Semiconductor Industry

Lithography

ALIO’s patented air bearing stages enable the introduction of a new level of smooth, continuous serpentine step-and-scan technique eliminating stops and wasted time.

Metrology (Wafer/Mask Inspection)

ALIO has developed the NANO Z® patented Z-lift air bearing stages which has a novel air-bearing plus linear motor design in a very compact footprint with up to 24mm travel.

Microelectronics Assembly & Testing

ALIO provides vacuum chuck rotary stage linear drives which allow for extremely precise positioning of the test probes for any package shape, any package size, and wafers. Independently controlled stages enable more flexibility for various electronic test scenarios and significantly reduce handling efforts and test times.

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