Rotary Motion Systems

ALIO Industries offers a wide range of rotary motion systems to meet the needs of today’s demanding high-precision applications. Our TRUE NANO® precision rotary stages are designed and manufactured to the highest standards, ensuring unparalleled performance and reliability.

Diameter

56 – 312 mm

Torque

0.66 – 48 Nm

Angular Resolution

0.01  – 0.04 arc-sec

Bi-Directional Repeatability

Down to +/- 0.2 arc-sec

Angular Accuracy

Down to +/- 3.0 arc-sec

Diameter

56 – 312 mm

Torque

0.66 – 48 Nm

Angular Resolution

0.01  – 0.04 arc-sec

Bi-Directional Repeatability

Down to +/- 0.2 arc-sec

Angular Accuracy

Down to +/- 3.0 arc-sec

TRUE NANO® Precision Rotary Stages by ALIO Industries – High-Precision Rotary Motion Solutions for Demanding Applications

ALIO Industries offers high-precision rotary motion systems through its TRUE NANO® precision rotary stages. These systems are designed to meet the growing demand for precise rotary motion control. ALIO’s line of rotary stages can be customized to meet the specific requirements of individual applications. Contact us today to learn more about our rotary motion solutions.

Crossed Roller Bearing Rotary Stages

ALIO Industries offers a range of precision rotary stages that are designed to meet the most demanding applications. Our standard rotary stage family uses crossed roller bearings and frameless torque motors to provide extreme throughput, acceleration, and mass capabilities while maintaining nanometer-level precision. These rotary stages are also highly stiff and can handle offset loads with ease.

Our crossed roller bearing rotary stages have +/-0.2 arc-second repeatability and are rated at 13 to 20 microns of radial and axial run-out. Some models even offer run-outs below 5 microns. We also offer mechanical bearing rotary stages in different sizes to meet varying duty cycles, mass, and acceleration needs, ranging from 80 mm to 300 mm in diameter. For mounting a vacuum chuck, vacuum rotary union options are available on the inner diameter.

Explore ALIO’s range of crossed roller bearing and mechanical bearing rotary stages to find the perfect solution for your rotary motion system needs.

Need more details?

Crossed Roller Bearing Rotary: AI-TM-(DIAMETER)R

360 Degree Angular Contact Bearing Stages

ALIO Industries offers mechanical bearing rotary stages with angular contact bearings to meet the requirements of applications that demand a compact and flat rotary stage with a decent aperture size. With torque motors, these stages enable a smooth continuous movement or a step-and-settle process over the full 360 degrees, without compromising precision or throughput. The stages are highly versatile and suitable for various industries and applications.

To know more about this family of stages, check out the spec sheet.

360 degree Angular Contact Bearing Stages: AI-TM-(DIAMETER)RA

Rotational Air Bearing Stages

ALIO Industries offers a line of air bearing rotary stages for manufacturers that require the highest rotational precision. These stages move without mechanical contact, resulting in frictionless and wear-free movement. ALIO’s air bearing rotary stages can minimize errors such as wobble, eccentricity, or runout to achieve near-perfect, smooth 360-degree movement even at high speeds or when mounted vertically. Equipped with powerful torque motors, these stages can perform both constant continuous rotation and step-and-settle processes with equal precision and reliability.

It’s no wonder that ALIO’s air bearing rotary stages are commonly used in highly precise applications within the semiconductor, metrology, and photonics industries. For detailed specifications, download the following spec sheets:

Rotational Air Bearing Stages: AI-TM-(DIAMETER)R-AB

Large Rotational Air Bearing Stages: AI-TM-(DIAMETER)R-AB

2 Axis Gimbal

ALIO Industries offers industry-leading torque ratings with its two-axis gimbal rotary systems, delivering high rotational speeds without sacrificing precision. The systems can be customized for each customer’s mass, with variable counterbalance, cable guidance, and cable and air feed-through capabilities. The dual-axis rotary systems allow for +/-110 and +/-170 degrees of rotation on the horizontal axis, while exhibiting angular travel +/-180 degrees for rotation about the vertical axis. An air purge is incorporated to protect against contamination and maximize lifespan.

ALIO’s 2-axis gimbal rotary systems have been utilized in a range of industries, including metrology, laser processing, and additive manufacturing. For more detailed specifications, please refer to the spec sheet.

2 Axis Gimbal

Open-Center Rotary Stages

ALIO Industries’ open-center rotary stages utilize tangential linear direct drives with angular contact bearings for up to +/-7.5 degrees of angular movement and an extreme aperture. These stages are ideal for high-precision applications, including the semiconductor, metrology, and life science industries. With rigid bearings and a powerful linear direct motor, they are designed to meet the high-throughput needs of the high-precision market.

Download our product spec sheet for more details.

Rotary with Large Aperture: AI-LM-(DIAMETER)RA

Find the right stage for your application using our intuitive product configurator.

Contact ALIO.

Get in touch with ALIO: Expert solutions for your precision motion control needs