| Model | AI-LM-100000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 1000 mm (+/- 500 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 2050 mm x 1600 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | #colspan# |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-LM-80000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 800 mm (+/- 400 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1850 mm x 1400 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-LM-60000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 600 mm (+/- 300 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1650 mm x 1200 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | #colspan# |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | #colspan# |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options |
| Model | AI-LM-50000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 500 mm (+/- 250 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1550 mm x 1100 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | #colspan# |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | #colspan# |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options |
| Model | AI-LM-40000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 400 mm (+/- 200 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1450 mm x 1000 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-LM-30000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 300 mm (+/- 150 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1350 mm x 800 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-LM-20000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 200 mm (+/- 100 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1250 mm x 700 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-LM-100000-UII | ||
| Stage | Cartesian Gantry | ||
| Travel - X And/Or Travel - Y | 1000 mm (+/- 500 mm) | ||
| Dimensions (Length x Width x Height) | 1300 mm x 1507 mm x 320 mm | ||
| Max. Sample Width (Inner Width) | 1134 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient | ||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | STD | PRCSN | ULTRA |
| Linear Displacement Accuracy | +/- 40 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 1.0 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 16 µm | +/- 5 µm | |
| Flatness [2] | +/- 35 µm | +/- 10 µm | |
| Pitch | 30 arc-sec | ||
| Yaw | 30 arc-sec | ||
| Roll | 30 arc-sec | ||
| Max Velocity With AC Drive [3] | 2.5 m/s | ||
| Max Velocity With 48VDC Drive [3] | 0.5 m/s | ||
| Max Acceleration With AC Drive [3] | 1.3 G | ||
| Max Acceleration With 48VDC Drive [3] | 0.3 G | ||
| Max (Vertical) Payload Capability | 25 kg | ||
| Max (Horizontal) Payload Capability | 30 kg | ||
| Assembly Mass | 84 kg | ||
| Configurable Options | |||
| ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements | Y Axis Top Down Mounting (Face Mounting Shown) | ||
| Large or Small Cable Tracks | |||
| Mix and Match Travel | |||
| Risers Available (Custom Height) | |||
| Multiple Cable Routing and Connectorization Options | |||
| Customer Cable Routing Available | |||
| Granite, Optical Table, and Breadboard Bases | |||
| Single Axis Versions Available | |||
| Z Axis Options Available | |||
| X and X' Controlled Yaw Available | |||
| Various Material Options Available | |||
| Inch Spacing Versions Available (see page 3) | |||
| *Increased Gap between X and X' stages without Increased Y Travel |
|||
| Model | AI-LM-90000-UII | ||
| Stage | Cartesian Gantry | ||
| Travel - X And/Or Travel - Y | 900 mm (+/- 450 mm) | ||
| Dimensions (Length x Width x Height) | 1200 mm x 1407 mm x 320 mm | ||
| Max. Sample Width (Inner Width) | 1034 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient | ||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | STD | PRCSN | ULTRA |
| Linear Displacement Accuracy | +/- 36 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 1.0 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 14 µm | +/- 5 µm | |
| Flatness [2] | +/- 28 µm | +/- 10 µm | |
| Pitch | 30 arc-sec | ||
| Yaw | 30 arc-sec | ||
| Roll | 30 arc-sec | ||
| Max Velocity With AC Drive [3] | 2.5 m/s | ||
| Max Velocity With 48VDC Drive [3] | 0.5 m/s | ||
| Max Acceleration With AC Drive [3] | 1.4 G | ||
| Max Acceleration With 48VDC Drive [3] | 0.3 G | ||
| Max (Vertical) Payload Capability | 25 kg | ||
| Max (Horizontal) Payload Capability | 30 kg | ||
| Assembly Mass | 73 kg | ||
| Configurable Options | |||
| ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements | Y Axis Top Down Mounting (Face Mounting Shown) | ||
| Large or Small Cable Tracks | |||
| Mix and Match Travel | |||
| Risers Available (Custom Height) | |||
| Multiple Cable Routing and Connectorization Options | |||
| Customer Cable Routing Available | |||
| Granite, Optical Table, and Breadboard Bases | |||
| Single Axis Versions Available | |||
| Z Axis Options Available | |||
| X and X' Controlled Yaw Available | |||
| Various Material Options Available | |||
| Inch Spacing Versions Available (see page 3) | |||
| *Increased Gap between X and X' stages without Increased Y Travel |
|||
| Model | AI-LM-80000-UII | ||
| Stage | Cartesian Gantry | ||
| Travel - X And/Or Travel - Y | 800 mm (+/- 400 mm) | ||
| Dimensions (Length x Width x Height) | 1100 mm x 1307 mm x 320 mm | ||
| Max. Sample Width (Inner Width) | 934 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient | ||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | STD | PRCSN | ULTRA |
| Linear Displacement Accuracy | +/- 32 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 1.0 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 12 µm | +/- 5 µm | |
| Flatness [2] | +/- 24 µm | +/- 10 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 25 arc-sec | ||
| Max Velocity With AC Drive [3] | 2.5 m/s | ||
| Max Velocity With 48VDC Drive [3] | 0.5 m/s | ||
| Max Acceleration With AC Drive [3] | 1.5 G | ||
| Max Acceleration With 48VDC Drive [3] | 0.3 G | ||
| Max (Vertical) Payload Capability | 25 kg | ||
| Max (Horizontal) Payload Capability | 30 kg | ||
| Assembly Mass | 63 kg | ||
| Configurable Options | |||
| ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements | Y Axis Top Down Mounting (Face Mounting Shown) | ||
| Large or Small Cable Tracks | |||
| Mix and Match Travel | |||
| Risers Available (Custom Height) | |||
| Multiple Cable Routing and Connectorization Options | |||
| Customer Cable Routing Available | |||
| Granite, Optical Table, and Breadboard Bases | |||
| Single Axis Versions Available | |||
| Z Axis Options Available | |||
| X and X' Controlled Yaw Available | |||
| Various Material Options Available | |||
| Inch Spacing Versions Available (see page 3) | |||
| *Increased Gap between X and X' stages without Increased Y Travel |
|||
| Model | AI-LM-70000-UII | ||
| Stage | Cartesian Gantry | ||
| Travel - X And/Or Travel - Y | 700 mm (+/- 350 mm) | ||
| Dimensions (Length x Width x Height) | 1000 mm x 1207 mm x 320 mm | ||
| Max. Sample Width (Inner Width) | 834 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient | ||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | STD | PRCSN | ULTRA |
| Linear Displacement Accuracy | +/- 28 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 1.0 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 10 µm | +/- 4 µm | |
| Flatness [2] | +/- 20 µm | +/- 8 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 25 arc-sec | ||
| Max Velocity With AC Drive [3] | 2.5 m/s | ||
| Max Velocity With 48VDC Drive [3] | 0.5 m/s | ||
| Max Acceleration With AC Drive [3] | 1.6 G | ||
| Max Acceleration With 48VDC Drive [3] | 0.4 G | ||
| Max (Vertical) Payload Capability | 25 kg | ||
| Max (Horizontal) Payload Capability | 30 kg | ||
| Assembly Mass | 54 kg | ||
| Configurable Options | |||
| ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements | Y Axis Top Down Mounting (Face Mounting Shown) | ||
| Large or Small Cable Tracks | |||
| Mix and Match Travel | |||
| Risers Available (Custom Height) | |||
| Multiple Cable Routing and Connectorization Options | |||
| Customer Cable Routing Available | |||
| Granite, Optical Table, and Breadboard Bases | |||
| Single Axis Versions Available | |||
| Z Axis Options Available | |||
| X and X' Controlled Yaw Available | |||
| Various Material Options Available | |||
| Inch Spacing Versions Available (see page 3) | |||
| *Increased Gap between X and X' stages without Increased Y Travel |
|||
| Model | AI-LM-60000-UII | ||
| Stage | Cartesian Gantry | ||
| Travel - X And/Or Travel - Y | 600 mm (+/- 300 mm) | ||
| Dimensions (Length x Width x Height) | 900 mm x 1107 mm x 320 mm | ||
| Max. Sample Width (Inner Width) | 734 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient | ||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | STD | PRCSN | ULTRA |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 1.0 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 16 µm | +/- 8 µm | |
| Pitch | 20 arc-sec | ||
| Yaw | 20 arc-sec | ||
| Roll | 20 arc-sec | ||
| Max Velocity With AC Drive [3] | 2.5 m/s | ||
| Max Velocity With 48VDC Drive [3] | 0.5 m/s | ||
| Max Acceleration With AC Drive [3] | 1.8 G | ||
| Max Acceleration With 48VDC Drive [3] | 0.4 G | ||
| Max (Vertical) Payload Capability | 25 kg | ||
| Max (Horizontal) Payload Capability | 30 kg | ||
| Assembly Mass | 45 kg | ||
| Configurable Options | |||
| ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements | Y Axis Top Down Mounting (Face Mounting Shown) | ||
| Large or Small Cable Tracks | |||
| Mix and Match Travel | |||
| Risers Available (Custom Height) | |||
| Multiple Cable Routing and Connectorization Options | |||
| Customer Cable Routing Available | |||
| Granite, Optical Table, and Breadboard Bases | |||
| Single Axis Versions Available | |||
| Z Axis Options Available | |||
| X and X' Controlled Yaw Available | |||
| Various Material Options Available | |||
| Inch Spacing Versions Available (see page 3) | |||
| *Increased Gap between X and X' stages without Increased Y Travel |
|||
| Model | AI-LM-50000-UII | ||
| Stage | Cartesian Gantry | ||
| Travel - X And/Or Travel - Y | 500 mm (+/- 250 mm) | ||
| Dimensions (Length x Width x Height) | 800 mm x 1007 mm x 320 mm | ||
| Max. Sample Width (Inner Width) | 634 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient | ||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | STD | PRCSN | ULTRA |
| Linear Displacement Accuracy | +/- 20 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 1.0 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 6 µm | +/- 4 µm | |
| Flatness [2] | +/- 12 µm | +/- 8 µm | |
| Pitch | 20 arc-sec | ||
| Yaw | 20 arc-sec | ||
| Roll | 20 arc-sec | ||
| Max Velocity With AC Drive [3] | 2.5 m/s | ||
| Max Velocity With 48VDC Drive [3] | 0.5 m/s | ||
| Max Acceleration With AC Drive [3] | 2 G | ||
| Max Acceleration With 48VDC Drive [3] | 0.4 G | ||
| Max (Vertical) Payload Capability | 25 kg | ||
| Max (Horizontal) Payload Capability | 30 kg | ||
| Assembly Mass | 38 kg | ||
| Configurable Options | |||
| ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements | Y Axis Top Down Mounting (Face Mounting Shown) | ||
| Large or Small Cable Tracks | |||
| Mix and Match Travel | |||
| Risers Available (Custom Height) | |||
| Multiple Cable Routing and Connectorization Options | |||
| Customer Cable Routing Available | |||
| Granite, Optical Table, and Breadboard Bases | |||
| Single Axis Versions Available | |||
| Z Axis Options Available | |||
| X and X' Controlled Yaw Available | |||
| Various Material Options Available | |||
| Inch Spacing Versions Available (see page 3) | |||
| *Increased Gap between X and X' stages without Increased Y Travel |
|||
| Model | AI-LM-40000-UII | ||
| Stage | Cartesian Gantry | ||
| Travel - X And/Or Travel - Y | 400 mm (+/- 200 mm) | ||
| Dimensions (Length x Width x Height) | 700 mm 907 mm x 320 mm | ||
| Max. Sample Width (Inner Width) | 534 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient | ||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | STD | PRCSN | ULTRA |
| Linear Displacement Accuracy | +/- 16 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 1.0 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 10 µm | +/- 6 µm | |
| Pitch | 20 arc-sec | ||
| Yaw | 20 arc-sec | ||
| Roll | 20 arc-sec | ||
| Max Velocity With AC Drive [3] | 2.0 m/s | ||
| Max Velocity With 48VDC Drive [3] | 0.5 m/s | ||
| Max Acceleration With AC Drive [3] | 2.2 G | ||
| Max Acceleration With 48VDC Drive [3] | 0.5 G | ||
| Max (Vertical) Payload Capability | 25 kg | ||
| Max (Horizontal) Payload Capability | 30 kg | ||
| Assembly Mass | 33 kg | ||
| Configurable Options | |||
| ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements | Y Axis Top Down Mounting (Face Mounting Shown) | ||
| Large or Small Cable Tracks | |||
| Mix and Match Travel | |||
| Risers Available (Custom Height) | |||
| Multiple Cable Routing and Connectorization Options | |||
| Customer Cable Routing Available | |||
| Granite, Optical Table, and Breadboard Bases | |||
| Single Axis Versions Available | |||
| Z Axis Options Available | |||
| X and X' Controlled Yaw Available | |||
| Various Material Options Available | |||
| Inch Spacing Versions Available (see page 3) | |||
| *Increased Gap between X and X' stages without Increased Y Travel |
|||
| Model | AI-LM-30000-UII | ||
| Stage | Cartesian Gantry | ||
| Travel - X And/Or Travel - Y | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 600 mm x 807 mm x 320 mm | ||
| Max. Sample Width (Inner Width) | 434 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient | ||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | STD | PRCSN | ULTRA |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 1.0 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 10 µm | +/- 6 µm | |
| Pitch | 20 arc-sec | ||
| Yaw | 20 arc-sec | ||
| Roll | 20 arc-sec | ||
| Max Velocity With AC Drive [3] | 2.0 m/s | ||
| Max Velocity With 48VDC Drive [3] | 0.5 m/s | ||
| Max Acceleration With AC Drive [3] | 2.5 G | ||
| Max Acceleration With 48VDC Drive [3] | 0.5 G | ||
| Max (Vertical) Payload Capability | 25 kg | ||
| Max (Horizontal) Payload Capability | 30 kg | ||
| Assembly Mass | 30 kg | ||
| Configurable Options | |||
| ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements | Y Axis Top Down Mounting (Face Mounting Shown) | ||
| Large or Small Cable Tracks | |||
| Mix and Match Travel | |||
| Risers Available (Custom Height) | |||
| Multiple Cable Routing and Connectorization Options | |||
| Customer Cable Routing Available | |||
| Granite, Optical Table, and Breadboard Bases | |||
| Single Axis Versions Available | |||
| Z Axis Options Available | |||
| X and X' Controlled Yaw Available | |||
| Various Material Options Available | |||
| Inch Spacing Versions Available (see page 3) | |||
| *Increased Gap between X and X' stages without Increased Y Travel |
|||
| Model | AI-LM-20000-UII | ||
| Stage | Cartesian Gantry | ||
| Travel - X And/Or Travel - Y | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 500 mm x 707 mm x 320 mm | ||
| Max. Sample Width (Inner Width) | 334 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient | ||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | STD | PRCSN | ULTRA |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 1.0 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 10 µm | +/- 6 µm | |
| Pitch | 20 arc-sec | ||
| Yaw | 20 arc-sec | ||
| Roll | 20 arc-sec | ||
| Max Velocity With AC Drive [3] | 2.0 m/s | ||
| Max Velocity With 48VDC Drive [3] | 0.5 m/s | ||
| Max Acceleration With AC Drive [3] | 2.5 G | ||
| Max Acceleration With 48VDC Drive [3] | 0.5 G | ||
| Max (Vertical) Payload Capability | 25 kg | ||
| Max (Horizontal) Payload Capability | 30 kg | ||
| Assembly Mass | 28 kg | ||
| Configurable Options | |||
| ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements | Y Axis Top Down Mounting (Face Mounting Shown) | ||
| Large or Small Cable Tracks | |||
| Mix and Match Travel | |||
| Risers Available (Custom Height) | |||
| Multiple Cable Routing and Connectorization Options | |||
| Customer Cable Routing Available | |||
| Granite, Optical Table, and Breadboard Bases | |||
| Single Axis Versions Available | |||
| Z Axis Options Available | |||
| X and X' Controlled Yaw Available | |||
| Various Material Options Available | |||
| Inch Spacing Versions Available (see page 3) | |||
| *Increased Gap between X and X' stages without Increased Y Travel |
|||
| Model | AI-LM-300x200-XY | ||
| Stage | Monolithic XY Stage (Asymmetrical) |
||
| Travel - X | 300 mm (+/- 150 mm) | ||
| Travel - Y | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 500 mm x 336 mm x 100mm | ||
| Drives | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5 µm | +/- 1.0 µm | +/- 0.5 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2 µm | +/- 1.0 µm | +/- 0.5 µm |
| Flatness [2] | +/- 5 µm | +/- 2 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Orthogonality | 20 arc-sec | 5 arc-sec | 1 arc-sec |
| Max Velocity [3] | 1 m/s | ||
| Max Acceleration [3] | 0.7 G | ||
| Max Payload Capability | 30 kg | ||
| Assembly Mass | 28 kg | ||
| Model | AI-SLM-395x320-XY | ||
| Stage | Monolithic XY Stage (Asymmetrical) |
||
| Travel - X | 395 mm | ||
| Travel - Y | 320 mm | ||
| Dimensions (Length X Width X Height) | 672 mm x 525 mm x 145 mm | ||
| Drives | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | STD | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 2.0 µm | +/- 1.0 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5.0 µm | +/- 2.0 µm | +/- 1.0 µm |
| Flatness [2] | +/- 10.0 µm | +/- 5.0 µm | +/- 2.0 µm |
| Pitch [2] | +/- 18.0 arc-sec | +/- 18.0 arc-sec | +/- 10.0 arc-sec |
| Yaw | +/- 18.0 arc-sec | +/- 18.0 arc-sec | +/- 10.0 arc-sec |
| Roll | +/- 10.0 arc-sec | +/- 10.0 arc-sec | +/- 10.0 arc-sec |
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 2.0 arc-sec |
| Max Velocity [3] | 1.5 m/s | ||
| Max Peak Acceleration [3] | 0.59 G | ||
| Max Payload Capability | 200 kg | ||
| Assembly Mass | 98 kg | ||
| Model | AI-LM-160x100-XY | ||
| Stage | Monolithic XY Stage (Asymmetrical) |
||
| Travel - X | 160 mm (+/- 80 mm) | ||
| Travel - Y | 100 mm (+/- 50 mm) | ||
| Dimensions (Length X Width X Height) | 275 mm x 175 mm x 80 mm | ||
| Drives | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm | +/- 0.7 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1.0 µm | +/- 0.7 µm | +/- 0.4 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 7.5 arc-sec | ||
| Yaw | +/- 7.5 arc-sec | ||
| Roll | +/- 4.0 arc-sec | ||
| Orthogonality | +/- 10.0 arc-sec | +/- 2.5 arc-sec | +/- 0.5 arc-sec |
| Max Velocity [3] | 1 m/s | ||
| Max Peak Acceleration [3] | 1.5 G | ||
| Max Payload Capability | 25 kg | ||
| Assembly Mass | 11.4 kg | ||
| Model | AI-CM-25000-250-XY | ||
| Stage | Monolithic XY Stage with Open Center |
||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 468.5 mm x 468.5 mm x 80 mm | ||
| Aperture / Thru | 250 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.2 µm | +/- 0.7 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4.0 µm | +/- 1.2 µm | +/- 0.7 µm |
| Flatness [2] | +/- 4.0 µm | +/- 3.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.1 m/s | ||
| Bot Axis Max Velocity [3] | 0.6 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.3 G | ||
| Max Payload Capability | 25 kg | ||
| Assembly Mass | 33 kg | ||
| Model | AI-CM-20000-200-XY | ||
| Stage | Monolithic XY Stage with Open Center |
||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 332.5 mm x 332.5 mm x 65 mm | ||
| Aperture / Thru | 200 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.2 µm | +/- 0.7 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4.0 µm | +/- 1.2 µm | +/- 0.7 µm |
| Flatness [2] | +/- 4.0 µm | +/- 3.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1 m/s | ||
| Bot Axis Max Velocity [3] | 0.6 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.4 G | ||
| Max Payload Capability | 15 kg | ||
| Assembly Mass | 11.4 kg | ||
| Model | AI-CM-15000-150-XY | ||
| Stage | Monolithic XY Stage with Open Center |
||
| Travel | 150 mm (+/- 75 mm) | ||
| Dimensions (Length x Width x Height) | 282.5 mm x 282.5 mm x 52 mm | ||
| Aperture / Thru | 150 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 4.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Flatness [2] | +/- 5.0 µm | +/- 2.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.9 m/s | ||
| Bot Axis Max Velocity [3] | 0.5 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.2 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.4 G | ||
| Max Payload Capability | 12 kg | ||
| Assembly Mass | 7.4 kg | ||
| Model | AI-CM-10000-100-XY | ||
| Stage | Monolithic XY Stage with Open Center |
||
| Travel | 100 mm (+/- 50 mm) | ||
| Dimensions (Length x Width x Height) | 229.5 mm x 229.5 mm x 52 mm | ||
| Aperture / Thru | 100 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 4.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 12.0 arc-sec | ||
| Yaw | +/- 12.0 arc-sec | ||
| Roll | +/- 12.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.8 m/s | ||
| Bot Axis Max Velocity [3] | 0.5 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.6 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.6 G | ||
| Max Payload Capability | 12 kg | ||
| Assembly Mass | 5.6 kg | ||
| Model | AI-CM-5000-050-XY | ||
| Stage | Monolithic XY Stage with Open Center |
||
| Travel | 60 mm (+/- 30 mm) | ||
| Dimensions (Length x Width x Height) | 179.5 mm x 179.5 mm x 45 mm | ||
| Aperture / Thru | 50 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.7 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3.0 µm | +/- 0.7 µm | +/- 0.4 µm |
| Flatness [2] | +/- 2.5 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 12.0 arc-sec | ||
| Yaw | +/- 12.0 arc-sec | ||
| Roll | +/- 12.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.8 m/s | ||
| Bot Axis Max Velocity [3] | 0.5 m/s | ||
| Top Axis Max Peak Acceleration [3] | 3.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 1.0 G | ||
| Max Payload Capability | 10 kg | ||
| Assembly Mass | 3.2 kg | ||
| Model | AI-CM-3000-030-XY | ||
| Stage | Monolithic XY Stage with Open Center |
||
| Travel | 30 mm (+/- 15 mm) | ||
| Dimensions (Length x Width x Height) | 140 mm x 140 mm x 45 mm | ||
| Aperture / Thru | 30 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.5 µm | +/- 0.3 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2.0 µm | +/- 0.5 µm | +/- 0.3 µm |
| Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
| Pitch [2] | +/- 12.0 arc-sec | ||
| Yaw | +/- 12.0 arc-sec | ||
| Roll | +/- 12.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.8 m/s | ||
| Bot Axis Max Velocity [3] | 0.5 m/s | ||
| Top Axis Max Peak Acceleration [3] | 5.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 1.8 G | ||
| Max Payload Capability | 8 kg | ||
| Assembly Mass | 1.9 kg | ||
| Model | AI-CM-30000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 500 mm x 500 mm x 100 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 6.0 µm | +/- 1.0 µm | +/- 0.6 µm |
| Bidirectional Linear Repeatability | +/- 30 | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 10.0 µm | +/- 2.0 µm | +/- 1.0 µm |
| Flatness [2] | +/- 8.0 µm | +/- 5.0 µm | |
| Pitch [2] | +/- 18.0 arc-sec | ||
| Yaw | +/- 18.0 arc-sec | ||
| Roll | +/- 18.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.7 m/s | ||
| Bot Axis Max Velocity [3] | 0.3 | ||
| Top Axis Max Peak Acceleration [3] | 0.4 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.1 | ||
| Max Payload Capability | 35 kg | ||
| Assembly Mass | 69 kg | ||
| Model | AI-CM-25000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 400 mm x 400 mm x 100 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Bidirectional Linear Repeatability | +/- 30 | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 6.0 µm | +/- 2.0 µm | +/- 1.0 µm |
| Flatness [2] | +/- 6.0 µm | +/- 4.0 µm | |
| Pitch [2] | +/- 18.0 arc-sec | ||
| Yaw | +/- 18.0 arc-sec | ||
| Roll | +/- 18.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.8 m/s | ||
| Bot Axis Max Velocity [3] | 0.5 | ||
| Top Axis Max Peak Acceleration [3] | 0.6 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.2 G | ||
| Max Payload Capability | 25 kg | ||
| Assembly Mass | 48 kg | ||
| Model | AI-CM-20000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 275 mm x 275 mm x 60 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 4.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 30 | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Flatness [2] | +/- 4.0 µm | +/- 3.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1 m/s | ||
| Bot Axis Max Velocity [3] | 0.6 | ||
| Top Axis Max Peak Acceleration [3] | 1.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.4 G | ||
| Max Payload Capability | 15 kg | ||
| Assembly Mass | 12 kg | ||
| Model | AI-CM-15000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 150 mm (+/- 75 mm) | ||
| Dimensions (Length x Width x Height) | 225 mm x 225 mm x 60 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 30 | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Flatness [2] | +/- 4.0 µm | +/- 2.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.8 m/s | ||
| Bot Axis Max Velocity [3] | 0.5 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.4 G | ||
| Max Payload Capability | 12 kg | ||
| Assembly Mass | 8.5 kg | ||
| Model | AI-CM-10000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 100 mm (+/- 50 mm) | ||
| Dimensions (Length x Width x Height) | 184 mm x 184 mm x 60 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 1.0 µm | +/- 0.3 µm |
| Bidirectional Linear Repeatability | +/- 30 | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2.0 µm | +/- 1.0 µm | +/- 0.3 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 12.0 arc-sec | ||
| Yaw | +/- 12.0 arc-sec | ||
| Roll | +/- 12.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.7 m/s | ||
| Bot Axis Max Velocity [3] | 0.5 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.2 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.6 G | ||
| Max Payload Capability | 12 kg | ||
| Assembly Mass | 5.8 kg | ||
| Model | AI-CM-6000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 60 mm (+/- 30 mm) | ||
| Dimensions (Length x Width x Height) | 125 mm x125 mm x 60 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings |
||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 |
||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.7 µm | +/- 0.3 µm |
| Bidirectional Linear Repeatability | +/- 30 | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2.0 µm | +/- 0.7 µm | +/- 0.3 µm |
| Flatness [2] | +/- 2.5 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 12.0 arc-sec | ||
| Yaw | +/- 12.0 arc-sec | ||
| Roll | +/- 12.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.9 m/s | ||
| Bot Axis Max Velocity [3] | 0.6 | ||
| Top Axis Max Peak Acceleration [3] | 3.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 1.2 G | ||
| Max Payload Capability | 10 kg | ||
| Assembly Mass | 2.9 kg | ||
| Model | AI-CM-3000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 30 mm (+/- 15 mm) | ||
| Dimensions (Length x Width x Height) | 112 mm x 112 mm x 50 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 |
||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.5 µm | +/- 0.2 µm |
| Bidirectional Linear Repeatability | +/- 30 | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1.0 µm | +/- 0.5 µm | +/- 0.2 µm |
| Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
| Pitch [2] | +/- 12.0 arc-sec | ||
| Yaw | +/- 12.0 arc-sec | ||
| Roll | +/- 12.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.7 m/s | ||
| Bot Axis Max Velocity [3] | 0.5 | ||
| Top Axis Max Peak Acceleration [3] | 4.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 2.0 G | ||
| Max Payload Capability | 8 kg | ||
| Assembly Mass | 1.6 kg | ||
| Model | AI-LM-40000-400-XY | ||
| Stage | Monolithic XY Stage with Open Center | ||
| Travel | 400 mm (+/- 200 mm) | ||
| Dimensions (Length x Width x Height) | 650 mm x 650 mm x 120 mm | ||
| Aperture / Thru | 400 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 16.0 µm | +/- 2.5 µm | +/- 1.5 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 10.0 µm | +/- 2.5 µm | +/- 1.5 µm |
| Flatness [2] | +/- 12.0 µm | +/- 5.0 µm | |
| Pitch [2] | +/- 20.0 arc-sec | ||
| Yaw | +/- 20.0 arc-sec | ||
| Roll | +/- 20.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.8 m/s | ||
| Bot Axis Max Velocity [3] | 1.0 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.8 G | ||
| Top Axis Max Peak Acceleration [3] | 0.6 G | ||
| Max Payload Capability | 50 kg | ||
| Assembly Mass | 104 kg | ||
| Model | AI-LM-35000-350-XY | ||
| Stage | Monolithic XY Stage with Open Center | ||
| Travel | 350 mm (+/- 175 mm) | ||
| Dimensions (Length x Width x Height) | 550 mm x 550 mm x 120 mm | ||
| Aperture / Thru | 350 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 10.0 µm | +/- 2.0 µm | +/- 1.5 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 6.0 µm | +/- 2.0 µm | +/- 1.5 µm |
| Flatness [2] | +/- 10.0 µm | +/- 4.0 µm | |
| Pitch [2] | +/- 20.0 arc-sec | ||
| Yaw | +/- 20.0 arc-sec | ||
| Roll | +/- 20.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.8 m/s | ||
| Bot Axis Max Velocity [3] | 1.1 m/s | ||
| Top Axis Max Peak Acceleration [3] | 2.0 G | ||
| Top Axis Max Peak Acceleration [3] | 0.8 G | ||
| Max Payload Capability | 50 kg | ||
| Assembly Mass | 64 kg | ||
| Model | AI-LM-30000-300-XY | ||
| Stage | Monolithic XY Stage with Open Center | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 500 mm x 500 mm x 120 mm | ||
| Aperture / Thru | 300 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 8.0 µm | +/- 1.5 µm | +/- 1.0 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5.0 µm | +/- 1.5 µm | +/- 1.0 µm |
| Flatness [2] | +/- 6.0 µm | +/- 3.0 µm | |
| Pitch [2] | +/- 18.0 arc-sec | ||
| Yaw | +/- 18.0 arc-sec | ||
| Roll | +/- 18.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.7 m/s | ||
| Bot Axis Max Velocity [3] | 1.2 m/s | ||
| Top Axis Max Peak Acceleration [3] | 2.0 G | ||
| Top Axis Max Peak Acceleration [3] | 1.0 G | ||
| Max Payload Capability | 50 kg | ||
| Assembly Mass | 58 kg | ||
| Model | AI-LM-25000-250-XY | ||
| Stage | Monolithic XY Stage with Open Center | ||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 460 mm x 460 mm x 95 mm | ||
| Aperture / Thru | 250 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 6.0 µm | +/- 1.5 µm | +/- 1.0 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4.0 µm | +/- 1.5 µm | +/- 1.0 µm |
| Flatness [2] | +/- 5.0 µm | +/- 2.0 µm | |
| Pitch [2] | +/- 18.0 arc-sec | ||
| Yaw | +/- 18.0 arc-sec | ||
| Roll | +/- 18.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.9 m/s | ||
| Bot Axis Max Velocity [3] | 1.3 m/s | ||
| Top Axis Max Peak Acceleration [3] | 3.0 G | ||
| Top Axis Max Peak Acceleration [3] | 1.4 G | ||
| Max Payload Capability | 40 kg | ||
| Assembly Mass | 37 kg | ||
| Model | AI-LM-20000-200-XY | ||
| Stage | Monolithic XY Stage with Open Center | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 392 mm x 392 mm x 80 mm | ||
| Aperture / Thru | 200 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 6.0 µm | +/- 1.5 µm | +/- 0.8 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3.0 µm | +/- 1.5 µm | +/- 0.8 µm |
| Flatness [2] | +/- 4.0 µm | +/- 2.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 2 m/s | ||
| Bot Axis Max Velocity [3] | 1.1 m/s | ||
| Top Axis Max Peak Acceleration [3] | 4.0 G | ||
| Top Axis Max Peak Acceleration [3] | 1.4 G | ||
| Max Payload Capability | 30 kg | ||
| Assembly Mass | 23 kg | ||
| Model | AI-LM-15000-150-XY | ||
| Stage | Monolithic XY Stage with Open Center | ||
| Travel | 150 mm (+/- 75 mm) | ||
| Dimensions (Length x Width x Height) | 326.5 mm x 326.5 mm x 68 mm | ||
| Aperture / Thru | 150 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 4.0 µm | +/- 1.2 µm | +/- 0.6 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3.0 µm | +/- 1.2 µm | +/- 0.6 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.7 m/s | ||
| Bot Axis Max Velocity [3] | 1.0 m/s | ||
| Top Axis Max Peak Acceleration [3] | 4.0 G | ||
| Top Axis Max Peak Acceleration [3] | 1.4 G | ||
| Max Payload Capability | 25 kg | ||
| Assembly Mass | 14 kg | ||
| Model | AI-LM-10000-100-XY | ||
| Stage | Monolithic XY Stage with Open Center | ||
| Travel | 100 mm (+/- 50 mm) | ||
| Dimensions (Length x Width x Height) | 230 mm x 230 mm x 64 mm | ||
| Aperture / Thru | 100 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 4.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
| Pitch [2] | +/- 10.0 arc-sec | ||
| Yaw | +/- 10.0 arc-sec | ||
| Roll | +/- 10.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.4 m/s | ||
| Bot Axis Max Velocity [3] | 0.8 m/s | ||
| Top Axis Max Peak Acceleration [3] | 4.0 G | ||
| Top Axis Max Peak Acceleration [3] | 1.6 G | ||
| Max Payload Capability | 25 kg | ||
| Assembly Mass | 6.5 kg | ||
| Model | AI-LM-45000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 450 mm (+/- 225 mm) | ||
| Dimensions (Length x Width x Height) | 650 mm x 650 mm x 115 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 12.0 µm | +/- 1.5 µm | +/- 1.0 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 6.0 µm | +/- 1.5 µm | +/- 1.0 µm |
| Flatness [2] | +/- 16.0 µm | +/- 8.0 µm | |
| Pitch [2] | +/- 20.0 arc-sec | ||
| Yaw | +/- 20.0 arc-sec | ||
| Roll | +/- 14.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.7 m/s | ||
| Bot Axis Max Velocity [3] | 1 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.4 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.5 G | ||
| Max Payload Capability | 80 kg | ||
| Assembly Mass | 135 kg | ||
| Model | AI-LM-40000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 400 mm (+/- 200 mm) | ||
| Dimensions (Length x Width x Height) | 650 mm x 650 mm x 115 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 12.0 µm | +/- 1.5 µm | +/- 1.0 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 6.0 µm | +/- 1.5 µm | +/- 1.0 µm |
| Flatness [2] | +/- 16.0 µm | +/- 8.0 µm | |
| Pitch [2] | +/- 20.0 arc-sec | ||
| Yaw | +/- 20.0 arc-sec | ||
| Roll | +/- 14.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.6 m/s | ||
| Bot Axis Max Velocity [3] | 1 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.4 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.5 G | ||
| Max Payload Capability | 80 kg | ||
| Assembly Mass | 135 kg | ||
| Model | AI-LM-35000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 350 mm (+/- 175 mm) | ||
| Dimensions (Length x Width x Height) | 500 mm x 500 mm x 115 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 8.0 µm | +/- 1.5 µm | +/- 0.8 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4.0 µm | +/- 1.5 µm | +/- 0.8 µm |
| Flatness [2] | +/- 8.0 µm | +/- 4.0 µm | |
| Pitch [2] | +/- 20.0 arc-sec | ||
| Yaw | +/- 20.0 arc-sec | ||
| Roll | +/- 14.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.7 m/s | ||
| Bot Axis Max Velocity [3] | 1.1 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.9 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.7 G | ||
| Max Payload Capability | 50 kg | ||
| Assembly Mass | 75 kg | ||
| Model | AI-LM-30000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 500 mm x 500 mm x 115 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.0 µm | +/- 0.6 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2.0 µm | +/- 1.0 µm | +/- 0.6 µm |
| Flatness [2] | +/- 5.0 µm | +/- 2.0 µm | |
| Pitch [2] | +/- 18.0 arc-sec | ||
| Yaw | +/- 18.0 arc-sec | ||
| Roll | +/- 10.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.6 m/s | ||
| Bot Axis Max Velocity [3] | 1 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.9 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.7 G | ||
| Max Payload Capability | 50 kg | ||
| Assembly Mass | 75 kg | ||
| Model | AI-LM-25000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 400 mm x 400 mm x 115 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Flatness [2] | +/- 5.0 µm | +/- 2.0 µm | |
| Pitch [2] | +/- 18.0 arc-sec | ||
| Yaw | +/- 18.0 arc-sec | ||
| Roll | +/- 10.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.5 m/s | ||
| Bot Axis Max Velocity [3] | 0.9 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.9 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.7 G | ||
| Max Payload Capability | 40 kg | ||
| Assembly Mass | 52 kg | ||
| Model | AI-LM-20000-XY-HF | ||
| Stage | Monolithic XY Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 336 mm x 336 mm x 90 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1.5 µm | +/- 1.0 µm | +/- 0.4 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 8.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 2.0 m/s | ||
| Bot Axis Max Velocity [3] | 1.2 m/s | ||
| Top Axis Max Peak Acceleration [3] | 5.6 G | ||
| Bot Axis Max Peak Acceleration [3] | 2 G | ||
| Max Payload Capability | 30 kg | ||
| Assembly Mass | 28 kg | ||
| Model | AI-LM-20000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 336 mm x 336 mm x 90 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1.5 µm | +/- 1.0 µm | +/- 0.4 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 8.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.7 m/s | ||
| Bot Axis Max Velocity [3] | 1 m/s | ||
| Top Axis Max Peak Acceleration [3] | 3.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 1.3 G | ||
| Max Payload Capability | 30 kg | ||
| Assembly Mass | 28 kg | ||
| Model | AI-LM-16000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 160 mm (+/- 80 mm) | ||
| Dimensions (Length x Width x Height) | 275 mm x 275 mm x 80 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.7 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1.5 µm | +/- 0.7 µm | +/- 0.4 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 8.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.5 m/s | ||
| Bot Axis Max Velocity [3] | 1 m/s | ||
| Top Axis Max Peak Acceleration [3] | 3.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 1.3 G | ||
| Max Payload Capability | 25 kg | ||
| Assembly Mass | 16 kg | ||
| Model | AI-LM-10000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 100 mm (+/- 50 mm) | ||
| Dimensions (Length x Width x Height) | 244 mm x 244 mm x 80 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.7 µm | +/- 0.3 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1.0 µm | +/- 0.7 µm | +/- 0.3 µm |
| Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
| Pitch [2] | +/- 10.0 arc-sec | ||
| Yaw | +/- 10.0 arc-sec | ||
| Roll | +/- 6.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.4 m/s | ||
| Bot Axis Max Velocity [3] | 0.8 m/s | ||
| Top Axis Max Peak Acceleration [3] | 4.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 1.6 G | ||
| Max Payload Capability | 25 kg | ||
| Assembly Mass | 13 kg | ||
| Model | AI-LM-6000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 60 mm (+/- 30 mm) | ||
| Dimensions (Length x Width x Height) | 152.5 mm x 152.5 mm x 80 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.5 µm | +/- 0.2 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1.0 µm | +/- 0.5 µm | +/- 0.2 µm |
| Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
| Pitch [2] | +/- 10.0 arc-sec | ||
| Yaw | +/- 10.0 arc-sec | ||
| Roll | +/- 6.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.2 m/s | ||
| Bot Axis Max Velocity [3] | 0.7 m/s | ||
| Top Axis Max Peak Acceleration [3] | 5.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 2.0 G | ||
| Max Payload Capability | 20 kg | ||
| Assembly Mass | 4.7 kg | ||
| Model | AI-LM-3000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 30 mm ( +/- 15 mm) | ||
| Dimensions (Length x Width x Height) | 108 mm x 108 mm x 65 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.0 µm | +/- 0.2 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3.0 µm | +/- 1.0 µm | +/- 0.2 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.0 µm | |
| Pitch [2] | +/- 12.0 arc-sec | ||
| Yaw | +/- 12.0 arc-sec | ||
| Roll | +/- 6.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.2 m/s | ||
| Bot Axis Max Velocity [3] | 0.7 m/s | ||
| Top Axis Max Peak Acceleration [3] | 11.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 4.0 G | ||
| Max Payload Capability | 10 kg | ||
| Assembly Mass | 2.3 kg | ||
