Rotary Motion Systems

ALIO Industries has also developed TRUE NANO® precision rotary stages to meet and exceed today’s demand for high precision rotary motion.

Diameter

56 – 312 mm

Torque

0.66 – 48 Nm

Angular Resolution

0.01  – 0.04 arc-sec

Bi-Directional Repeatability

Down to +/- 0.2 arc-sec

Angular Accuracy

Down to +/- 3.0 arc-sec

Diameter

56 – 312 mm

Torque

0.66 – 48 Nm

Angular Resolution

0.01  – 0.04 arc-sec

Bi-Directional Repeatability

Down to +/- 0.2 arc-sec

Angular Accuracy

Down to +/- 3.0 arc-sec

Product overview

ALIO Industries has also developed TRUE NANO® precision rotary stages to meet and exceed today’s demand for high precision rotary motion. ALIO’s line of rotary stages continues to expand as the company works with each individual customer on a one-to-one basis to provide customized motion control solutions perfectly aligned to the specifics of particular applications.

Crossed Roller Bearing Rotary Stages

ALIO’s standard and most common rotary stage family uses crossed roller bearings in combination with frameless torque motors. These stages can handle applications where the mass, acceleration, or simply throughput needs are extreme, while still maintaining nanometer-level precision performance. Because of the improved stiffness it can also perform well with offset loads.

Standard ALIO crossed roller bearing rotary stages have only +/-0.2 arc-second repeatability and are rated at 13 to 20 microns of radial and axial run-out, with optional run-outs of certain models below 5 microns. The mechanical bearing rotary stage family has multiple motor sizes to meet different duty cycles, as well as mass and acceleration needs from 80 mm to 300 mm in diameter. Vacuum rotary union options are available on the inner diameter for mounting a vacuum chuck.

Need more details?

Crossed Roller Bearing Rotary: AI-TM-(DIAMETER)R

360 Degree Angular Contact Bearing Stages

ALIO has designed mechanical bearing rotary stages with angular contact bearings addressing the need for very compact, flat, rotary stages for applications that require a decent sized aperture. Through the use of torque motors, the stages allow a smooth continuous movement or a step-and-settle process over the full 360 degrees. As we only use the finest bearings and motors, you don’t need to make compromises on precision or throughput — both can be maximized with this family of stages.

This is a versatile stage for various applications and industries!

Find out more within the spec sheet:

360 degree Angular Contact Bearing Stages: AI-TM-(DIAMETER)RA

Rotational Air Bearing Stages

When the highest rotational precision is required, manufacturers can choose from ALIO’s line of air bearing rotary stages. Air bearings allow the stage to move without mechanical contact and therefore movement is frictionless and without wear. Errors like wobble, eccentricity, or runout can be minimized to get close to a perfect, smooth 360 degree movement even at high speeds or when the rotational stage is mounted vertically. Thanks to powerful torque motors, both constant continuous rotation as well as step-and-settle processes can be performed in an equally precise and reliable way.

It is no surprise that ALIO’s rotational air bearing stages can therefore be found in the most precise applications within the semiconductor, metrology, and photonics industries.  

For detailed specifications please download the following spec sheets:

Rotational Air Bearing Stages: AI-TM-(DIAMETER)R-AB

Large Rotational Air Bearing Stages: AI-TM-(DIAMETER)R-AB

2 Axis Gimbal

Incorporating ALIO’s industry-leading torque ratings, our two-axis gimbal rotary systems are capable of high rotational speeds while maintaining the stand-out precision levels expected from ALIO’s systems.

ALIO’s two-axis systems are designed around the customers’ mass, with variable counterbalance, cable guidance, and cable and air feed-through capabilities. With hard-stops allowing for +/- 110 and +/-170 degrees of rotation for nearly unlimited part access on the horizontal axis, ALIO’s dual axis rotary systems exhibit angular travel +/- 180 degrees for rotation about the vertical axis.

An incorporated air purge protects the stage against contamination and maximizes life span.

Metrology, laser processing, additive manufacturing, and many other industry sectors have benefited from these ALIO products.

More details are shown on the spec sheet:

2 Axis Gimbal

Open-Center Rotary Stages

This type of rotary stage utilizes a tangential linear direct drive with angular contact (duplex pair) bearings. The result is a family of stages with up to +/-7.5 degrees angular movement, a very low profile, and an extreme aperture for maximum accessibility from both sides. As even 12-inch wafers can fit into the aperture, it is not surprising that this stage is getting increasingly common in applications in the semiconductor industry, but it is as commonly seen in metrology or even life science applications.

With the rigid bearings and highly powerful linear direct motor, this stage contributes to the high-throughput needs of the high precision market.

More information available for download:

Rotary with Large Aperture: AI-LM-(DIAMETER)RA

Find the right stage for your application using our intuitive product configurator.

Contact ALIO.

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