Z-Lift & Vertical Motion Stages

ALIO Industries’ Z-Lift motion platforms were created to address the unavoidable inaccuracies of Z-Wedge vertical stages, as well as to reduce the footprint and improve performance of linear stages mounted in the vertical orientation.

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Product overview

ALIO Industries’ Z-Lift motion platforms were created to address the unavoidable inaccuracies of Z-Wedge vertical stages, as well as to reduce the footprint and improve performance of linear stages mounted in the vertical orientation. Every component in a motion stage adds to the total error. Since Z-wedges have a minimum of three machined components with complex angles, three sets of bearings, a motor via a coupling, and an encoder, the result is a very inaccurate stage. ALIO answers this with a family of very high accuracy, highly repeatable vertical stages.

Patented NANO Z®

Increased demands for True NANO® metrology and processes led ALIO to design and manufacture the NANO Z® patented Z lift air bearing stage to overcome legacy design issues associated with tip and tilt while attaining accuracy of less than 100 nanometers using standard Renishaw Invar encoders. The counterbalanced NANO Z® can easily hold heavy vacuum wafer chucks and still excel with nanometer-level precision over 24 mm of travel

Mechanical Bearing Z Stages

The attributes of this family of vertical Z-lift stages are:

  • Use of linear or voice coil motors
  • High rigidity crossed roller bearings
  • High force motors
  • Linear encoders
  • Air counterbalanced
  • Motor, bearings, encoder and counterbalance all on approximate centerline of the stage
  • Payload can mount directly to the face or top surface of the stage to eliminate the weakness and resonant frequency issues associated with additional brackets

Excellent dynamic performance

Compact Voice Coil Z Stages

The attributes of this family of vertical Z-lift stages are:

  • Compact design, low profile height
  • Voice coil motors
  • High rigidity crossed roller bearings
  • Linear encoders
  • Air counterbalanced
  • Motor, bearings, encoder and counterbalance all on approximate centerline of the stage
  • Payload can mount directly to the face or top surface of the stage to eliminate the weakness and resonant frequency issues associated with additional brackets

4x to 10x more precise than Z-wedge stages

GeoSymmertic® Z-Stage Linear Motor Drive

GeoSymmertic® Z-Stage Linear Motor Drive with Magnetic  Counterbalance

The attributes of this family of vertical Z-lift stages are:

  • Sturdy design minimizing Abbé errors
  • DC Servo Linear Motors
  • High rigidity crossed roller bearings
  • Linear encoders
  • Motor, bearings, encoder and counterbalance all on approximate centerline of the stage.
  • Payload can mount directly to the face or top surface of the stage to eliminate the weakness and resonant frequency issues associated with additional brackets

4x to 10x more precise than Z-wedge stages

Linear Motor Counterbalanced Z Stages

The attributes of this family of vertical linear stages are:

  • Nano-precision design
  • Linear servo motors
  • High rigidity crossed roller bearings
  • Linear encoders
  • Counterbalanced with dual frictionless cylinders balancing the load. The cylinders are in-line with the motor, bearings and encoder thus they do not create an Abbé error

Motor, bearings, encoder and counterbalance all on approximate centerline of the stage.

Air Bearing Linear Motion Z Stages

The attributes of this family of vertical linear stages are:

  • Granite base to ensure exceptional flatness and straightness
  • Linear servo motors
  • High rigidity, nano-precision air bearings
  • Linear encoders
  • Counterbalanced with dual frictionless cylinders balancing the load. The cylinders are in-line with the motor, bearings and encoder thus they do not create an Abbé error
  • Counterbalance brackets can be changed if required to assure counterbalance force is transferred through the mass center of the load.

Motor, bearings, encoder and counterbalance all on approximate centerline of the stage

Linear Motor Magnetic Counter Balanced Z Stage

Linear Motor Magnetic Counter Balanced Z Stage for High Frequency and Quick Focus

The attributes of this family of vertical linear stages are:

  • Nano-precision design
  • Linear servo motors
  • High rigidity crossed roller bearings
  • Linear encoders
  • Removes the need for air lines to counterbalance and can be designed for motion AWAY from crashing on a power-off situation

Motor, bearings, encoder and counterbalance all on approximate centerline of the stage.

For all information regarding this product please download its datasheet.

Download datasheet

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