Air Bearing Systems

ALIO Industries has developed leading-edge 6-D Nano Positioning® air bearing motion systems for a wide range of applications in manufacturing, inspection/repair, and metrology.

XY Travel

200 – 1000mm

Velocity/Acceleration

>1m/sec/>1 G

Payload Capacity

20kg (80kg Opt.)

Bi-Directional Repeatability

Down to +/- 100nm

Displacement Accuracy

<0.5µm

XY Travel

200 – 1000mm

Velocity/Acceleration

>1m/sec/>1 G

Payload Capacity

20kg (80kg Opt.)

Bi-Directional Repeatability

Down to +/- 100nm

Displacement Accuracy

<0.5µm

Product overview

ALIO Industries has developed leading-edge 6-D Nano Positioning® air bearing motion systems for a wide range of applications in manufacturing, inspection/repair, and metrology. With several patent-pending designs for Planar and Nano Z®, ALIO is well-positioned for the next generation application demands of TRUE NANO® precision in photovoltaic, semiconductor, ink jet deposition, lithography, and optical inspection applications.

Planar XY Air Bearing Stages

ALIO’s patented 2-axis planar XY air bearing system has set the bar in the world of 6-D Nano Positioning®. As both axes use the same highly precise granite base as reference, advanced flatness of just a single micron over several hundreds of mm (or even meters) of travel ranges can be achieved.

Thanks to ALIO’s patented design and the proprietary 6-D Nano Precision test methods, this highly stiff family of planar xy air bearing motion systems delivers sub-micron accuracy, and a +/- 100nm bi-directional repeatability even in higher quantities for serial machine production. With 200 mm to 800mm standard versions, and possible customizations to over 3 meters of X and Y travel, this product family has no equal for True Nano® precision in any kind of measurement / metrology applications and in the semiconductor industry.

Powerful linear direct drives and air bearings make these motion systems perfectly suited to high precision, high throughput applications that require smooth continuous scanning or a fast step-and-settle process over very long distances.

For more information on the planar xy air bearing stages, and the numerous customization options available, contact ALIO or have a brief look at following data sheet:

Planar XY Air Bearing Stage: AI-LM-(TRAVEL)00-ABL

Air Bearing Counterbalanced Z Stages

ALIO’s family of linear motor driven, vertical Z-lift stages with Air Bearing counterbalance are characterized by their low profile and extremely long travel ranges. Using high precision crossed roller bearings and linear encoders, the stages are equipped with a frictionless air bearing pneumatic cylinder. Similar to the GeoSymmetric series of stages, these long travel Z stages have counterbalance, motor, bearings, and encoder all placed on an approximate centerline of the stage. Payloads may be mounted directly to the face of the stage.

The Z-ABCB series — with its frictionless air bearing pneumatic cylinder counterbalance — can carry payloads of up to 25kg over 200mm or more.

Details:

Long Travel, High Payload: AI-LM-(TRAVEL)00-Z-ABCB-(OPTION)

Nano Z® – Dual Voice Coil Stage with Air Bearings

NANO Z® patented Z-lift air bearing stages overcome the legacy design issues associated with z-wedges and other vertical stages. They use a novel combination of air-bearings plus two voice coil motors in a compact footprint with up to 50mm travel.

Using air bearings means negligible friction which enables unparalleled accuracy and repeatability down to low double-digit nanometers. Variable counterbalancing easily handles heavy weights like wafer chucks, while still achieving nano-level precision over the full travel range.

The Nano Z® design places vertical force in line with the payload, and this makes it possible to place the stage directly below the payload instead of beside it, avoiding inevitable cantilever inaccuracies and nearly eliminating pitch, yaw and roll.

Dimensions and specification can be found in following data sheet:

Patented Nano Z®: AI-VC-2400-NANO-Z-AB

Rotational Air Bearing Stages

When the highest rotational precision is required, manufacturers can choose from ALIO’s line of air bearing rotary stages. Air bearings allow the stage to move without mechanical contact and therefore movement is frictionless and without wear. Errors like wobble, eccentricity, or runout can be minimized to get close to a perfect, smooth 360 degree movement even at high speeds or when the rotational stage is mounted vertically. Thanks to powerful torque motors, both constant continuous rotation as well as step-and-settle processes can be performed in an equally precise and reliable way.

It is no surprise that ALIO’s rotational air bearing stages can therefore be found in the most precise applications within the semiconductor, metrology, and photonics industries.  

For detailed specifications please download the following spec sheets:

Rotational Air Bearing Stages: AI-TM-(DIAMETER)R-AB

Large Rotational Air Bearing Stages: AI-TM-(DIAMETER)R-AB

Find the right stage for your application using our intuitive product configurator.

Contact ALIO.

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