Motion Control for 3D Optical Metrology OEMs — Engineering Accuracy at the Platform Level

Your Sensor Is Only as Good as the Motion That Drives It

As an OEM of high-resolution 3D optical metrology systems, your reputation is staked on measurement fidelity. Whether you build systems for semiconductor wafer inspection, freeform surface analysis, or advanced component verification, your sensor’s performance is only as good as the platform that moves the part or the sensor.

That’s where ALIO Industries comes in.

We partner with OEMs and system developers to deliver motion platforms that meet (and often exceed) the geometric precision and stability requirements of modern metrology sensors.

Our motion systems aren’t simply about movement. They’re about enabling the integrity of your data and enhancing your system’s total performance envelope.

Designed for the Rigors of High-Resolution Metrology

Your customers often expect sub-micro or nanometer-scale accuracy across increasingly complex scanning applications. That’s why our motion platforms are engineered from the ground up to deliver:

• Ultra-straight and flat travel, verified via laser interferometry
• Nanometer-to-submicron repeatability, over both short and long strokes
• Stiff, stable motion architectures, to eliminate flex and drift
• Cleanroom compatibility for contamination-sensitive environments

Whether you’re integrating confocal sensors, white light interferometers, or fringe projection systems, we ensure the motion side supports your sensor’s resolution, not limits it.

ALIO’s OEM Integration Advantage

We understand what it takes to build a turnkey metrology system. Design constraints, payload considerations, thermal management, and software control must all align. ALIO brings over two decades of experience in supporting OEMs with:

• Custom and configurable motion platforms from compact linear stages to full 6-DOF architectures
• Mechanical integration support, including base/frame compatibility and (Center of Gravity (COG) tuning
• Onsite engineering collaboration, to accelerate development and reduce integration risk

And because we build everything in-house, from machining to metrology to final testing, we can validate and document performance before shipment, streamlining your verification process.

Precision Enabled by Smart Control

Your sensor delivers high fidelity data, but the motion must match it dynamically. That’s why we integrate cutting-edge drive and control technology into our platforms, including:

• Feedforward motion algorithms to reduce lag and improve stability
• COG calibration to ensure optimal system balance
• Real-time motion profile tuning, with jerk-limited paths and trajectory smoothing

These features aren’t just bells and whistles, they’re essential to ensuring scan consistency and minimizing artifacts, even when pushing the limits of acceleration or scanning speed.

We work with your controls and software teams to ensure motion and data capture are synchronized, efficient, and accurate, from prototype to production.

Why OEMs Choose ALIO

From laser metrology to nano-inspection systems, ALIO is the trusted motion partner behind some of the most advanced metrology tools on the market.

OEMs come to us because:

• We deliver measurement-grade motion with documented precision
• We offer application-specific engineering support
• We design platforms that scale, from benchtop tools to factory-scale systems

Your Motion Partner from Development to Deployment

As a metrology OEM, you can’t afford motion drift, profile distortion, or calibration instability. ALIO helps you eliminate those risks, and raises the bar on what your system can do.

At ALIO, our focus in Precision Built for You. We’re not just building motion platforms. We’re building the foundation your data depends on.