History & Milestones

Milestones for ALIO Industries

2001

ALIO Industries was founded with a focus on nanometer precision motion, quality, novel and outside the box design.

2002

First Piezo Hexapod

2003

First 10-12 Vacuum Linear Motion System travelling in 50mm of stroke

2004

Two US Patents for Piezo Hexapod

2009

First Air Bearing Lift Stage with less than 10-nanometer repeatability

2010

Novel Decoupled Air Bearing Gantry System with close and open center platens

2012

Patent on Nano Z™ air bearing lift stage

2013

First Hybrid Hexapod in the world. Novel design and unmatched 5 or 6 axis precision. A true game-changer

2014

Novel Conforming Bearing on granite in straightness and flatness to greatly enhance gantry systems precision

2015

Opened new state-of-the-art facility

2016

Industry’s first Asymmetric Monolithic XY Stage

2017

First of 3 patents for Hybrid Hexapod

2018

Novel Planar Rotary Air Bearing Stage for new Fritz Metrology platform

2020

Angulares™ Hybrid Hexapod, the industry’s only precision 6-DOF positioner with 60o tip/tilt range

2021

Patent for Planar Rotary Air Bearing Stage

2021

Acquired by Allied Motion Technologies

Contact ALIO.

Want to learn more about the services we offer?