Our Custom Solutions

Configurable Gantries

The SNH-series is a highly configurable gantry robot design based on ALIO’s proven standard stages that can be adapted according to customers’ load, throughput, precision, travel, and budget.

Customers may choose from XY travels from as little as 100mm or up to 1m plus and various powerful drive options allowing accelerations of up to 3.5G. With gantries being delivered on rigid base plates like granite, steel or aluminum frames allow superior precision with accuracy of +/- 1.5µm.

One key contributor to such high precision is our “Yaw Compliance” option — a virtual rotary axis allowing precise compensation for small angular misalignments that also may be used as an actual rotary axis for small intended angular motions.

Combining the cartesian gantry with optional degrees of freedom like z-axis, rotary axis, (Inverted) tripods or Hybrid Hexapods® or Gimbals makes this series to one of the most versatile and flexible high precision motion systems in the market.

You’ll likely find our cartesian gantries in industrial applications like laser machining or additive manufacturing / 3D printing, where an overhead motion is needed as samples can’t be moved or are extremely large.

An overview of “standard” configurations will show specifications:

Configurable Gantry: AI-LM-(X_TRAVEL)X-(Y_TRAVEL)Y-UII-SNH

Configuration Options

Add-on items & accessories

Z-axis options

  • Linear motor or screw drive
  • Linear or rotary brake available
  • Air or pneumatic counterbalance
  • Counterbalance biased AWAY from collision
  • Position trigger capable with ALIO controller

Rotary-axis options

  • 56mm to 208mm diameter
  • Up to 20Nm torque rating
  • Kinematic equations included with ALIO controller
  • Air purge for contaminant protection
  • Position trigger capable with ALIO controller

Inverted Tripod Options

  • Linear motor or screw drive
  • Kinematic equations included with ALIO controller
  • High precision, closed-loop feedback
  • Counterbalance biased AWAY from collision (linear motor driven solutions)
  • Position trigger capable with ALIO controller

Trunnion product support dual rotary options

  • 104mm to 208mm diameter
  • Up to 20Nm torque rating
  • Kinematic equations included with ALIO controller
  • Air purge for contaminant protection
  • Position trigger capable with ALIO control
Planar XY Air Bearing Stages

ALIO’s patented 2-axis planar XY air bearing system has set the bar in the world of 6-D Nano Positioning®. As both axes use the same highly precise granite base as reference, advanced flatness of just a single micron over several hundreds of mm (or even meters) of travel ranges can be achieved.

Thanks to ALIO’s patented design and the proprietary 6-D Nano Precision test methods, this highly stiff family of planar xy air bearing motion systems delivers sub-micron accuracy, and a +/- 100nm bi-directional repeatability even in higher quantities for serial machine production. With 200 mm to 800mm standard versions, and possible customizations to over 3 meters of X and Y travel, this product family has no equal for True Nano® precision in any kind of measurement / metrology applications and in the semiconductor industry.

Powerful linear direct drives and air bearings make these motion systems perfectly suited to high precision, high throughput applications that require smooth continuous scanning or a fast step-and-settle process over very long distances.

For more information on the planar xy air bearing stages, and the numerous customization options available, contact ALIO or have a brief look at following data sheet:

Planar XY Air Bearing Stage: AI-LM-(TRAVEL)00-ABL

Air Bearing Counterbalanced Z Stages

ALIO’s family of linear motor driven, vertical Z-lift stages with Air Bearing counterbalance are characterized by their low profile and extremely long travel ranges. Using high precision crossed roller bearings and linear encoders, the stages are equipped with a frictionless air bearing pneumatic cylinder. Similar to the GeoSymmetric series of stages, these long travel Z stages have counterbalance, motor, bearings, and encoder all placed on an approximate centerline of the stage. Payloads may be mounted directly to the face of the stage.

The Z-ABCB series — with its frictionless air bearing pneumatic cylinder counterbalance — can carry payloads of up to 25kg over 200mm or more.

Details:

Long Travel, High Payload: AI-LM-(TRAVEL)00-Z-ABCB-(OPTION)

Nano Z® – Dual Voice Coil Stage with Air Bearings

NANO Z® patented Z-lift air bearing stages overcome the legacy design issues associated with z-wedges and other vertical stages. They use a novel combination of air-bearings plus two voice coil motors in a compact footprint with up to 50mm travel.

Using air bearings means negligible friction which enables unparalleled accuracy and repeatability down to low double-digit nanometers. Variable counterbalancing easily handles heavy weights like wafer chucks, while still achieving nano-level precision over the full travel range.

The Nano Z® design places vertical force in line with the payload, and this makes it possible to place the stage directly below the payload instead of beside it, avoiding inevitable cantilever inaccuracies and nearly eliminating pitch, yaw and roll.

Dimensions and specification can be found in following data sheet:

Patented Nano Z®: AI-VC-2400-NANO-Z-AB

Rotational Air Bearing Stages

When the highest rotational precision is required, manufacturers can choose from ALIO’s line of air bearing rotary stages. Air bearings allow the stage to move without mechanical contact and therefore movement is frictionless and without wear. Errors like wobble, eccentricity, or runout can be minimized to get close to a perfect, smooth 360 degree movement even at high speeds or when the rotational stage is mounted vertically. Thanks to powerful torque motors, both constant continuous rotation as well as step-and-settle processes can be performed in an equally precise and reliable way.

It is no surprise that ALIO’s rotational air bearing stages can therefore be found in the most precise applications within the semiconductor, metrology, and photonics industries.  

For detailed specifications please download the following spec sheets:

Rotational Air Bearing Stages: AI-TM-(DIAMETER)R-AB

Large Rotational Air Bearing Stages: AI-TM-(DIAMETER)R-AB

Nano Z® – Dual Voice Coil Stage with Air Bearings

NANO Z® patented Z-lift air bearing stages overcome the legacy design issues associated with z-wedges and other vertical stages. They use a novel combination of air-bearings plus two voice coil motors in a compact footprint with up to 50mm travel.

Using air bearings means negligible friction which enables unparalleled accuracy and repeatability down to low double-digit nanometers. Variable counterbalancing easily handles heavy weights like wafer chucks, while still achieving nano-level precision over the full travel range.

The Nano Z® design places vertical force in line with the payload, and this makes it possible to place the stage directly below the payload instead of beside it, avoiding inevitable cantilever inaccuracies and nearly eliminating pitch, yaw and roll.

Dimensions and specification can be found in following data sheet:

Patented Nano Z®: AI-VC-2400-NANO-Z-AB

GeoSymmetric Voice Coil Z Stages

ALIO’s GeoSymmetric™ Vertical Positioning Stages use voice coil or linear direct drives, high precision crossed roller bearings, and various counterbalance options within a unique and innovative design concept.

Unique geometric shapes provide mounting surfaces on multiple faces of the stage for flexible installation options. Being able to mount the payload directly to the face or top surface of the stage helps to eliminate weakness and resonant frequency issues associated with additional brackets.

The “Symmetric” part of the family’s name originates from the arrangement of the components used. The counterbalance, motor, bearings, and encoder are all placed on an approximate centerline of the stage, i.e. they are integrated in a way that their masses are symmetrically distributed over the stage.

This series of stages has been built for precision with application dependent counterbalances, and has been structurally designed to exceed application performance demands (with bidirectional repeatability down to +/-45nm, travels from 6 to 70mm, and load capacities of up to 30kg). Being 4x to 10x more precise than Z-wedge stages makes ALIO’s GeoSymmetric™ Vertical Positioning Stages  great for any application within the semiconductor industry, microscopes for life and health science, or numerous metrology applications.

Explore our many options with a closer look at the relevant data sheets:

Pneumatic Counterbalanced Z: AI-(MOTOR)-(TRAVEL)00-(FORCE)-Z-CB

High-Force Pneumatic Counterbalanced Z: AI-(MOTOR)-(TRAVEL)00-(FORCE)N-Z-CB

Magnetic Spring Counterbalanced Z, Voice Coil: AI-(MOTOR)-(TRAVEL)00-(PAYLOAD)-Z-MCB-(ORIENTATION)

Mini Z with user-swappable Spring Counterbalanced Z: AI-(MOTOR)-(TRAVEL)00-Z-SCB

Long travel Z Stages with Linear Drives

ALIO’s family of linear motor driven, vertical Z-lift stages are characterized by their low profile and extremely long travel ranges. Using high precision crossed roller bearings and linear encoders, the stages are equipped with magnetic spring counterbalances or a frictionless air bearing pneumatic cylinder. Similar to the GeoSymmetric series of stages, these long travel Z stages have counterbalance, motor, bearings, and encoder all placed on an approximate centerline of the stage. Payloads may be mounted directly to the face of the stage.

The Z-MCB versions with magnetic spring counterbalances allow travel between 25 and 170mm, while the Z-ABCB — with its frictionless air bearing pneumatic cylinder counterbalance — can carry payloads of up to 25kg over 200mm or more.

Details:

Magnetic Spring Counterbalanced Z, Linear Drive; AI-LM-(TRAVEL)00-Z-MCB-(MAX PAYLOAD)

Extra Long Travel Z: AI-LM-(TRAVEL)00-(PAYLOAD)-Z-MCB-BASE

Long Travel, High Payload: AI-LM-(TRAVEL)00-Z-ABCB-(OPTION)

High Load and Force Z Stages with Pneumatic Brake

A broad field of applications from industrial automation to large measurement or metrology tools demand enormous lift capabilities while still achieving nanometer precision. For such applications, ALIO offers vertical Z stages with precision ball screws driven by a frameless torque motor that is equipped with pneumatic release spring engage brakes that lift 20kg without additional counterbalance. For even higher loads, this series offers the so-called “pneumatic boost” option which uses a frictionless pneumatic counterbalance to boost the payload capability to 50kg.

Even with such high loads, these stages can achieve +/- 100 nm bi-directional repeatability over ranges of up to 50mm. This makes it the ideal stage for applications requiring high loads and long travel ranges without compromising precision.

More information on precision, accuracy and motion profile specifications:

Z Stage with Pneumatic Brake: AI-BSD-(TRAVEL)00-Z-PBRK

Standard, Dual Ball Rail Micron 2 X Stages

Combining linear direct drives with dual recirculating ball rails instead of crossed roller bearings opens up the precision world to many more applications and customers.

This robust system architecture helps customers to overcome budget-constraints as they move towards micron to nano precision, and exceeds the travel possible using crossed roller bearings.

The nine standard stages of this series allow flexible travel ranges from 100mm to 700mm. By strictly adhering to ALIO’s design and manufacturing principles they can be used not only when mounted on a flat horizontal surface, but also when used on vertical surfaces or even inverted.

High flex cabling with optimized routing, hard stops, high resolution encoders, optical latching home index, and end-of-travel Limits, etc… are designed with a total focus on the production of highly robust and precise motion with an economical price tag to help industrial and heavy duty applications get to the next level of precision.

Take a closer look in the datasheet:

Micron 2 Dual Rail Linear X: AI-LM-(TRAVEL)00-uII

Slim, Single Ball Rail X Stages

Our two lines of “Slim” Micron 2 (µII) motion systems utilize recirculating ball rail bearings together with linear direct drives. The stages either come in a compact housing or as “naked” version. Both versions are ideal as a basis for more complex systems, and are widely used in Cartesian Gantry systems.

Wherever long travel ranges of up to 1m are required but space matters, these lines are probably your best choice. No matter which of the many standard lengths you choose, a 72 mm width and a height of just 57mm mean that you don’t need to make compromises: as precise as a +/-0.5µm bi-directional repeatability is guaranteed!

ALIO’s proprietary design and manufacturing process used in these two Micron 2 (µII) lines help achieve surprisingly good flatness and straightness.

Check them out by clicking through their respective datasheets:

Micron 2 Slim Rail Linear X: AI-LM-(TRAVEL)00-uII-S

Micron 2 Slim (Naked) Rail Linear X: AI-LM-(TRAVEL)00-uII-SN

Extra Large Ball Rail X Stages

These three series of products are designed for extreme applications. They can carry heavy, large objects, targets, and products and can be used over extra-long ranges. Equipped with dual recirculating bail rail bearings, driven by a linear direct drive, these robust stages can reach lengths of up to 2m on which with carrier plates up to 300mm wide and either 170mm, 270mm or even 306mm long.

It is therefore not surprising that all these stage can carry payloads of up to 100kg and achieve acceleration of 2.0 G -4.0 G.

What is perhaps more surprising, however,  is that customers can still expect a bi-directional repeatability of less than +/-0.5µm and 1-digit micron and arc-sec in flatness, straightness, pitch, yaw and roll.

All details can be found on the datasheets:

Micron 2 Wide Dual Rail Linear X: AI-LM-(TRAVEL)00-uII-W

Micron 2 Large Carrier Linear X: AI-LM-(TRAVEL)00-uII-WL

Micron 2 Extra Large Linear X: AI-(TRAVEL)00-uII-XB

High-Force, Payload and Range – Ball Screw Driven X Stages

For certain applications, an electromagnetic linear direct drive might not be ideal. This is specifically true for applications that require the ability to hold position (literally no movement on power loss) even during a sudden or necessary power stop or loss. This is often critical when high payloads (but not only high payloads) are involved, or if a stage needs to be mounted other than horizontally.

ALIO has therefore extended its range of stages suitable for these kinds of challenges with further Micron 2 (µII) motion systems. Those stages known as the “SBS” and “XBS” series use a frameless torque motor that drives the carrier with a precision ball screw on dual recirculating ball rail bearings. For further strength, certain stages can be equipped with brake options contributing to the safety of the machines.

Even with this combination of drive and bearings, the stage will successfully accomplish applications requiring a bi-directional repeatability of only +/-1 µm. The ball screws anti-backlash nut ensures any backlash is avoided.

Further information concerning  linear displacement accuracy, resolution, flatness, straightness or pitch, yaw, and roll can be found in the specific datasheet available for download:

Ball Screw Driven X: AI-SBS-(TRAVEL)00-UII-(BRAKE OPTION)

High-Force, High-Payload X: AI-XBS-(TRAVEL)00-UII

Micron 2 Rotary Stages

ALIO’s Micron 2 Rotary Stages utilize frameless torque motors and angular contact, duplex pair bearings. These stages are designed to achieve maximum possible throughput without compromising on precision, regardless of whether the application requires a smooth, continuous movement or a fast step and settle process. Also allowing decent sized apertures, those rotational stages are used in a broad selection of applications and industries such as industrial manufacturing, photonics or semiconductor metrology.

Micron II Rotary: AI-TM-(DIAMETER)RA-UII

Crossed Roller Bearing Rotary Stages

ALIO’s standard and most common rotary stage family uses crossed roller bearings in combination with frameless torque motors. These stages can handle applications where the mass, acceleration, or simply throughput needs are extreme, while still maintaining nanometer-level precision performance. Because of the improved stiffness it can also perform well with offset loads.

Standard ALIO crossed roller bearing rotary stages have only +/-0.2 arc-second repeatability and are rated at 13 to 20 microns of radial and axial run-out, with optional run-outs of certain models below 5 microns. The mechanical bearing rotary stage family has multiple motor sizes to meet different duty cycles, as well as mass and acceleration needs from 80 mm to 300 mm in diameter. Vacuum rotary union options are available on the inner diameter for mounting a vacuum chuck.

Need more details?

Crossed Roller Bearing Rotary: AI-TM-(DIAMETER)R

360 Degree Angular Contact Bearing Stages

ALIO has designed mechanical bearing rotary stages with angular contact bearings addressing the need for very compact, flat, rotary stages for applications that require a decent sized aperture. Through the use of torque motors, the stages allow a smooth continuous movement or a step-and-settle process over the full 360 degrees. As we only use the finest bearings and motors, you don’t need to make compromises on precision or throughput — both can be maximized with this family of stages.

This is a versatile stage for various applications and industries!

Find out more within the spec sheet:

360 degree Angular Contact Bearing Stages: AI-TM-(DIAMETER)RA

Rotational Air Bearing Stages

When the highest rotational precision is required, manufacturers can choose from ALIO’s line of air bearing rotary stages. Air bearings allow the stage to move without mechanical contact and therefore movement is frictionless and without wear. Errors like wobble, eccentricity, or runout can be minimized to get close to a perfect, smooth 360 degree movement even at high speeds or when the rotational stage is mounted vertically. Thanks to powerful torque motors, both constant continuous rotation as well as step-and-settle processes can be performed in an equally precise and reliable way.

It is no surprise that ALIO’s rotational air bearing stages can therefore be found in the most precise applications within the semiconductor, metrology, and photonics industries.  

For detailed specifications please download the following spec sheets:

Rotational Air Bearing Stages: AI-TM-(DIAMETER)R-AB

Large Rotational Air Bearing Stages: AI-TM-(DIAMETER)R-AB

2 Axis Gimbal

Incorporating ALIO’s industry-leading torque ratings, our two-axis gimbal rotary systems are capable of high rotational speeds while maintaining the stand-out precision levels expected from ALIO’s systems.

ALIO’s two-axis systems are designed around the customers’ mass, with variable counterbalance, cable guidance, and cable and air feed-through capabilities. With hard-stops allowing for +/- 110 and +/-170 degrees of rotation for nearly unlimited part access on the horizontal axis, ALIO’s dual axis rotary systems exhibit angular travel +/- 180 degrees for rotation about the vertical axis.

An incorporated air purge protects the stage against contamination and maximizes life span.

Metrology, laser processing, additive manufacturing, and many other industry sectors have benefited from these ALIO products.

More details are shown on the spec sheet:

2 Axis Gimbal

Open-Center Rotary Stages

This type of rotary stage utilizes a tangential linear direct drive with angular contact (duplex pair) bearings. The result is a family of stages with up to +/-7.5 degrees angular movement, a very low profile, and an extreme aperture for maximum accessibility from both sides. As even 12-inch wafers can fit into the aperture, it is not surprising that this stage is getting increasingly common in applications in the semiconductor industry, but it is as commonly seen in metrology or even life science applications.

With the rigid bearings and highly powerful linear direct motor, this stage contributes to the high-throughput needs of the high precision market.

More information available for download:

Rotary with Large Aperture: AI-LM-(DIAMETER)RA

Linear X Stages

Linear X Stages are probably the most common stages used in the precision industry, which is why it is not surprising that you can find ALIO’s linear X stages in nearly all precision applications.

By using two different types of linear direct drives — the “LM”- and the “CM”-type — this family of stages offers a wide variety of options for travel needs from 30mm to 300mm.

While the “LM” versions offer more force, higher acceleration, speed, and payloads of up to 50kg, the “CM”-series’ low-profile design allows for implementation in tools and applications with space constraints — of course, without compromising precision.

For more information please download and analyze the following datasheets:

Linear X: AI-LM-(TRAVEL)00

Low-profile Linear X: AI-CM-(TRAVEL)00

Enclosed Monolithic XY Stages

Used in any kind of high precision application, ALIO’s enclosed, monolithic XY Stages utilize direct linear drives and high precision crossed roller bearings built into a compact 3-plate system. With nanometer straightness and flatness — as well as an optimized orthogonality — you can be assured that your point precision is True Nano®.

While compact in size, standard travel ranges from 30mm up to 400mm are available. If required, stages can also be built for high vacuum or clean room applications.

The design achieves the highest precision with bi-directional repeatabilities of only +/- 30nm and is equally strong in scanning applications requiring a smooth, continuous movement or when the requirement is for a fast step and settle process — even when highest output matters the most.

The enclosed, monolithic XY stages are divided into the standard LM-series and the low-profile CM-series.

To download datasheets, look for:

Enclosed Monolithic XY: AI-LM-(TRAVEL)00-XY

Low-profile Enclosed Monolithic XY: AI-CM-(TRAVEL)00-XY

Open-centered Monolithic XY Stages

ALIO’s open-centered, monolithic XY stages are characterized by large apertures enabling usage in any kind of application requiring accessibility of the carried product from all sides.

Using powerful direct linear drives and high precision crossed roller bearings carefully designed into a 3-plate system, we are capable of achieving outstanding precision in our open-centered XY stages. Besides a bi-directional repeatability of just +/- 50nm, the stages offer superior straightness and flatness, as well as an optimized orthogonality that gives you Nano Precision® at travel ranges of 30mm up to 400mm.

Scanning applications requiring a smooth, continuous movement and fast step and settle processes can be performed equally well to help customers to achieve an ideal motion and increased throughput.

If the application requires, the stages can also be built for high vacuum or clean room applications.

The open-centered, monolithic XY stages are divided into the standard LM-series as well as the more compact CM-Series.

Detailed specifications, sizes and more can be found in following datasheets:

Open-Centered Monolithic XY: AI-LM-(TRAVEL)00-(THRU)E-XY

Low-profile Open-Centered Monolithic XY: AI-CM-(TRAVEL)00E-(THRU)-XY

Asymmetrical, Monolithic XY Stages

If you require different travels in x and y, need a low-profile solution to avoid space constraints, and can’t compromise on performance and precision, there are hardly any off-the-shelf products on the market. Still unique in the market, one of ALIO’s asymmetrical, monolithic XY stages can help solve this complex combination of motion requirements.

With their linear direct drives, high precision crossed roller bearings, and our 3-plate system, not only is highly precise and powerful motion guaranteed, but so is perfect orthogonality of the x and y axes in respect to each other.

“Asymmetrical” in this design concept refers to the two different travel ranges of these two stages that usually can only be achieved by mounted to different linear x stages on top of each other.

For further information, we suggest contacting us or downloading following specification sheets:

Asymmetrical, Monolithic XY: AI-LM-(TRAVEL_X)x(TRAVEL_Y)-XY

Asymmetrical, Monolithic XY: AI-SLM-(TRAVEL_X)x(TRAVEL_Y)-XY

Precision Ball-Screw Driven X Stages

In some cases, applications need to ensure that precision can be achieved in the presence of any kind of electrical noise. For such applications, ALIO offers stages driven by a torque motor moving a precision ball screw with an anti-backlash nut, and if necessary equipped with pneumatic or electric solenoid brakes.

Thanks to ALIO’s unique design and manufacturing principles, such stages still achieve a bi-directional repeatability of only +/- 100nm as well as straightness and flatness well below 5µm (and on request even 1µm can be maintained).

Off-the-shelf versions allow travels of 30mm, 100mm, 150mm, and 200mm, and can be realized for ambient, high vacuum and clean room conditions.

More information can be found on following datasheet:

Linear X with Precision Ball Screw:_AI-VBS-(TRAVEL)00-(BRAKE OPTION)

Micron 2 (µII) motion systems family

ALIO has introduced its new Micron 2 (µII) motion systems family to compete in the micron-level motion control market, where the demand is for low-cost, mid-precision, reliable, long travel stages. As with all products, ALIO’s Micron 2 (µII) motion systems are designed using the company’s uncompromising standards of “quality first” thereby ensuring long-term reliable operation.

The Micron 2 (µII) recirculating ball rail bearing stages come as standard in sizes of 100mm up to 2 meters thus providing the end-user a solution for a large variety of applications. This family of motion systems is a robust, powerful line that is designed to be used either stand-alone, or as a top axis of an integrated solution.

For more details please visit the dedicated Micron 2 (µII) motion systems page

Standard Hybrid Hexapod

We believe that in the nano age, traditional hexapods will become rare and maybe even obsolete. The Hybrid Hexapod® is ALIO’s novel, patented approach to six degree of freedom (6-DOF) positioning, resulting in nano-level accuracy at any working point. A design that allows the Hybrid Hexapod® to be two orders of magnitude more precise than any competitive hexapod built today.

The modular concept uses a tripod with non-contact linear driven motors and linear encoders — for any rotary and Z motion — sitting on a monolithic XY basis. The tripod’s links are designed to create a stiffness unique to this class of hexapods, and which allow the avoidance of common problems associated with screw-driven stewart platforms. Pitch errors, backlash, calculation errors from conversion of a rotary encoder to a linear movement, friction, wear, and slow speed are no longer an issue. The monolithic base allows unrivalled horizontal movements.

The entire six-dimensional motion is simplified while the working cubic volume is drastically increased. Need to move in X or Y? Move one axis only instead of six legs. Need to tip or tilt? You only need to move the three legs of the tripod instead of all six legs. Need to rotate around the Z axis? Just add a 360 degrees rotary stage in the middle of the tripod.

All these and many more specific details make this a unique design ideal for literally any application requiring six degrees of freedom positioning with nanometer/arc-sec levels of incremental motion and repeatability. An extensive overview of what can be achieved with our standard configurations is given in  the following datasheet:

Standard Hybrid Hexapod: AI-HH-(XY TRAVEL)XY-(Z TRAVEL)Z-(R DIAMETER)R-(OPTION)

MINI Hybrid Hexapod

Currently the smallest of our Hybrid Hexapod® line, the MINI is compact but still provides a 54,000 mm2 working volume (60x60x15mm). With the flexibility to scale tripod, rotary and monolithic XY, you can size your MINI to your required working volume. Brakes, gear reduction, ball screw drive, and linear motor drive are some of the options to match the performance to your application.

ALIO’s MINI Hybrid Hexapod® is ideal for automated lens alignment or bonding processes. It has been helpful in building camera array modules, translational OIS, and telescopic integrated lenses for miniature cameras used in every day products like cell phone cameras and drones. Any application requiring six degrees of freedom (6-DOF) positioning with nanometer/arc-sec levels of incremental motion and repeatability is a good fit for this product.

Find out more by downloading the detailed specifications:

Miniature Hybrid Hexapod: AI-HH-(XY TRAVEL)XY-(Z TRAVEL)Z-(R DIAMETER)RT-(OPTION)

AngularesTM – Extra large Tip/Tilt Range Hexapod

The 60-degree tip/tilt travel of the AngularesTM Hybrid Hexapod® is by far the most angular travel range available from any 6-Degree-Of-Freedom (6-DOF) positioner on the market, and offers the same unmatched positioning performance found in any of ALIO’s full-line of Hybrid Hexapod systems.

The AngularesTM features precision crossed roller bearing guides, optical incremental or absolute encoder feedback on all axes, linear motor and/or servo ball screw drives, unlimited programmable tool center point locations and coordinate offsets, and zero backlash on all axes. The design makes the AngularesTM capable of unlimited XY travel, Z travel of 62 mm (which can be increased to 208 mm using other tripod models); tip/tilt travel of 60 degrees (+/- 30 degrees) with continuous 360 degree Theta-Z; XYZ bidirectional repeatability of less than +/- 100nm; velocity up to 100 mm/second XY and Z; and less than 10 nanometers linear and 0.1 arc-seconds angular minimum incremental motion.

This makes the AngularesTM perfectly suited for many applications including aspheric and freeform optical metrology, silicon photonics packaging and probing, laser micro processing (non-planar substrates and taper control), wafer metrology, camera module alignment and assembly, and optical element and fiber alignment.

Data sheets available for download:

AngularesTM – Extra large Tip/Tilt: AI-HH-30D-(XY TRAVEL)XY-(Z TRAVEL)Z-(R DIAMETER)R

Special Task Hybrid Hexapods

ALIO’s modular and versatile Hybrid Hexapod® concept allows various adaptions and customization to align with your application requirements. These can range from applications with several dozens of kg load and high force requirements, to totally novel designs with large apertures. Some requirements have been so commonly requested that we decided to standardize them and make them available to all our customers. See specific details below:

High Torque Hybrid Hexapod: AI-HH-(XY TRAVEL)XY-(Z TRAVEL)Z-(R DIAMETER)RGR

High Load Hybrid Hexapod: AI-6D-(XY TRAVEL)XY-(R DIAMETER)R-(Z TRAVEL)Z-(OPTION)

Ball Screw Driven Hybrid Hexapod: AI-HH-BSD-(XY TRAVEL)XY-(Z TRAVEL)Z-(R DIAMETER)R-(OPTION)

Stepper-Motor based Hybrid Hexapod: AI-HH-ST14-(XY TRAVEL)XY-(Z TRAVEL)Z-(R DIAMETER)R-(OPTION)

High Angle Tripods

Tripods allow the combination of z-movement with tip and tilt around a common center point of rotation. ALIO introduced its tripods as a flexible part of the Hybrid Hexapod® design, paying special attention to finding ways to overcome traditional design issues related to simple link designs. The rigid structure of the links counteracts horizontal forces, and offers enhanced stiffness. A direct readout with linear encoders instead of rotary encoders overcomes problems like pitch errors, backlash, and calculation errors when converting a rotary encoder to a linear movement. To secure the process and increase load capacities, counterbalance options are available to handle gravity, while the drive can be fully focused on the displacement.

Today our tripods — as part of a Hybrid Hexapod® or as stand alone system — move in z from 6mm to 106mm and allow angular movements of just +/- 3 degrees or as high as +/- 20 degrees.

All details can be found within following two documents:

Linear Tripod: AI-TRI-LM-(Z TRAVEL)00-(OPTION)

Linear Tripod with integrated Rotary: AI-TRI-LM-(Z TRAVEL)00-(R DIAMETER)-(OPTION)

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