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Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 200 mm (+/- 100 mm) Payload Capacity: Horizontal - 32kg | Vertical: 40kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 800 mm (+/- 400 mm) Payload Capacity: Horizontal - 32kg | Vertical: 40kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 250 mm (+/- 125 mm) Payload Capacity: Horizontal - 32kg | Vertical: 40kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 450 mm (+/- 225 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Cartesian Gantry Motion Type: Cartesian Gantries, Linear Motion Systems Direction: X (or Y), X and Y Travel: 900 mm (+/- 450 mm) Payload Capacity: Horizontal - 30kg | Vertical: 25kg Bidirectional Repeatability: +/- 1.0 µm
Stage: 2 Axis Rotary Gimbal Motion Type: Rotary Motion Systems Direction: Rotation Travel: Theta Z = 360 deg continuous Theta Y = +/- 100 degrees (Theta Y) Optional: up to +/- 172 deg Payload Capacity: 8 kg (+/- 4 kg or 12 kg maximum) Bidirectional Repeatability: +/- 0.4 arc-sec | +/- 0.5 arc-sec
Stage: Rotary Stage Motion Type: Air Bearing Systems, Rotary Motion Systems Direction: Rotation Travel: 360 deg continuous Payload Capacity: Arial = 8 kg | Radial = 4 kg
Stage: Cartesian Gantry Motion Type: Cartesian Gantries, Linear Motion Systems Direction: X (or Y), X and Y Travel: 700 mm (+/- 350 mm) Payload Capacity: Horizontal - 30kg | Vertical: 25kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 100 mm (+/- 50 mm) Payload Capacity: 30 kg
Stage: Rotary Stage Motion Type: Rotary Motion Systems Direction: Rotation Travel: 360 deg continuous Payload Capacity: 10 kg Bidirectional Repeatability: +/- 0.5 arc-sec | +/- 0.5 arc-sec | +/- 0.3 arc-sec
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 800 mm (+/- 400 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 600 mm (+/- 300 mm) Payload Capacity: Horizontal - 32kg | Vertical: 40kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 300 mm (+/- 150 mm) Payload Capacity: Horizontal - 32kg | Vertical: 40kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 350 mm (+/- 175 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 150 mm (+/- 75 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 200 mm (+/- 100 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 150 mm (+/- 75 mm) Payload Capacity: 25 kg Bidirectional Repeatability: +/- 30 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 600 mm (+/- 300 mm) Payload Capacity: 60kg
Stage: Rotary Stage Motion Type: Rotary Motion Systems Direction: Rotation Travel: +/- 5 deg Payload Capacity: Axial = 40 kg | Radial = 20 kg Bidirectional Repeatability: +/- 0.4 arc-sec | +/- 0.4 arc-sec | +/- 0.2 arc-sec
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 500 mm (+/- 250 mm) Payload Capacity: Horizontal - 32kg | Vertical: 40kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 400 mm (+/- 200 mm) Payload Capacity: 70 kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 400 mm (+/- 200 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 100 mm (+/- 50 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 100 mm (+/- 50 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 700 mm (+/- 350 mm) Payload Capacity: Horizontal - 32kg | Vertical: 40kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 300 mm (+/- 150 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Rotary Stage Motion Type: Rotary Motion Systems Direction: Rotation Travel: 360 deg continuous Payload Capacity: 2.5 kg Bidirectional Repeatability: +/- 1.5 arc-sec | +/- 0.5 arc-sec | +/- 0.3 arc-sec
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 150 mm (+/- 75 mm) Payload Capacity: 60kg
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 250 mm (+/- 125 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 200 mm (+/- 100 mm) Payload Capacity: 60kg
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 200 mm (+/- 100 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 400 mm (+/- 200 mm) Payload Capacity: Horizontal - 32kg | Vertical: 40kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 600 mm (+/- 300 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 1 µm / +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 100 mm (+/- 50 mm) Payload Capacity: Horizontal - 32kg | Vertical: 40kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 450 mm (+/- 225 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 500 mm (+/- 250 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Rotary Stage Motion Type: Rotary Motion Systems Direction: Rotation Travel: 360 deg continuous Payload Capacity: Axial = 50 kg | Radial = 33 kg Bidirectional Repeatability: +/- 0.5 arc-sec | +/- 0.4 arc-sec | +/- 0.2 arc-sec
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 100 mm (+/- 50 mm) Payload Capacity: 70 kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 250 mm (+ /-125 mm) Payload Capacity: 40 kg Bidirectional Repeatability: +/- 30 nm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 1000 mm (+/- 500 mm) Payload Capacity: Horizontal - 32kg | Vertical: 40kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 100 mm (+/- 50 mm) Payload Capacity: 25 kg Bidirectional Repeatability: +/- 30 nm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 700 mm (+/- 350 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 2000 mm (+/- 1000 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 1 µm / +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 1000 mm (+/- 500 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 1 µm / +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 250 mm (+/- 125 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 800 mm (+/- 400 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 1 µm / +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 150 mm (+/- 75 mm) Payload Capacity: Horizontal - 32kg | Vertical: 40kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y), Z Travel: 60 mm (+/- 30 mm) Payload Capacity: 12kg (Vertical) - 20kg (Horizontal) Bidirectional Repeatability: +/- 100 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 300 mm (+/- 150 mm) Payload Capacity: 30 kg
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 100 mm (+/- 50 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Rotary Stage Motion Type: Rotary Motion Systems Direction: Rotation Travel: 360 deg continuous Payload Capacity: 2.5 kg Bidirectional Repeatability: +/- 0.7 arc-sec | +/- 0.6 arc-sec | +/- 0.4 arc-sec
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 300 mm (+/- 150 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 200 mm (+/- 100 mm) Payload Capacity: 70 kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 300 mm (+/- 150 mm) Payload Capacity: 60kg
Stage: Cartesian Gantry Motion Type: Cartesian Gantries, Linear Motion Systems Direction: X (or Y), X and Y Travel: 800 mm (+/- 400 mm) Payload Capacity: Horizontal - 30kg | Vertical: 25kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 500 mm (+/- 250 mm) Payload Capacity: 70 kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Rotary Stage Motion Type: Rotary Motion Systems Direction: Rotation Travel: 360 deg continuous Payload Capacity: 12 kg Bidirectional Repeatability: +/- 0.6 arc-sec | +/- 0.5 arc-sec | +/- 0.3 arc-sec
Stage: Box Rail Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 1000 mm (+/- 500 mm) Payload Capacity: 100kg
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 150 mm (+/- 75 mm) Payload Capacity: 70 kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 400 mm (+/- 200 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 600 mm (+/- 300 mm) Payload Capacity: 30 kg
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 150 mm (+/- 75 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 600 mm (+/- 300 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 60 mm (+/- 30 mm) Payload Capacity: 20 kg Bidirectional Repeatability: +/- 30 nm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 200 mm (+/- 100 mm) Payload Capacity: 25 kg Bidirectional Repeatability: +/- 30 nm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 350 mm (+/- 175 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 60 mm (+/- 30 mm) Payload Capacity: 10 kg Bidirectional Repeatability: +/- 30 nm
Stage: Rotary Stage Motion Type: Rotary Motion Systems Direction: Rotation Travel: 360 deg continuous Payload Capacity: 8 kg Bidirectional Repeatability: +/- 0.5 arc-sec | +/- 0.4 arc-sec | +/- 0.2 arc-sec
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 500 mm (+/- 250 mm) Payload Capacity: 30 kg
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 200 mm (+/- 100 mm) Payload Capacity: 12 kg Bidirectional Repeatability: +/- 30 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 500 mm (+/- 250 mm) Payload Capacity: 60kg
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 400 mm (+/- 200 mm) Payload Capacity: 60kg
Stage: Cartesian Gantry Motion Type: Cartesian Gantries, Linear Motion Systems Direction: X (or Y), X and Y Travel: 600 mm (+/- 300 mm) Payload Capacity: Horizontal - 30kg | Vertical: 25kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 150 mm (+/- 75 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 200 mm (+/- 100 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 500 mm (+/- 250 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 30 mm (+/- 15 mm) Payload Capacity: 8 kg Bidirectional Repeatability: +/- 30 nm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 100 mm (+/- 50 mm) Payload Capacity: 12 kg Bidirectional Repeatability: +/- 30 nm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 250 mm (+/- 125 mm) Payload Capacity: Depending on application - Ask ALIO Bidirectional Repeatability: +/- 30 nm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 1500 mm (+/- 750 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 1 µm / +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 900 mm (+/- 450 mm) Payload Capacity: Horizontal - 32kg | Vertical: 40kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 300 mm (+/- 150 mm) Payload Capacity: Depending on application - Ask ALIO Bidirectional Repeatability: +/- 30 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 1000 mm (+/- 500 mm) Payload Capacity: 60kg
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 50 mm (+/- 25 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 300 mm (+/- 150 mm) Payload Capacity: 70 kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 150 mm (+/- 75 mm) Payload Capacity: 12 kg Bidirectional Repeatability: +/- 30 nm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 1000 mm (+/- 500 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 200 mm (+/- 100 mm) Payload Capacity: 30 kg
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 400 mm (+/- 200 mm) Payload Capacity: 30 kg
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 250 mm (+/- 125 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 500 mm (+/- 250 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 1 µm / +/- 0.5 µm
Stage: Rotary Stage Motion Type: Rotary Motion Systems Direction: Rotation Travel: 360 deg continuous Payload Capacity: Axial: 40kg | Radial = 27 kg Bidirectional Repeatability: +/- 0.5 arc-sec | +/- 0.4 arc-sec | +/- 0.3 arc-sec
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 800 mm (+/- 400 mm) Payload Capacity: 30 kg
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 150 mm (+/- 75 mm) Payload Capacity: 30 kg
Stage: Rotary Stage Motion Type: Rotary Motion Systems Direction: Rotation Travel: +/- 7.5 deg Payload Capacity: Axial = 40 kg | Radial = 20 kg Bidirectional Repeatability: +/- 0.5 arc-sec | +/- 0.4 arc-sec | +/- 0.2 arc-sec
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 500 mm (+/- 250 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Rotary Stage Motion Type: Rotary Motion Systems Direction: Rotation Travel: 360 deg continuous Payload Capacity: 20 kg Bidirectional Repeatability: +/- 0.5 arc-sec
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y), Z Travel: 100 mm (+/- 50 mm) Payload Capacity: 12kg (Vertical) - 25kg (Horizontal) Bidirectional Repeatability: +/- 100 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 800 mm (+/- 400 mm) Payload Capacity: 60kg
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 700 mm (+/- 350 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 1 µm / +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 250 mm (+/- 125 mm) Payload Capacity: 70 kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 300 mm (+/- 150 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 50 mm (+/- 25 mm) Payload Capacity: 30 kg
Stage: Rotary Stage Motion Type: Air Bearing Systems, Rotary Motion Systems Direction: Rotation Travel: 360 deg continuous Payload Capacity: Arial = 37 kg | Radial = 14 kg
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 550 mm (+/- 275 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 600 mm (+/- 300 mm) Payload Capacity: 70 kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 400 mm (+/- 200 mm) Payload Capacity: Horizontal - 70kg | Vertical: 100kg Bidirectional Repeatability: +/- 1 µm / +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y), Z Travel: 150 mm (+/- 75 mm) Payload Capacity: 12kg (Vertical) - 25kg (Horizontal) Bidirectional Repeatability: +/- 100 nm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 400 mm (+/- 200 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 300 mm (+/- 150 mm) Payload Capacity: 50kg Bidirectional Repeatability: +/- 30 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 50 mm (+/- 25 mm) Payload Capacity: 60kg
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y) Travel: 700 mm (+/- 350 mm) Payload Capacity: 70 kg Bidirectional Repeatability: +/- 0.5 µm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y), Z Travel: 200 mm (+/- 100 mm) Payload Capacity: 12kg (Vertical) - 25kg (Horizontal) Bidirectional Repeatability: +/- 100 nm
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