Model | AI-VBS-10000 | ||
Stage | Linear Stage | ||
Travel | 100 mm (+/- 50 mm) | ||
Dimensions (Length x Width x Height) | 295 mm x 120 mm x 50 mm | ||
Brake Options | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
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(-Pbrk) Dimensions (Length x Width x Height) | 329 mm x 120 mm x 50 mm | ||
(-Ebrk) Dimensions (Length x Width x Height) | 377 mm x 120 mm x 50 mm | ||
Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
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Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm | +/- 1.0 µm | +/- 0.3 µm |
Backlash | 0 nm | ||
Bidirectional Linear Repeatability | +/- 100 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
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Straightness | +/- 2.5 µm | +/- 1.5 µm | +/- 1.2 µm |
Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
Pitch [2] | +/- 15 arc-sec | ||
Yaw | +/- 15 arc-sec | ||
Roll | +/- 15 arc-sec | ||
Max Velocity [3] | 0.3 m/s | ||
Max Peak Acceleration [3] | 1.0 G | ||
Max Payload Capability W/ Axis Oriented Horizontal | 25 kg | ||
Max Payload Capability W/ Axis Oriented Vertical | 12 kg | ||
Assembly Mass | 3.8 kg |
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