Hybrid Hexapod

A game-changer in the field of motion control, that will stimulate innovation as an enabler of next-generation manufacturing processes.

Max. Travel XY/Z/A/B/G

Unlimited/60/60/360

Min. Travel XY/Z/A/B/G

60/6/5/5/360

Max. Linear, Ang. Velocity

0.5m/s, 180deg/s

Linear Resolution

<5nm

Bi-Directional Repeatability

Down to +/- 80nm

Displacement Accuracy

~<1.0µm

Max. Travel XY/Z/A/B/G

Unlimited/60/60/360

Min. Travel XY/Z/A/B/G

60/6/5/5/360

Max. Linear, Ang. Velocity

0.5m/s, 180deg/s

Linear Resolution

<5nm

Bi-Directional Repeatability

Down to +/- 80nm

Displacement Accuracy

~<1.0µm

Product overview

ALIO’s patented next generation Hybrid Hexapod® takes a different approach to traditional 6 Degree of Freedom (6-DOF) positioning devices, and exhibits much higher performance at extremely competitive prices. The Hybrid Hexapod® combines a precision XY monolithic stage, tripod, and continuous rotation theta-Z axis. This renders traditional hexapod kinematics obsolete, with orders-of-magnitude improvements in precision, path performance, speed, stiffness and a larger work envelope with virtually unlimited XY travel, and fully programmable tool-center point locations.

The Hybrid Hexapod® has less than 100 nm 3-Dimensional 6 axis Point Precision® repeatability, making it an essential technology for mission critical applications in the laser processing, optical inspection, photonics, semiconductor, metrology, and medical device sectors, and indeed all micro-machining projects.

Standard Hybrid Hexapod

We believe that in the nano age, traditional hexapods will become rare and maybe even obsolete. The Hybrid Hexapod® is ALIO’s novel, patented approach to six degree of freedom (6-DOF) positioning, resulting in nano-level accuracy at any working point. A design that allows the Hybrid Hexapod® to be two orders of magnitude more precise than any competitive hexapod built today.

The modular concept uses a tripod with non-contact linear driven motors and linear encoders — for any rotary and Z motion — sitting on a monolithic XY basis. The tripod’s links are designed to create a stiffness unique to this class of hexapods, and which allow the avoidance of common problems associated with screw-driven stewart platforms. Pitch errors, backlash, calculation errors from conversion of a rotary encoder to a linear movement, friction, wear, and slow speed are no longer an issue. The monolithic base allows unrivalled horizontal movements.

The entire six-dimensional motion is simplified while the working cubic volume is drastically increased. Need to move in X or Y? Move one axis only instead of six legs. Need to tip or tilt? You only need to move the three legs of the tripod instead of all six legs. Need to rotate around the Z axis? Just add a 360 degrees rotary stage in the middle of the tripod.

All these and many more specific details make this a unique design ideal for literally any application requiring six degrees of freedom positioning with nanometer/arc-sec levels of incremental motion and repeatability. An extensive overview of what can be achieved with our standard configurations is given in  the following datasheet:

Standard Hybrid Hexapod: AI-HH-(XY TRAVEL)XY-(Z TRAVEL)Z-(R DIAMETER)R-(OPTION)

MINI Hybrid Hexapod

Currently the smallest of our Hybrid Hexapod® line, the MINI is compact but still provides a 54,000 mm2 working volume (60x60x15mm). With the flexibility to scale tripod, rotary and monolithic XY, you can size your MINI to your required working volume. Brakes, gear reduction, ball screw drive, and linear motor drive are some of the options to match the performance to your application.

ALIO’s MINI Hybrid Hexapod® is ideal for automated lens alignment or bonding processes. It has been helpful in building camera array modules, translational OIS, and telescopic integrated lenses for miniature cameras used in every day products like cell phone cameras and drones. Any application requiring six degrees of freedom (6-DOF) positioning with nanometer/arc-sec levels of incremental motion and repeatability is a good fit for this product.

Find out more by downloading the detailed specifications:

Miniature Hybrid Hexapod: AI-HH-(XY TRAVEL)XY-(Z TRAVEL)Z-(R DIAMETER)RT-(OPTION)

AngularesTM – Extra large Tip/Tilt Range Hexapod

The 60-degree tip/tilt travel of the AngularesTM Hybrid Hexapod® is by far the most angular travel range available from any 6-Degree-Of-Freedom (6-DOF) positioner on the market, and offers the same unmatched positioning performance found in any of ALIO’s full-line of Hybrid Hexapod systems.

The AngularesTM features precision crossed roller bearing guides, optical incremental or absolute encoder feedback on all axes, linear motor and/or servo ball screw drives, unlimited programmable tool center point locations and coordinate offsets, and zero backlash on all axes. The design makes the AngularesTM capable of unlimited XY travel, Z travel of 62 mm (which can be increased to 208 mm using other tripod models); tip/tilt travel of 60 degrees (+/- 30 degrees) with continuous 360 degree Theta-Z; XYZ bidirectional repeatability of less than +/- 100nm; velocity up to 100 mm/second XY and Z; and less than 10 nanometers linear and 0.1 arc-seconds angular minimum incremental motion.

This makes the AngularesTM perfectly suited for many applications including aspheric and freeform optical metrology, silicon photonics packaging and probing, laser micro processing (non-planar substrates and taper control), wafer metrology, camera module alignment and assembly, and optical element and fiber alignment.

Data sheets available for download:

AngularesTM – Extra large Tip/Tilt: AI-HH-30D-(XY TRAVEL)XY-(Z TRAVEL)Z-(R DIAMETER)R

Special Task Hybrid Hexapods

ALIO’s modular and versatile Hybrid Hexapod® concept allows various adaptions and customization to align with your application requirements. These can range from applications with several dozens of kg load and high force requirements, to totally novel designs with large apertures. Some requirements have been so commonly requested that we decided to standardize them and make them available to all our customers. See specific details below:

High Torque Hybrid Hexapod: AI-HH-(XY TRAVEL)XY-(Z TRAVEL)Z-(R DIAMETER)RGR

High Load Hybrid Hexapod: AI-6D-(XY TRAVEL)XY-(R DIAMETER)R-(Z TRAVEL)Z-(OPTION)

Ball Screw Driven Hybrid Hexapod: AI-HH-BSD-(XY TRAVEL)XY-(Z TRAVEL)Z-(R DIAMETER)R-(OPTION)

Stepper-Motor based Hybrid Hexapod: AI-HH-ST14-(XY TRAVEL)XY-(Z TRAVEL)Z-(R DIAMETER)R-(OPTION)

High Angle Tripods

Tripods allow the combination of z-movement with tip and tilt around a common center point of rotation. ALIO introduced its tripods as a flexible part of the Hybrid Hexapod® design, paying special attention to finding ways to overcome traditional design issues related to simple link designs. The rigid structure of the links counteracts horizontal forces, and offers enhanced stiffness. A direct readout with linear encoders instead of rotary encoders overcomes problems like pitch errors, backlash, and calculation errors when converting a rotary encoder to a linear movement. To secure the process and increase load capacities, counterbalance options are available to handle gravity, while the drive can be fully focused on the displacement.

Today our tripods — as part of a Hybrid Hexapod® or as stand alone system — move in z from 6mm to 106mm and allow angular movements of just +/- 3 degrees or as high as +/- 20 degrees.

All details can be found within following two documents:

Linear Tripod: AI-TRI-LM-(Z TRAVEL)00-(OPTION)

Linear Tripod with integrated Rotary: AI-TRI-LM-(Z TRAVEL)00-(R DIAMETER)-(OPTION)

Find the right stage for your application using our intuitive product configurator.

Contact ALIO.

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