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Nano Precision® Motion Systems

ALIO Designs and Manufacturers Proprietary Robotic Devices and Tools that Enable Precise Nano-Scale Movements for Manufacturing and Research & Development.

Products Include Hexapods, Air Bearings, Linear & Rotary Atmospheric and Vacuum Systems.

Linear motion systems

  • Linear Servo Motor Stages

Air Bearing Systems

  • Planar Air Bearing System
  • Linear Air Bearing System
  • Rotary Air Bearing Stage
  • Z Air Bearing Stage

 Z-Lift and Vertical Axis Motion Systems

  • NANO Z® Air Bearing Lift
  • NANO Z® Linear Servo

Rotary Motion Systems

  • Servo Torque Motor Stages

Parallel Kinematics Motion Systems

  • Hybrid Hexapod®
  • Tripods

Micron 2 Systems

  • Micron 2
  • Ball-Rail Systems
  • Long Travel Systems

Cartesian Gantries

  • Cartesian Robots
  • Industrial Robots
  • Gantry Assemblies with Tool-Handling Options

ALIO Solutions

  • Application-Specific Systems
  • Custom Designed Products
  • OEM-Platforms
  • Integrated Sub-Assemblies