Linear Motion Systems

ALIO linear motion products have been designed and manufactured to have no equal in terms of performance and reliability.

XY Travel

30mm – 450mm

Velocity

0.3 – 1.0 m/sec

Linear Resolution

<5nm

Bi-Directional Repeatability

Down to +/- 30nm

Displacement Accuracy

~<1.0µm

XY Travel

30mm – 450mm

Velocity

0.3 – 1.0 m/sec

Linear Resolution

<5nm

Bi-Directional Repeatability

Down to +/- 30nm

Displacement Accuracy

~<1.0µm

Product overview

ALIO’s linear motion products have been designed and manufactured to have no equal in terms of performance and reliability. These “mechanical”  bearing stages can perform at a level of precision that alternative suppliers struggle to match with their “air” bearing stages. ALIO’s focus on 6-D Nano Precision® only — while others design and build to the 2-D world of planar repeatability and accuracy — keeps the company on the leading edge. All of the ALIO linear stage product families exhibit world class performance, component choice being dictated by the demands of exacting applications and cost sensitivity. 

ALIO does not build legacy products and is acutely aware of the 6-dimensional errors associated with simple linear motion. ALIO designs and manufactures with these issues in sharp focus with unique manufacturing techniques and leading-edge components tested to NIST traceable nano results.

Linear X Stages

Linear X Stages are probably the most common stages used in the precision industry, which is why it is not surprising that you can find ALIO’s linear X stages in nearly all precision applications.

By using two different types of linear direct drives — the “LM”- and the “CM”-type — this family of stages offers a wide variety of options for travel needs from 30mm to 300mm.

While the “LM” versions offer more force, higher acceleration, speed, and payloads of up to 50kg, the “CM”-series’ low-profile design allows for implementation in tools and applications with space constraints — of course, without compromising precision.

For more information please download and analyze the following datasheets:

Linear X: AI-LM-(TRAVEL)00

Low-profile Linear X: AI-CM-(TRAVEL)00

Enclosed Monolithic XY Stages

Used in any kind of high precision application, ALIO’s enclosed, monolithic XY Stages utilize direct linear drives and high precision crossed roller bearings built into a compact 3-plate system. With nanometer straightness and flatness — as well as an optimized orthogonality — you can be assured that your point precision is True Nano®.

While compact in size, standard travel ranges from 30mm up to 400mm are available. If required, stages can also be built for high vacuum or clean room applications.

The design achieves the highest precision with bi-directional repeatabilities of only +/- 30nm and is equally strong in scanning applications requiring a smooth, continuous movement or when the requirement is for a fast step and settle process — even when highest output matters the most.

The enclosed, monolithic XY stages are divided into the standard LM-series and the low-profile CM-series.

To download datasheets, look for:

Enclosed Monolithic XY: AI-LM-(TRAVEL)00-XY

Low-profile Enclosed Monolithic XY: AI-CM-(TRAVEL)00-XY

Open-centered Monolithic XY Stages

ALIO’s open-centered, monolithic XY stages are characterized by large apertures enabling usage in any kind of application requiring accessibility of the carried product from all sides.

Using powerful direct linear drives and high precision crossed roller bearings carefully designed into a 3-plate system, we are capable of achieving outstanding precision in our open-centered XY stages. Besides a bi-directional repeatability of just +/- 50nm, the stages offer superior straightness and flatness, as well as an optimized orthogonality that gives you Nano Precision® at travel ranges of 30mm up to 400mm.

Scanning applications requiring a smooth, continuous movement and fast step and settle processes can be performed equally well to help customers to achieve an ideal motion and increased throughput.

If the application requires, the stages can also be built for high vacuum or clean room applications.

The open-centered, monolithic XY stages are divided into the standard LM-series as well as the more compact CM-Series.

Detailed specifications, sizes and more can be found in following datasheets:

Open-Centered Monolithic XY: AI-LM-(TRAVEL)00-(THRU)E-XY

Low-profile Open-Centered Monolithic XY: AI-CM-(TRAVEL)00E-(THRU)-XY

Asymmetrical, Monolithic XY Stages

If you require different travels in x and y, need a low-profile solution to avoid space constraints, and can’t compromise on performance and precision, there are hardly any off-the-shelf products on the market. Still unique in the market, one of ALIO’s asymmetrical, monolithic XY stages can help solve this complex combination of motion requirements.

With their linear direct drives, high precision crossed roller bearings, and our 3-plate system, not only is highly precise and powerful motion guaranteed, but so is perfect orthogonality of the x and y axes in respect to each other.

“Asymmetrical” in this design concept refers to the two different travel ranges of these two stages that usually can only be achieved by mounted to different linear x stages on top of each other.

For further information, we suggest contacting us or downloading following specification sheets:

Asymmetrical, Monolithic XY: AI-LM-(TRAVEL_X)x(TRAVEL_Y)-XY

Asymmetrical, Monolithic XY: AI-SLM-(TRAVEL_X)x(TRAVEL_Y)-XY

Precision Ball-Screw Driven X Stages

In some cases, applications need to ensure that precision can be achieved in the presence of any kind of electrical noise. For such applications, ALIO offers stages driven by a torque motor moving a precision ball screw with an anti-backlash nut, and if necessary equipped with pneumatic or electric solenoid brakes.

Thanks to ALIO’s unique design and manufacturing principles, such stages still achieve a bi-directional repeatability of only +/- 100nm as well as straightness and flatness well below 5µm (and on request even 1µm can be maintained).

Off-the-shelf versions allow travels of 30mm, 100mm, 150mm, and 200mm, and can be realized for ambient, high vacuum and clean room conditions.

More information can be found on following datasheet:

Linear X with Precision Ball Screw:_AI-VBS-(TRAVEL)00-(BRAKE OPTION)

Micron 2 (µII) motion systems family

ALIO has introduced its new Micron 2 (µII) motion systems family to compete in the micron-level motion control market, where the demand is for low-cost, mid-precision, reliable, long travel stages. As with all products, ALIO’s Micron 2 (µII) motion systems are designed using the company’s uncompromising standards of “quality first” thereby ensuring long-term reliable operation.

The Micron 2 (µII) recirculating ball rail bearing stages come as standard in sizes of 100mm up to 2 meters thus providing the end-user a solution for a large variety of applications. This family of motion systems is a robust, powerful line that is designed to be used either stand-alone, or as a top axis of an integrated solution.

For more details please visit the dedicated Micron 2 (µII) motion systems page

Find the right stage for your application using our intuitive product configurator.

Contact ALIO.

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