Our Custom Solutions

Laser Gimbal® Five-Axis Positioning Workstation

ALIO’s Laser Gimbal® Five Axis Positioning Workstation is the world’s only positioning system with 5-D vector path laser triggering. The system provides a novel solution for engineers and manufacturers that are using additive and subtractive laser processing techniques on cutting-edge materials to produce a variety of next generation products

Additive Manufacturing – Phone Antenna Direct Printing

ALIO is capable of programmable path and contour control using its novel forward and inverse kinematic algorithms. This Hybrid Hexapod® operates at 100mm/sec 3D path velocity and is capable of micron-level path accuracy.  In this Hybrid Hexapod® system the nozzle proximity is kept to within 5 microns of surface and was designed for a 24/7 production environment.

Optical Camera Module Assembly/Test

ALIO’s MINI Hybrid Hexapod® is ideal for automated lens alignment/bonding to CCD arrays.  It has been helpful in building camera array modules, translational OIS, telescopic integrated lenses for miniature cameras used in every day products like cell phone cameras and drones.  Any application requiring 6- degrees of freedom positioning with nanometer/arc-sec levels of incremental motion and repeatability is a good fit for this product where product sensor resolution improvements are driving the need for higher precision.

Sensor Metrology

ALIO has experience providing systems to many of the world’s largest metrology companies for their internal measurement systems.  The company can provide solutions for even the most precise targets.

Hybrid Hexapod® For Wafer Metrology

ALIO has supplied a 5-axis, open frame Hybrid Hexapod® design for wafer metrology.  Its precision comes from precision crossed-roller bearings, and integrated frameless DC servo motors driving ballscrews.  It has a cubic travel range of 350mm “X” x 350mm “Y” x 75mm “Z” and tip/tilt travel ± 2 degrees.  ALIO was able to provide ± 0.1 micron bidirectional XYZ repeatability.

Wafer Metrology Low-Profile XY-Theta With Large Open Aperture

ALIO’s vacuum expertise and broad selection of stages allowed the opportunity to couple four HV (10-7 Torr) stages to provide a nano-precision® solution. This R-XY-Z stack once again uses a pure linear based Z solution vs. the legacy Z-wedge design.

Application: Fiber/Optical Assembly (Private Label)

ALIO’s metrology grade XY stage is the foundation for an exceptional three-axis alignment platform. ALIO’s unique design of the Z axis provides a completely linear based vertical solution with near air bearing performance. The Z stage with a high force linear motor, linear encoder, linear high-precision crossed roller bearings and integrated linear air counterbalance exceeds any mechanical based vertical axis on the market as well as some air bearing options. One major advantage to this unique solution allows for the customer’s payload to be mounted directly on the top of the stage in-line with the motor, encoder, bearings, and counterbalance thus minimizing overhanging brackets and greatly reducing potential Abbé errors. ALIO’s linear Z axis is 5 times order of magnitude more precise than old school z-wedge solutions

Application: Nano Metrology

ALIO has taken its industry-leading, near air-bearing performance open center metrology stages, to the next level. This crossed roller bearing 300mm XY Nano Metrology® stage is DC Servo linear motor driven with 300mm open center, has unmatched motion performance with 3-Sigma, 6-D (linear, straightness, flatness, pitch, yaw and roll) and bi-directional repeatability of less than +/- 250nm. In other words, the volumetric bi-directional repeatability of any XY point is within a sphere of 500nm or less.

Material Selection

Vacuum motion systems are typically made from bare 6061 aluminium or 300 or 400 series stainless steel. Since most precision bearings in vacuum are made from 400 stainless steel, the use of 300 or 400 stainless steel for the motion system is recommended when thermal variations are a feature of the application or experiment. This allows for the bearings and structure to deviate at the same rate, which means the bearings can maintain preload.

Precision Bearings

To consistently meet nanometer-level precision, ALIO advocates the use of crossed roller bearings. It is important to use the highest-grade bearings to assure precision. The better-quality bearings have rollers matched in size allowing for smoother motion, less friction, and less straightness deviation along the path.

Position Feedback

Position feedback systems in a vacuum chamber have special designs to ensure performance and no outgassing. ALIO uses optical encoders that read either to a tape or glass scale, or when more precision is required read to a scale etched directly into a stainless steel of a ring (for rotary applications), or onto a nickel plated invar spar (for linear applications) The invar scale allows for near laser precision with repeatability and accuracy as it is calibrated using an interferometer. Placing the scale on invar greatly reduces thermal effect that influences the accuracy of other scales. ALIO also uses a laser interferometer to provide resolutions to 38 picometers providing positioning stability — on a suitable mechanical system — to sub-nanometer levels.

Drive Mechanism

For vacuum motion control applications, ALIO uses piezoelectric driven stages and linear and rotary servo motors. Ceramic servo motors are unique in their motion acting as a spiralling friction motor, which allows for unlimited travel without mechanical hysteresis while maintaining nanometer precision. Servo motors are much more robust with higher forces and higher duty cycles but are currently limited to 10-7.  Both drive motors have no drive inertia and no hysteresis. These piezo motors stages are well suited for ultra high vacuum environments (10-10 TORR) due to the material’s limited outgassing.

Lubrication

ALIO uses a range of wet to dry vacuum compatible lubricants. ALIO uses various formulas of Krytox depending on the application and customer preference. The uses of dry lubricants in the form of thin films are easy to apply and offer low friction and smooth motion. There are many dry lubricants available for UHV but ALIO has had great success with two types — Molybdenum Disulfide and Tungsten Disulfide.

Kinematic Structure

Serial kinematics work well for single, two, three, or four axis systems, but the design and machining of these axes is critical when reducing errors such as sine / cosine and orthogonality when stacked, and must address the potential for thermal deviations caused by the motor, and stacking the axis in a manner that increases motion forces.When extreme precision is needed for five and more axes, the parallel kinematic solution is the best choice. With parallel kinematic solutions the error quotient is not additive thus reducing the concern for serial kinematic sine / cosine and orthogonality error quotient.Parallel kinematics typically take up less valuable space in a chamber versus serial kinematics. Hexapods with forward and inverse kinematics have velocity and path motion that can enhance motion profiles that serial kinematics may not be able to handle due to sub-micron errors associated with the stacking of stages.

Micron 2 SNH-G
  • 100mm XY to 1m XY travel
  • Up to 3.5G acceleration (controller dependent)
  • Standard and ULTRA precision grades to <1.5µm accuracy
  • Linear resolution 5nm standard
  • Position trigger capable with ALIO controller
  • Yaw compliance to command angular alignment (standard)
Micron 2 S-G 
  • 100mm XY to 1m XY travel
  • Up to 3.5G acceleration (controller dependent)
  • Standard and ULTRA precision grades to <1.5µm accuracy
  • Linear resolution 5nm standard
  • Position trigger capable with ALIO controller
  • Yaw compliance to command angular alignment (standard)
Micron 2 G
  • 100mm XY to 1m XY travel
  • Up to 3.5G acceleration (controller dependent)
  • Standard and ULTRA precision grades to <1.5µm accuracy
  • Linear resolution 5nm standard
  • Position trigger capable with ALIO controller
  • Yaw compliance to command angular alignment (standard)
Micron 2 SNH2-G
  • 100mm XY to 1m XY travel
  • Up to 3.5G acceleration (controller dependent)
  • Standard and ULTRA precision grades to <1.5µm accuracy
  • Linear resolution 5nm standard
  • Position trigger capable with ALIO controller
  • Yaw compliance to command angular alignment (standard)
Micron 2 X-G
  • 100mm XY to 1m XY travel
  • Up to 3.5G acceleration (controller dependent)
  • Standard and ULTRA precision grades to <1.5µm accuracy
  • Linear resolution 5nm standard
  • Position trigger capable with ALIO controller
  • Yaw compliance to command angular alignment (standard)
Micron L-G
  • 100mm XY to 1m XY travel
  • Up to 3.5G acceleration (controller dependent)
  • Standard and ULTRA precision grades to <1.5µm accuracy
  • Linear resolution 5nm standard
  • Position trigger capable with ALIO controller
  • Yaw compliance to command angular alignment (standard)

Add-on items & accessories

Z-axis options

  • Linear motor or screw drive
  • Linear or rotary brake available
  • Air or pneumatic counterbalance
  • Counterbalance biased AWAY from collision
  • Position trigger capable with ALIO controller

Rotary-axis options

  • 56mm to 208mm diameter
  • Up to 20Nm torque rating
  • Kinematic equations included with ALIO controller
  • Air purge for contaminant protection
  • Position trigger capable with ALIO controller

Inverted Tripod Options

  • Linear motor or screw drive
  • Kinematic equations included with ALIO controller
  • High precision, closed-loop feedback
  • Counterbalance biased AWAY from collision (linear motor driven solutions)
  • Position trigger capable with ALIO controller

Trunnion product support dual rotary options

  • 104mm to 208mm diameter
  • Up to 20Nm torque rating
  • Kinematic equations included with ALIO controller
  • Air purge for contaminant protection
  • Position trigger capable with ALIO control
Planar Air Bearing System

ALIO’s patent pending 2 axis planar air bearing system has set the bar in the world of 6-D Nano Positioning®. With 300 mm to over 3 meters of X and Y travel this product family has no equal for True Nano® precision. NIST traceable laser data has measured this product over meters with nanometer precision in all 6 degrees of freedom of a moving member. Expect standard flatness of < 1 µm/meter with less than < 1 arc second of pitch, yaw, and roll. Standard repeatability < 60 nm with optional 10 nm capability in the product family.

Linear Air Bearings

Single axis linear air bearings are available in horizontal or vertical orientation. The linear product family utilizes ironless linear servo motors with variable forces depending on customer needs. These product family standard designs are from 25 mm to 3 meters of travel each with nanometer-level precision.

Patented NANO Z®

Increased demands for True NANO® metrology and processes led ALIO to design and manufacture the NANO Z® patented Z lift air bearing stage to overcome legacy design issues associated with tip and tilt while attaining accuracy of less than 100 nanometers using standard Renishaw Invar encoders. The counterbalanced NANO Z® can easily hold heavy vacuum wafer chucks and still excel with nanometer-level precision over 24 mm of travel.

Rotary Air Bearing Stages and Spindles

ALIO’s nano precision rotary air bearing product family ranges from 100 mm and upwards with variable torque options to meet a broad range of applications. This growing product line has excellent axial and radial run-out specifications for extreme precision needs.

Patented NANO Z®

Increased demands for True NANO® metrology and processes led ALIO to design and manufacture the NANO Z® patented Z lift air bearing stage to overcome legacy design issues associated with tip and tilt while attaining accuracy of less than 100 nanometers using standard Renishaw Invar encoders. The counterbalanced NANO Z® can easily hold heavy vacuum wafer chucks and still excel with nanometer-level precision over 24 mm of travel

Mechanical Bearing Z Stages

The attributes of this family of vertical Z-lift stages are:

  • Use of linear or voice coil motors
  • High rigidity crossed roller bearings
  • High force motors
  • Linear encoders
  • Air counterbalanced
  • Motor, bearings, encoder and counterbalance all on approximate centerline of the stage
  • Payload can mount directly to the face or top surface of the stage to eliminate the weakness and resonant frequency issues associated with additional brackets

Excellent dynamic performance

Compact Voice Coil Z Stages

The attributes of this family of vertical Z-lift stages are:

  • Compact design, low profile height
  • Voice coil motors
  • High rigidity crossed roller bearings
  • Linear encoders
  • Air counterbalanced
  • Motor, bearings, encoder and counterbalance all on approximate centerline of the stage
  • Payload can mount directly to the face or top surface of the stage to eliminate the weakness and resonant frequency issues associated with additional brackets

4x to 10x more precise than Z-wedge stages

GeoSymmertic® Z-Stage Linear Motor Drive

GeoSymmertic® Z-Stage Linear Motor Drive with Magnetic  Counterbalance

The attributes of this family of vertical Z-lift stages are:

  • Sturdy design minimizing Abbé errors
  • DC Servo Linear Motors
  • High rigidity crossed roller bearings
  • Linear encoders
  • Motor, bearings, encoder and counterbalance all on approximate centerline of the stage.
  • Payload can mount directly to the face or top surface of the stage to eliminate the weakness and resonant frequency issues associated with additional brackets

4x to 10x more precise than Z-wedge stages

Linear Motor Counterbalanced Z Stages

The attributes of this family of vertical linear stages are:

  • Nano-precision design
  • Linear servo motors
  • High rigidity crossed roller bearings
  • Linear encoders
  • Counterbalanced with dual frictionless cylinders balancing the load. The cylinders are in-line with the motor, bearings and encoder thus they do not create an Abbé error

Motor, bearings, encoder and counterbalance all on approximate centerline of the stage.

Air Bearing Linear Motion Z Stages

The attributes of this family of vertical linear stages are:

  • Granite base to ensure exceptional flatness and straightness
  • Linear servo motors
  • High rigidity, nano-precision air bearings
  • Linear encoders
  • Counterbalanced with dual frictionless cylinders balancing the load. The cylinders are in-line with the motor, bearings and encoder thus they do not create an Abbé error
  • Counterbalance brackets can be changed if required to assure counterbalance force is transferred through the mass center of the load.

Motor, bearings, encoder and counterbalance all on approximate centerline of the stage

Linear Motor Magnetic Counter Balanced Z Stage

Linear Motor Magnetic Counter Balanced Z Stage for High Frequency and Quick Focus

The attributes of this family of vertical linear stages are:

  • Nano-precision design
  • Linear servo motors
  • High rigidity crossed roller bearings
  • Linear encoders
  • Removes the need for air lines to counterbalance and can be designed for motion AWAY from crashing on a power-off situation

Motor, bearings, encoder and counterbalance all on approximate centerline of the stage.

S-Ball Rail with DC Servo Linear Motors

Ball Rail “Slim”, DC Servo Linear Motor Driven, Optical Linear Encoder Feedback.  The Micron-II line of linear stages is a robust, powerful line that is designed to be used either stand-alone, or a top axis of an integrated solution.

W-Ball Rail with DC Servo Linear Motors

Ball Rail “Wide”, DC Servo Linear Motor Driven, Optical Linear Encoder Feedback.  The Micron-II line of linear stages is a robust, powerful line that is designed to be used either stand-alone, or a base axis of an integrated solution.

SN-Ball Rail with DC Servo Linear Motors

Ball Rail Standard, DC Servo Linear Motor Driven, Optical Linear Encoder Feedback.  The Micron-II line of linear stages is a robust, powerful line that is designed to be used stand-alone, or integrated with other axes for a complete solution.  This version is stripped down for cost savings.

SNH- Ball Rail with DC Servo Linear Motors

Ball Rail Standard, DC Servo Linear Motor Driven, Optical Linear Encoder Feedback.  The Micron-II line of linear stages is a robust, powerful line that is designed to be used stand-alone, or integrated with other axes for a complete solution.  This version is stripped down for cost savings with an increased motor size to accommodate higher force and higher duty-cycle applications than the -SN.

SBS-Ball Rail with Drive Screw & DC Servo Rotary Motors

Ball Rail Standard, DC Servo Motor with Ball-Screw Drive, Optical Linear Encoder Feedback.  The Micron-II line of linear stages is a robust, powerful line that is designed to be used stand-alone, or integrated with other axes for a complete solution.

Mechanical Rotary Stages

ALIO’s mechanical bearing rotary stages have been designed with crossed roller bearings for improved stiffness for offset loads and rotational precision. Integrated with servo torque frameless motors, these stages can handle applications where the mass and acceleration needs are extreme, while still maintaining nanometer-level precision performance.

ALIO’s focus on materials and machining is absolute in the manufacture of its rotary product line ensuring the bearings and metal are located in ultra-machined parallel surfaces as shown by the machined lands on all stages.

Standard ALIO rotary stages have 0.2 arc-second repeatability using ALIO supplied motion controllers. Standard mechanical crossed roller bearings are rated at 13 to 20 microns of radial and axial run-out, with optional run-outs of certain models below 5 microns. The mechanical bearing rotary stage family has multiple motor sizes to meet duty cycles as well as mass and acceleration needs from 80 mm to 300 mm in diameter. Vacuum rotary union options are available on the inner diameter for mounting a vacuum chuck.

Low Angle Mechanical Rotary Stages

ALIO has designed mechanical bearing rotary stages with angular contact bearings representing the most compact design on the market. Integrated with servo ironless motors, these stages best fit metrology applications where small angular adjustment is needed with nanometer-level precision performance.

Air Bearing Rotational Stages

When ultra-tight run-out precision motion is needed, manufacturers can choose from ALIO’s continually growing line of air bearing rotary stages. Whether it is exceptional stiffness or cost-effective motion that is the priority, ALIO Industries can offer a variety of options to meet the needs of today’s nano-precision applications.

Dual Axis Rotary Systems

ALIO’s two-axis systems are designed around the customers’ mass with variable counterbalance, cable guidance, and cable and air feed-through capabilities.  With hard-stops allowing for ± 110 and ± 170 degrees of rotation for nearly unlimited part access on the horizontal axis, ALIO’s dual axis rotary systems exhibit angular travel ± 180 for the rotation about the vertical axis.

Two-Axis Gimbal

Incorporating ALIO’s industry-leading torque ratings, the company’s two-axis gimbal rotary systems are capable of high rotational speeds while maintaining the stand-out precision levels expected from ALIO Industries’ systems. Metrology, laser processing, additive manufacturing, and many other industry sectors have benefited from these ALIO products., and air purge is incorporated for contaminant protection and longer life.  Internal cable and air line routing provide an extremely clean finished product.

AZ-EL Rotary Assembly

ALIO Industry’s AZ-EL rotary assembly systems incorporate the company’s exceptional torque-ratings and are capable of high rotational speeds while maintaining the precision levels synonymous with any ALIO motion control systems. As with the two-axis gimbal system, the AZ-EL rotary assembly systems are used in metrology, laser processing, additive manufacturing, and numerous other industry applications.

Precision Crossed Roller Bearing Linear Stages

ALIO’ Nano Precision XY Monolithic product is a 3-plate system with unmatched 6-D performance.  With years of testing, continuous design improvement, and unique manufacturing protocols, the ALIO precision crossed roller bearing stages have no equal for quality and performance. Our linear stage product family begin with 25 mm travel and go up to 400 mm of travel with motor and encoder options to fit your application needs.

XY Linear System

ALIO’s XY monolithic True Nano® motion systems performance is unequaled for 6-D Nano Precision®. With nanometer straightness and flatness you can be assured that your point precision is True Nano®. This stage family comes with enclosed or open center versions from 50mm travel to 450mm travel. Standard axis bi-directional repeatability is less than 50 nanometers with optional 10 nanometers bi-directional repeatability for demanding metrology or manufacturing needs. Stages can come with NIST traceable data assuring nano precision not just marketing data sheet optimism.

Servo Voice Coil Z Stage

Precision and compact designs for Z / lift stages have been an industry challenge that ALIO recognized and for which the company engineered a solution. Legacy designs such as wedges are compact but lack sub-micron precision in all 6 DOF, and linear stages with counterbalances take up space as well as making application tooling a challenge to design around. The ALIO nano-precision, air counter balanced Z lift stages solved this with voice coils (VC)  and rigid precision structures that have application mounting location on all sides of the precision rectangular structure. The ALIO VC Z stages are available up to 50 mm of travel with our nano precision designs and compact counterbalancing. Similar designs for longer travels are available upon request.

Linear CM Servo Motor

ALIO produces CM linear servo stages for customers that need less costly True Nano® precision. CM servo motor stages still have the ALIO 6-D precision with less linear force for smaller and lower acceleration applications. The stage family uses the precision anti-skid bearings common to all other ALIO mechanical bearing products with the same 25 mm to 400 mm travel ranges.

MINI Hybrid Hexapod

ALIO’s MINI Hybrid Hexapod® is ideal for automated lens alignment/bonding to CCD arrays. It has been helpful in building camera array modules, translational OIS, telescopic integrated lenses for miniature cameras used in every day products like cell phone cameras and drones. Any application requiring 6- degrees of freedom positioning with nanometer/arc-sec levels of incremental motion and repeatability is a good fit for this product where product sensor resolution improvements are driving the need for higher precision.

AngularesTM Hybrid Hexapod

The 60-degree tip/tilt travel of the AngularesTM Hybrid Hexapod® is by far the most angular travel range available from any 6-Degree-Of-Freedom (6-DOF) positioner on the market and offers the same unmatched positioning performance found in any of ALIO’s full-line of Hybrid Hexapod systems. It is perfectly suited for applications including aspheric and freeform optical metrology, silicon photonics packaging and probing, laser micro processing (non-planar substrates and taper control), wafer metrology, camera module alignment and assembly, sensor/image stabilization testing, and optical element and fiber alignment.

The AngularesTM features precision crossed roller bearing guides, optical incremental or absolute encoder feedback on all axes, linear motor and/or servo ball screw drives, unlimited programmable tool center point locations and coordinate offsets, and zero backlash on all axes. The design makes the AngularesTM capable of unlimited XY travel, Z travel for 62 mm which can be increased to 208 mm using other tripod models, tip/tilt travel of 60 degrees (+/- 30 degrees) with continuous 360 degree Theta-Z, XYZ bidirectional repeatability of less than +/- 0.6 arc-seconds, velocity up to 100 mm/second XY and Z, and less than 10 nanometers linear and 0.1 arc-seconds angular minimum incremental motion.

Special Hybrid Hexapod Configurations

Welcome to WordPress. This is your first post. Edit or delete it, then start writing!

Copyright 2021 ALIO Industries | Website by SmartaStudio