 12.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
0.7 m/s
Bot Axis Max
Velocity [3]
0.5
Top Axis Max
Peak Acceleration [3]
4.0 G
Bot Axis Max
Peak Acceleration [3]
2.0 G
Max Payload
Capability
8 kg
Assembly Mass1.6 kg
ModelAI-CM-30000
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
506 mm x 120 mm x 48 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 6.0 µm +/- 1.0 µm +/- 0.6 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8.0 µm +/- 6.0 µm +/- 4.0 µm
Flatness [2] +/- 8.0 µm +/- 5.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Max Velocity
[3]
Depending on application - Ask ALIO
Max
Acceleration [3]
Depending on application - Ask ALIO
Max Payload
Capability
Depending on application - Ask ALIO
Assembly MassDepending on application - Ask ALIO
ModelAI-CM-25000
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
404 mm x 154 mm x 48 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 4.0 µm +/- 3.0 µm
Flatness [2] +/- 6.0 µm +/- 4.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Max Velocity
[3]
Depending on application - Ask ALIO
Max
Acceleration [3]
Depending on application - Ask ALIO
Max Payload
Capability
Depending on application - Ask ALIO
Assembly MassDepending on application - Ask ALIO
ModelAI-CM-20000
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
279 mm x 120 mm x 32 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 4.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5.0 µm +/- 4.0 µm +/- 3.0 µm
Flatness [2] +/- 5.0 µm +/- 3.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Max Velocity
[3]
1.4 m/s
Max
Acceleration [3]
2.0 G
Max Payload
Capability
12 kg
Assembly Mass3.2 kg
ModelAI-CM-15000
StageLinear Stage
Travel 150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
229 mm x 120 mm x 32 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.5 µm +/- 2.5 µm +/- 1.5 µm
Flatness [2] +/- 4.0 µm +/- 2.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Max Velocity
[3]
1.1 m/s
Max
Acceleration [3]
1.8 G
Max Payload
Capability
12 kg
Assembly Mass2.5 kg
ModelAI-CM-10000
StageLinear Stage
Travel100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
190 mm x 120 mm x 32 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 1.0 µm +/- 0.3 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.5 µm +/- 1.5 µm +/- 1.2 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 12.0 arc-sec
Yaw +/- 12.0 arc-sec
Roll +/- 12.0 arc-sec
Max Velocity
[3]
1 m/s
Max
Acceleration [3]
2.0 G
Max Payload
Capability
12 kg
Assembly Mass2.2 kg
ModelAI-CM-6000
StageLinear Stage
Travel60 mm (+/- 30 mm)
Dimensions
(Length x Width x Height)
130 mm x 120 mm x 32 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.5 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 2.5 µm +/- 1.5 µm
Pitch [2] +/- 12.0 arc-sec
Yaw +/- 12.0 arc-sec
Roll +/- 12.0 arc-sec
Max Velocity
[3]
0.9 m/s
Max
Acceleration [3]
3.0 G
Max Payload
Capability
10 kg
Assembly Mass1.4 kg
ModelAI-CM-3000
StageLinear Stage
Travel 30 mm (+/- 15 mm)
Dimensions
(Length x Width x Height)
104 mm x 120 mm x 32 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 0.5 µm +/- 0.2 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.5 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch [2] +/- 12.0 arc-sec
Yaw +/- 12.0 arc-sec
Roll +/- 12.0 arc-sec
Max Velocity
[3]
0.7 m/s
Max
Acceleration [3]
4.0 G
Max Payload
Capability
8 kg
Assembly Mass1.1 kg
ModelAI-LM-30000
StageLinear Stage
Travel 300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
506 mm x 178 mm x 55 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.0 µm +/- 0.6 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 4.5 µm +/- 3.0 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm
Pitch Y [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 10.0 arc-sec
Max Velocity
[3]
2.4 m/s
Max
Acceleration [3]
4.0 G
Max Payload
Capability
50 kg
Assembly Mass15.2 kg
ModelAI-LM-25000
StageLinear Stage
Travel 250 mm (+ /-125 mm)
Dimensions
(Length x Width x Height)
404 mm x 154 mm x 55 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 3.0 µm +/- 2.0 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm
Pitch Y [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 10.0 arc-sec
Max Velocity
[3]
2.5 m/s
Max
Acceleration [3]
5.0 G
Max Payload
Capability
40 kg
Assembly Mass9.4 kg
ModelAI-LM-20000
StageLinear Stage
Travel 200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
340 mm x 154 mm x 46 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.0 µm +/- 2.0 µm +/- 1.5 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch Y [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Max Velocity
[3]
2.4 m/s
Max
Acceleration [3]
6.0 G
Max Payload
Capability
30 kg
Assembly Mass7.8 kg
ModelAI-LM-15000
StageLinear Stage
Travel 150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
275 mm x 120 mm x 45 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 0.7 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.5 µm +/- 1.5 µm +/- 1.2 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch Y [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Max Velocity
[3]
2.1 m/s
Max
Acceleration [3]
6.0 G
Max Payload
Capability
25 kg
Assembly Mass4.4 kg
ModelAI-LM-10000
StageLinear Stage
Travel 100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
244 mm x 120 mm x 45 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 0.7 µm +/- 0.3 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.5 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch Y [2] +/- 10.0 arc-sec
Yaw +/- 10.0 arc-sec
Roll +/- 6.0 arc-sec
Max Velocity
[3]
1.8 m/s
Max
Acceleration [3]
7.0 G
Max Payload
Capability
25 kg
Assembly Mass4 kg
ModelAI-LM-6000
StageLinear Stage
Travel 60 mm (+/- 30 mm)
Dimensions
(Length x Width x Height)
168 mm x 120 mm x 40 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 0.5 µm +/- 0.2 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard:
~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.5 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch Y [2] +/- 10.0 arc-sec
Yaw +/- 10.0 arc-sec
Roll +/- 6.0 arc-sec
Max Velocity
[3]
1.2 m/s
Max
Acceleration [3]
5.0 G
Max Payload
Capability
20 kg
Assembly Mass2.2 kg
ModelAI-LM-40000-400-XY
StageMonolithic XY Stage with Open Center
Travel 400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
650 mm x 650 mm x 120 mm
Aperture /
Thru
400 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 16.0 µm +/- 2.5 µm +/- 1.5 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 10.0 µm +/- 2.5 µm +/- 1.5 µm
Flatness [2] +/- 12.0 µm +/- 5.0 µm
Pitch [2] +/- 20.0 arc-sec
Yaw +/- 20.0 arc-sec
Roll +/- 20.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.8 m/s
Bot Axis Max
Velocity [3]
1.0 m/s
Top Axis Max
Peak Acceleration [3]
1.8 G
Top Axis Max
Peak Acceleration [3]
0.6 G
Max Payload
Capability
50 kg
Assembly Mass104 kg
ModelAI-LM-35000-350-XY
StageMonolithic XY Stage with Open Center
Travel350 mm (+/- 175 mm)
Dimensions
(Length x Width x Height)
550 mm x 550 mm x 120 mm
Aperture /
Thru
350 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 10.0 µm +/- 2.0 µm +/- 1.5 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 2.0 µm +/- 1.5 µm
Flatness [2] +/- 10.0 µm +/- 4.0 µm
Pitch [2] +/- 20.0 arc-sec
Yaw +/- 20.0 arc-sec
Roll +/- 20.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.8 m/s
Bot Axis Max
Velocity [3]
1.1 m/s
Top Axis Max
Peak Acceleration [3]
2.0 G
Top Axis Max
Peak Acceleration [3]
0.8 G
Max Payload
Capability
50 kg
Assembly Mass64 kg
ModelAI-LM-30000-300-XY
StageMonolithic XY Stage with Open Center
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
500 mm x 500 mm x 120 mm
Aperture /
Thru
300 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8.0 µm +/- 1.5 µm +/- 1.0 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5.0 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 6.0 µm +/- 3.0 µm
Pitch [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 18.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.7 m/s
Bot Axis Max
Velocity [3]
1.2 m/s
Top Axis Max
Peak Acceleration [3]
2.0 G
Top Axis Max
Peak Acceleration [3]
1.0 G
Max Payload
Capability
50 kg
Assembly Mass58 kg
ModelAI-LM-25000-250-XY
StageMonolithic XY Stage with Open Center
Travel 250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)460 mm x 460 mm x 95 mm
Aperture / Thru250 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 6.0 µm +/- 1.5 µm +/- 1.0 µm
Bidirectional Linear Repeatability +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm
Pitch [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 18.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max Velocity [3]1.9 m/s
Bot Axis Max Velocity [3]1.3 m/s
Top Axis Max Peak Acceleration [3]3.0 G
Top Axis Max Peak Acceleration [3]1.4 G
Max Payload Capability40 kg
Assembly Mass37 kg
ModelAI-LM-20000-200-XY
StageMonolithic XY Stage with Open Center
Travel 200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
392 mm x 392 mm x 80 mm
Aperture /
Thru
200 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 6.0 µm +/- 1.5 µm +/- 0.8 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.0 µm +/- 1.5 µm +/- 0.8 µm
Flatness [2] +/- 4.0 µm +/- 2.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
2 m/s
Bot Axis Max
Velocity [3]
1.1 m/s
Top Axis Max
Peak Acceleration [3]
4.0 G
Top Axis Max
Peak Acceleration [3]
1.4 G
Max Payload
Capability
30 kg
Assembly Mass23 kg
ModelAI-LM-15000-150-XY
StageMonolithic XY Stage with Open Center
Travel 150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
326.5 mm x 326.5 mm x 68 mm
Aperture /
Thru
150 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 4.0 µm +/- 1.2 µm +/- 0.6 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.0 µm +/- 1.2 µm +/- 0.6 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.7 m/s
Bot Axis Max
Velocity [3]
1.0  m/s
Top Axis Max
Peak Acceleration [3]
4.0 G
Top Axis Max
Peak Acceleration [3]
1.4 G
Max Payload
Capability
25 kg
Assembly Mass14 kg
ModelAI-LM-10000-100-XY
StageMonolithic XY Stage with Open Center
Travel100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
230 mm x 230 mm x 64 mm
Aperture /
Thru
100 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 4.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.0 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch [2] +/- 10.0 arc-sec
Yaw +/- 10.0 arc-sec
Roll +/- 10.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.4 m/s
Bot Axis Max
Velocity [3]
0.8 m/s
Top Axis Max
Peak Acceleration [3]
4.0 G
Top Axis Max
Peak Acceleration [3]
1.6 G
Max Payload
Capability
25 kg
Assembly Mass6.5 kg
ModelAI-LM-45000-XY
StageMonolithic XY Stage
Travel450 mm (+/- 225 mm)
Dimensions
(Length x Width x Height)
650 mm x 650 mm x 115 mm
DriveDirect Drive (Ironless Core
Linear Motor)
FeedbackNon-Contact Optical Linear
Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12.0 µm +/- 1.5 µm +/- 1.0 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 16.0 µm +/- 8.0 µm
Pitch [2] +/- 20.0 arc-sec
Yaw +/- 20.0 arc-sec
Roll +/- 14.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.7 m/s
Bot Axis Max
Velocity [3]
1 m/s
Top Axis Max
Peak Acceleration [3]
1.4 G
Bot Axis Max
Peak Acceleration [3]
0.5 G
Max Payload
Capability
80 kg
Assembly Mass135 kg
ModelAI-LM-40000-XY
StageMonolithic XY Stage
Travel400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
650 mm x 650 mm x 115 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12.0 µm +/- 1.5 µm +/- 1.0 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 16.0 µm +/- 8.0 µm
Pitch [2] +/- 20.0 arc-sec
Yaw +/- 20.0 arc-sec
Roll +/- 14.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.6 m/s
Bot Axis Max
Velocity [3]
1 m/s
Top Axis Max
Peak Acceleration [3]
1.4 G
Bot Axis Max
Peak Acceleration [3]
0.5 G
Max Payload
Capability
80 kg
Assembly Mass135 kg
ModelAI-LM-35000-XY
StageMonolithic XY Stage
Travel 350 mm (+/- 175 mm)
Dimensions
(Length x Width x Height)
500 mm x 500 mm x 115 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8.0 µm +/- 1.5 µm +/- 0.8 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 1.5 µm +/- 0.8 µm
Flatness [2] +/- 8.0 µm +/- 4.0 µm
Pitch [2] +/- 20.0 arc-sec
Yaw +/- 20.0 arc-sec
Roll +/- 14.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.7 m/s
Bot Axis Max
Velocity [3]
1.1 m/s
Top Axis Max
Peak Acceleration [3]
1.9 G
Bot Axis Max
Peak Acceleration [3]
0.7 G
Max Payload
Capability
50 kg
Assembly Mass75 kg
ModelAI-LM-30000-XY
StageMonolithic XY Stage
Travel 300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
500 mm x 500 mm x 115 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.0 µm +/- 0.6 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.0 µm +/- 1.0 µm +/- 0.6 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm
Pitch [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 10.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.6 m/s
Bot Axis Max
Velocity [3]
1 m/s
Top Axis Max
Peak Acceleration [3]
1.9 G
Bot Axis Max
Peak Acceleration [3]
0.7 G
Max Payload
Capability
50 kg
Assembly Mass75 kg
ModelAI-LM-25000-XY
StageMonolithic XY Stage
Travel 250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
400 mm x 400 mm x 115 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.0 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm
Pitch [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 10.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.5 m/s
Bot Axis Max
Velocity [3]
0.9 m/s
Top Axis Max
Peak Acceleration [3]
1.9 G
Bot Axis Max
Peak Acceleration [3]
0.7 G
Max Payload
Capability
40 kg
Assembly Mass52 kg
ModelAI-LM-20000-XY-HF
StageMonolithic XY Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
336 mm x 336 mm x 90 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1.5 µm +/- 1.0 µm +/- 0.4 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
2.0 m/s
Bot Axis Max
Velocity [3]
1.2 m/s
Top Axis Max
Peak Acceleration [3]
5.6 G
Bot Axis Max
Peak Acceleration [3]
2 G
Max Payload
Capability
30 kg
Assembly Mass28 kg
ModelAI-LM-20000-XY
StageMonolithic XY Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
336 mm x 336 mm x 90 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1.5 µm +/- 1.0 µm +/- 0.4 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.7 m/s
Bot Axis Max
Velocity [3]
1 m/s
Top Axis Max
Peak Acceleration [3]
3.0 G
Bot Axis Max
Peak Acceleration [3]
1.3 G
Max Payload
Capability
30 kg
Assembly Mass28 kg
ModelAI-LM-16000-XY
StageMonolithic XY Stage
Travel 160 mm (+/- 80 mm)
Dimensions
(Length x Width x Height)
275 mm x 275 mm x 80 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 0.7 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1.5 µm +/- 0.7 µm +/- 0.4 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.5 m/s
Bot Axis Max
Velocity [3]
1 m/s
Top Axis Max
Peak Acceleration [3]
3.0 G
Bot Axis Max
Peak Acceleration [3]
1.3 G
Max Payload
Capability
25 kg
Assembly Mass16 kg
ModelAI-LM-10000-XY
StageMonolithic XY Stage
Travel100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
244 mm x 244 mm x 80 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 0.7 µm +/- 0.3 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1.0 µm +/- 0.7 µm +/- 0.3 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch [2] +/- 10.0 arc-sec
Yaw +/- 10.0 arc-sec
Roll +/- 6.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.4 m/s
Bot Axis Max
Velocity [3]
0.8 m/s
Top Axis Max
Peak Acceleration [3]
4.0 G
Bot Axis Max
Peak Acceleration [3]
1.6 G
Max Payload
Capability
25 kg
Assembly Mass13 kg
ModelAI-LM-6000-XY
StageMonolithic XY Stage
Travel 60 mm (+/- 30 mm)
Dimensions
(Length x Width x Height)
152.5 mm x 152.5 mm x 80 mm
DriveDirect Drive (Ironless Core
Linear Motor)
FeedbackNon-Contact Optical Linear
Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 0.5 µm +/- 0.2 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1.0 µm +/- 0.5 µm +/- 0.2 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch [2] +/- 10.0 arc-sec
Yaw +/- 10.0 arc-sec
Roll +/- 6.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.2 m/s
Bot Axis Max
Velocity [3]
0.7 m/s
Top Axis Max
Peak Acceleration [3]
5.0 G
Bot Axis Max
Peak Acceleration [3]
2.0 G
Max Payload
Capability
20 kg
Assembly Mass4.7 kg
ModelAI-LM-3000-XY
StageMonolithic XY Stage
Travel30 mm ( +/- 15 mm)
Dimensions
(Length x Width x Height)
108 mm x 108 mm x 65 mm
DriveDirect Drive (Ironless Core
Linear Motor)
FeedbackNon-Contact Optical Linear
Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.0 µm +/- 0.2 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.0 µm +/- 1.0 µm +/- 0.2 µm
Flatness [2] +/- 3.0 µm +/- 1.0 µm
Pitch [2] +/- 12.0 arc-sec
Yaw +/- 12.0 arc-sec
Roll +/- 6.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.2 m/s
Bot Axis Max
Velocity [3]
0.7 m/s
Top Axis Max
Peak Acceleration [3]
11.0 G
Bot Axis Max
Peak Acceleration [3]
4.0 G
Max Payload
Capability
10 kg
Assembly Mass2.3 kg