ModelAI-LM-20000-Z-ABCB
StageVertical Z Stage
Travel200mm (+/- 100mm)
Dimensions (Length x Width x Height)230mm x 50mm x 484mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceAir Bearing Pneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 3.0 µm +/- 2.0 µm +/- 1.5 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Max Velocity [3]0.25 m/s
Max Peak Acceleration [3]2.5 G
Max Payload Capability25 kg
Assembly Mass9.3 kg
ModelAI-LM-15000-Z-ABCB-HF
StageVertical Z Stage
Travel150mm (+/- 75mm)
Dimensions (Length x Width x Height)215mm x 50mm x 353mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceAir Bearing Pneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 0.7 µm +/- 0.4 µm
Bidirectional Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 2.5 µm +/- 1.5 µm +/- 1.2 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Max Velocity [3]0.25 m/s
Max Peak Acceleration [3]4.0 G
Max Payload Capability25 kg
Assembly Mass6.5 kg
ModelAI-LM-15000-Z-ABCB
StageVertical Z Stage
Travel150mm (+/- 75mm)
Dimensions (Length x Width x Height)200mm x 50mm x 353mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceAir Bearing Pneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 0.7 µm +/- 0.4 µm
Bidirectional Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 2.5 µm +/- 1.5 µm +/- 1.2 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Max Velocity [3]0.25 m/s
Max Peak Acceleration [3]2.5 G
Max Payload Capability25 kg
Assembly Mass5.6 kg
ModelAI-LM-10000-Z-ABCB-HF
StageVertical Z Stage
Travel100mm (+/- 50mm)
Dimensions (Length x Width x Height)215mm x 50mm x 323mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceAir Bearing Pneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 0.7 µm +/- 0.3 µm
Bidirectional Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 2.5 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch [2] +/- 10.0 arc-sec
Yaw +/- 10.0 arc-sec
Roll +/- 6.0 arc-sec
Max Velocity [3]0.25 m/s
Max Peak Acceleration [3]4.5 G
Max Payload Capability25 kg
Assembly Mass5.9 kg
ModelAI-LM-10000-Z-ABCB
StageVertical Z Stage
Travel100mm (+/- 50mm)
Dimensions (Length x Width x Height)183.5mm x 50mm x 323mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceAir Bearing Pneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 0.7 µm +/- 0.3 µm
Bidirectional Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 2.5 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch [2] +/- 10.0 arc-sec
Yaw +/- 10.0 arc-sec
Roll +/- 6.0 arc-sec
Max Velocity [3]0.25 m/s
Max Peak Acceleration [3]3.5 G
Max Payload Capability12 kg
Assembly Mass4.7 kg
ModelAI-LM-6000-Z-ABCB
StageVertical Z Stage
Travel60mm (+/- 30mm)
Dimensions (Length x Width x Height)183.5mm x 45mm x 220mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceAir Bearing Pneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 0.5 µm +/- 0.2 µm
Bidirectional Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 2.5 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch [2] +/- 10.0 arc-sec
Yaw +/- 10.0 arc-sec
Roll +/- 6.0 arc-sec
Max Velocity [3]0.25 m/s
Max Peak Acceleration [3]2.5 G
Max Payload Capability10 kg
Assembly Mass2.9 kg
ModelAI-BSD-5000-Z
StageVertical Z Stage
Travel50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)175 mm x 100 mm 229 mm
MotorFrameless Torque Motor, Precision Ball Screw
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
BrakeStandard: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: No Brake
CounterbalanceStandard: None Needed
Optional: Pneumatic Counterbalance to Increase Payload Capability
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional Linear Repeatability +/- 125 nm+/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 4.0 µm +/- 2.0 µm
Pitch +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.1 m/s
Max Acceleration [3]1.0 G
Max Payload Capability20 kg
Max Payload Capability (With Pneuboost)50 kg
Assembly Mass7.6 kg
ModelAI-BSD-3200-Z
StageVertical Z Stage
Travel32 mm (+/- 16 mm)
Dimensions (Length x Width x Height)175 mm x 100 mm x 202 mm
MotorFrameless Torque Motor, Precision Ball Screw
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
BrakeStandard: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: No Brake
CounterbalanceStandard: None Needed
Optional: Pneumatic Counterbalance to Increase Payload Capability
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional Linear Repeatability +/- 125 nm+/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.1 m/s
Max Acceleration [3]1.0 G
Max Payload Capability20 kg
Max Payload Capability (With Pneuboost)50 kg
Assembly Mass6.9 kg
ModelAI-BSD-2400-Z
StageVertical Z Stage
Travel24 mm (+/- 12 mm)
Dimensions (Length x Width x Height)175 mm x 100 mm x 188 mm
MotorFrameless Torque Motor, Precision Ball Screw
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
BrakeStandard: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: No Brake
CounterbalanceStandard: None Needed
Optional: Pneumatic Counterbalance to Increase Payload Capability
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3 µm +/- 0.8 µm +/- 0.4 µm
Bidirectional Linear Repeatability +/- 125 nm+/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2 µm +/- 0.8 µm +/- 0.4 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.1 m/s
Max Acceleration [3]1.0 G
Max Payload Capability20 kg
Max Payload Capability (With Pneuboost)50 kg
Assembly Mass6.6 kg
ModelAI-LM-17000-("PAYLOAD")-Z-MCB-BASE
StageVertical Z Stage
Travel170 mm (+/- 85 mm)
Payload Options20 N, 30 N, 40 N, 50 N, or 60 N
Dimensions (Length x Width x Height)262 mm x 50 mm x 340 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 2.0 µm +/- 0.4 µm
Bidirectional Linear Repeatability +/- 75 nm +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5.0 µm +/- 2.0 µm +/- 1.5 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm +/- 1.5 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll18 arc-sec
Max Velocity [3]1 m/s
Max Acceleration [3]2.0 G
Payload (Nominal)20 N30 N40 N50 N60 N
Minimum To Maximum Payload Range15-25 N25-35 N35-45 N45-55 N55-65 N
Assembly Mass13.8 kg
ModelAI-LM-5000-("PAYLOAD")-Z-MCB-("ORIENTATION")
StageVertical Z Stage
Travel50 mm (+/- 25 mm)
Payload Options30 N, 50 N, 60 N, 70 N, 80 N, or 90 N
Dimensions (Length x Width x Height)182 mm x 106 mm x 176 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Stainless Steel
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 7 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional Linear Repeatability +/- 100 nm +/- 75 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 3.0 µm
Flatness [2] +/- 6.0 µm +/- 3.0 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll15 arc-sec
Max Velocity [3]0.05 m/s
Payload (Nominal)30 N, 50 N, 60 N, 70 N, 80 N, or 90 N50 N60 N70 N80 N90 N
Minimum To Maximum Payload Range24-36 N44-56 N54-66 N64-76 N74-86 N84-96 N
Assembly Mass7.1 kg
Moving Mass3.3 kg
ModelAI-LM-5000-("PAYLOAD")-Z-MCB-("ORIENTATION")
StageVertical Z Stage
Travel50 mm (+/- 25 mm)
Payload Options2 N, 8 N, 14 N, 19 N, or 24 N
Dimensions (Length x Width x Height)165 mm x 96 mm x 156 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Stainless Steel
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 7 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional Linear Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5.0 µm +/- 2.5 µm
Flatness [2] +/- 5.0 µm +/- 2.5 µm
Pitch14 arc-sec
Yaw14 arc-sec
Roll14 arc-sec
Max Velocity [3]0.1 m/s
Payload (Nominal) --2 N8 N14 N19 N24 N
Minimum To Maximum Payload Range --0-6 N4-12 N10-18 N15-23 N18-30 N
Assembly Mass5.2 kg
Moving Mass2.1 kg
ModelAI-LM-2400-("PAYLOAD")-Z-MCB-("ORIENTATION")
StageVertical Z Stage
Travel24 mm (+/-12 mm)
Payload Options2 N, 8 N, 14 N, 19 N, or 24 N
Dimensions (Length x Width x Height)165 mm x 96 mm x 130 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Stainless Steel
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 0.7 µm +/- 0.3 µm
Bidirectional Linear Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.0 µm +/- 2.0 µm
Flatness [2] +/- 3.0 µm +/- 2.0 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll10 arc-sec
Max Velocity [3]0.1 m/s
Payload (Nominal) --2 N8 N14 N19 N24 N
Minimum To Maximum Payload Range --0-6 N4-12 N10-18 N15-23 N18-30 N
Assembly Mass4.6 kg
Moving Mass2 kg
ModelAI-VC-600-Z-SCB
StageVertical Z Stage
Travel6 mm (+/- 3 mm)
Dimensions (Length x Width x Height)80 mm x 60 mm x 70 mm
DriveVoice Coil Motor (VC)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]Depending on specific Application - Ask ALIO
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]4.0 G
Max Payload Capability2.5 kg
Assembly Mass0.9 kg
ModelAI-LM-2500-Z-MCB-15N
StageVertical Z Stage
Travel25 mm (+/- 12.5 mm)
Dimensions (Length x Width x Height)56 mm x 88 mm x 144 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Stainless Steel
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]Depending on specific Application - Ask ALIO
Max Payload [6]15N
Payload Range [6]7.5 - 15 N
Max Velocity0.1 m/s
Max Acceleration0.5 G
Assembly Mass1.9 kg
ModelAI-LM-2500-Z-MCB-7N
StageVertical Z Stage
Travel25 mm (+/- 12.5 mm)
Dimensions (Length x Width x Height)56 mm x 88 mm x 144 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Stainless Steel
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]Depending on specific Application - Ask ALIO
Max Payload [6]7.5 N
Payload Range [6]2.5 - 7.5 N
Max Velocity0.1 m/s
Max Acceleration0.5 G
Assembly Mass1.9 kg
ModelAI-LM-2500-Z-MCB-2N
StageVertical Z Stage
Travel25 mm (+/- 12.5 mm)
Dimensions (Length x Width x Height)56 mm x 88 mm x 144 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Stainless Steel
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]Depending on specific Application - Ask ALIO
Max Payload [6]2.5 N
Payload Range [6]0 - 2.5 N
Max Velocity0.1 m/s
Max Acceleration0.5 G
Assembly Mass1.9 kg
ModelAI-VC-2400-NANO-Z-CB
Travel24 mm (+ 24 mm/- 0 mm) 
Dimensions (Diameter x Height)200 mm x 112 mm
StageVertical Z Stage
MotorDual Voice Coil Motor (VC)
FeedbackDual Non-Contact Optical Linear Encoder
BearingsAir Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]Depending on specific application - Ask ALIO
Max Velocity0.2 m/s
Max Acceleration0.5 G
Assembly Mass6.5 kg
Max Payload20 kg
ModelAI-LM-7000-50N-Z-CB
StageVertical Z Stage
Travel70 mm (+ 70 mm/- 0 mm)
Dimensions (Length x Width x Height)175 mm x 125 mm x 250 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional Linear Repeatability +/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 4.0 µm +/- 2.0 µm
Pitch +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.25 m/s
Max Acceleration [3]1.0 G
Max Payload Capability30 kg
Force50 N
Assembly Mass13.0 kg
ModelAI-LM-6000-50N-Z-CB
StageVertical Z Stage
Travel60 mm (+ 60 mm/- 0 mm)
Dimensions (Length x Width x Height)175 mm x 125 mm x 235 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional Linear Repeatability +/- 75 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch +/- 12 arc-sec
Yaw +/- 12 arc-sec
Roll +/- 12 arc-sec
Max Velocity [3]0.25 m/s
Max Acceleration [3]1.0 G
Max Payload Capability20 kg
Force50 N
Assembly Mass12.3 kg
ModelAI-VC-2400-120N-Z-CB
StageVertical Z Stage
Travel24 mm (+ 24 mm/- 0 mm)
Dimensions (Length x Width x Height)175 mm x 125 mm x 170 mm
MotorVoice Coil Motor (VC)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3 µm +/- 0.8 µm +/- 0.4 µm
Bidirectional Linear Repeatability +/- 75 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2 µm +/- 0.8 µm +/- 0.4 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch +/- 10 arc-sec
Yaw +/- 10 arc-sec
Roll +/- 10 arc-sec
Max Velocity [3]0.25 m/s
Max Acceleration [3]1.0 G
Max Payload Capability16 kg
Force120 N
Assembly Mass8.0 kg
ModelAI-LM-5000-15N-Z-CB
StageVertical Z Stage
Travel50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)165 mm x 96 mm x 136 mm
DriveDirect Drive Ironless Core Linear Motor
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 8.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional Linear Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X +/- 5.0 µm +/- 2.5 µm
Flatness [2] +/- 5.0 µm +/- 2.5 µm
Pitch [2] +/- 12.0 arc-sec
Yaw +/- 12.0 arc-sec
Roll +/- 12.0 arc-sec
Max Velocity [3]0.2 m/s
Max Peak Acceleration [3]1.5 G
Max Payload Capability10 kg
Force15 N
Assembly Mass4.4 kg
ModelAI-LM-3000-47N-Z-CB
StageVertical Z Stage
Travel30 mm (+/- 15 mm)
Dimensions (Length x Width x Height)165 mm x 96 mm x 136 mm
DriveDirect Drive Ironless Core Linear Motor
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 6.0 µm +/- 0.8 µm +/- 0.5 µm
Bidirectional Linear Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X +/- 4.0 µm +/- 2.0 µm
Flatness [2] +/- 4.0 µm +/- 2.0 µm
Pitch [2] +/- 10.0  arc-sec
Yaw +/- 10.0  arc-sec
Roll +/- 10.0  arc-sec
Max Velocity [3]0.2 m/s
Max Peak Acceleration [3]3.0 G
Max Payload Capability10 kg
Force47 N
Assembly Mass4.4 kg
ModelAI-VC-2400-11N-Z-CB
StageVertical Z Stage
Travel24 mm (+/- 12 mm)
Dimensions (Length x Width x Height)165 mm x 96 mm x 98 mm
DriveVoice Coil Motor (VC)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5.0 µm +/- 0.7 µm +/- 0.3 µm
Bidirectional Linear Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X +/- 3.0 µm +/- 2.0 µm
Flatness [2] +/- 3.0 µm +/- 2.0 µm
Pitch [2] +/- 10.0  arc-sec
Yaw +/- 10.0  arc-sec
Roll +/- 10.0  arc-sec
Max Velocity [3]0.1 m/s
Max Peak Acceleration [3]1.0 G
Max Payload Capability10 kg
Force11 N
Assembly Mass3.6 kg
ModelAI-VC-600-24N-Z-CB
StageVertical Z Stage
Travel6 mm (+/- 3 mm)
Dimensions (Length x Width x Height)165 mm x 96 mm x 98 mm
DriveVoice Coil Motor (VC)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 0.5 µm +/- 0.2 µm
Bidirectional Linear Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 1.5 µm +/- 1.0 µm
Pitch [2] +/- 10.0  arc-sec
Yaw +/- 10.0  arc-sec
Roll +/- 10.0  arc-sec
Max Velocity [3]0.1 m/s
Max Peak Acceleration [3]2.5 G
Max Payload Capability10 kg
Force24 N
Assembly Mass3.6 kg