Model	AI-LM-100000-AB8
Stage	Air Bearing Linear Stage
Travel	1000 mm (+/- 500 mm)
Dimensions (Length x Width x Height)	1387.6 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	26 kg

Model	AI-LM-80000-AB8
Stage	Air Bearing Linear Stage
Travel	800 mm (+/- 400 mm)
Dimensions (Length x Width x Height)	1184.4 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	23 kg

Model	AI-LM-60000-AB8
Stage	Air Bearing Linear Stage
Travel	600 mm (+/- 300 mm)
Dimensions (Length x Width x Height)	981.2 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	20 kg

Model	AI-LM-50000-AB8
Stage	Air Bearing Linear Stage
Travel	500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)	879.6 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	18.5 kg

Model	AI-LM-40000-AB8
Stage	Air Bearing Linear Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	778 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	17 kg

Model	AI-LM-30000-AB8
Stage	Air Bearing Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	676.4 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	15.5 kg

Model	AI-LM-20000-AB8
Stage	Air Bearing Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	574.8 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	14 kg

Model	AI-LM-15000-AB8
Stage	Air Bearing Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	524 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	13 kg

Model	AI-LM-10000-AB8
Stage	Air Bearing Linear Stage
Travel	50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)	473.2 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	12.5 kg

Model	AI-VC-600-Z-SCB-ATRAK
Stage	Vertical Z Stage
Travel	6 mm (+/- 3 mm)
Dimensions (Length x Width x Height)	73.6 mm x 60 mm x 59 mm
Drive	Voice Coil Motor (VC)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Spring Counterbalance
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Linear Displacement Accuracy	+/- 2.0 µm
Bidirectional Linear Repeatability	+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 5 µm
Flatness [2]	+/- 5 µm
Max Payload Capability	350 g
Force	15 N
Assembly Mass	620 g

Model	AI-LM-100000-AB-BR
Stage	Box Rail Air Bearing Linear Stage
Travel	1000 mm (+/- 500 mm)
Dimensions (Length x Width x Height)	1320.8 mm x 317.5 mm x 100.84 mm
Dimensions Moving Plate (Length x Width)	317.5 mm x 266.7 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Payload Capacity	100 kg
Assembly Mass	29 kg

Model	AI-LM-80000-AB
Stage	Air Bearing Linear Stage
Travel	800 mm (+/- 400 mm)
Dimensions (Length x Width x Height)	1032 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	14.3 kg

Model	AI-LM-60000-AB
Stage	Air Bearing Linear Stage
Travel	600 mm (+/- 300 mm)
Dimensions (Length x Width x Height)	828.8 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	11.7 kg

Model	AI-LM-50000-AB
Stage	Air Bearing Linear Stage
Travel	500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)	727.2 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	10.4 kg

Model	AI-LM-40000-AB
Stage	Air Bearing Linear Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	625.6 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	9.1 kg

Model	AI-LM-30000-AB
Stage	Air Bearing Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	524 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	7.8 kg

Model	AI-LM-20000-AB
Stage	Air Bearing Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	422.4 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	6.5 kg

Model	AI-LM-15000-AB
Stage	Air Bearing Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	371.6 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	5.9 kg

Model	AI-LM-10000-AB
Stage	Air Bearing Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	320.8 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	5.2 kg

Model	AI-LM-5000-AB
Stage	Air Bearing Linear Stage
Travel	50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)	270 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	4.6 kg

Model	AI-TM-80RA-UII
Stage	Rotary Stage
Travel	360 deg continuous
Diameter	80 mm
Dimensions (Length x Width x Height)	86 mm x 80 mm x 84 mm
Aperture / Thru	10.75 mm
Drive	Torque Motor
Feedback	Non-Contact Optical Rotary Encoder
Bearings	Angular Contact (Duplex Pair)
Cables	High Flex, 10M Cycle, 1.5m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [2]	(STD)	ULTRA	NANO
Bidirectional Angular Repeatability	+/- 1.5 arc-sec	+/- 0.5 arc-sec	+/- 0.3 arc-sec
Resolution	0.32 - 32.0 arc-sec (Digital)
Axial Runout	25 µm
Radial Runout	25 µm
Wobble	50 arc-sec
Max Velocity [3]	720 deg/s
Max Acceleration [3]	> 3600 deg/s²
Assembly Mass	1 kg
Max Load (Axial)	2.5 kg
Max Load (Radial)	2.5 kg

Model	AI-LM-420RA
Stage	Rotary Stage
Travel	+/- 5 deg
Diameter	420 mm
Dimensions (Length x Width x Height)	490 mm x 420 mm x 40 mm
Thru	330 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Rotary Encoder
Bearings	Angular Contact (Duplex Pair)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Angular Accuracy	N/A	+/- 1.0 arc-sec
Bidirectional Angular Repeatability	+/- 0.4 arc-sec	+/- 0.3 arc-sec	+/- 0.2 arc-sec
Resolution [2]	Standard: 0.005 arc-sec (Analog) Optional: 0.002 - 5.0 arc-sec (Digital)
Axial Runout	+/- 1.5 µm	N/A
Radial Runout	+/- 1.5 µm	N/A
Wobble	+/- 2.5 arc-sec	N/A
Max Velocity [3]	900 deg/s
Max Acceleration [3]	800000 deg/s²
Max Load (Axial)	40 kg
Max Load (Radial)	20 kg
Assembly Mass	8.7 kg

Model	AI-LM-200RA
Stage	Rotary Stage
Travel	+/- 7.5 deg
Diameter	200 mm
Dimensions (Length x Width x Height)	270 mm x 200 mm x 36 mm
Thru	100 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Rotary Encoder
Bearings	Angular Contact (Duplex Pair)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Angular Accuracy	N/A	+/- 1.0 arc-sec
Bidirectional Angular Repeatability	+/- 0.5 arc-sec	+/- 0.4 arc-sec	+/- 0.2 arc-sec
Resolution [2]	Standard: 0.01 arc-sec (Analog) Optional: 0.003 - 10.0 arc-sec (Digital)
Axial Runout	+/- 2.0 µm	N/A
Radial Runout	+/- 2.0 µm	N/A
Wobble	+/- 4.0 arc-sec	N/A
Max Velocity [3]	1500 deg/s
Max Acceleration [3]	2000000 deg/s²
Max Load (Axial)	40 kg
Max Load (Radial)	20 kg
Assembly Mass	4 kg

Model	AI-TM-312RA
Stage	Rotary Stage
Travel	360 deg continuous
Diameter	312 mm
Dimensions (Length x Width x Height)	332 mm x 312 mm x 80 mm
Aperture / Thru	75 mm
Drive	Torque Motor
Feedback	Non-Contact Optical Rotary Encoder
Sensors	Integrated Home
Bearings	Angular Contact (Duplex Pair)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Angular Accuracy	N/A	+/- 3.0 arc-sec
Bidirectional Angular Repeatability	+/- 0.5 arc-sec	+/- 0.4 arc-sec	+/- 0.2 arc-sec
Axial Runout	+/- 5.0 µm	+/- 2.5 µm	+/- 1.5 µm
Radial Runout	+/- 5.0 µm	+/- 2.5 µm	+/- 1.5 µm
Wobble	+/- 7.5 arc-sec	+/- 5.0 arc-sec	+/- 2.5 arc-sec
Resolution [2]	Standard: 0.007 arc-sec (Analog) Optional: 0.002 - 7.0 arc-sec (Digital)
Max Velocity [3]	2400 deg/s
Max Acceleration [3]	30000 deg/s²
Max Load (Axial)	50 kg
Max Load (Radial)	33 kg
Assembly Mass	19 kg

Model	AI-TM-240RA
Stage	Rotary Stage
Travel	360 deg continuous
Diameter	240 mm
Dimensions (Length x Width x Height)	260 mm x 240 mm x 45 mm
Aperture / Thru	100 mm
Drive	Torque Motor
Feedback	Non-Contact Optical Rotary Encoder
Sensors	Integrated Home
Bearings	Angular Contact (Duplex Pair)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Angular Accuracy	N/A	+/- 3.0 arc-sec
Bidirectional Angular Repeatability	+/- 0.5 arc-sec	+/- 0.4 arc-sec	+/- 0.2 arc-sec
Axial Runout	+/- 5.0 µm	+/- 2.5 µm	+/- 1.5 µm
Radial Runout	+/- 5.0 µm	+/- 2.5 µm	+/- 1.5 µm
Wobble	+/- 7.5 arc-sec	+/- 5.0 arc-sec	+/- 2.5 arc-sec
Resolution [2]	Standard: 0.009 arc-sec (Analog) Optional: 0.003 - 9.0 arc-sec (Digital)
Max Velocity [3]	3600 deg/s
Max Acceleration [3]	70000 deg/s²
Max Load (Axial)	8 kg
Max Load (Radial)	8 kg
Assembly Mass	10 kg

Model	AI-TM-208RA
Stage	Rotary Stage
Travel	360 deg continuous
Diameter	208 mm
Dimensions (Length x Width x Height)	228 mm x 208 mm x 110 mm
Aperture / Thru	75 mm
Drive	Torque Motor
Feedback	Non-Contact Optical Rotary Encoder
Sensors	Integrated Home
Bearings	Angular Contact (Duplex Pair)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Angular Accuracy	N/A	+/- 3.0 arc-sec
Bidirectional Angular Repeatability	+/- 0.5 arc-sec	+/- 0.4 arc-sec	+/- 0.3 arc-sec
Axial Runout	+/- 5.0 µm	+/- 2.5 µm	+/- 1.5 µm
Radial Runout	+/- 5.0 µm	+/- 2.5 µm	+/- 1.5 µm
Wobble	+/- 8.0 arc-sec	+/- 5.0 arc-sec	+/- 2.5 arc-sec
Resolution [2]	Standard: 0.01 arc-sec (Analog) Optional: 0.003 - 10.0 arc-sec (Digital)
Max Velocity [3]	5500 deg/s
Max Acceleration [3]	170000 deg/s²
Max Load (Axial)	40 kg
Max Load (Radial)	27 kg
Assembly Mass	11 kg

Model	AI-TM-154RA
Stage	Rotary Stage
Travel	360 deg continuous
Diameter	154 mm
Dimensions (Length x Width x Height)	173 mm x 154 mm x 84 mm
Aperture / Thru	72 mm
Drive	Torque Motor
Feedback	Non-Contact Optical Rotary Encoder
Sensors	Integrated Home
Bearings	Angular Contact (Duplex Pair)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Angular Accuracy	N/A	+/- 3.0 arc-sec
Bidirectional Angular Repeatability	+/- 0.5 arc-sec
Axial Runout	+/- 5.0 µm	+/- 3.5 µm	+/- 2.0 µm
Radial Runout	+/- 5.0 µm	+/- 3.5 µm	+/- 2.0 µm
Wobble	+/- 10.0 arc-sec	+/- 5.0 arc-sec	+/- 3.0 arc-sec
Resolution [2]	Standard: 0.013 arc-sec (Analog) Optional: 0.004 - 14.0 arc-sec (Digital)
Max Velocity [3]	5500 deg/s
Max Acceleration [3]	160000 deg/s²
Max Load (Axial)	20 kg
Max Load (Radial)	20 kg
Assembly Mass	4.4 kg

Model	AI-TM-104RA
Stage	Rotary Stage
Travel	360 deg continuous
Diameter	104 mm
Dimensions (Length x Width x Height)	123 mm x 104 mm x 80 mm
Aperture / Thru	32 mm
Drive	Torque Motor
Feedback	Non-Contact Optical Rotary Encoder
Sensors	Integrated Home
Bearings	Angular Contact (Duplex Pair)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Angular Accuracy	N/A	+/- 3.0 arc-sec
Bidirectional Angular Repeatability	+/- 0.5 arc-sec	+/- 0.5 arc-sec	+/- 0.3 arc-sec
Axial Runout	+/- 5.0 µm	+/- 3.5 µm	+/- 2.0 µm
Radial Runout	+/- 5.0 µm	+/- 3.5 µm	+/- 2.0 µm
Wobble	+/- 10.0 arc-sec	+/- 5.0 arc-sec	+/- 3.0 arc-sec
Resolution [2]	Standard: 0.02 arc-sec (Analog) Optional: 0.05 - 21.0 arc-sec (Digital)
Max Velocity [3]	10000 deg/s
Max Acceleration [3]	500000 deg/s²
Max Load (Axial)	10 kg
Max Load (Radial)	10 kg
Assembly Mass	2.7 kg

Model	AI-TM-125R-AB
Stage	Rotary Stage
Travel	360 deg continuous
Diameter	125 mm
Dimensions (Length x Width x Height)	145 mm x 145 mm x 150 mm
Aperture / Thru	19 mm
Drive	Torque Motor
Feedback	Non-Contact Optical Rotary Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications
Axial Runout (Standard)	0.5 µm
Radial Runout (Standard)	0.5 µm
Axial Stiffness [7]	263 N/µm
Radial Stiffness [7]	87 N/µm
Tilt Stiffness [7]	0.18 Nm/µrad
Resolution (Standard) [8]	Standard: 0.02 arc-sec (Analog) Optional: 0.021 - 21.0 arc-sec (Digital)
Max Velocity [6]	1800 deg/s
Max Axial Load [7]	37 kg
Max Radial Load [7]	14 kg
Assembly Mass	9.6 kg

Model	AI-TM-104R-AB
Stage	Rotary Stage
Travel	360 deg continuous
Diameter	104 mm
Dimensions (Length x Width x Height)	123 mm x 104 mm x 94 mm
Aperture / Thru	32 mm
Drive	Torque Motor
Feedback	Non-Contact Optical Rotary Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications
Axial Runout	+/- 1 µm
Radial Runout	+/- 1 µm
Resolution [8]	Standard: 0.02 arc-sec (Analog) Optional: 0.021 - 21.0 arc-sec (Digital)
Max Velocity [7]	1440  deg/s
Max Axial Load	8 kg
Max Radial Load	4 kg
Assembly Mass	3.1 kg

Model	AI-TM-104R
Stage	Rotary Stage
Travel	360 deg continuous
Diameter	104 mm
Dimensions (Length x Width x Height)	123 mm x 104 mm x 80 mm
Aperture / Thru	32 mm
Drive	Torque Motor
Feedback	Non-Contact Optical Rotary Encoder
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Angular Accuracy	N/A	+/- 3.0 arc-sec
Bidirectional Angular Repeatability	+/- 0.6 arc-sec	+/- 0.5 arc-sec	+/- 0.3 arc-sec
Resolution [2]	Standard: 0.02 arc-sec (Analog) Optional: 0.005 - 21.0 arc-sec (Digital)
Axial Runout	+/- 6.0 µm	+/- 4.5 µm	+/- 3.0 µm
Radial Runout	+/- 6.0 µm	+/- 4.5 µm	+/- 3.0 µm
Wobble	+/- 12.5 arc-sec	+/- 7.5 arc-sec	+/- 5.0 arc-sec
Max Velocity [3]	>8000 deg/s
Max Acceleration [3]	400000 deg/s²
Max Load (Axial)	12 kg
Max Load (Radial)	12 kg
Assembly Mass	2.7 kg

Model	AI-TM-80R
Stage	Rotary Stage
Travel	360 deg continuous
Diameter	80 mm
Dimensions (Length x Width x Height)	96mm x 80 mm x 60 mm
Aperture / Thru	6 mm
Drive	Torque Motor
Feedback	Non-Contact Optical Rotary Encoder
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Angular Accuracy	N/A	+/- 3.0 arc-sec
Bidirectional Angular Repeatability	+/- 0.7 arc-sec	+/- 0.6 arc-sec	+/- 0.4 arc-sec
Resolution [2]	Standard: 0.027 arc-sec (Analog) Optional: 0.007 - 27.0 arc-sec (Digital)
Axial Runout	+/- 6.0 µm	+/- 5.0 µm	+/- 4.0 µm
Radial Runout	+/- 6.0 µm	+/- 5.0 µm	+/- 4.0 µm
Wobble	+/- 12.5 arc-sec	+/- 10.0 arc-sec	+/- 7.5 arc-sec
Max Velocity [3]	>6000 deg/s
Max Acceleration [3]	200000 deg/s²
Max Load (Axial)	2.5 kg
Max Load (Radial)	2.5 kg
Assembly Mass	1.1 kg

Model	AI-TM-56R
Stage	Rotary Stage
Travel	360 deg continuous
Diameter	56 mm
Dimensions (Length x Width x Height)	72 mm x 56 mm x 62 mm
Aperture / Thru	8 mm
Drive	Torque Motor
Feedback	Non-Contact Optical Rotary Encoder
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Angular Accuracy	N/A	+/- 3.0 arc-sec
Bidirectional Angular Repeatability	+/- 0.7 arc-sec	+/- 0.6 arc-sec	+/- 0.4 arc-sec
Resolution [2]	Standard: 0.039 arc-sec (Analog) Optional: 0.01 - 40.0 arc-sec (Digital)
Axial Runout	+/- 7.5 µm	+/- 6.0 µm	+/- 5.0 µm
Radial Runout	+/- 7.5 µm	+/- 6.0 µm	+/- 5.0 µm
Wobble	+/- 12.5 arc-sec	+/- 10.0 arc-sec	+/- 7.5 arc-sec
Max Velocity [3]	>3000 deg/s
Max Acceleration [3]	60000 deg/s²
Max Load (Axial)	2.5 kg
Max Load (Radial)	2.5 kg
Assembly Mass	0.65 kg

Model	AI-LM-100000-ABL
Stage	XY Planar Air Bearing Stage
Travel - XY	1000 mm (+/- 500 mm)
Optional Travel - Yaw Compliance	Optional: +/- 0.1 deg
Dimensions (Length x Width x Height)	2050 mm x 1600 mm x 145 mm
Dimensions Moving Plate (Length x Width)	404 mm x 423.4 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available
Structure	Anodized Aluminum 6061-T6
Base Structure	Precision Lapped Black Granite
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy	< +/- 0.5 µm
Repeatability	< +/- 100 nm
Straightness	< +/- 0.5 µm
Flatness	< +/- 1 µm
Max Velocity	> 1 m/s
Max Acceleration	> 1 G
Load Capacity	20 kg Optional: 80+ kg
Assembly Mass	Depending on specific Configuration - Ask ALIO
Configurable Options	#colspan#
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements	Custom Plate L x W x H
	Custom X and/or Y Travel
	Custom User Mounting Interface Features
	Custom Platen Designs (Open Center Options)
	Custom Compact Designs for Small Footprint
	Customer Cable Routing
	Customizable Motor Forces
	Custom High Payload Options
	Custom Granite Features and Sizes
	Various Material Options Throughout
	Single Axis Versions Available (Y Axis Only)
	Various Support and Vibration Isolation Options
	Various Safety System Options
	Various Control Chassis Options

Model	AI-LM-80000-ABL
Stage	XY Planar Air Bearing Stage
Travel - XY	800 mm (+/- 400 mm)
Optional Travel - Yaw Compliance	Optional: +/- 0.1 deg
Dimensions (Length x Width x Height)	1850 mm x 1400 mm x 145 mm
Dimensions Moving Plate (Length x Width)	404 mm x 423.4 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available
Structure	Anodized Aluminum 6061-T6
Base Structure	Precision Lapped Black Granite
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy	< +/- 0.5 µm
Repeatability	< +/- 100 nm
Straightness	< +/- 0.5 µm
Flatness	< +/- 1 µm
Max Velocity	> 1 m/s
Max Acceleration	> 1 G
Load Capacity	20 kg Optional: 80+ kg
Assembly Mass	Depending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements	Custom Plate L x W x H
	Custom X and/or Y Travel
	Custom User Mounting Interface Features
	Custom Platen Designs (Open Center Options)
	Custom Compact Designs for Small Footprint
	Customer Cable Routing
	Customizable Motor Forces
	Custom High Payload Options
	Custom Granite Features and Sizes
	Various Material Options Throughout
	Single Axis Versions Available (Y Axis Only)
	Various Support and Vibration Isolation Options
	Various Safety System Options
	Various Control Chassis Options

Model	AI-LM-60000-ABL
Stage	XY Planar Air Bearing Stage
Travel - XY	600 mm (+/- 300 mm)
Optional Travel - Yaw Compliance	Optional: +/- 0.1 deg
Dimensions (Length x Width x Height)	1650 mm x 1200 mm x 145 mm
Dimensions Moving Plate (Length x Width)	404 mm x 423.4 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available
Structure	Anodized Aluminum 6061-T6
Base Structure	Precision Lapped Black Granite
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	#colspan#
Accuracy	< +/- 0.5 µm
Repeatability	< +/- 100 nm
Straightness	< +/- 0.5 µm
Flatness	< +/- 1 µm
Max Velocity	> 1 m/s
Max Acceleration	> 1 G
Load Capacity	20 kg Optional: 80+ kg
Assembly Mass	Depending on specific Configuration - Ask ALIO
Configurable Options	#colspan#
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements	Custom Plate L x W x H
	Custom X and/or Y Travel
	Custom User Mounting Interface Features
	Custom Platen Designs (Open Center Options)
	Custom Compact Designs for Small Footprint
	Customer Cable Routing
	Customizable Motor Forces
	Custom High Payload Options
	Custom Granite Features and Sizes
	Various Material Options Throughout
	Single Axis Versions Available (Y Axis Only)
	Various Support and Vibration Isolation Options
	Various Safety System Options
	Various Control Chassis Options

Model	AI-LM-50000-ABL
Stage	XY Planar Air Bearing Stage
Travel - XY	500 mm (+/- 250 mm)
Optional Travel - Yaw Compliance	Optional: +/- 0.1 deg
Dimensions (Length x Width x Height)	1550 mm x 1100 mm x 145 mm
Dimensions Moving Plate (Length x Width)	404 mm x 423.4 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available
Structure	Anodized Aluminum 6061-T6
Base Structure	Precision Lapped Black Granite
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	#colspan#
Accuracy	< +/- 0.5 µm
Repeatability	< +/- 100 nm
Straightness	< +/- 0.5 µm
Flatness	< +/- 1 µm
Max Velocity	> 1 m/s
Max Acceleration	> 1 G
Load Capacity	20 kg Optional: 80+ kg
Assembly Mass	Depending on specific Configuration - Ask ALIO
Configurable Options	#colspan#
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements	Custom Plate L x W x H
	Custom X and/or Y Travel
	Custom User Mounting Interface Features
	Custom Platen Designs (Open Center Options)
	Custom Compact Designs for Small Footprint
	Customer Cable Routing
	Customizable Motor Forces
	Custom High Payload Options
	Custom Granite Features and Sizes
	Various Material Options Throughout
	Single Axis Versions Available (Y Axis Only)
	Various Support and Vibration Isolation Options
	Various Safety System Options
	Various Control Chassis Options

Model	AI-LM-40000-ABL
Stage	XY Planar Air Bearing Stage
Travel - XY	400 mm (+/- 200 mm)
Optional Travel - Yaw Compliance	Optional: +/- 0.1 deg
Dimensions (Length x Width x Height)	1450 mm x 1000 mm x 145 mm
Dimensions Moving Plate (Length x Width)	404 mm x 423.4 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available
Structure	Anodized Aluminum 6061-T6
Base Structure	Precision Lapped Black Granite
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy	< +/- 0.5 µm
Repeatability	< +/- 100 nm
Straightness	< +/- 0.5 µm
Flatness	< +/- 1 µm
Max Velocity	> 1 m/s
Max Acceleration	> 1 G
Load Capacity	20 kg Optional: 80+ kg
Assembly Mass	Depending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements	Custom Plate L x W x H
	Custom X and/or Y Travel
	Custom User Mounting Interface Features
	Custom Platen Designs (Open Center Options)
	Custom Compact Designs for Small Footprint
	Customer Cable Routing
	Customizable Motor Forces
	Custom High Payload Options
	Custom Granite Features and Sizes
	Various Material Options Throughout
	Single Axis Versions Available (Y Axis Only)
	Various Support and Vibration Isolation Options
	Various Safety System Options
	Various Control Chassis Options

Model	AI-LM-30000-ABL
Stage	XY Planar Air Bearing Stage
Travel - XY	300 mm (+/- 150 mm)
Optional Travel - Yaw Compliance	Optional: +/- 0.1 deg
Dimensions (Length x Width x Height)	1350 mm x 800 mm x 145 mm
Dimensions Moving Plate (Length x Width)	404 mm x 423.4 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available
Structure	Anodized Aluminum 6061-T6
Base Structure	Precision Lapped Black Granite
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy	< +/- 0.5 µm
Repeatability	< +/- 100 nm
Straightness	< +/- 0.5 µm
Flatness	< +/- 1 µm
Max Velocity	> 1 m/s
Max Acceleration	> 1 G
Load Capacity	20 kg Optional: 80+ kg
Assembly Mass	Depending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements	Custom Plate L x W x H
	Custom X and/or Y Travel
	Custom User Mounting Interface Features
	Custom Platen Designs (Open Center Options)
	Custom Compact Designs for Small Footprint
	Customer Cable Routing
	Customizable Motor Forces
	Custom High Payload Options
	Custom Granite Features and Sizes
	Various Material Options Throughout
	Single Axis Versions Available (Y Axis Only)
	Various Support and Vibration Isolation Options
	Various Safety System Options
	Various Control Chassis Options

Model	AI-LM-20000-ABL
Stage	XY Planar Air Bearing Stage
Travel - XY	200 mm (+/- 100 mm)
Optional Travel - Yaw Compliance	Optional: +/- 0.1 deg
Dimensions (Length x Width x Height)	1250 mm x 700 mm x 145 mm
Dimensions Moving Plate (Length x Width)	404 mm x 423.4 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available
Structure	Anodized Aluminum 6061-T6
Base Structure	Precision Lapped Black Granite
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy	< +/- 0.5 µm
Repeatability	< +/- 100 nm
Straightness	< +/- 0.5 µm
Flatness	< +/- 1 µm
Max Velocity	> 1 m/s
Max Acceleration	> 1 G
Load Capacity	20 kg Optional: 80+ kg
Assembly Mass	Depending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements	Custom Plate L x W x H
	Custom X and/or Y Travel
	Custom User Mounting Interface Features
	Custom Platen Designs (Open Center Options)
	Custom Compact Designs for Small Footprint
	Customer Cable Routing
	Customizable Motor Forces
	Custom High Payload Options
	Custom Granite Features and Sizes
	Various Material Options Throughout
	Single Axis Versions Available (Y Axis Only)
	Various Support and Vibration Isolation Options
	Various Safety System Options
	Various Control Chassis Options

Model		AI-HH-60XY-15Z-56RT-LM
Stage		Hybrid Hexapod
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		170 mm x 163.5 mm x 224.5 mm
Drives		Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.03 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	150 mm/s
	Z	15 mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	30 deg/s
	Roll	360 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>1000 deg/s²
Max Payload		5 kg
Assembly Mass		9.1 kg

Model		AI-HH-60XY-15Z-56R
Stage		Hybrid Hexapod
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		174 mm x 176.3 mm x 201 mm
Drives		Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.03 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	100 mm/s
	Z	15 mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	30 deg/s
	Roll	360 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>1000 deg/s²
Max Payload		5 kg
Assembly Mass		5.7 kg

Model		AI-HH-30D-200XY-62Z-80R-LM
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		571 mm x 401 mm x 322.2 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 30 nm
	Z	+/- 200 nm
	Pitch And Roll	+/- 1 arc-sec
	Yaw	+/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	100  mm/s
	Z	15  mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>2000 deg/s²
Max Payload		5-10 kg
Assembly Mass		30 kg

Model		AI-HH-30D-200XY-62Z-80R-CM
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		510 mm x 336.5 mm x 293.2 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 30 nm
	Z	+/- 200 nm
	Pitch And Roll	+/- 1 arc-sec
	Yaw	+/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	50  mm/s
	Z	15  mm/s
Max Linear Acceleration [3]	XY	0.1 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>2000 deg/s²
Max Payload		5 kg
Assembly Mass		14 kg

Model		AI-HH-30D-100XY-62Z-80R-LM
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		415.8 mm x 295.5 mm x 312.2 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 30 nm
	Z	+/- 200 nm
	Pitch And Roll	+/- 1 arc-sec
	Yaw	+/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	100  mm/s
	Z	15  mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>2000 deg/s²
Max Payload		5-10 kg
Assembly Mass		15.29 kg

Model		AI-HH-30D-60XY-62Z-80R-BSD
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		199 mm x 208 mm x 285.2 mm
Drives		XY, Pitch & Roll: Frameless Torque Motor with Precision Ball Screw Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 100 nm
	Z	+/- 200 nm
	Pitch And Roll	+/- 1 arc-sec
	Yaw	+/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec		Pitch And Roll
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	YawPitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	50  mm/s
	Z	15  mm/s
Max Linear Acceleration [3]	XY	0.1 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>2000 deg/s²
Max Payload		5-10 kg
Assembly Mass

Model		AI-HH-200XY-60Z-154RA
Stage		Hybrid Hexapod
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		60 mm (+ 60 mm/- 0 mm)
Travel - Pitch & Roll		+/- 14 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		443.2 mm x 410.1 mm x 378 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw Yaw: Torque Motor
Brake		Pneumatic Release, Spring Lock
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	10 nm	7 nm	4 nm
	Radial Runout	10 nm	7 nm	4 nm
	Wobble	20 arc-sec	10 arc-sec	6 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.02 arc-sec
	Yaw	~0.01 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	500  mm/s
	Z	30  mm/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	60 deg/s
	Yaw	1800 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>3600 deg/s²
Max Payload		20 kg
Assembly Mass		57 kg

Model		AI-HH-200XY-15Z-56RT-CM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		336.5 mm  x 275 mm x 202.7 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc/sec	5 arc/sec	1 arc/sec
	XZ & YZ	250 arc/sec	200 arc/sec	50 arc/sec
Max Linear Velocity [3]	XY	50 mm/s
	Z	15 mm/s
Max Linear Acceleration[3]	XY	0.1 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch and Roll	30 deg/s
	Yaw	3000 deg/s
Max Angular Acceleration [3]	Pitch and Roll	>1000 deg/s²
	Yaw	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		16.3 kg

Model		AI-HH-100XY-15Z-56RT-LM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		296 mm x 244 mm x 215.2 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc/sec	5 arc/sec	1 arc/sec
	XZ & YZ	250 arc/sec	200 arc/sec	50 arc/sec
Max Linear Velocity [3]	XY	150 mm/s
	Z	15 mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	30 deg/s
	Yaw	3000 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		8.9 kg

Model		AI-HH-60XY-15Z-56RT-LM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		165 mm  x 215.2 mm x 222.7 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	150 mm/s
	Z	15 mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	30 deg/s
	Yaw	3000 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		7.3 kg

Model		AI-HH-60XY-15Z-56RT-BSD
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		171 mm x 177 mm x 191.7 mm
Drives		XY, Pitch & Roll: Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	100 mm/s
	Z	15 mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	30 deg/s
	Yaw	3000 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		6 kg

Model	AI-HH-ST14-200XY-60Z-104R
Travel - XY	200 mm (+/- 100 mm)
Travel - Z	60 mm (+ 60 mm /- 0 mm)
Travel - Pitch & Roll	+/- 30 deg
Travel - Yaw	360 deg continous
Dimensions (Length x Width x Height)	292 mm x 275 mm x 400 mm
Stage	Hybrid Hexapod
Drives	XY, Pitch & Yaw: Stepper Motor Yaw: Torque Motor
Feedback	Standard: No Encoder Optional: Non-Contact Optical Linear Encoder, Rotary Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder Optional: Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications	(STD)
Linear Resolution with Encoder Option	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution with Encoder Option	~0.01 arc-sec
Yaw Resolution with Encoder Option	0.02 arc-sec
Max Linear Velocity [2]	20 mm/s
Max Angular Velocity (Pitch & Roll) [2]	10 deg/s
Max Angular Velocity (Yaw) [2]	540 deg/s
Max Payload [3]	10 kg
Assembly Mass	28 kg

Model	AI-6D-250XY-92Z
Stage	Hybrid Hexapod  (6 DOF)
Travel - XY	250mm (+/- 125mm)
Travel - Z	92mm (+ 92mm/ - 0mm)
Travel - Pitch & Roll	+/- 20 deg
Travel - Yaw	360 deg continuous
Dimensions (Length x Width x Height)	435 mm x 435 mm x 707.5 mm
Drives	XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder Optional: Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications
Linear Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution	~0.02 arc-sec
Yaw Resolution	~0.01 arc-sec
Max Linear Velocity [10]	0.3 m/s
Max Angular Velocity (Pitch & Roll) [10]	90 deg/s
Max Angular Velocity (Yaw) [10]	180 deg/s
Assembly Mass	130 kg
Max Payload [11]	35 kg

Model		AI-HH-300XY-206Z-154R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		300 mm (+/- 150 mm)
Travel - Z		206 mm (+ 206 mm/- 0 mm)
Travel - Pitch & Roll		+/- 18 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		504.2 mm x 500 mm x 660 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	10 µm	7 µm	4 µm
	Radial Runout	10 µm	7 µm	4 µm
	Wobble	20 arc-sec	10 arc-sec	6 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	~0.01 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	Pitch and Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		20 kg
Assembly Mass		122 kg

Model		AI-HH-300XY-106Z-154R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		300 mm (+/- 150 mm)
Travel - Z		106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll		+/- 18 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		504.2 mm x 500 mm x 519.9 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	10 µm	7 µm	4 µm
	Radial Runout	10 µm	7 µm	4 µm
	Wobble	20 arc-sec	10 arc-sec	6 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	~0.01 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		10 kg
Assembly Mass		105 kg

Model		AI-HH-300XY-106Z-104R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		300 mm (+/- 150 mm)
Travel - Z		106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll		+/- 18 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		504.2 mm x 500 mm x 519.9 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	12 µm	9 µm	6 µm
	Radial Runout	12 µm	9 µm	6 µm
	Wobble	25 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	0.02 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch and Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	Pitch and Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		7.5 kg
Assembly Mass		105 kg

Model		AI-HH-200XY-40Z-104R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		200 mm(+/- 100 mm)
Travel - Z		40 mm (+ 40 mm/- 0 mm)
Travel - Pitch & Roll		+/- 11 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		399 mm x 359 mm x 318.9 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	12 µm	9 µm	6 µm
	Radial Runout	12 µm	9 µm	6 µm
	Wobble	25 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	0.02 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Yaw	180 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		5 kg
Assembly Mass		46 kg

Model		AI-HH-150XY-40Z-104R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		150 mm (+/- 75 mm)
Travel - Z		40 mm (+ 40 mm/- 0 mm)
Travel - Pitch & Roll		+/- 11 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		399 mm x 350 mm x 308.9 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	9 µm	6 µm
	Radial Runout	12 µm	9 µm	6 µm
	Wobble	25 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	#colspan#~0.01 arc-sec
	Yaw	0.02 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.4 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		5 kg
Assembly Mass		34 kg

Model		AI-HH-100XY-24Z-56R-MS
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		262.5 mm x 246 mm x 250.8 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Magnetic Spring (Constant Force)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
Pitch And Roll	~0.02 arc-sec
Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.5 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		2.5 kg
Assembly Mass		20 kg

Model		AI-HH-100XY-24Z-56R-CM,MS
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		262.5 mm x 246 mm x 218.8 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.02 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		50 mm/s
Max Linear Acceleration [3]		0.1 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		2.5 kg
Assembly Mass		13.1 kg

Model		AI-HH-100XY-24Z-56R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		24 mm (+ 24 mm/- 0 mm)
Travel - Pitch & Roll		+/- 11 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		244 mm x 244 mm x 233.8 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.02 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.5 G
Max Angular Velocity [3]	Pitch and Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	Pitch and Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		2.5 kg
Assembly Mass		18.4 kg

Model		AI-HH-100XY-6Z-56R-CM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll		+/- 3 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		200 mm x 184 mm x 200.5 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.03 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.05 m/s
Max Linear Acceleration [3]		0.1 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		2 kg
Assembly Mass		10 kg

Model		AI-HH-100XY-6Z-56R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll		+/- 3 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		244 mm x 244 mm x 220.5 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.03 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.4 m/s
Max Linear Acceleration [3]		0.5 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Yaw	180 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		2 kg
Assembly Mass		17.2 kg

Model	AI-LM-20000-Z-ABCB
Stage	Vertical Z Stage
Travel	200mm (+/- 100mm)
Dimensions (Length x Width x Height)	230mm x 50mm x 484mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 3.0 µm	+/- 2.0 µm	+/- 1.5 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	2.5 G
Max Payload Capability	25 kg
Assembly Mass	9.3 kg

Model	AI-LM-15000-Z-ABCB-HF
Stage	Vertical Z Stage
Travel	150mm (+/- 75mm)
Dimensions (Length x Width x Height)	215mm x 50mm x 353mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	4.0 G
Max Payload Capability	25 kg
Assembly Mass	6.5 kg

Model	AI-LM-15000-Z-ABCB
Stage	Vertical Z Stage
Travel	150mm (+/- 75mm)
Dimensions (Length x Width x Height)	200mm x 50mm x 353mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	2.5 G
Max Payload Capability	25 kg
Assembly Mass	5.6 kg

Model	AI-LM-10000-Z-ABCB-HF
Stage	Vertical Z Stage
Travel	100mm (+/- 50mm)
Dimensions (Length x Width x Height)	215mm x 50mm x 323mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	4.5 G
Max Payload Capability	25 kg
Assembly Mass	5.9 kg

Model	AI-LM-10000-Z-ABCB
Stage	Vertical Z Stage
Travel	100mm (+/- 50mm)
Dimensions (Length x Width x Height)	183.5mm x 50mm x 323mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	3.5 G
Max Payload Capability	12 kg
Assembly Mass	4.7 kg

Model	AI-LM-6000-Z-ABCB
Stage	Vertical Z Stage
Travel	60mm (+/- 30mm)
Dimensions (Length x Width x Height)	183.5mm x 45mm x 220mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	2.5 G
Max Payload Capability	10 kg
Assembly Mass	2.9 kg

Model	AI-BSD-5000-Z
Stage	Vertical Z Stage
Travel	50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)	175 mm x 100 mm 229 mm
Motor	Frameless Torque Motor, Precision Ball Screw
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Brake	Standard: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: No Brake
Counterbalance	Standard: None Needed Optional: Pneumatic Counterbalance to Increase Payload Capability
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 125 nm		+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.1 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	20 kg
Max Payload Capability (With Pneuboost)	50 kg
Assembly Mass	7.6 kg

Model	AI-BSD-3200-Z
Stage	Vertical Z Stage
Travel	32 mm (+/- 16 mm)
Dimensions (Length x Width x Height)	175 mm x 100 mm x 202 mm
Motor	Frameless Torque Motor, Precision Ball Screw
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Brake	Standard: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: No Brake
Counterbalance	Standard: None Needed Optional: Pneumatic Counterbalance to Increase Payload Capability
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 125 nm		+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.1 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	20 kg
Max Payload Capability (With Pneuboost)	50 kg
Assembly Mass	6.9 kg

Model	AI-BSD-2400-Z
Stage	Vertical Z Stage
Travel	24 mm (+/- 12 mm)
Dimensions (Length x Width x Height)	175 mm x 100 mm x 188 mm
Motor	Frameless Torque Motor, Precision Ball Screw
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Brake	Standard: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: No Brake
Counterbalance	Standard: None Needed Optional: Pneumatic Counterbalance to Increase Payload Capability
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.8 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 125 nm		+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2 µm	+/- 0.8 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.1 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	20 kg
Max Payload Capability (With Pneuboost)	50 kg
Assembly Mass	6.6 kg

Model	AI-LM-17000-("PAYLOAD")-Z-MCB-BASE
Stage	Vertical Z Stage
Travel	170 mm (+/- 85 mm)
Payload Options	20 N, 30 N, 40 N, 50 N, or 60 N
Dimensions (Length x Width x Height)	262 mm x 50 mm x 340 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)		ULTRA		NANO
Linear Displacement Accuracy	+/- 5 µm		+/- 2.0 µm		+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 75 nm				+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm		+/- 2.0 µm		+/- 1.5 µm
Flatness [2]	+/- 5.0 µm		+/- 2.0 µm		+/- 1.5 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	18 arc-sec
Max Velocity [3]	1 m/s
Max Acceleration [3]	2.0 G
Payload (Nominal)	20 N	30 N	40 N	50 N	60 N
Minimum To Maximum Payload Range	15-25 N	25-35 N	35-45 N	45-55 N	55-65 N
Assembly Mass	13.8 kg

Model	AI-LM-5000-("PAYLOAD")-Z-MCB-("ORIENTATION")
Stage	Vertical Z Stage
Travel	50 mm (+/- 25 mm)
Payload Options	30 N, 50 N, 60 N, 70 N, 80 N, or 90 N
Dimensions (Length x Width x Height)	182 mm x 106 mm x 176 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)		ULTRA		NANO
Linear Displacement Accuracy	+/- 7 µm		+/- 1.0 µm		+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 100 nm				+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm		+/- 3.0 µm
Flatness [2]	+/- 6.0 µm		+/- 3.0 µm
Pitch	15 arc-sec
Yaw	15 arc-sec
Roll	15 arc-sec
Max Velocity [3]	0.05 m/s
Payload (Nominal)	30 N, 50 N, 60 N, 70 N, 80 N, or 90 N	50 N	60 N	70 N	80 N	90 N
Minimum To Maximum Payload Range	24-36 N	44-56 N	54-66 N	64-76 N	74-86 N	84-96 N
Assembly Mass	7.1 kg
Moving Mass	3.3 kg

Model	AI-LM-5000-("PAYLOAD")-Z-MCB-("ORIENTATION")
Stage	Vertical Z Stage
Travel	50 mm (+/- 25 mm)
Payload Options	2 N, 8 N, 14 N, 19 N, or 24 N
Dimensions (Length x Width x Height)	165 mm x 96 mm x 156 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)		ULTRA		NANO
Linear Displacement Accuracy	+/- 7 µm		+/- 1.0 µm		+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 75 nm				+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm		+/- 2.5 µm
Flatness [2]	+/- 5.0 µm		+/- 2.5 µm
Pitch	14 arc-sec
Yaw	14 arc-sec
Roll	14 arc-sec
Max Velocity [3]	0.1 m/s
Payload (Nominal)	--	2 N	8 N	14 N	19 N	24 N
Minimum To Maximum Payload Range	--	0-6 N	4-12 N	10-18 N	15-23 N	18-30 N
Assembly Mass	5.2 kg
Moving Mass	2.1 kg

Model	AI-LM-2400-("PAYLOAD")-Z-MCB-("ORIENTATION")
Stage	Vertical Z Stage
Travel	24 mm (+/-12 mm)
Payload Options	2 N, 8 N, 14 N, 19 N, or 24 N
Dimensions (Length x Width x Height)	165 mm x 96 mm x 130 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)		ULTRA		NANO
Linear Displacement Accuracy	+/- 5 µm		+/- 0.7 µm		+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 75 nm				+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm		+/- 2.0 µm
Flatness [2]	+/- 3.0 µm		+/- 2.0 µm
Pitch	10 arc-sec
Yaw	10 arc-sec
Roll	10 arc-sec
Max Velocity [3]	0.1 m/s
Payload (Nominal)	--	2 N	8 N	14 N	19 N	24 N
Minimum To Maximum Payload Range	--	0-6 N	4-12 N	10-18 N	15-23 N	18-30 N
Assembly Mass	4.6 kg
Moving Mass	2 kg

Model	AI-VC-600-Z-SCB
Stage	Vertical Z Stage
Travel	6 mm (+/- 3 mm)
Dimensions (Length x Width x Height)	80 mm x 60 mm x 70 mm
Drive	Voice Coil Motor (VC)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Spring Counterbalance
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	Depending on specific Application - Ask ALIO
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	4.0 G
Max Payload Capability	2.5 kg
Assembly Mass	0.9 kg

Model	AI-LM-2500-Z-MCB-15N
Stage	Vertical Z Stage
Travel	25 mm (+/- 12.5 mm)
Dimensions (Length x Width x Height)	56 mm x 88 mm x 144 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	Depending on specific Application - Ask ALIO
Max Payload [6]	15N
Payload Range [6]	7.5 - 15 N
Max Velocity	0.1 m/s
Max Acceleration	0.5 G
Assembly Mass	1.9 kg

Model	AI-LM-2500-Z-MCB-7N
Stage	Vertical Z Stage
Travel	25 mm (+/- 12.5 mm)
Dimensions (Length x Width x Height)	56 mm x 88 mm x 144 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	Depending on specific Application - Ask ALIO
Max Payload [6]	7.5 N
Payload Range [6]	2.5 - 7.5 N
Max Velocity	0.1 m/s
Max Acceleration	0.5 G
Assembly Mass	1.9 kg

Model	AI-LM-2500-Z-MCB-2N
Stage	Vertical Z Stage
Travel	25 mm (+/- 12.5 mm)
Dimensions (Length x Width x Height)	56 mm x 88 mm x 144 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	Depending on specific Application - Ask ALIO
Max Payload [6]	2.5 N
Payload Range [6]	0 - 2.5 N
Max Velocity	0.1 m/s
Max Acceleration	0.5 G
Assembly Mass	1.9 kg

Model	AI-VC-2400-NANO-Z-CB
Travel	24 mm (+ 24 mm/- 0 mm)
Dimensions (Diameter x Height)	200 mm x 112 mm
Stage	Vertical Z Stage
Motor	Dual Voice Coil Motor (VC)
Feedback	Dual Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.8 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 0.8 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm	+/- 0.4 µm
Pitch	+/- 10 arc-sec
Yaw	+/- 10 arc-sec
Roll	+/- 10 arc-sec
Max Velocity	0.2 m/s
Max Acceleration	0.5 G
Assembly Mass	6.5 kg
Max Payload	20 kg

Model	AI-LM-7000-50N-Z-CB
Stage	Vertical Z Stage
Travel	70 mm (+ 70 mm/- 0 mm)
Dimensions (Length x Width x Height)	175 mm x 125 mm x 250 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.25 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	30 kg
Force	50 N
Assembly Mass	13.0 kg

Model	AI-LM-6000-50N-Z-CB
Stage	Vertical Z Stage
Travel	60 mm (+ 60 mm/- 0 mm)
Dimensions (Length x Width x Height)	175 mm x 125 mm x 235 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch	+/- 12 arc-sec
Yaw	+/- 12 arc-sec
Roll	+/- 12 arc-sec
Max Velocity [3]	0.25 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	20 kg
Force	50 N
Assembly Mass	12.3 kg

Model	AI-VC-2400-120N-Z-CB
Stage	Vertical Z Stage
Travel	24 mm (+ 24 mm/- 0 mm)
Dimensions (Length x Width x Height)	175 mm x 125 mm x 170 mm
Motor	Voice Coil Motor (VC)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.8 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2 µm	+/- 0.8 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch	+/- 10 arc-sec
Yaw	+/- 10 arc-sec
Roll	+/- 10 arc-sec
Max Velocity [3]	0.25 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	16 kg
Force	120 N
Assembly Mass	8.0 kg

Model	AI-LM-5000-15N-Z-CB
Stage	Vertical Z Stage
Travel	50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)	165 mm x 96 mm x 136 mm
Drive	Direct Drive Ironless Core Linear Motor
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 8.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 5.0 µm	+/- 2.5 µm
Flatness [2]	+/- 5.0 µm	+/- 2.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Max Velocity [3]	0.2 m/s
Max Peak Acceleration [3]	1.5 G
Max Payload Capability	10 kg
Force	15 N
Assembly Mass	4.4 kg

Model	AI-LM-3000-47N-Z-CB
Stage	Vertical Z Stage
Travel	30 mm (+/- 15 mm)
Dimensions (Length x Width x Height)	165 mm x 96 mm x 136 mm
Drive	Direct Drive Ironless Core Linear Motor
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6.0 µm	+/- 0.8 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 4.0 µm	+/- 2.0 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch [2]	+/- 10.0  arc-sec
Yaw	+/- 10.0  arc-sec
Roll	+/- 10.0  arc-sec
Max Velocity [3]	0.2 m/s
Max Peak Acceleration [3]	3.0 G
Max Payload Capability	10 kg
Force	47 N
Assembly Mass	4.4 kg

Model	AI-VC-2400-11N-Z-CB
Stage	Vertical Z Stage
Travel	24 mm (+/- 12 mm)
Dimensions (Length x Width x Height)	165 mm x 96 mm x 98 mm
Drive	Voice Coil Motor (VC)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 3.0 µm	+/- 2.0 µm
Flatness [2]	+/- 3.0 µm	+/- 2.0 µm
Pitch [2]	+/- 10.0  arc-sec
Yaw	+/- 10.0  arc-sec
Roll	+/- 10.0  arc-sec
Max Velocity [3]	0.1 m/s
Max Peak Acceleration [3]	1.0 G
Max Payload Capability	10 kg
Force	11 N
Assembly Mass	3.6 kg

Model	AI-VC-600-24N-Z-CB
Stage	Vertical Z Stage
Travel	6 mm (+/- 3 mm)
Dimensions (Length x Width x Height)	165 mm x 96 mm x 98 mm
Drive	Voice Coil Motor (VC)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 1.5 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0  arc-sec
Yaw	+/- 10.0  arc-sec
Roll	+/- 10.0  arc-sec
Max Velocity [3]	0.1 m/s
Max Peak Acceleration [3]	2.5 G
Max Payload Capability	10 kg
Force	24 N
Assembly Mass	3.6 kg

Model	AI-LM-300x200-XY
Stage	Monolithic XY Stage (Asymmetrical)
Travel - X	300 mm (+/- 150 mm)
Travel - Y	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	500 mm x 336 mm x 100mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 5 µm	+/- 2 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	10 arc-sec
Orthogonality	20 arc-sec	5 arc-sec	1 arc-sec
Max Velocity [3]	1 m/s
Max Acceleration [3]	0.7 G
Max Payload Capability	30 kg
Assembly Mass	28 kg

Model	AI-SLM-395x320-XY
Stage	Monolithic XY Stage (Asymmetrical)
Travel - X	395 mm
Travel - Y	320 mm
Dimensions (Length X Width X Height)	672 mm x 525 mm x 145 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	STD	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 2.0 µm	+/- 1.0 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm	+/- 2.0 µm	+/- 1.0 µm
Flatness [2]	+/- 10.0 µm	+/- 5.0 µm	+/- 2.0 µm
Pitch [2]	+/- 18.0 arc-sec	+/- 18.0 arc-sec	+/- 10.0 arc-sec
Yaw	+/- 18.0 arc-sec	+/- 18.0 arc-sec	+/- 10.0 arc-sec
Roll	+/- 10.0 arc-sec	+/- 10.0 arc-sec	+/- 10.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 2.0 arc-sec
Max Velocity [3]	1.5 m/s
Max Peak Acceleration [3]	0.59 G
Max Payload Capability	200 kg
Assembly Mass	98 kg

Model	AI-LM-160x100-XY
Stage	Monolithic XY Stage (Asymmetrical)
Travel - X	160 mm (+/- 80 mm)
Travel - Y	100 mm (+/- 50 mm)
Dimensions (Length X Width X Height)	275 mm x 175 mm x 80 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.0 µm	+/- 0.7 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 7.5 arc-sec
Yaw	+/- 7.5 arc-sec
Roll	+/- 4.0 arc-sec
Orthogonality	+/- 10.0 arc-sec	+/- 2.5 arc-sec	+/- 0.5 arc-sec
Max Velocity [3]	1 m/s
Max Peak Acceleration [3]	1.5 G
Max Payload Capability	25 kg
Assembly Mass	11.4 kg

Model	AI-VBS-20000
Stage	Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	492 mm x 154 mm x 50 mm
Brake Options	Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	524 mm x 154 mm x 50 mm
(-Ebrk) Dimensions (Length x Width x Height)	571 mm x 154 mm x 50 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4 µm	+/- 1.0 µm	+/- 0.4 µm
Backlash	0 nm
Bidirectional Linear Repeatability	+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5 µm	+/- 4 µm	+/- 3 µm
Flatness [2]	+/- 5.0 µm	+/- 3.0 µm
Pitch [2]	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	1.0 G
Max Payload Capability W/ Axis Oriented Horizontal	25 kg
Max Payload Capability W/ Axis Oriented Vertical	12 kg
Assembly Mass	8 kg

Model	AI-VBS-15000
Stage	Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	370 mm x 120 mm x 50 mm
Brake Options	Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	404 mm x 120 mm x 50 mm
(-Ebrk) Dimensions (Length x Width x Height)	452 mm x 120 mm x 50 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 1.0 µm	+/- 0.4 µm
Backlash	0 nm
Bidirectional Linear Repeatability	+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.5 µm	+/- 2.5 µm	+/- 1.5 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch [2]	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	1.0 G
Max Payload Capability W/ Axis Oriented Horizontal	25 kg
Max Payload Capability W/ Axis Oriented Vertical	12 kg
Assembly Mass	4.6 kg

Model	AI-VBS-10000
Stage	Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	295 mm x 120 mm x 50 mm
Brake Options	Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	329 mm x 120 mm x 50 mm
(-Ebrk) Dimensions (Length x Width x Height)	377 mm x 120 mm x 50 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 1.0 µm	+/- 0.3 µm
Backlash	0 nm
Bidirectional Linear Repeatability	+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	1.0 G
Max Payload Capability W/ Axis Oriented Horizontal	25 kg
Max Payload Capability W/ Axis Oriented Vertical	12 kg
Assembly Mass	3.8 kg

Model	AI-VBS-6000
Stage	Linear Stage
Travel	60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)	225 mm x 120 mm x 50 mm
Brake Options	Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	259 mm x 120 mm x 50 mm
(-Ebrk) Dimensions (Length x Width x Height)	307 mm x 120 mm x 50 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.7 µm	+/- 0.3 µm
Backlash	0 nm
Bidirectional Linear Repeatability	+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.5 µm	+/- 1.5 µm
Pitch [2]	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	1.0 G
Max Payload Capability W/ Axis Oriented Horizontal	20 kg
Max Payload Capability W/ Axis Oriented Vertical	12 kg
Assembly Mass	3 kg

Model	AI-CM-25000-250-XY
Stage	Monolithic XY Stage with Open Center
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	468.5 mm x 468.5 mm x 80 mm
Aperture / Thru	250 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.2 µm	+/- 0.7 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 1.2 µm	+/- 0.7 µm
Flatness [2]	+/- 4.0 µm	+/- 3.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.1 m/s
Bot Axis Max Velocity [3]	0.6 m/s
Top Axis Max Peak Acceleration [3]	1.0 G
Bot Axis Max Peak Acceleration [3]	0.3 G
Max Payload Capability	25 kg
Assembly Mass	33 kg

Model	AI-CM-20000-200-XY
Stage	Monolithic XY Stage with Open Center
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	332.5 mm x 332.5 mm x 65 mm
Aperture / Thru	200 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.2 µm	+/- 0.7 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 1.2 µm	+/- 0.7 µm
Flatness [2]	+/- 4.0 µm	+/- 3.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1 m/s
Bot Axis Max Velocity [3]	0.6 m/s
Top Axis Max Peak Acceleration [3]	1.0 G
Bot Axis Max Peak Acceleration [3]	0.4 G
Max Payload Capability	15 kg
Assembly Mass	11.4 kg

Model	AI-CM-15000-150-XY
Stage	Monolithic XY Stage with Open Center
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	282.5 mm x 282.5 mm x 52 mm
Aperture / Thru	150 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 5.0 µm	+/- 2.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.9 m/s
Bot Axis Max Velocity [3]	0.5 m/s
Top Axis Max Peak Acceleration [3]	1.2 G
Bot Axis Max Peak Acceleration [3]	0.4 G
Max Payload Capability	12 kg
Assembly Mass	7.4 kg

Model	AI-CM-10000-100-XY
Stage	Monolithic XY Stage with Open Center
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	229.5 mm x 229.5 mm x 52 mm
Aperture / Thru	100 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.8 m/s
Bot Axis Max Velocity [3]	0.5 m/s
Top Axis Max Peak Acceleration [3]	1.6 G
Bot Axis Max Peak Acceleration [3]	0.6 G
Max Payload Capability	12 kg
Assembly Mass	5.6 kg

Model	AI-CM-5000-050-XY
Stage	Monolithic XY Stage with Open Center
Travel	60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)	179.5 mm x 179.5 mm x 45 mm
Aperture / Thru	50 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Flatness [2]	+/- 2.5 µm	+/- 1.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.8 m/s
Bot Axis Max Velocity [3]	0.5 m/s
Top Axis Max Peak Acceleration [3]	3.0 G
Bot Axis Max Peak Acceleration [3]	1.0 G
Max Payload Capability	10 kg
Assembly Mass	3.2 kg

Model	AI-CM-3000-030-XY
Stage	Monolithic XY Stage with Open Center
Travel	30 mm (+/- 15 mm)
Dimensions (Length x Width x Height)	140 mm x 140 mm x 45 mm
Aperture / Thru	30 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 0.5 µm	+/- 0.3 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.8 m/s
Bot Axis Max Velocity [3]	0.5 m/s
Top Axis Max Peak Acceleration [3]	5.0 G
Bot Axis Max Peak Acceleration [3]	1.8 G
Max Payload Capability	8 kg
Assembly Mass	1.9 kg

Model	AI-CM-30000-XY
Stage	Monolithic XY Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	500 mm x 500 mm x 100 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6.0 µm	+/- 1.0 µm	+/- 0.6 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 10.0 µm	+/- 2.0 µm	+/- 1.0 µm
Flatness [2]	+/- 8.0 µm	+/- 5.0 µm
Pitch [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 18.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.7 m/s
Bot Axis Max Velocity [3]	0.3 m/s
Top Axis Max Peak Acceleration [3]	0.4 G
Bot Axis Max Peak Acceleration [3]	0.1 G
Max Payload Capability	35 kg
Assembly Mass	69 kg

Model	AI-CM-25000-XY
Stage	Monolithic XY Stage
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	400 mm x 400 mm x 100 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm	+/- 2.0 µm	+/- 1.0 µm
Flatness [2]	+/- 6.0 µm	+/- 4.0 µm
Pitch [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 18.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.8 m/s
Bot Axis Max Velocity [3]	0.5
Top Axis Max Peak Acceleration [3]	0.6 G
Bot Axis Max Peak Acceleration [3]	0.2 G
Max Payload Capability	25 kg
Assembly Mass	48 kg

Model	AI-CM-20000-XY
Stage	Monolithic XY Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	275 mm x 275 mm x 60 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 1.0 µm	+/- 0.4 µm
Flatness [2]	+/- 4.0 µm	+/- 3.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1 m/s
Bot Axis Max Velocity [3]	0.6
Top Axis Max Peak Acceleration [3]	1.0 G
Bot Axis Max Peak Acceleration [3]	0.4 G
Max Payload Capability	15 kg
Assembly Mass	12 kg

Model	AI-CM-15000-XY
Stage	Monolithic XY Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	225 mm x 225 mm x 60 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.8 m/s
Bot Axis Max Velocity [3]	0.5 m/s
Top Axis Max Peak Acceleration [3]	1.0 G
Bot Axis Max Peak Acceleration [3]	0.4 G
Max Payload Capability	12 kg
Assembly Mass	8.5 kg

Model	AI-CM-10000-XY
Stage	Monolithic XY Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	184 mm x 184 mm x 60 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 1.0 µm	+/- 0.3 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.7 m/s
Bot Axis Max Velocity [3]	0.5 m/s
Top Axis Max Peak Acceleration [3]	1.2 G
Bot Axis Max Peak Acceleration [3]	0.6 G
Max Payload Capability	12 kg
Assembly Mass	5.8 kg

Model	AI-CM-6000-XY
Stage	Monolithic XY Stage
Travel	60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)	125 mm x125 mm x 60 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 0.7 µm	+/- 0.3 µm
Flatness [2]	+/- 2.5 µm	+/- 1.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.9 m/s
Bot Axis Max Velocity [3]	0.6
Top Axis Max Peak Acceleration [3]	3.0 G
Bot Axis Max Peak Acceleration [3]	1.2 G
Max Payload Capability	10 kg
Assembly Mass	2.9 kg

Model	AI-CM-3000-XY
Stage	Monolithic XY Stage
Travel	30 mm (+/- 15 mm)
Dimensions (Length x Width x Height)	112 mm x 112 mm x 50 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.0 µm	+/- 0.5 µm	+/- 0.2 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.7 m/s
Bot Axis Max Velocity [3]	0.5
Top Axis Max Peak Acceleration [3]	4.0 G
Bot Axis Max Peak Acceleration [3]	2.0 G
Max Payload Capability	8 kg
Assembly Mass	1.6 kg

Model	AI-CM-30000
Stage	Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	506 mm x 120 mm x 48 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6.0 µm	+/- 1.0 µm	+/- 0.6 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 8.0 µm	+/- 6.0 µm	+/- 4.0 µm
Flatness [2]	+/- 8.0 µm	+/- 5.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Max Velocity [3]	Depending on application - Ask ALIO
Max Acceleration [3]	Depending on application - Ask ALIO
Max Payload Capability	Depending on application - Ask ALIO
Assembly Mass	Depending on application - Ask ALIO

Model	AI-CM-25000
Stage	Linear Stage
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	404 mm x 154 mm x 48 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm	+/- 4.0 µm	+/- 3.0 µm
Flatness [2]	+/- 6.0 µm	+/- 4.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Max Velocity [3]	Depending on application - Ask ALIO
Max Acceleration [3]	Depending on application - Ask ALIO
Max Payload Capability	Depending on application - Ask ALIO
Assembly Mass	Depending on application - Ask ALIO

Model	AI-CM-20000
Stage	Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	279 mm x 120 mm x 32 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm	+/- 4.0 µm	+/- 3.0 µm
Flatness [2]	+/- 5.0 µm	+/- 3.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Max Velocity [3]	1.4 m/s
Max Acceleration [3]	2.0 G
Max Payload Capability	12 kg
Assembly Mass	3.2 kg

Model	AI-CM-15000
Stage	Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	229 mm x 120 mm x 32 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.5 µm	+/- 2.5 µm	+/- 1.5 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Max Velocity [3]	1.1 m/s
Max Acceleration [3]	1.8 G
Max Payload Capability	12 kg
Assembly Mass	2.5 kg

Model	AI-CM-10000
Stage	Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	190 mm x 120 mm x 32 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Max Velocity [3]	1 m/s
Max Acceleration [3]	2.0 G
Max Payload Capability	12 kg
Assembly Mass	2.2 kg

Model	AI-CM-6000
Stage	Linear Stage
Travel	60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)	130 mm x 120 mm x 32 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.5 µm	+/- 1.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Max Velocity [3]	0.9 m/s
Max Acceleration [3]	3.0 G
Max Payload Capability	10 kg
Assembly Mass	1.4 kg

Model	AI-CM-3000
Stage	Linear Stage
Travel	30 mm (+/- 15 mm)
Dimensions (Length x Width x Height)	104 mm x 120 mm x 32 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Max Velocity [3]	0.7 m/s
Max Acceleration [3]	4.0 G
Max Payload Capability	8 kg
Assembly Mass	1.1 kg

Model	AI-LM-30000
Stage	Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	506 mm x 178 mm x 55 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.6 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm	+/- 4.5 µm	+/- 3.0 µm
Flatness [2]	+/- 5.0 µm	+/- 2.0 µm
Pitch Y [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 10.0 arc-sec
Max Velocity [3]	2.4 m/s
Max Acceleration [3]	4.0 G
Max Payload Capability	50 kg
Assembly Mass	15.2 kg

Model	AI-LM-25000
Stage	Linear Stage
Travel	250 mm (+ /-125 mm)
Dimensions (Length x Width x Height)	404 mm x 154 mm x 55 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 3.0 µm	+/- 2.0 µm
Flatness [2]	+/- 5.0 µm	+/- 2.0 µm
Pitch Y [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 10.0 arc-sec
Max Velocity [3]	2.5 m/s
Max Acceleration [3]	5.0 G
Max Payload Capability	40 kg
Assembly Mass	9.4 kg

Model	AI-LM-20000
Stage	Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	340 mm x 154 mm x 46 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 2.0 µm	+/- 1.5 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch Y [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Max Velocity [3]	2.4 m/s
Max Acceleration [3]	6.0 G
Max Payload Capability	30 kg
Assembly Mass	7.8 kg

Model	AI-LM-15000
Stage	Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	275 mm x 120 mm x 45 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch Y [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Max Velocity [3]	2.1 m/s
Max Acceleration [3]	6.0 G
Max Payload Capability	25 kg
Assembly Mass	4.4 kg

Model	AI-LM-10000
Stage	Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	244 mm x 120 mm x 45 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch Y [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Max Velocity [3]	1.8 m/s
Max Acceleration [3]	7.0 G
Max Payload Capability	25 kg
Assembly Mass	4 kg

Model	AI-LM-6000
Stage	Linear Stage
Travel	60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)	168 mm x 120 mm x 40 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch Y [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Max Velocity [3]	1.2 m/s
Max Acceleration [3]	5.0 G
Max Payload Capability	20 kg
Assembly Mass	2.2 kg

Model	AI-LM-40000-400-XY
Stage	Monolithic XY Stage with Open Center
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	650 mm x 650 mm x 120 mm
Aperture / Thru	400 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 16.0 µm	+/- 2.5 µm	+/- 1.5 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 10.0 µm	+/- 2.5 µm	+/- 1.5 µm
Flatness [2]	+/- 12.0 µm	+/- 5.0 µm
Pitch [2]	+/- 20.0 arc-sec
Yaw	+/- 20.0 arc-sec
Roll	+/- 20.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.8 m/s
Bot Axis Max Velocity [3]	1.0 m/s
Top Axis Max Peak Acceleration [3]	1.8 G
Top Axis Max Peak Acceleration [3]	0.6 G
Max Payload Capability	50 kg
Assembly Mass	104 kg

Model	AI-LM-35000-350-XY
Stage	Monolithic XY Stage with Open Center
Travel	350 mm (+/- 175 mm)
Dimensions (Length x Width x Height)	550 mm x 550 mm x 120 mm
Aperture / Thru	350 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 10.0 µm	+/- 2.0 µm	+/- 1.5 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm	+/- 2.0 µm	+/- 1.5 µm
Flatness [2]	+/- 10.0 µm	+/- 4.0 µm
Pitch [2]	+/- 20.0 arc-sec
Yaw	+/- 20.0 arc-sec
Roll	+/- 20.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.8 m/s
Bot Axis Max Velocity [3]	1.1 m/s
Top Axis Max Peak Acceleration [3]	2.0 G
Top Axis Max Peak Acceleration [3]	0.8 G
Max Payload Capability	50 kg
Assembly Mass	64 kg

Model	AI-LM-30000-300-XY
Stage	Monolithic XY Stage with Open Center
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	500 mm x 500 mm x 120 mm
Aperture / Thru	300 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 8.0 µm	+/- 1.5 µm	+/- 1.0 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 6.0 µm	+/- 3.0 µm
Pitch [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 18.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.7 m/s
Bot Axis Max Velocity [3]	1.2 m/s
Top Axis Max Peak Acceleration [3]	2.0 G
Top Axis Max Peak Acceleration [3]	1.0 G
Max Payload Capability	50 kg
Assembly Mass	58 kg

Model	AI-LM-25000-250-XY
Stage	Monolithic XY Stage with Open Center
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	460 mm x 460 mm x 95 mm
Aperture / Thru	250 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6.0 µm	+/- 1.5 µm	+/- 1.0 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 5.0 µm	+/- 2.0 µm
Pitch [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 18.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.9 m/s
Bot Axis Max Velocity [3]	1.3 m/s
Top Axis Max Peak Acceleration [3]	3.0 G
Top Axis Max Peak Acceleration [3]	1.4 G
Max Payload Capability	40 kg
Assembly Mass	37 kg

Model	AI-LM-20000-200-XY
Stage	Monolithic XY Stage with Open Center
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	392 mm x 392 mm x 80 mm
Aperture / Thru	200 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6.0 µm	+/- 1.5 µm	+/- 0.8 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 1.5 µm	+/- 0.8 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	2 m/s
Bot Axis Max Velocity [3]	1.1 m/s
Top Axis Max Peak Acceleration [3]	4.0 G
Top Axis Max Peak Acceleration [3]	1.4 G
Max Payload Capability	30 kg
Assembly Mass	23 kg

Model	AI-LM-15000-150-XY
Stage	Monolithic XY Stage with Open Center
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	326.5 mm x 326.5 mm x 68 mm
Aperture / Thru	150 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4.0 µm	+/- 1.2 µm	+/- 0.6 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 1.2 µm	+/- 0.6 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.7 m/s
Bot Axis Max Velocity [3]	1.0  m/s
Top Axis Max Peak Acceleration [3]	4.0 G
Top Axis Max Peak Acceleration [3]	1.4 G
Max Payload Capability	25 kg
Assembly Mass	14 kg

Model	AI-LM-10000-100-XY
Stage	Monolithic XY Stage with Open Center
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	230 mm x 230 mm x 64 mm
Aperture / Thru	100 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 10.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.4 m/s
Bot Axis Max Velocity [3]	0.8 m/s
Top Axis Max Peak Acceleration [3]	4.0 G
Top Axis Max Peak Acceleration [3]	1.6 G
Max Payload Capability	25 kg
Assembly Mass	6.5 kg

Model	AI-LM-45000-XY
Stage	Monolithic XY Stage
Travel	450 mm (+/- 225 mm)
Dimensions (Length x Width x Height)	650 mm x 650 mm x 115 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 12.0 µm	+/- 1.5 µm	+/- 1.0 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 16.0 µm	+/- 8.0 µm
Pitch [2]	+/- 20.0 arc-sec
Yaw	+/- 20.0 arc-sec
Roll	+/- 14.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.7 m/s
Bot Axis Max Velocity [3]	1 m/s
Top Axis Max Peak Acceleration [3]	1.4 G
Bot Axis Max Peak Acceleration [3]	0.5 G
Max Payload Capability	80 kg
Assembly Mass	135 kg

Model	AI-LM-40000-XY
Stage	Monolithic XY Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	650 mm x 650 mm x 115 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 12.0 µm	+/- 1.5 µm	+/- 1.0 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 16.0 µm	+/- 8.0 µm
Pitch [2]	+/- 20.0 arc-sec
Yaw	+/- 20.0 arc-sec
Roll	+/- 14.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.6 m/s
Bot Axis Max Velocity [3]	1 m/s
Top Axis Max Peak Acceleration [3]	1.4 G
Bot Axis Max Peak Acceleration [3]	0.5 G
Max Payload Capability	80 kg
Assembly Mass	135 kg

Model	AI-LM-35000-XY
Stage	Monolithic XY Stage
Travel	350 mm (+/- 175 mm)
Dimensions (Length x Width x Height)	500 mm x 500 mm x 115 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 8.0 µm	+/- 1.5 µm	+/- 0.8 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 1.5 µm	+/- 0.8 µm
Flatness [2]	+/- 8.0 µm	+/- 4.0 µm
Pitch [2]	+/- 20.0 arc-sec
Yaw	+/- 20.0 arc-sec
Roll	+/- 14.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.7 m/s
Bot Axis Max Velocity [3]	1.1 m/s
Top Axis Max Peak Acceleration [3]	1.9 G
Bot Axis Max Peak Acceleration [3]	0.7 G
Max Payload Capability	50 kg
Assembly Mass	75 kg

Model	AI-LM-30000-XY
Stage	Monolithic XY Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	500 mm x 500 mm x 115 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.6 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 1.0 µm	+/- 0.6 µm
Flatness [2]	+/- 5.0 µm	+/- 2.0 µm
Pitch [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 10.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.6 m/s
Bot Axis Max Velocity [3]	1 m/s
Top Axis Max Peak Acceleration [3]	1.9 G
Bot Axis Max Peak Acceleration [3]	0.7 G
Max Payload Capability	50 kg
Assembly Mass	75 kg

Model	AI-LM-25000-XY
Stage	Monolithic XY Stage
Travel	250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)	400 mm x 400 mm x 115 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 5.0 µm	+/- 2.0 µm
Pitch [2]	+/- 18.0 arc-sec
Yaw	+/- 18.0 arc-sec
Roll	+/- 10.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.5 m/s
Bot Axis Max Velocity [3]	0.9 m/s
Top Axis Max Peak Acceleration [3]	1.9 G
Bot Axis Max Peak Acceleration [3]	0.7 G
Max Payload Capability	40 kg
Assembly Mass	52 kg

Model	AI-LM-20000-XY-HF
Stage	Monolithic XY Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	336 mm x 336 mm x 90 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.5 µm	+/- 1.0 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	2.0 m/s
Bot Axis Max Velocity [3]	1.2 m/s
Top Axis Max Peak Acceleration [3]	5.6 G
Bot Axis Max Peak Acceleration [3]	2 G
Max Payload Capability	30 kg
Assembly Mass	28 kg

Model	AI-LM-20000-XY
Stage	Monolithic XY Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	336 mm x 336 mm x 90 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.5 µm	+/- 1.0 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.7 m/s
Bot Axis Max Velocity [3]	1 m/s
Top Axis Max Peak Acceleration [3]	3.0 G
Bot Axis Max Peak Acceleration [3]	1.3 G
Max Payload Capability	30 kg
Assembly Mass	28 kg

Model	AI-LM-16000-XY
Stage	Monolithic XY Stage
Travel	160 mm (+/- 80 mm)
Dimensions (Length x Width x Height)	275 mm x 275 mm x 80 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.5 µm	+/- 0.7 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.5 m/s
Bot Axis Max Velocity [3]	1 m/s
Top Axis Max Peak Acceleration [3]	3.0 G
Bot Axis Max Peak Acceleration [3]	1.3 G
Max Payload Capability	25 kg
Assembly Mass	16 kg

Model	AI-LM-10000-XY
Stage	Monolithic XY Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	244 mm x 244 mm x 80 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.0 µm	+/- 0.7 µm	+/- 0.3 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.4 m/s
Bot Axis Max Velocity [3]	0.8 m/s
Top Axis Max Peak Acceleration [3]	4.0 G
Bot Axis Max Peak Acceleration [3]	1.6 G
Max Payload Capability	25 kg
Assembly Mass	13 kg

Model	AI-LM-6000-XY
Stage	Monolithic XY Stage
Travel	60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)	152.5 mm x 152.5 mm x 80 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.0 µm	+/- 0.5 µm	+/- 0.2 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.2 m/s
Bot Axis Max Velocity [3]	0.7 m/s
Top Axis Max Peak Acceleration [3]	5.0 G
Bot Axis Max Peak Acceleration [3]	2.0 G
Max Payload Capability	20 kg
Assembly Mass	4.7 kg

Model	AI-LM-3000-XY
Stage	Monolithic XY Stage
Travel	30 mm ( +/- 15 mm)
Dimensions (Length x Width x Height)	108 mm x 108 mm x 65 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 1.0 µm	+/- 0.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.0 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 6.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.2 m/s
Bot Axis Max Velocity [3]	0.7 m/s
Top Axis Max Peak Acceleration [3]	11.0 G
Bot Axis Max Peak Acceleration [3]	4.0 G
Max Payload Capability	10 kg
Assembly Mass	2.3 kg