Increased demands for True NANO^® metrology and processes led ALIO to design and manufacture the NANO Z^® patented Z lift air bearing stage to overcome legacy design issues associated with tip and tilt while attaining accuracy of less than 100 nanometers using standard Renishaw Invar encoders. The counterbalanced NANO Z^® can easily hold heavy vacuum wafer chucks and still excel with nanometer-level precision over 24 mm of travel

The attributes of this family of vertical Z-lift stages are:

• Use of linear or voice coil motors
• High rigidity crossed roller bearings
• High force motors
• Linear encoders
• Air counterbalanced
• Motor, bearings, encoder and counterbalance all on approximate centerline of the stage
• Payload can mount directly to the face or top surface of the stage to eliminate the weakness and resonant frequency issues associated with additional brackets

Excellent dynamic performance

GeoSymmertic® Z-Stage Linear Motor Drive with Magnetic  Counterbalance

The attributes of this family of vertical Z-lift stages are:

• Sturdy design minimizing Abbé errors
• DC Servo Linear Motors
• High rigidity crossed roller bearings
• Linear encoders
• Motor, bearings, encoder and counterbalance all on approximate centerline of the stage.
• Payload can mount directly to the face or top surface of the stage to eliminate the weakness and resonant frequency issues associated with additional brackets

4x to 10x more precise than Z-wedge stages

The attributes of this family of vertical linear stages are:

• Nano-precision design
• Linear servo motors
• High rigidity crossed roller bearings
• Linear encoders
• Counterbalanced with dual frictionless cylinders balancing the load. The cylinders are in-line with the motor, bearings and encoder thus they do not create an Abbé error

Motor, bearings, encoder and counterbalance all on approximate centerline of the stage.

The attributes of this family of vertical linear stages are:

• Granite base to ensure exceptional flatness and straightness
• Linear servo motors
• High rigidity, nano-precision air bearings
• Linear encoders
• Counterbalanced with dual frictionless cylinders balancing the load. The cylinders are in-line with the motor, bearings and encoder thus they do not create an Abbé error
• Counterbalance brackets can be changed if required to assure counterbalance force is transferred through the mass center of the load.

Motor, bearings, encoder and counterbalance all on approximate centerline of the stage