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Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 350 mm (+/- 175 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 300 mm (+/- 150 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Vertical Z Stage Motion Type: Air Bearing Systems, Z-Lift & Vertical Stages Direction: Z Travel: 24 mm (+ 24 mm/- 0 mm) Payload Capacity: 20 kg
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 100 mm (+/- 50 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 300 mm (+/- 150 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 200 mm (+/- 100 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 550 mm (+/- 275 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y), Z Travel: 150 mm (+/- 75 mm) Payload Capacity: 12kg (Vertical) - 25kg (Horizontal) Bidirectional Repeatability: +/- 100 nm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 250 mm (+/- 125 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y), Z Travel: 200 mm (+/- 100 mm) Payload Capacity: 12kg (Vertical) - 25kg (Horizontal) Bidirectional Repeatability: +/- 100 nm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 350 mm (+/- 175 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 250 mm (+/- 125 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y), Z Travel: 100 mm (+/- 50 mm) Payload Capacity: 12kg (Vertical) - 25kg (Horizontal) Bidirectional Repeatability: +/- 100 nm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 400 mm (+/- 200 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 500 mm (+/- 250 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 450 mm (+/- 225 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 500 mm (+/- 250 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 150 mm (+/- 75 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 50 mm (+/- 25 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y), Z Travel: 60 mm (+/- 30 mm) Payload Capacity: 12kg (Vertical) - 20kg (Horizontal) Bidirectional Repeatability: +/- 100 nm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 150 mm (+/- 75 mm) Payload Capacity: Horizontal - 70kg | Vertical: 40kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 400 mm (+/- 200 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 200 mm (+/- 100 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
Stage: Linear Stage Motion Type: Linear Motion Systems, Micron 2 (µII) Stages Direction: X (or Y), Z Travel: 100 mm (+/- 50 mm) Payload Capacity: Horizontal - 150kg | Vertical: 80kg Bidirectional Repeatability: +/- 1.0 µm
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