Hybrid Hexapod

Less than 100 nm 3-Dimensional 6 axis Point Precision repeatability.

Product overview

ALIO’s patented next generation Hybrid Hexapod® takes a different approach to traditional 6 Degree of Freedom (6-DOF) positioning devices, and exhibits much higher performance at extremely competitive prices. Rather than 6 independent legs (and 12 connection joints) the Hybrid Hexapod® combines a precision XY monolithic stage, tripod, and continuous rotation theta-Z axis to provide superior overall performance. This renders traditional hexapod kinematics obsolete, with orders-of-magnitude improvements in precision, path performance, speed, stiffness and a larger work envelope with virtually unlimited XY travel, and fully programmable tool center point locations.

The Hybrid Hexapod® has less than 100 nm 3-Dimensional 6 axis Point Precision® repeatability, making it an essential technology for mission critical applications in the laser processing, optical inspection, photonics, semiconductor, metrology, and medical device sectors, and indeed all micro-machining projects.

Traditional hexapods cannot achieve sub-micron accuracy because they require the accurate coordination of the movement of all six axes to accomplish a motion profile, even if the requirement is only for a simple single-axis motion. In addition, despite the fact that the general perception is that hexapods exhibit good stiffness compared to serial stacked multi-axis systems, this is really only in the vertical “z” axis, with weaknesses in the “xy” plane.

MINI Hybrid Hexapod

ALIO’s MINI Hybrid Hexapod® is ideal for automated lens alignment/bonding to CCD arrays. It has been helpful in building camera array modules, translational OIS, telescopic integrated lenses for miniature cameras used in every day products like cell phone cameras and drones. Any application requiring 6- degrees of freedom positioning with nanometer/arc-sec levels of incremental motion and repeatability is a good fit for this product where product sensor resolution improvements are driving the need for higher precision.

AngularesTM Hybrid Hexapod

The 60-degree tip/tilt travel of the AngularesTM Hybrid Hexapod® is by far the most angular travel range available from any 6-Degree-Of-Freedom (6-DOF) positioner on the market and offers the same unmatched positioning performance found in any of ALIO’s full-line of Hybrid Hexapod systems. It is perfectly suited for applications including aspheric and freeform optical metrology, silicon photonics packaging and probing, laser micro processing (non-planar substrates and taper control), wafer metrology, camera module alignment and assembly, sensor/image stabilization testing, and optical element and fiber alignment.

The AngularesTM features precision crossed roller bearing guides, optical incremental or absolute encoder feedback on all axes, linear motor and/or servo ball screw drives, unlimited programmable tool center point locations and coordinate offsets, and zero backlash on all axes. The design makes the AngularesTM capable of unlimited XY travel, Z travel for 62 mm which can be increased to 208 mm using other tripod models, tip/tilt travel of 60 degrees (+/- 30 degrees) with continuous 360 degree Theta-Z, XYZ bidirectional repeatability of less than +/- 0.6 arc-seconds, velocity up to 100 mm/second XY and Z, and less than 10 nanometers linear and 0.1 arc-seconds angular minimum incremental motion.

Special Hybrid Hexapod Configurations

For all information regarding this product please download its datasheet.

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