ALIO provides monolithic, low-profile, open-center X, Y, Z electromagnetic driven stages for such applications, promoting high speed, high throughput, and low friction in a small footprint, scan times being reduced allowing better pre-scan images.
ALIO promotes increased throughput, reduced run time, and lower costs per run coupled with high quality and repeatable imaging by creating a smoother, continuous scan process using a monolithic XY stage and a low friction vertical Z-stage for focusing.
ALIO provides the Angulares Hybrid Hexapod for such applications, which accommodates large XY movement to shift the instrument from process step to process step.
