Air Bearing Systems

ALIO Industries has developed leading-edge 6-D Nano Positioning® air bearing motion systems for a wide range of applications in manufacturing, inspection/repair, and metrology.

XY Travel

200 – 1000mm

Velocity/Acceleration

>1m/sec/>1 G

Payload Capacity

20kg (80kg Opt.)

Bi-Directional Repeatability

Down to +/- 100nm

Displacement Accuracy

<0.5µm

XY Travel

200 – 1000mm

Velocity/Acceleration

>1m/sec/>1 G

Payload Capacity

20kg (80kg Opt.)

Bi-Directional Repeatability

Down to +/- 100nm

Displacement Accuracy

<0.5µm

Product overview

ALIO Industries has developed leading-edge 6-D Nano Positioning® air bearing motion systems for a wide range of applications in manufacturing, inspection/repair, and metrology. With several patent-pending designs for Planar and Nano Z®, ALIO is well-positioned for the next generation application demands of TRUE NANO® precision in photovoltaic, semiconductor, ink jet deposition, lithography, and optical inspection applications.

Planar XY Air Bearing Stages

ALIO’s patented 2 axis planar XY air bearing system has set the bar in the world of 6-D Nano Positioning®. Using linear direct drives and air bearings, it is perfectly suitable for high precision, high throughput applications that require smooth continuous movement or a fast step and settle process over very long distances. With 300 mm to over 3 meters of X and Y travel this product family has no equal for True Nano® precision. Therefore those precision positioning stages are
used in broad selection of applications and industries such as semiconductor, metrology and any kind of measurement industry.

Air Bearing Z Stages

Single axis linear air bearings are available in horizontal or vertical orientation. The linear product family utilizes high precision crossed roller bearings and ironless linear direct drives with variable forces depending on customer needs. These product family standard designs are capable of several dozens of mm each with nanometer-level precision and used in many applications within semiconductor, metrology and measurement industry.

Nano Z® – Dual Voice Coil Stage with Air Bearings

Increased demands for True NANO® metrology and processes led ALIO to design and manufacture the NANO Z® patented Z lift air bearing stage to overcome legacy design issues associated with tip and tilt while attaining accuracy of less than 100 nanometers using standard Renishaw Invar encoders. The counterbalanced NANO Z® can easily hold heavy vacuum wafer chucks and still excel with nanometer-level precision over 24 mm of travel. It is therefore perfect for high demanding applications in the semiconductor and metrology industry.

Rotational Air Bearing Stages

ALIO’s nano precision rotary air bearing product family utilizes torque motors and air bearings. The comparatively compact design of this growing product line has excellent axial and radial run-out specifications for extreme precision needs. Which makes it suitable for high precision applications requiring a high
throughput without compromising in smoothness of movements. The backlash-free motor furthermore allows fast step and settle processes. It can be configured with variable torque options to meet a broad range of applications.

For all information regarding this product please download its datasheet.

Contact ALIO.

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