Model	AI-LM-50000-AB8
Stage	Air Bearing Linear Stage
Travel	500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)	879.6 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	18.5 kg

Model	AI-LM-40000-AB8
Stage	Air Bearing Linear Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	778 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	17 kg

Model	AI-LM-50000-AB
Stage	Air Bearing Linear Stage
Travel	500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)	727.2 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	10.4 kg

Model	AI-LM-40000-AB
Stage	Air Bearing Linear Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	625.6 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	9.1 kg

Model	AI-LM-50000-ABL
Stage	XY Planar Air Bearing Stage
Travel - XY	500 mm (+/- 250 mm)
Optional Travel - Yaw Compliance	Optional: +/- 0.1 deg
Dimensions (Length x Width x Height)	1550 mm x 1100 mm x 145 mm
Dimensions Moving Plate (Length x Width)	404 mm x 423.4 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available
Structure	Anodized Aluminum 6061-T6
Base Structure	Precision Lapped Black Granite
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	#colspan#
Accuracy	< +/- 0.5 µm
Repeatability	< +/- 100 nm
Straightness	< +/- 0.5 µm
Flatness	< +/- 1 µm
Max Velocity	> 1 m/s
Max Acceleration	> 1 G
Load Capacity	20 kg Optional: 80+ kg
Assembly Mass	Depending on specific Configuration - Ask ALIO
Configurable Options	#colspan#
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements	Custom Plate L x W x H
	Custom X and/or Y Travel
	Custom User Mounting Interface Features
	Custom Platen Designs (Open Center Options)
	Custom Compact Designs for Small Footprint
	Customer Cable Routing
	Customizable Motor Forces
	Custom High Payload Options
	Custom Granite Features and Sizes
	Various Material Options Throughout
	Single Axis Versions Available (Y Axis Only)
	Various Support and Vibration Isolation Options
	Various Safety System Options
	Various Control Chassis Options

Model	AI-LM-40000-ABL
Stage	XY Planar Air Bearing Stage
Travel - XY	400 mm (+/- 200 mm)
Optional Travel - Yaw Compliance	Optional: +/- 0.1 deg
Dimensions (Length x Width x Height)	1450 mm x 1000 mm x 145 mm
Dimensions Moving Plate (Length x Width)	404 mm x 423.4 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available
Structure	Anodized Aluminum 6061-T6
Base Structure	Precision Lapped Black Granite
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy	< +/- 0.5 µm
Repeatability	< +/- 100 nm
Straightness	< +/- 0.5 µm
Flatness	< +/- 1 µm
Max Velocity	> 1 m/s
Max Acceleration	> 1 G
Load Capacity	20 kg Optional: 80+ kg
Assembly Mass	Depending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements	Custom Plate L x W x H
	Custom X and/or Y Travel
	Custom User Mounting Interface Features
	Custom Platen Designs (Open Center Options)
	Custom Compact Designs for Small Footprint
	Customer Cable Routing
	Customizable Motor Forces
	Custom High Payload Options
	Custom Granite Features and Sizes
	Various Material Options Throughout
	Single Axis Versions Available (Y Axis Only)
	Various Support and Vibration Isolation Options
	Various Safety System Options
	Various Control Chassis Options

Model	AI-LM-50000-UII
Stage	Cartesian Gantry
Travel - X And/Or Travel - Y	500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)	800 mm x 1007 mm x 320 mm
Max. Sample Width (Inner Width)	634 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	STD	PRCSN	ULTRA
Linear Displacement Accuracy	+/- 20 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness	+/- 6 µm	+/- 4 µm
Flatness [2]	+/- 12 µm	+/- 8 µm
Pitch	20 arc-sec
Yaw	20 arc-sec
Roll	20 arc-sec
Max Velocity With AC Drive [3]	2.5 m/s
Max Velocity With 48VDC Drive [3]	0.5 m/s
Max Acceleration With AC Drive [3]	2 G
Max Acceleration With 48VDC Drive [3]	0.4 G
Max (Vertical) Payload Capability	25 kg
Max (Horizontal) Payload Capability	30 kg
Assembly Mass	38 kg
Configurable Options
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements	Y Axis Top Down Mounting (Face Mounting Shown)
	Large or Small Cable Tracks
	Mix and Match Travel
	Risers Available (Custom Height)
	Multiple Cable Routing and Connectorization Options
	Customer Cable Routing Available
	Granite, Optical Table, and Breadboard Bases
	Single Axis Versions Available
	Z Axis Options Available
	X and X' Controlled Yaw Available
	Various Material Options Available
	Inch Spacing Versions Available (see page 3)
	*Increased Gap between X and X' stages without Increased Y Travel

Model	AI-LM-40000-UII
Stage	Cartesian Gantry
Travel - X And/Or Travel - Y	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	700 mm  907 mm x 320 mm
Max. Sample Width (Inner Width)	534 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	STD	PRCSN	ULTRA
Linear Displacement Accuracy	+/- 16 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 10 µm	+/- 6 µm
Pitch	20 arc-sec
Yaw	20 arc-sec
Roll	20 arc-sec
Max Velocity With AC Drive [3]	2.0  m/s
Max Velocity With 48VDC Drive [3]	0.5 m/s
Max Acceleration With AC Drive [3]	2.2 G
Max Acceleration With 48VDC Drive [3]	0.5 G
Max (Vertical) Payload Capability	25 kg
Max (Horizontal) Payload Capability	30 kg
Assembly Mass	33 kg
Configurable Options
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements	Y Axis Top Down Mounting (Face Mounting Shown)
	Large or Small Cable Tracks
	Mix and Match Travel
	Risers Available (Custom Height)
	Multiple Cable Routing and Connectorization Options
	Customer Cable Routing Available
	Granite, Optical Table, and Breadboard Bases
	Single Axis Versions Available
	Z Axis Options Available
	X and X' Controlled Yaw Available
	Various Material Options Available
	Inch Spacing Versions Available (see page 3)
	*Increased Gap between X and X' stages without Increased Y Travel

Model	AI-LM-50000-UII-XB
Stage	Linear Stage
Travel	500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)	866 mm x 357 mm x 96.5 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	ELITE
Linear Displacement Accuracy	+/- 20 µm	+/- 5 µm	+/- 2 µm
Bidirectional Linear Repeatability	+/- 1 µm	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness	+/- 20 µm	+/- 15 µm	+/- 10 µm
Flatness [2]	+/- 40 µm	+/- 15 µm	+/- 10 µm
Pitch	+/- 30 arc-sec	+/- 15 arc-sec
Yaw	+/- 30 arc-sec	+/- 18 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	4.0 G
Max (Vertical) Payload Capability	100 kg
Max (Horizontal) Payload Capability	70 kg
Assembly Mass	Depending on specific Application - Ask ALIO

Model	AI-LM-40000-UII-XB
Stage	Linear Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	766 mm x 357 mm x 96.5 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	ELITE
Linear Displacement Accuracy	+/- 16 µm	+/- 5 µm	+/- 2 µm
Bidirectional Linear Repeatability	+/- 1 µm	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness	+/- 18 µm	+/- 13 µm	+/- 10 µm
Flatness [2]	+/- 30 µm	+/- 15 µm	+/- 10 µm
Pitch	+/- 30 arc-sec	+/- 15 arc-sec
Yaw	+/- 30 arc-sec	+/- 18 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	4.0 G
Max (Vertical) Payload Capability	100 kg
Max (Horizontal) Payload Capability	70 kg
Assembly Mass	Depending on specific Application - Ask ALIO

Model	AI-XBS-50000-UII
Stage	Linear Stage
Travel	500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)	863 mm x 388 mm x 100 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)	908 mm x 388 mm x 100 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 24 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In Y	+/- 8 µm	+/- 4 µm
Flatness [2]	+/- 8 µm	+/- 4 µm
Pitch [2]	+/- 18 arc-sec
Yaw	+/- 18 arc-sec
Roll	+/- 18 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	150 kg
Max Payload Capability With Axis Oriented Vertically	80 kg
Assembly Mass	38 kg

Model	AI-XBS-45000-UII
Stage	Linear Stage
Travel	450 mm (+/- 225 mm)
Dimensions (Length x Width x Height)	813 mm x 388 mm x 100 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)	858 mm x 388 mm x 100 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 24 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In Y	+/- 8 µm	+/- 4 µm
Flatness [2]	+/- 8 µm	+/- 4 µm
Pitch [2]	+/- 18 arc-sec
Yaw	+/- 18 arc-sec
Roll	+/- 18 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	150 kg
Max Payload Capability With Axis Oriented Vertically	80 kg
Assembly Mass	36 kg

Model	AI-XBS-40000-UII
Stage	Linear Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	763 mm x 388 mm x 100 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)	808 mm x 388 mm x 100 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 20 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In Y	+/- 6 µm	+/- 4 µm
Flatness [2]	+/- 6 µm	+/- 4 µm
Pitch [2]	+/- 18 arc-sec
Yaw	+/- 18 arc-sec
Roll	+/- 18 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	150 kg
Max Payload Capability With Axis Oriented Vertically	80 kg
Assembly Mass	34 kg

Model	AI-XBS-35000-UII
Stage	Linear Stage
Travel	350 mm (+/- 175 mm)
Dimensions (Length x Width x Height)	713 mm x 388 mm x 100 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)	758 mm x 388 mm x 100 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 16 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In Y	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch [2]	+/- 18 arc-sec
Yaw	+/- 18 arc-sec
Roll	+/- 18 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	150 kg
Max Payload Capability With Axis Oriented Vertically	80 kg
Assembly Mass	32 kg

Model	AI-SBS-50000-UII
Stage	Linear Stage
Travel	500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)	793 mm x 258 mm x 69 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	815 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)	865 mm x 258 mm x 69 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 24 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 8 µm	+/- 4 µm
Flatness [2]	+/- 8 µm	+/- 4 µm
Pitch [2]	+/- 18 arc-sec
Yaw	+/- 18 arc-sec
Roll	+/- 18 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	70 kg
Max Payload Capability With Axis Oriented Vertically	40 kg
Assembly Mass	15.5 kg

Model	AI-SBS-45000-UII
Stage	Linear Stage
Travel	450 mm (+/- 225 mm)
Dimensions (Length x Width x Height)	743 mm x 258 mm x 69 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	765 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)	815 mm x 258 mm x 69 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 24 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 8 µm	+/- 4 µm
Flatness [2]	+/- 8 µm	+/- 4 µm
Pitch [2]	+/- 18 arc-sec
Yaw	+/- 18 arc-sec
Roll	+/- 18 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	70 kg
Max Payload Capability With Axis Oriented Vertically	40 kg
Assembly Mass	15 kg

Model	AI-SBS-40000-UII
Stage	Linear Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	693 mm x 258 mm x 69 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	715 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)	765 mm x 258 mm x 69 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 20 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 6 µm	+/- 4 µm
Flatness [2]	+/- 6 µm	+/- 4 µm
Pitch [2]	+/- 18 arc-sec
Yaw	+/- 18 arc-sec
Roll	+/- 18 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	70 kg
Max Payload Capability With Axis Oriented Vertically	40 kg
Assembly Mass	14.5 kg

Model	AI-SBS-35000-UII
Stage	Linear Stage
Travel	350 mm (+/- 175 mm)
Dimensions (Length x Width x Height)	643 mm x 258 mm x 69 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	665 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)	715 mm x 258 mm x 69 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 16 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch [2]	+/- 18 arc-sec
Yaw	+/- 18 arc-sec
Roll	+/- 18 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	70 kg
Max Payload Capability With Axis Oriented Vertically	40 kg
Assembly Mass	13.5 kg

Model	AI-LM-50000-UII-WL
Stage	Linear Stage
Travel	500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)	820 mm x 388 mm x 88 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 20 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6 µm	+/- 4 µm
Flatness [2]	+/- 6 µm	+/- 4 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	10 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max (Vertical) Payload Capability	100 kg
Max (Horizontal) Payload Capability	70 kg
Assembly Mass	31 kg

Model	AI-LM-40000-UII-WL
Stage	Linear Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	720 mm x 388 mm x 88 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 16 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	10 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max (Vertical) Payload Capability	100 kg
Max (Horizontal) Payload Capability	70 kg
Assembly Mass	27 kg

Model	AI-LM-50000-UII-W
Stage	Linear Stage
Travel	500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)	720 mm x 388 mm x 88 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 20 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6 µm	+/- 4 µm
Flatness [2]	+/- 6 µm	+/- 4 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	10 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	2.0 G
Max (Vertical) Payload Capability	100 kg
Max (Horizontal) Payload Capability	70 kg
Assembly Mass	31 kg

Model	AI-LM-40000-UII-W
Stage	Linear Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	620 mm x 388 mm x 88 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 16 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	10 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	2.0 G
Max (Vertical) Payload Capability	100 kg
Max (Horizontal) Payload Capability	70 kg
Assembly Mass	27 kg

Model	AI-LM-50000-UII-SN
Stage	Linear Stage
Travel	500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)	680 mm x 72 mm x 57 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 20 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness	+/- 6 µm	+/- 4 µm
Flatness [2]	+/- 6 µm	+/- 4 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	10 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	4.0 G
Max (Vertical) Payload Capability	40 kg
Max (Horizontal) Payload Capability	32 kg
Assembly Mass	6 kg

Model	AI-LM-40000-UII-SN
Stage	Linear Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	580 mm x 72 mm x 57 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 16 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	10 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	4.0 G
Max (Vertical) Payload Capability	40 kg
Max (Horizontal) Payload Capability	32 kg
Assembly Mass	5 kg

Model	AI-LM-50000-UII-S
Stage	Linear Stage
Travel	500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)	720 mm x 208 mm x 82.5 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 20 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6 µm	+/- 4 µm
Flatness [2]	+/- 6 µm	+/- 4 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	10 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	4.0 G
Max (Vertical) Payload Capability	40 kg
Max (Horizontal) Payload Capability	32 kg
Assembly Mass	15 kg

Model	AI-LM-40000-UII-S
Stage	Linear Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	620 mm x 208 mm x 82.5 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 16 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	10 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	4.0 G
Max (Vertical) Payload Capability	40 kg
Max (Horizontal) Payload Capability	32 kg
Assembly Mass	13 kg

Model	AI-LM-50000-UII
Stage	Linear Stage
Travel	500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)	720 mm x 258 mm x 82.5 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 20 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 6 µm	+/- 4 µm
Flatness [2]	+/- 6 µm	+/- 4 µm
Pitch [2]	+/- 9 arc-sec
Yaw	+/- 9 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	4.5 m/s
Max Peak Acceleration [3]	10.0 G
Max Payload Capability	70 kg
Assembly Mass	19 kg

Model	AI-LM-40000-UII
Stage	Linear Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	620 mm x 258 mm x 82.5 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 16 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 5 µm	+/- 3 µm
Flatness [2]	+/- 5 µm	+/- 3 µm
Pitch [2]	+/- 9 arc-sec
Yaw	+/- 9 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	4 m/s
Max Peak Acceleration [3]	10.0 G
Max Payload Capability	70 kg
Assembly Mass	17 kg

Model	AI-SLM-395x320-XY
Stage	Monolithic XY Stage (Asymmetrical)
Travel - X	395 mm
Travel - Y	320 mm
Dimensions (Length X Width X Height)	672 mm x 525 mm x 145 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	STD	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 2.0 µm	+/- 1.0 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm	+/- 2.0 µm	+/- 1.0 µm
Flatness [2]	+/- 10.0 µm	+/- 5.0 µm	+/- 2.0 µm
Pitch [2]	+/- 18.0 arc-sec	+/- 18.0 arc-sec	+/- 10.0 arc-sec
Yaw	+/- 18.0 arc-sec	+/- 18.0 arc-sec	+/- 10.0 arc-sec
Roll	+/- 10.0 arc-sec	+/- 10.0 arc-sec	+/- 10.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 2.0 arc-sec
Max Velocity [3]	1.5 m/s
Max Peak Acceleration [3]	0.59 G
Max Payload Capability	200 kg
Assembly Mass	98 kg

Model	AI-LM-40000-400-XY
Stage	Monolithic XY Stage with Open Center
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	650 mm x 650 mm x 120 mm
Aperture / Thru	400 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 16.0 µm	+/- 2.5 µm	+/- 1.5 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 10.0 µm	+/- 2.5 µm	+/- 1.5 µm
Flatness [2]	+/- 12.0 µm	+/- 5.0 µm
Pitch [2]	+/- 20.0 arc-sec
Yaw	+/- 20.0 arc-sec
Roll	+/- 20.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.8 m/s
Bot Axis Max Velocity [3]	1.0 m/s
Top Axis Max Peak Acceleration [3]	1.8 G
Top Axis Max Peak Acceleration [3]	0.6 G
Max Payload Capability	50 kg
Assembly Mass	104 kg

Model	AI-LM-35000-350-XY
Stage	Monolithic XY Stage with Open Center
Travel	350 mm (+/- 175 mm)
Dimensions (Length x Width x Height)	550 mm x 550 mm x 120 mm
Aperture / Thru	350 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 10.0 µm	+/- 2.0 µm	+/- 1.5 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm	+/- 2.0 µm	+/- 1.5 µm
Flatness [2]	+/- 10.0 µm	+/- 4.0 µm
Pitch [2]	+/- 20.0 arc-sec
Yaw	+/- 20.0 arc-sec
Roll	+/- 20.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.8 m/s
Bot Axis Max Velocity [3]	1.1 m/s
Top Axis Max Peak Acceleration [3]	2.0 G
Top Axis Max Peak Acceleration [3]	0.8 G
Max Payload Capability	50 kg
Assembly Mass	64 kg

Model	AI-LM-45000-XY
Stage	Monolithic XY Stage
Travel	450 mm (+/- 225 mm)
Dimensions (Length x Width x Height)	650 mm x 650 mm x 115 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 12.0 µm	+/- 1.5 µm	+/- 1.0 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 16.0 µm	+/- 8.0 µm
Pitch [2]	+/- 20.0 arc-sec
Yaw	+/- 20.0 arc-sec
Roll	+/- 14.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.7 m/s
Bot Axis Max Velocity [3]	1 m/s
Top Axis Max Peak Acceleration [3]	1.4 G
Bot Axis Max Peak Acceleration [3]	0.5 G
Max Payload Capability	80 kg
Assembly Mass	135 kg

Model	AI-LM-40000-XY
Stage	Monolithic XY Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	650 mm x 650 mm x 115 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 12.0 µm	+/- 1.5 µm	+/- 1.0 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 16.0 µm	+/- 8.0 µm
Pitch [2]	+/- 20.0 arc-sec
Yaw	+/- 20.0 arc-sec
Roll	+/- 14.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.6 m/s
Bot Axis Max Velocity [3]	1 m/s
Top Axis Max Peak Acceleration [3]	1.4 G
Bot Axis Max Peak Acceleration [3]	0.5 G
Max Payload Capability	80 kg
Assembly Mass	135 kg

Model	AI-LM-35000-XY
Stage	Monolithic XY Stage
Travel	350 mm (+/- 175 mm)
Dimensions (Length x Width x Height)	500 mm x 500 mm x 115 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 8.0 µm	+/- 1.5 µm	+/- 0.8 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 1.5 µm	+/- 0.8 µm
Flatness [2]	+/- 8.0 µm	+/- 4.0 µm
Pitch [2]	+/- 20.0 arc-sec
Yaw	+/- 20.0 arc-sec
Roll	+/- 14.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.7 m/s
Bot Axis Max Velocity [3]	1.1 m/s
Top Axis Max Peak Acceleration [3]	1.9 G
Bot Axis Max Peak Acceleration [3]	0.7 G
Max Payload Capability	50 kg
Assembly Mass	75 kg