Model	AI-LM-30000-AB8
Stage	Air Bearing Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	676.4 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	15.5 kg

Model	AI-LM-20000-AB8
Stage	Air Bearing Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	574.8 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	14 kg

Model	AI-LM-30000-AB
Stage	Air Bearing Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	524 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	7.8 kg

Model	AI-LM-20000-AB
Stage	Air Bearing Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	422.4 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	6.5 kg

Model	AI-LM-30000-ABL
Stage	XY Planar Air Bearing Stage
Travel - XY	300 mm (+/- 150 mm)
Optional Travel - Yaw Compliance	Optional: +/- 0.1 deg
Dimensions (Length x Width x Height)	1350 mm x 800 mm x 145 mm
Dimensions Moving Plate (Length x Width)	404 mm x 423.4 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available
Structure	Anodized Aluminum 6061-T6
Base Structure	Precision Lapped Black Granite
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy	< +/- 0.5 µm
Repeatability	< +/- 100 nm
Straightness	< +/- 0.5 µm
Flatness	< +/- 1 µm
Max Velocity	> 1 m/s
Max Acceleration	> 1 G
Load Capacity	20 kg Optional: 80+ kg
Assembly Mass	Depending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements	Custom Plate L x W x H
	Custom X and/or Y Travel
	Custom User Mounting Interface Features
	Custom Platen Designs (Open Center Options)
	Custom Compact Designs for Small Footprint
	Customer Cable Routing
	Customizable Motor Forces
	Custom High Payload Options
	Custom Granite Features and Sizes
	Various Material Options Throughout
	Single Axis Versions Available (Y Axis Only)
	Various Support and Vibration Isolation Options
	Various Safety System Options
	Various Control Chassis Options

Model	AI-LM-20000-ABL
Stage	XY Planar Air Bearing Stage
Travel - XY	200 mm (+/- 100 mm)
Optional Travel - Yaw Compliance	Optional: +/- 0.1 deg
Dimensions (Length x Width x Height)	1250 mm x 700 mm x 145 mm
Dimensions Moving Plate (Length x Width)	404 mm x 423.4 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available
Structure	Anodized Aluminum 6061-T6
Base Structure	Precision Lapped Black Granite
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy	< +/- 0.5 µm
Repeatability	< +/- 100 nm
Straightness	< +/- 0.5 µm
Flatness	< +/- 1 µm
Max Velocity	> 1 m/s
Max Acceleration	> 1 G
Load Capacity	20 kg Optional: 80+ kg
Assembly Mass	Depending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements	Custom Plate L x W x H
	Custom X and/or Y Travel
	Custom User Mounting Interface Features
	Custom Platen Designs (Open Center Options)
	Custom Compact Designs for Small Footprint
	Customer Cable Routing
	Customizable Motor Forces
	Custom High Payload Options
	Custom Granite Features and Sizes
	Various Material Options Throughout
	Single Axis Versions Available (Y Axis Only)
	Various Support and Vibration Isolation Options
	Various Safety System Options
	Various Control Chassis Options

Model		AI-HH-30D-200XY-62Z-80R-LM
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		571 mm x 401 mm x 322.2 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 30 nm
	Z	+/- 200 nm
	Pitch And Roll	+/- 1 arc-sec
	Yaw	+/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	100  mm/s
	Z	15  mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>2000 deg/s²
Max Payload		5-10 kg
Assembly Mass		30 kg

Model		AI-HH-30D-200XY-62Z-80R-CM
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		510 mm x 336.5 mm x 293.2 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 30 nm
	Z	+/- 200 nm
	Pitch And Roll	+/- 1 arc-sec
	Yaw	+/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	50  mm/s
	Z	15  mm/s
Max Linear Acceleration [3]	XY	0.1 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>2000 deg/s²
Max Payload		5 kg
Assembly Mass		14 kg

Model		AI-HH-200XY-60Z-154RA
Stage		Hybrid Hexapod
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		60 mm (+ 60 mm/- 0 mm)
Travel - Pitch & Roll		+/- 14 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		443.2 mm x 410.1 mm x 378 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw Yaw: Torque Motor
Brake		Pneumatic Release, Spring Lock
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	10 nm	7 nm	4 nm
	Radial Runout	10 nm	7 nm	4 nm
	Wobble	20 arc-sec	10 arc-sec	6 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.02 arc-sec
	Yaw	~0.01 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	500  mm/s
	Z	30  mm/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	60 deg/s
	Yaw	1800 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>3600 deg/s²
Max Payload		20 kg
Assembly Mass		57 kg

Model		AI-HH-200XY-15Z-56RT-CM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		336.5 mm  x 275 mm x 202.7 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc/sec	5 arc/sec	1 arc/sec
	XZ & YZ	250 arc/sec	200 arc/sec	50 arc/sec
Max Linear Velocity [3]	XY	50 mm/s
	Z	15 mm/s
Max Linear Acceleration[3]	XY	0.1 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch and Roll	30 deg/s
	Yaw	3000 deg/s
Max Angular Acceleration [3]	Pitch and Roll	>1000 deg/s²
	Yaw	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		16.3 kg

Model	AI-6D-250XY-92Z
Stage	Hybrid Hexapod  (6 DOF)
Travel - XY	250mm (+/- 125mm)
Travel - Z	92mm (+ 92mm/ - 0mm)
Travel - Pitch & Roll	+/- 20 deg
Travel - Yaw	360 deg continuous
Dimensions (Length x Width x Height)	435 mm x 435 mm x 707.5 mm
Drives	XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder Optional: Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications
Linear Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution	~0.02 arc-sec
Yaw Resolution	~0.01 arc-sec
Max Linear Velocity [10]	0.3 m/s
Max Angular Velocity (Pitch & Roll) [10]	90 deg/s
Max Angular Velocity (Yaw) [10]	180 deg/s
Assembly Mass	130 kg
Max Payload [11]	35 kg

Model		AI-HH-300XY-206Z-154R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		300 mm (+/- 150 mm)
Travel - Z		206 mm (+ 206 mm/- 0 mm)
Travel - Pitch & Roll		+/- 18 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		504.2 mm x 500 mm x 660 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	10 µm	7 µm	4 µm
	Radial Runout	10 µm	7 µm	4 µm
	Wobble	20 arc-sec	10 arc-sec	6 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	~0.01 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	Pitch and Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		20 kg
Assembly Mass		122 kg

Model		AI-HH-300XY-106Z-154R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		300 mm (+/- 150 mm)
Travel - Z		106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll		+/- 18 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		504.2 mm x 500 mm x 519.9 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	10 µm	7 µm	4 µm
	Radial Runout	10 µm	7 µm	4 µm
	Wobble	20 arc-sec	10 arc-sec	6 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	~0.01 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		10 kg
Assembly Mass		105 kg

Model		AI-HH-300XY-106Z-104R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		300 mm (+/- 150 mm)
Travel - Z		106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll		+/- 18 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		504.2 mm x 500 mm x 519.9 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	12 µm	9 µm	6 µm
	Radial Runout	12 µm	9 µm	6 µm
	Wobble	25 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	0.02 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch and Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	Pitch and Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		7.5 kg
Assembly Mass		105 kg

Model		AI-HH-200XY-40Z-104R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		200 mm(+/- 100 mm)
Travel - Z		40 mm (+ 40 mm/- 0 mm)
Travel - Pitch & Roll		+/- 11 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		399 mm x 359 mm x 318.9 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	12 µm	9 µm	6 µm
	Radial Runout	12 µm	9 µm	6 µm
	Wobble	25 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	0.02 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Yaw	180 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		5 kg
Assembly Mass		46 kg

Model	AI-LM-20000-Z-ABCB
Stage	Vertical Z Stage
Travel	200mm (+/- 100mm)
Dimensions (Length x Width x Height)	230mm x 50mm x 484mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 3.0 µm	+/- 2.0 µm	+/- 1.5 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	2.5 G
Max Payload Capability	25 kg
Assembly Mass	9.3 kg

Model	AI-LM-17000-("PAYLOAD")-Z-MCB-BASE
Stage	Vertical Z Stage
Travel	170 mm (+/- 85 mm)
Payload Options	20 N, 30 N, 40 N, 50 N, or 60 N
Dimensions (Length x Width x Height)	262 mm x 50 mm x 340 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)		ULTRA		NANO
Linear Displacement Accuracy	+/- 5 µm		+/- 2.0 µm		+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 75 nm				+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm		+/- 2.0 µm		+/- 1.5 µm
Flatness [2]	+/- 5.0 µm		+/- 2.0 µm		+/- 1.5 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	18 arc-sec
Max Velocity [3]	1 m/s
Max Acceleration [3]	2.0 G
Payload (Nominal)	20 N	30 N	40 N	50 N	60 N
Minimum To Maximum Payload Range	15-25 N	25-35 N	35-45 N	45-55 N	55-65 N
Assembly Mass	13.8 kg

Model	AI-LM-30000-UII
Stage	Cartesian Gantry
Travel - X And/Or Travel - Y	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	600 mm x 807 mm x 320 mm
Max. Sample Width (Inner Width)	434 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	STD	PRCSN	ULTRA
Linear Displacement Accuracy	+/- 12 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 10 µm	+/- 6 µm
Pitch	20 arc-sec
Yaw	20 arc-sec
Roll	20 arc-sec
Max Velocity With AC Drive [3]	2.0  m/s
Max Velocity With 48VDC Drive [3]	0.5 m/s
Max Acceleration With AC Drive [3]	2.5 G
Max Acceleration With 48VDC Drive [3]	0.5 G
Max (Vertical) Payload Capability	25 kg
Max (Horizontal) Payload Capability	30 kg
Assembly Mass	30 kg
Configurable Options
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements	Y Axis Top Down Mounting (Face Mounting Shown)
	Large or Small Cable Tracks
	Mix and Match Travel
	Risers Available (Custom Height)
	Multiple Cable Routing and Connectorization Options
	Customer Cable Routing Available
	Granite, Optical Table, and Breadboard Bases
	Single Axis Versions Available
	Z Axis Options Available
	X and X' Controlled Yaw Available
	Various Material Options Available
	Inch Spacing Versions Available (see page 3)
	*Increased Gap between X and X' stages without Increased Y Travel

Model	AI-LM-20000-UII
Stage	Cartesian Gantry
Travel - X And/Or Travel - Y	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	500 mm x 707 mm x 320 mm
Max. Sample Width (Inner Width)	334 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	STD	PRCSN	ULTRA
Linear Displacement Accuracy	+/- 12 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 10 µm	+/- 6 µm
Pitch	20 arc-sec
Yaw	20 arc-sec
Roll	20 arc-sec
Max Velocity With AC Drive [3]	2.0  m/s
Max Velocity With 48VDC Drive [3]	0.5 m/s
Max Acceleration With AC Drive [3]	2.5 G
Max Acceleration With 48VDC Drive [3]	0.5 G
Max (Vertical) Payload Capability	25 kg
Max (Horizontal) Payload Capability	30 kg
Assembly Mass	28 kg
Configurable Options
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements	Y Axis Top Down Mounting (Face Mounting Shown)
	Large or Small Cable Tracks
	Mix and Match Travel
	Risers Available (Custom Height)
	Multiple Cable Routing and Connectorization Options
	Customer Cable Routing Available
	Granite, Optical Table, and Breadboard Bases
	Single Axis Versions Available
	Z Axis Options Available
	X and X' Controlled Yaw Available
	Various Material Options Available
	Inch Spacing Versions Available (see page 3)
	*Increased Gap between X and X' stages without Increased Y Travel

Model	AI-XBS-30000-UII
Stage	Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	663 mm x 388 mm x 100 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)	708 mm x 388 mm x 100 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 12 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In Y	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch [2]	+/- 18 arc-sec
Yaw	+/- 18 arc-sec
Roll	+/- 18 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	150 kg
Max Payload Capability With Axis Oriented Vertically	80 kg
Assembly Mass	29 kg

Model	AI-XBS-25000-UII
Stage	Linear Stage
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	613 mm x 388 mm x 100 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)	658 mm x 388 mm x 100 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 10 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In Y	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch [2]	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	150 kg
Max Payload Capability With Axis Oriented Vertically	80 kg
Assembly Mass	28 kg

Model	AI-XBS-20000-UII
Stage	Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	563 mm x 388 mm x 100 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)	608 mm x 388 mm x 100 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 8 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In Y	+/- 4 µm	+/- 3 µm
Flatness [2]	+/- 4 µm	+/- 3 µm
Pitch [2]	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	150 kg
Max Payload Capability With Axis Oriented Vertically	80 kg
Assembly Mass	27 kg

Model	AI-SBS-30000-UII
Stage	Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	593 mm x 258 mm x 69 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	615 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)	665 mm x 258 mm x 69 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 12 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch [2]	+/- 18 arc-sec
Yaw	+/- 18 arc-sec
Roll	+/- 18 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	70 kg
Max Payload Capability With Axis Oriented Vertically	40 kg
Assembly Mass	13 kg

Model	AI-SBS-25000-UII
Stage	Linear Stage
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	543 mm x 258 mm x 69 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	565 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)	615 mm x 258 mm x 69 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 10 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch [2]	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	70 kg
Max Payload Capability With Axis Oriented Vertically	40 kg
Assembly Mass	12.5 kg

Model	AI-SBS-20000-UII
Stage	Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	493 mm x 258 mm x 69 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	515 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)	565 mm x 258 mm x 69 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 8 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 4 µm	+/- 3 µm
Flatness [2]	+/- 4 µm	+/- 3 µm
Pitch [2]	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	70 kg
Max Payload Capability With Axis Oriented Vertically	40 kg
Assembly Mass	12 kg

Model	AI-LM-30000-UII-WL
Stage	Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	620 mm x 388 mm x 88 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 12 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	10 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max (Vertical) Payload Capability	100 kg
Max (Horizontal) Payload Capability	70 kg
Assembly Mass	25 kg

Model	AI-LM-25000-UII-WL
Stage	Linear Stage
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	570 mm x 388 mm x 88 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 10 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch	15 arc-sec
Yaw	15 arc-sec
Roll	8 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max (Vertical) Payload Capability	100 kg
Max (Horizontal) Payload Capability	70 kg
Assembly Mass	24 kg

Model	AI-LM-20000-UII-WL
Stage	Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	520 mm x 388 mm x 88 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 8 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 3 µm
Flatness [2]	+/- 4 µm	+/- 3 µm
Pitch	15 arc-sec
Yaw	15 arc-sec
Roll	8 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max (Vertical) Payload Capability	100 kg
Max (Horizontal) Payload Capability	70 kg
Assembly Mass	23 kg

Model	AI-LM-30000-UII-W
Stage	Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	520 mm x 388 mm x 88 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 12 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	10 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	2.0 G
Max (Vertical) Payload Capability	100 kg
Max (Horizontal) Payload Capability	70 kg
Assembly Mass	25 kg

Model	AI-LM-25000-UII-W
Stage	Linear Stage
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	470 mm x 388 mm x 88 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 10 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch	15 arc-sec
Yaw	15 arc-sec
Roll	8 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	2.0 G
Max (Vertical) Payload Capability	100 kg
Max (Horizontal) Payload Capability	70 kg
Assembly Mass	24 kg

Model	AI-LM-20000-UII-W
Stage	Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	420 mm x 388 mm x 88 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 8 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 3 µm
Flatness [2]	+/- 4 µm	+/- 3 µm
Pitch	15 arc-sec
Yaw	15 arc-sec
Roll	8 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	2.0 G
Max (Vertical) Payload Capability	100 kg
Max (Horizontal) Payload Capability	70 kg
Assembly Mass	23 kg

Model	AI-LM-30000-UII-SN
Stage	Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	480 mm x 72 mm x 57 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 12 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	10 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	4.0 G
Max (Vertical) Payload Capability	40 kg
Max (Horizontal) Payload Capability	32 kg
Assembly Mass	4 kg

Model	AI-LM-25000-UII-SN
Stage	Linear Stage
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	430 mm x 72 mm x 57 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 10 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch	15 arc-sec
Yaw	15 arc-sec
Roll	8 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	4.0 G
Max (Vertical) Payload Capability	40 kg
Max (Horizontal) Payload Capability	32 kg
Assembly Mass	3.4 kg

Model	AI-LM-20000-UII-SN
Stage	Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	380 mm x 72 mm x 57 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 8 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness	+/- 4 µm	+/- 3 µm
Flatness [2]	+/- 4 µm	+/- 3 µm
Pitch	15 arc-sec
Yaw	15 arc-sec
Roll	8 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	4.0 G
Max (Vertical) Payload Capability	40 kg
Max (Horizontal) Payload Capability	32 kg
Assembly Mass	2.9 kg

Model	AI-LM-30000-UII-S
Stage	Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	520 mm x 208 mm x 82.5 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 12 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	10 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	4.0 G
Max (Vertical) Payload Capability	40 kg
Max (Horizontal) Payload Capability	32 kg
Assembly Mass	12 kg

Model	AI-LM-25000-UII-S
Stage	Linear Stage
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	470 mm x 208 mm x 82.5 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10^-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 10 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch	15 arc-sec
Yaw	15 arc-sec
Roll	8 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	4.0 G
Max (Vertical) Payload Capability	40 kg
Max (Horizontal) Payload Capability	32 kg
Assembly Mass	11 kg

Model	AI-LM-20000-UII-S
Stage	Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	420 mm x 208 mm x 82.5 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 8 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 3 µm
Flatness [2]	+/- 4 µm	+/- 3 µm
Pitch	15 arc-sec
Yaw	15 arc-sec
Roll	8 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	4.0 G
Max (Vertical) Payload Capability	40 kg
Max (Horizontal) Payload Capability	32 kg
Assembly Mass	10 kg

Model	AI-LM-30000-UII
Stage	Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	520 mm x 258 mm x 82.5 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 12 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch [2]	+/- 9 arc-sec
Yaw	+/- 9 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	3.5 m/s
Max Peak Acceleration [3]	10.0 G
Max Payload Capability	70 kg
Assembly Mass	15 kg

Model	AI-LM-25000-UII
Stage	Linear Stage
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	470 mm x 258 mm x 82.5 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 10 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch [2]	+/- 7.5 arc-sec
Yaw	+/- 7.5 arc-sec
Roll	+/- 4 arc-sec
Max Velocity [3]	3.5 m/s
Max Peak Acceleration [3]	10.0 G
Max Payload Capability	70 kg
Assembly Mass	14 kg

Model	AI-LM-20000-UII
Stage	Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	420 mm x 258 mm x 82.5 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 8 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 4 µm	+/- 3 µm
Flatness [2]	+/- 4 µm	+/- 3 µm
Pitch [2]	+/- 7.5 arc-sec
Yaw	+/- 7.5 arc-sec
Roll	+/- 4 arc-sec
Max Velocity [3]	3 m/s
Max Peak Acceleration [3]	10.0 G
Max Payload Capability	70 kg
Assembly Mass	13 kg

Model	AI-LM-300x200-XY
Stage	Monolithic XY Stage (Asymmetrical)
Travel - X	300 mm (+/- 150 mm)
Travel - Y	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	500 mm x 336 mm x 100mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 5 µm	+/- 2 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	10 arc-sec
Orthogonality	20 arc-sec	5 arc-sec	1 arc-sec
Max Velocity [3]	1 m/s
Max Acceleration [3]	0.7 G
Max Payload Capability	30 kg
Assembly Mass	28 kg

Model	AI-LM-160x100-XY
Stage	Monolithic XY Stage (Asymmetrical)
Travel - X	160 mm (+/- 80 mm)
Travel - Y	100 mm (+/- 50 mm)
Dimensions (Length X Width X Height)	275 mm x 175 mm x 80 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.0 µm	+/- 0.7 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 7.5 arc-sec
Yaw	+/- 7.5 arc-sec
Roll	+/- 4.0 arc-sec
Orthogonality	+/- 10.0 arc-sec	+/- 2.5 arc-sec	+/- 0.5 arc-sec
Max Velocity [3]	1 m/s
Max Peak Acceleration [3]	1.5 G
Max Payload Capability	25 kg
Assembly Mass	11.4 kg

Model	AI-VBS-20000
Stage	Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	492 mm x 154 mm x 50 mm
Brake Options	Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	524 mm x 154 mm x 50 mm
(-Ebrk) Dimensions (Length x Width x Height)	571 mm x 154 mm x 50 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4 µm	+/- 1.0 µm	+/- 0.4 µm
Backlash	0 nm
Bidirectional Linear Repeatability	+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5 µm	+/- 4 µm	+/- 3 µm
Flatness [2]	+/- 5.0 µm	+/- 3.0 µm
Pitch [2]	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	1.0 G
Max Payload Capability W/ Axis Oriented Horizontal	25 kg
Max Payload Capability W/ Axis Oriented Vertical	12 kg
Assembly Mass	8 kg

Model	AI-CM-25000-250-XY
Stage	Monolithic XY Stage with Open Center
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	468.5 mm x 468.5 mm x 80 mm
Aperture / Thru	250 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.2 µm	+/- 0.7 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 1.2 µm	+/- 0.7 µm
Flatness [2]	+/- 4.0 µm	+/- 3.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.1 m/s
Bot Axis Max Velocity [3]	0.6 m/s
Top Axis Max Peak Acceleration [3]	1.0 G
Bot Axis Max Peak Acceleration [3]	0.3 G
Max Payload Capability	25 kg
Assembly Mass	33 kg

Model	AI-CM-20000-200-XY
Stage	Monolithic XY Stage with Open Center
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	332.5 mm x 332.5 mm x 65 mm
Aperture / Thru	200 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.2 µm	+/- 0.7 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 1.2 µm	+/- 0.7 µm
Flatness [2]	+/- 4.0 µm	+/- 3.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1 m/s
Bot Axis Max Velocity [3]	0.6 m/s
Top Axis Max Peak Acceleration [3]	1.0 G
Bot Axis Max Peak Acceleration [3]	0.4 G
Max Payload Capability	15 kg
Assembly Mass	11.4 kg

Model	AI-CM-30000-XY
Stage	Monolithic XY Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	500 mm x 500 mm x 100 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6.0 µm	+/- 1.0 µm	+/- 0.6 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 10.0 µm	+/- 2.0 µm	+/- 1.0 µm
Flatness [2]	+/- 8.0 µm	+/- 5.0 µm
Pitch [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 18.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.7 m/s
Bot Axis Max Velocity [3]	0.3 m/s
Top Axis Max Peak Acceleration [3]	0.4 G
Bot Axis Max Peak Acceleration [3]	0.1 G
Max Payload Capability	35 kg
Assembly Mass	69 kg

Model	AI-CM-25000-XY
Stage	Monolithic XY Stage
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	400 mm x 400 mm x 100 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm	+/- 2.0 µm	+/- 1.0 µm
Flatness [2]	+/- 6.0 µm	+/- 4.0 µm
Pitch [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 18.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.8 m/s
Bot Axis Max Velocity [3]	0.5
Top Axis Max Peak Acceleration [3]	0.6 G
Bot Axis Max Peak Acceleration [3]	0.2 G
Max Payload Capability	25 kg
Assembly Mass	48 kg

Model	AI-CM-20000-XY
Stage	Monolithic XY Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	275 mm x 275 mm x 60 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 1.0 µm	+/- 0.4 µm
Flatness [2]	+/- 4.0 µm	+/- 3.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1 m/s
Bot Axis Max Velocity [3]	0.6
Top Axis Max Peak Acceleration [3]	1.0 G
Bot Axis Max Peak Acceleration [3]	0.4 G
Max Payload Capability	15 kg
Assembly Mass	12 kg

Model	AI-CM-30000
Stage	Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	506 mm x 120 mm x 48 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6.0 µm	+/- 1.0 µm	+/- 0.6 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 8.0 µm	+/- 6.0 µm	+/- 4.0 µm
Flatness [2]	+/- 8.0 µm	+/- 5.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Max Velocity [3]	Depending on application - Ask ALIO
Max Acceleration [3]	Depending on application - Ask ALIO
Max Payload Capability	Depending on application - Ask ALIO
Assembly Mass	Depending on application - Ask ALIO

Model	AI-CM-25000
Stage	Linear Stage
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	404 mm x 154 mm x 48 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm	+/- 4.0 µm	+/- 3.0 µm
Flatness [2]	+/- 6.0 µm	+/- 4.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Max Velocity [3]	Depending on application - Ask ALIO
Max Acceleration [3]	Depending on application - Ask ALIO
Max Payload Capability	Depending on application - Ask ALIO
Assembly Mass	Depending on application - Ask ALIO

Model	AI-CM-20000
Stage	Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	279 mm x 120 mm x 32 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm	+/- 4.0 µm	+/- 3.0 µm
Flatness [2]	+/- 5.0 µm	+/- 3.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Max Velocity [3]	1.4 m/s
Max Acceleration [3]	2.0 G
Max Payload Capability	12 kg
Assembly Mass	3.2 kg

Model	AI-LM-30000
Stage	Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	506 mm x 178 mm x 55 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.6 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm	+/- 4.5 µm	+/- 3.0 µm
Flatness [2]	+/- 5.0 µm	+/- 2.0 µm
Pitch Y [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 10.0 arc-sec
Max Velocity [3]	2.4 m/s
Max Acceleration [3]	4.0 G
Max Payload Capability	50 kg
Assembly Mass	15.2 kg

Model	AI-LM-25000
Stage	Linear Stage
Travel	250 mm (+ /-125 mm)
Dimensions (Length x Width x Height)	404 mm x 154 mm x 55 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 3.0 µm	+/- 2.0 µm
Flatness [2]	+/- 5.0 µm	+/- 2.0 µm
Pitch Y [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 10.0 arc-sec
Max Velocity [3]	2.5 m/s
Max Acceleration [3]	5.0 G
Max Payload Capability	40 kg
Assembly Mass	9.4 kg

Model	AI-LM-20000
Stage	Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	340 mm x 154 mm x 46 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 2.0 µm	+/- 1.5 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch Y [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Max Velocity [3]	2.4 m/s
Max Acceleration [3]	6.0 G
Max Payload Capability	30 kg
Assembly Mass	7.8 kg

Model	AI-LM-30000-300-XY
Stage	Monolithic XY Stage with Open Center
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	500 mm x 500 mm x 120 mm
Aperture / Thru	300 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 8.0 µm	+/- 1.5 µm	+/- 1.0 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 6.0 µm	+/- 3.0 µm
Pitch [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 18.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.7 m/s
Bot Axis Max Velocity [3]	1.2 m/s
Top Axis Max Peak Acceleration [3]	2.0 G
Top Axis Max Peak Acceleration [3]	1.0 G
Max Payload Capability	50 kg
Assembly Mass	58 kg

Model	AI-LM-25000-250-XY
Stage	Monolithic XY Stage with Open Center
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	460 mm x 460 mm x 95 mm
Aperture / Thru	250 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6.0 µm	+/- 1.5 µm	+/- 1.0 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 5.0 µm	+/- 2.0 µm
Pitch [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 18.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.9 m/s
Bot Axis Max Velocity [3]	1.3 m/s
Top Axis Max Peak Acceleration [3]	3.0 G
Top Axis Max Peak Acceleration [3]	1.4 G
Max Payload Capability	40 kg
Assembly Mass	37 kg

Model	AI-LM-20000-200-XY
Stage	Monolithic XY Stage with Open Center
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	392 mm x 392 mm x 80 mm
Aperture / Thru	200 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6.0 µm	+/- 1.5 µm	+/- 0.8 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 1.5 µm	+/- 0.8 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	2 m/s
Bot Axis Max Velocity [3]	1.1 m/s
Top Axis Max Peak Acceleration [3]	4.0 G
Top Axis Max Peak Acceleration [3]	1.4 G
Max Payload Capability	30 kg
Assembly Mass	23 kg

Model	AI-LM-30000-XY
Stage	Monolithic XY Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	500 mm x 500 mm x 115 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.6 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 1.0 µm	+/- 0.6 µm
Flatness [2]	+/- 5.0 µm	+/- 2.0 µm
Pitch [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 10.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.6 m/s
Bot Axis Max Velocity [3]	1 m/s
Top Axis Max Peak Acceleration [3]	1.9 G
Bot Axis Max Peak Acceleration [3]	0.7 G
Max Payload Capability	50 kg
Assembly Mass	75 kg

Model	AI-LM-25000-XY
Stage	Monolithic XY Stage
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	400 mm x 400 mm x 115 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 5.0 µm	+/- 2.0 µm
Pitch [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 10.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.5 m/s
Bot Axis Max Velocity [3]	0.9 m/s
Top Axis Max Peak Acceleration [3]	1.9 G
Bot Axis Max Peak Acceleration [3]	0.7 G
Max Payload Capability	40 kg
Assembly Mass	52 kg

Model	AI-LM-20000-XY-HF
Stage	Monolithic XY Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	336 mm x 336 mm x 90 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.5 µm	+/- 1.0 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	2.0 m/s
Bot Axis Max Velocity [3]	1.2 m/s
Top Axis Max Peak Acceleration [3]	5.6 G
Bot Axis Max Peak Acceleration [3]	2 G
Max Payload Capability	30 kg
Assembly Mass	28 kg

Model	AI-LM-20000-XY
Stage	Monolithic XY Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	336 mm x 336 mm x 90 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.5 µm	+/- 1.0 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.7 m/s
Bot Axis Max Velocity [3]	1 m/s
Top Axis Max Peak Acceleration [3]	3.0 G
Bot Axis Max Peak Acceleration [3]	1.3 G
Max Payload Capability	30 kg
Assembly Mass	28 kg

Model	AI-LM-16000-XY
Stage	Monolithic XY Stage
Travel	160 mm (+/- 80 mm)
Dimensions (Length x Width x Height)	275 mm x 275 mm x 80 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.5 µm	+/- 0.7 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.5 m/s
Bot Axis Max Velocity [3]	1 m/s
Top Axis Max Peak Acceleration [3]	3.0 G
Bot Axis Max Peak Acceleration [3]	1.3 G
Max Payload Capability	25 kg
Assembly Mass	16 kg