| Model | AI-TM-240RA | ||
| Stage | Rotary Stage | ||
| Travel | 360 deg continuous | ||
| Diameter | 240 mm | ||
| Dimensions (Length x Width x Height) | 260 mm x 240 mm x 45 mm | ||
| Aperture / Thru | 100 mm | ||
| Drive | Torque Motor | ||
| Feedback | Non-Contact Optical Rotary Encoder | ||
| Sensors | Integrated Home | ||
| Bearings | Angular Contact (Duplex Pair) | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Angular Accuracy | N/A | +/- 3.0 arc-sec | |
| Bidirectional Angular Repeatability | +/- 0.5 arc-sec | +/- 0.4 arc-sec | +/- 0.2 arc-sec |
| Axial Runout | +/- 5.0 µm | +/- 2.5 µm | +/- 1.5 µm |
| Radial Runout | +/- 5.0 µm | +/- 2.5 µm | +/- 1.5 µm |
| Wobble | +/- 7.5 arc-sec | +/- 5.0 arc-sec | +/- 2.5 arc-sec |
| Resolution [2] | Standard: 0.009 arc-sec (Analog) Optional: 0.003 - 9.0 arc-sec (Digital) |
||
| Max Velocity [3] | 3600 deg/s | ||
| Max Acceleration [3] | 70000 deg/s² | ||
| Max Load (Axial) | 8 kg | ||
| Max Load (Radial) | 8 kg | ||
| Assembly Mass | 10 kg | ||
| Model | AI-TM-104RA | ||
| Stage | Rotary Stage | ||
| Travel | 360 deg continuous | ||
| Diameter | 104 mm | ||
| Dimensions (Length x Width x Height) | 123 mm x 104 mm x 80 mm | ||
| Aperture / Thru | 32 mm | ||
| Drive | Torque Motor | ||
| Feedback | Non-Contact Optical Rotary Encoder | ||
| Sensors | Integrated Home | ||
| Bearings | Angular Contact (Duplex Pair) | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Angular Accuracy | N/A | +/- 3.0 arc-sec | |
| Bidirectional Angular Repeatability | +/- 0.5 arc-sec | +/- 0.5 arc-sec | +/- 0.3 arc-sec |
| Axial Runout | +/- 5.0 µm | +/- 3.5 µm | +/- 2.0 µm |
| Radial Runout | +/- 5.0 µm | +/- 3.5 µm | +/- 2.0 µm |
| Wobble | +/- 10.0 arc-sec | +/- 5.0 arc-sec | +/- 3.0 arc-sec |
| Resolution [2] | Standard: 0.02 arc-sec (Analog) Optional: 0.05 - 21.0 arc-sec (Digital) |
||
| Max Velocity [3] | 10000 deg/s | ||
| Max Acceleration [3] | 500000 deg/s² | ||
| Max Load (Axial) | 10 kg | ||
| Max Load (Radial) | 10 kg | ||
| Assembly Mass | 2.7 kg | ||
| Model | AI-TM-104R-AB |
| Stage | Rotary Stage |
| Travel | 360 deg continuous |
| Diameter | 104 mm |
| Dimensions (Length x Width x Height) | 123 mm x 104 mm x 94 mm |
| Aperture / Thru | 32 mm |
| Drive | Torque Motor |
| Feedback | Non-Contact Optical Rotary Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications | |
| Axial Runout | +/- 1 µm |
| Radial Runout | +/- 1 µm |
| Resolution [8] | Standard: 0.02 arc-sec (Analog) Optional: 0.021 - 21.0 arc-sec (Digital) |
| Max Velocity [7] | 1440 deg/s |
| Max Axial Load | 8 kg |
| Max Radial Load | 4 kg |
| Assembly Mass | 3.1 kg |
| Model | AI-TM-154RA + AI-TM-208RA-GMB-CB | |||||
| Stage | 2 Axis Rotary Gimbal | |||||
| Travel (Theta Z) | 360 degrees continuous (Theta Z) | |||||
| Travel (Theta Y) | +/- 100 degrees (Theta Y) Optional: up to +/- 172 deg |
|||||
| Dimensions (Length x Width x Height) | 571 mm x 230 mm x 362.5 mm | |||||
| Drive | Torque Motor | |||||
| Feedback | Non-Contact Optical Rotary Encoder | |||||
| Bearings | Angular Contact (Duplex Pair) | |||||
| Counterbalance | Counterweight Capability (Adjustable with Provided Weights) | |||||
| Cables | High Flex, 10M Cycle, 3m Length | |||||
| Structure | Anodized Aluminum 6061-T6 | |||||
| Environment | Ambient | |||||
| Operating Temperature | 0°C to 50°C | |||||
| Humidity | 10% to 80% Non-Condensing | |||||
| Axis | A (THETA Z) | B (THETA Y) | ||||
| Performance Specifications [2] | STD | ULTRA | NANO | STD | ULTRA | NANO |
| Angular Accuracy With Compensation | n/a | +/-3 arc-sec | n/a | +/-3 arc-sec | ||
| Bidirectional Angular Repeatability | +/- 0.5 arc-sec | +/- 0.4 arc-sec | ||||
| Resolution | 0.01 arc-sec (analog) | 0.01 arc-sec (analog) | ||||
| Axial Runout | 10 µm | 4 µm | 2 µm | 10 µm | 5 µm | 3 µm |
| Radial Runout | 10 µm | 4 µm | 2 µm | 10 µm | 5 µm | 3 µm |
| Axis Wobble | 16 arc-sec | 10 arc-sec | 8 arc-sec | 10 arc-sec | 7 arc-sec | 5 arc-sec |
| B Axis To A Mount Surface Distance | 60 mm +/- 0.5 mm Nominal (exact distance provided for each S/N at shipment) |
|||||
| Max Velocity [3] | 360 deg/s (~6.28 rad/s) | 360 deg/s (~6.28 rad/s) | ||||
| Max Acceleration [3] | ` | 2300 deg/s (~40 rad/s) | ||||
| Max Load (Axial) | 12 kg | 40 kg | ||||
| Max Load (Radial) | 12 kg | 40 kg | ||||
| Customer Specified Payload | 8 kg (+/- 4 kg or 12 kg maximum) | |||||
| Assembly Mass (With Counterweight) | 39 kg | |||||
| Model | AI-TM-104RA + AI-TM-208RA-GMB-CB | |||||
| Stage | 2 Axis Rotary Gimbal | |||||
| Travel (Theta Z) | 360 deg continuous (Theta Z) | |||||
| Travel (Theta Y) | +/- 100 degrees (Theta Y) Optional: up to +/- 172 deg |
|||||
| Dimensions (Length x Width x Height) | 571 mm x 230 mm x 362.5 mm | |||||
| Drive | Torque Motor | |||||
| Feedback | Non-Contact Optical Rotary Encoder | |||||
| Bearings | Angular Contact (Duplex Pair) | |||||
| Counterbalance | Counterweight Capability (Adjustable with Provided Weights) | |||||
| Cables | High Flex, 10M Cycle, 3m Length | |||||
| Structure | Anodized Aluminum 6061-T6 | |||||
| Environment | Ambient | |||||
| Operating Temperature | 0°C to 50°C | |||||
| Humidity | 10% to 80% Non-Condensing | |||||
| Axis | A (THETA Z) | B (THETA Y) | ||||
| Performance Specifications [2] | STD | ULTRA | NANO | STD | ULTRA | NANO |
| Angular Accuracy With Compensation | n/a | +/-3 arc-sec | n/a | +/-3 arc-sec | ||
| Bidirectional Angular Repeatability | +/- 0.5 arc-sec | +/- 0.4 arc-sec | ||||
| Resolution | 0.02 arc-sec (analog) | 0.01 arc-sec (analog) | ||||
| Axial Runout | 10 µm | 4 µm | 2 µm | 10 µm | 5 µm | 3 µm |
| Radial Runout | 10 µm | 4 µm | 2 µm | 10 µm | 5 µm | 3 µm |
| Axis Wobble | 12 arc-sec | 8 arc-sec | 6 arc-sec | 10 arc-sec | 7 arc-sec | 5 arc-sec |
| B Axis To A Mount Surface Distance | 60 mm +/- 0.5 mm Nominal (exact distance provided for each S/N at shipment) |
|||||
| Max Velocity [3] | 360 deg/s (~6.28 rad/s) | 360 deg/s (~6.28 rad/s) | ||||
| Max Acceleration [3] | 1600 deg/s (~28 rad/s) | 2300 deg/s (~40 rad/s) | ||||
| Max Load (Axial) | 12 kg | 40 kg | ||||
| Max Load (Radial) | 12 kg | 40 kg | ||||
| Customer Specified Payload | 8 kg (+/- 4 kg or 12 kg maximum) | |||||
| Assembly Mass (With Counterweight) | 39 kg | |||||
| Model | AI-HH-30D-200XY-62Z-80R-LM | |||
| Stage | Hybrid Hexapod (Angulares® ) | |||
| Travel - XY | 200 mm (+/- 100 mm) | |||
| Travel - Z | 62 mm (+ 62 mm/- 0 mm) | |||
| Travel - Pitch & Roll | +/- 30 deg | |||
| Travel - Yaw | 360 deg continuous | |||
| Dimensions (Length x Width x Height) | 571 mm x 401 mm x 322.2 mm | |||
| Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
| Bearings | Crossed Roller Bearings | |||
| Rotary Brake | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B) |
|||
| Cables | High Flex, 10M Cycle, 3m Length | |||
| Structure | Anodized Aluminum 6061-T6 | |||
| Environment | Ambient | |||
| Operating Temperature | 0°C to 50°C | |||
| Humidity | 10% to 80% Non-Condensing | |||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |
| Bidrectional Repeatability | XY | +/- 30 nm | ||
| Z | +/- 200 nm | |||
| Pitch And Roll | +/- 1 arc-sec | |||
| Yaw | +/- 0.5 arc-sec | |||
| Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
| Z | ||||
| Pitch And Roll | ||||
| Yaw | ||||
| Minimum Incremental Step Size | XY | < 20 nm | ||
| Z | < 20 nm | |||
| Pitch And Roll | < 0.1 arc-sec | |||
| Yaw | < 0.1 arc-sec | |||
| Yaw Runout | Axial Runout | 12 µm | 10 µm | 5 µm |
| Radial Runout | 12 µm | 10 µm | 5 µm | |
| Wobble | 20 arc-sec | 15 arc-sec | 10 arc-sec | |
| Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Z | ||||
| Pitch And Roll | ~0.15 arc-sec | |||
| Yaw | 0.04 arc-sec | |||
| Max Linear Velocity [3] | XY | 100 mm/s | ||
| Z | 15 mm/s | |||
| Max Linear Acceleration [3] | XY | 0.3 G | ||
| Z | 0.3 G | |||
| Max Angular Velocity [3] | Pitch And Roll | 20 deg/s | ||
| Roll | >3000 deg/s | |||
| Max Angular Acceleration [3] | PITCH AND ROLL | >1000 deg/s² | ||
| YAW | >2000 deg/s² | |||
| Max Payload | 5-10 kg | |||
| Assembly Mass | 30 kg | |||
| Model | AI-HH-30D-100XY-62Z-80R-LM | |||
| Stage | Hybrid Hexapod (Angulares® ) | |||
| Travel - XY | 100 mm (+/- 50 mm) | |||
| Travel - Z | 62 mm (+ 62 mm/- 0 mm) | |||
| Travel - Pitch & Roll | +/- 30 deg | |||
| Travel - Yaw | 360 deg continuous | |||
| Dimensions (Length x Width x Height) | 415.8 mm x 295.5 mm x 312.2 mm | |||
| Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
| Bearings | Crossed Roller Bearings | |||
| Rotary Brake | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B) |
|||
| Cables | High Flex, 10M Cycle, 3m Length | |||
| Structure | Anodized Aluminum 6061-T6 | |||
| Environment | Ambient | |||
| Operating Temperature | 0°C to 50°C | |||
| Humidity | 10% to 80% Non-Condensing | |||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |
| Bidrectional Repeatability | XY | +/- 30 nm | ||
| Z | +/- 200 nm | |||
| Pitch And Roll | +/- 1 arc-sec | |||
| Yaw | +/- 0.5 arc-sec | |||
| Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
| Z | ||||
| Pitch And Roll | ||||
| Yaw | ||||
| Minimum Incremental Step Size | XY | < 20 nm | ||
| Z | < 20 nm | |||
| Pitch And Roll | < 0.1 arc-sec | |||
| Yaw | < 0.1 arc-sec | |||
| Yaw Runout | Axial Runout | 12 µm | 10 µm | 5 µm |
| Radial Runout | 12 µm | 10 µm | 5 µm | |
| Wobble | 20 arc-sec | 15 arc-sec | 10 arc-sec | |
| Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Z | ||||
| Pitch And Roll | ~0.15 arc-sec | |||
| Yaw | 0.04 arc-sec | |||
| Max Linear Velocity [3] | XY | 100 mm/s | ||
| Z | 15 mm/s | |||
| Max Linear Acceleration [3] | XY | 0.3 G | ||
| Z | 0.3 G | |||
| Max Angular Velocity [3] | Pitch And Roll | 20 deg/s | ||
| Roll | >3000 deg/s | |||
| Max Angular Acceleration [3] | PITCH AND ROLL | >1000 deg/s² | ||
| YAW | >2000 deg/s² | |||
| Max Payload | 5-10 kg | |||
| Assembly Mass | 15.29 kg | |||
| Model | AI-HH-30D-60XY-62Z-80R-BSD | |||
| Stage | Hybrid Hexapod (Angulares® ) | |||
| Travel - XY | 60 mm (+/- 30 mm) | |||
| Travel - Z | 62 mm (+ 62 mm/- 0 mm) | |||
| Travel - Pitch & Roll | +/- 30 deg | |||
| Travel - Yaw | 360 deg continuous | |||
| Dimensions (Length x Width x Height) | 199 mm x 208 mm x 285.2 mm | |||
| Drives | XY, Pitch & Roll: Frameless Torque Motor with Precision Ball Screw Yaw: Torque Motor |
|||
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
| Bearings | Crossed Roller Bearings | |||
| Rotary Brake | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B) |
|||
| Cables | High Flex, 10M Cycle, 3m Length | |||
| Structure | Anodized Aluminum 6061-T6 | |||
| Environment | Ambient | |||
| Operating Temperature | 0°C to 50°C | |||
| Humidity | 10% to 80% Non-Condensing | |||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |
| Bidrectional Repeatability | XY | +/- 100 nm | ||
| Z | +/- 200 nm | |||
| Pitch And Roll | #colspan# +/- 1 arc-sec | |||
| Yaw | #colspan# +/- 0.5 arc-sec | |||
| Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
| Z | ||||
| Pitch And Roll | ||||
| Yaw | ||||
| Minimum Incremental Step Size | XY | < 20 nm | ||
| Z | < 20 nm | |||
| Pitch And Roll | < 0.1 arc-sec | |||
| Yaw | < 0.1 arc-sec | Pitch And Roll | ||
| Yaw Runout | Axial Runout | 12 µm | 10 µm | 5 µm |
| Radial Runout | 12 µm | 10 µm | 5 µm | |
| Wobble | 20 arc-sec | 15 arc-sec | 10 arc-sec | |
| Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Z | ||||
| YawPitch And Roll | ~0.15 arc-sec | |||
| Yaw | 0.04 arc-sec | |||
| Max Linear Velocity [3] | XY | 50 mm/s | ||
| Z | 15 mm/s | |||
| Max Linear Acceleration [3] | XY | 0.1 G | ||
| Z | 0.3 G | |||
| Max Angular Velocity [3] | Pitch And Roll | 20 deg/s | ||
| Roll | >3000 deg/s | |||
| Max Angular Acceleration [3] | PITCH AND ROLL | >1000 deg/s² | ||
| YAW | >2000 deg/s² | |||
| Max Payload | 5-10 kg | |||
| Assembly Mass | ||||
| Model | AI-HH-ST14-200XY-60Z-104R |
| Travel - XY | 200 mm (+/- 100 mm) |
| Travel - Z | 60 mm (+ 60 mm /- 0 mm) |
| Travel - Pitch & Roll | +/- 30 deg |
| Travel - Yaw | 360 deg continous |
| Dimensions (Length x Width x Height) | 292 mm x 275 mm x 400 mm |
| Stage | Hybrid Hexapod |
| Drives | XY, Pitch & Yaw: Stepper Motor Yaw: Torque Motor |
| Feedback | Standard: No Encoder Optional: Non-Contact Optical Linear Encoder, Rotary Encoder |
| Bearings | Crossed Roller Bearings |
| Counterbalance | Pneumatic Cylinder Optional: Magnetic Spring (Constant Force) |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications | (STD) |
| Linear Resolution with Encoder Option | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
| Pitch And Roll Resolution with Encoder Option | ~0.01 arc-sec |
| Yaw Resolution with Encoder Option | 0.02 arc-sec |
| Max Linear Velocity [2] | 20 mm/s |
| Max Angular Velocity (Pitch & Roll) [2] | 10 deg/s |
| Max Angular Velocity (Yaw) [2] | 540 deg/s |
| Max Payload [3] | 10 kg |
| Assembly Mass | 28 kg |
| Model | AI-TRI-LM-10600-104R |
| Stage | Linear Motor Tripod with Yaw Rotary Stage (4 DOF) |
| Travel - Z | 106 mm (+ 106 mm/- 0 mm) |
| Travel - Pitch & Roll | +/- 18 deg |
| Travel - Yaw | 360 deg continuous |
| Dimensions (Length x Width x Height) | 504.2 mm x 462.8 mm x 460 mm |
| Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
| Bearings | Crossed Roller Bearings |
| Counterbalance | Pneumatic Cylinder |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications | (STD) |
| Linear Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
| Pitch And Roll Resolution | ~0.01 arc-sec |
| Yaw Resolution | 0.02 arc-sec |
| Max Linear Velocity [10] | 0.2 m/s |
| Max Angular Velocity (Pitch & Roll) [10] | 90 deg/s |
| Max Angular Velocity (Yaw) [10] | 720 deg/s |
| Assembly Mass | 30 kg |
| Max Payload [11] | 7 kg |
| Model | AI-TRI-LM-10600 |
| Stage | Linear Motor Tripod (3 DOF) |
| Travel - Z | 106 mm (+ 106 mm/- 0 mm) |
| Travel - Pitch & Roll | +/- 20 deg |
| Dimensions (Length x Width x Height) | 399.1 mm x 348.8 mm x 459.1 mm |
| Drive | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Crossed Roller Bearings |
| Counterbalance | Pneumatic Cylinder |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | (STD) |
| Linear Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
| Pitch And Roll Resolution | ~0.02 arc-sec |
| Max Linear Velocity [10] | 0.2 m/s |
| Max Angular Velocity (Pitch & Roll) [10] | 90 deg/s |
| Max Payload [11] | 10 kg |
| Assembly Mass | 23.2 kg |
| Model | AI-TRI-LM-5500 |
| Stage | Linear Motor Tripod (3 DOF) |
| Travel - Z | 55 mm (+ 55 mm/- 0 mm) |
| Travel - Pitch & Roll | +/- 20 deg |
| Dimensions (Length x Width x Height) | 363.8 mm x 339.9 mm x 308.6 mm |
| Drive | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Crossed Roller Bearings |
| Counterbalance | Pneumatic Cylinder |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | (STD) |
| Linear Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
| Pitch And Roll Resolution | ~0.02 arc-sec |
| Max Linear Velocity [10] | 0.2 m/s |
| Max Angular Velocity (Pitch & Roll) [10] | 90 deg/s |
| Max Payload [11] | 10 kg |
| Assembly Mass | 15.6 kg |
| Model | AI-TRI-LM-4000 |
| Stage | Linear Motor Tripod (3 DOF) |
| Travel - Z | 40 mm (+ 40 mm/- 0 mm) |
| Travel - Pitch & Roll | +/- 16 deg |
| Dimensions (Length x Width x Height) | 331.6 mm x 303.3 mm x 246.9 mm |
| Drive | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Crossed Roller Bearings |
| Counterbalance | Pneumatic Cylinder |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | (STD) |
| Linear Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
| Pitch And Roll Resolution | ~0.02 arc-sec |
| Max Linear Velocity [10] | 0.1 m/s |
| Max Angular Velocity (Pitch & Roll) [10] | 90 deg/s |
| Max Payload [11] | 7.5 kg |
| Assembly Mass | 13.6 kg |
| Model | AI-HH-300XY-106Z-154R | |||
| Stage | Hybrid Hexapod (6 DOF) | |||
| Travel - XY | 300 mm (+/- 150 mm) | |||
| Travel - Z | 106 mm (+ 106 mm/- 0 mm) | |||
| Travel - Pitch & Roll | +/- 18 deg | |||
| Travel - Yaw | 360 deg continuous | |||
| Dimensions (Length x Width x Height) | 504.2 | |||
| Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
| Bearings | Crossed Roller Bearings | |||
| Counterbalance | Pneumatic Cylinder | |||
| Cables | High Flex, 10M Cycle, 3m Length | |||
| Structure | Anodized Aluminum 6061-T6 | |||
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
| Operating Temperature | 0°C to 50°C | |||
| Humidity | 10% to 80% Non-Condensing | |||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |
| Bidrectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
| Z | +/- 80 nm | +/- 50 nm | ||
| Pitch And Roll | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
| Yaw | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
| Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
| Z | ||||
| Pitch And Roll | ||||
| Yaw | ||||
| Minimum Incremental Step Size | XY | < 20 nm | ||
| Z | < 20 nm | |||
| Pitch And Roll | < 0.08 arc-sec | |||
| Yaw | < 0.08 arc-sec | |||
| Yaw Runout | Axial Runout | 10 µm | 7 µm | 4 µm |
| Radial Runout | 10 µm | 7 µm | 4 µm | |
| Wobble | 20 arc-sec | 10 arc-sec | 6 arc-sec | |
| Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Z | ||||
| Pitch And Roll | ~0.01 arc-sec | |||
| Yaw | ~0.01 arc-sec | |||
| Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
| XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
| Max Linear Velocity [3] | 0.5 m/s | |||
| Max Linear Acceleration [3] | 0.3 G | |||
| Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
| Roll | #colspan#180 deg/s | |||
| Max Angular Acceleration [3] | PITCH AND ROLL | >1800 deg/s² | ||
| YAW | >3600 deg/s² | |||
| Max Payload | 10 kg | |||
| Assembly Mass | 105 kg | |||
| Model | AI-HH-300XY-106Z-104R | |||
| Stage | Hybrid Hexapod (6 DOF) | |||
| Travel - XY | 300 mm (+/- 150 mm) | |||
| Travel - Z | 106 mm (+ 106 mm/- 0 mm) | |||
| Travel - Pitch & Roll | +/- 18 deg | |||
| Travel - Yaw | 360 deg continuous | |||
| Dimensions (Length x Width x Height) | 504.2 mm x 500 mm x 519.9 mm | |||
| Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
| Bearings | Crossed Roller Bearings | |||
| Counterbalance | Pneumatic Cylinder | |||
| Cables | High Flex, 10M Cycle, 3m Length | |||
| Structure | Anodized Aluminum 6061-T6 | |||
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
| Operating Temperature | 0°C to 50°C | |||
| Humidity | 10% to 80% Non-Condensing | |||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |
| Bidrectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
| Z | +/- 80 nm | +/- 50 nm | ||
| Pitch And Roll | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
| Yaw | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
| Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
| Z | ||||
| Pitch And Roll | ||||
| Yaw | ||||
| Minimum Incremental Step Size | XY | < 20 nm | ||
| Z | < 20 nm | |||
| Pitch And Roll | < 0.08 arc-sec | |||
| Yaw | < 0.08 arc-sec | |||
| Yaw Runout | Axial Runout | 12 µm | 9 µm | 6 µm |
| Radial Runout | 12 µm | 9 µm | 6 µm | |
| Wobble | 25 arc-sec | 15 arc-sec | 10 arc-sec | |
| Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Z | ||||
| Pitch And Roll | ~0.01 arc-sec | |||
| Yaw | 0.02 arc-sec | |||
| Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
| XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
| Max Linear Velocity [3] | 0.5 m/s | |||
| Max Linear Acceleration [3] | 0.3 G | |||
| Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
| Roll | 180 deg/s | |||
| Max Angular Acceleration [3] | PITCH AND ROLL | >1800 deg/s² | ||
| YAW | >3600 deg/s² | |||
| Max Payload | 7.5 kg | |||
| Assembly Mass | 105 kg | |||
| Model | AI-LM-6000-Z-ABCB | ||
| Stage | Vertical Z Stage | ||
| Travel | 60mm (+/- 30mm) | ||
| Dimensions (Length x Width x Height) | 183.5mm x 45mm x 220mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Counterbalance | Air Bearing Pneumatic Cylinder | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.5 µm | +/- 0.2 µm |
| Bidirectional Repeatability | +/- 75 nm | +/- 45 nm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness In Y | +/- 2.5 µm | +/- 1.5 µm | +/- 1.0 µm |
| Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
| Pitch [2] | +/- 10.0 arc-sec | ||
| Yaw | +/- 10.0 arc-sec | ||
| Roll | +/- 6.0 arc-sec | ||
| Max Velocity [3] | 0.25 m/s | ||
| Max Peak Acceleration [3] | 2.5 G | ||
| Max Payload Capability | 10 kg | ||
| Assembly Mass | 2.9 kg | ||
| Model | AI-LM-5000-15N-Z-CB | ||
| Stage | Vertical Z Stage | ||
| Travel | 50 mm (+/- 25 mm) | ||
| Dimensions (Length x Width x Height) | 165 mm x 96 mm x 136 mm | ||
| Drive | Direct Drive Ironless Core Linear Motor | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Counterbalance | Pneumatic Cylinder | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 8.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Bidirectional Linear Repeatability | +/- 75 nm | +/- 45 nm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness In X | +/- 5.0 µm | +/- 2.5 µm | |
| Flatness [2] | +/- 5.0 µm | +/- 2.5 µm | |
| Pitch [2] | +/- 12.0 arc-sec | ||
| Yaw | +/- 12.0 arc-sec | ||
| Roll | +/- 12.0 arc-sec | ||
| Max Velocity [3] | 0.2 m/s | ||
| Max Peak Acceleration [3] | 1.5 G | ||
| Max Payload Capability | 10 kg | ||
| Force | 15 N | ||
| Assembly Mass | 4.4 kg | ||
| Model | AI-LM-3000-47N-Z-CB | ||
| Stage | Vertical Z Stage | ||
| Travel | 30 mm (+/- 15 mm) | ||
| Dimensions (Length x Width x Height) | 165 mm x 96 mm x 136 mm | ||
| Drive | Direct Drive Ironless Core Linear Motor | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Counterbalance | Pneumatic Cylinder | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 6.0 µm | +/- 0.8 µm | +/- 0.5 µm |
| Bidirectional Linear Repeatability | +/- 75 nm | +/- 45 nm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness In X | +/- 4.0 µm | +/- 2.0 µm | |
| Flatness [2] | +/- 4.0 µm | +/- 2.0 µm | |
| Pitch [2] | +/- 10.0 arc-sec | ||
| Yaw | +/- 10.0 arc-sec | ||
| Roll | +/- 10.0 arc-sec | ||
| Max Velocity [3] | 0.2 m/s | ||
| Max Peak Acceleration [3] | 3.0 G | ||
| Max Payload Capability | 10 kg | ||
| Force | 47 N | ||
| Assembly Mass | 4.4 kg | ||
| Model | AI-VC-2400-11N-Z-CB | ||
| Stage | Vertical Z Stage | ||
| Travel | 24 mm (+/- 12 mm) | ||
| Dimensions (Length x Width x Height) | 165 mm x 96 mm x 98 mm | ||
| Drive | Voice Coil Motor (VC) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Counterbalance | Pneumatic Cylinder | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 0.7 µm | +/- 0.3 µm |
| Bidirectional Linear Repeatability | +/- 75 nm | +/- 45 nm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness In X | +/- 3.0 µm | +/- 2.0 µm | |
| Flatness [2] | +/- 3.0 µm | +/- 2.0 µm | |
| Pitch [2] | +/- 10.0 arc-sec | ||
| Yaw | +/- 10.0 arc-sec | ||
| Roll | +/- 10.0 arc-sec | ||
| Max Velocity [3] | 0.1 m/s | ||
| Max Peak Acceleration [3] | 1.0 G | ||
| Max Payload Capability | 10 kg | ||
| Force | 11 N | ||
| Assembly Mass | 3.6 kg | ||
| Model | AI-VC-600-24N-Z-CB | ||
| Stage | Vertical Z Stage | ||
| Travel | 6 mm (+/- 3 mm) | ||
| Dimensions (Length x Width x Height) | 165 mm x 96 mm x 98 mm | ||
| Drive | Voice Coil Motor (VC) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Counterbalance | Pneumatic Cylinder | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.5 µm | +/- 0.2 µm |
| Bidirectional Linear Repeatability | +/- 75 nm | +/- 45 nm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness In X | +/- 1.5 µm | +/- 1.0 µm | |
| Flatness [2] | +/- 1.5 µm | +/- 1.0 µm | |
| Pitch [2] | +/- 10.0 arc-sec | ||
| Yaw | +/- 10.0 arc-sec | ||
| Roll | +/- 10.0 arc-sec | ||
| Max Velocity [3] | 0.1 m/s | ||
| Max Peak Acceleration [3] | 2.5 G | ||
| Max Payload Capability | 10 kg | ||
| Force | 24 N | ||
| Assembly Mass | 3.6 kg | ||
| Model | AI-CM-5000-050-XY | ||
| Stage | Monolithic XY Stage with Open Center |
||
| Travel | 60 mm (+/- 30 mm) | ||
| Dimensions (Length x Width x Height) | 179.5 mm x 179.5 mm x 45 mm | ||
| Aperture / Thru | 50 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.7 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3.0 µm | +/- 0.7 µm | +/- 0.4 µm |
| Flatness [2] | +/- 2.5 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 12.0 arc-sec | ||
| Yaw | +/- 12.0 arc-sec | ||
| Roll | +/- 12.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.8 m/s | ||
| Bot Axis Max Velocity [3] | 0.5 m/s | ||
| Top Axis Max Peak Acceleration [3] | 3.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 1.0 G | ||
| Max Payload Capability | 10 kg | ||
| Assembly Mass | 3.2 kg | ||
| Model | AI-CM-3000-030-XY | ||
| Stage | Monolithic XY Stage with Open Center |
||
| Travel | 30 mm (+/- 15 mm) | ||
| Dimensions (Length x Width x Height) | 140 mm x 140 mm x 45 mm | ||
| Aperture / Thru | 30 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.5 µm | +/- 0.3 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2.0 µm | +/- 0.5 µm | +/- 0.3 µm |
| Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
| Pitch [2] | +/- 12.0 arc-sec | ||
| Yaw | +/- 12.0 arc-sec | ||
| Roll | +/- 12.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.8 m/s | ||
| Bot Axis Max Velocity [3] | 0.5 m/s | ||
| Top Axis Max Peak Acceleration [3] | 5.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 1.8 G | ||
| Max Payload Capability | 8 kg | ||
| Assembly Mass | 1.9 kg | ||
| Model | AI-CM-6000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 60 mm (+/- 30 mm) | ||
| Dimensions (Length x Width x Height) | 125 mm x125 mm x 60 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings |
||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 |
||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.7 µm | +/- 0.3 µm |
| Bidirectional Linear Repeatability | +/- 30 | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2.0 µm | +/- 0.7 µm | +/- 0.3 µm |
| Flatness [2] | +/- 2.5 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 12.0 arc-sec | ||
| Yaw | +/- 12.0 arc-sec | ||
| Roll | +/- 12.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.9 m/s | ||
| Bot Axis Max Velocity [3] | 0.6 | ||
| Top Axis Max Peak Acceleration [3] | 3.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 1.2 G | ||
| Max Payload Capability | 10 kg | ||
| Assembly Mass | 2.9 kg | ||
| Model | AI-CM-3000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 30 mm (+/- 15 mm) | ||
| Dimensions (Length x Width x Height) | 112 mm x 112 mm x 50 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 |
||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.5 µm | +/- 0.2 µm |
| Bidirectional Linear Repeatability | +/- 30 | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1.0 µm | +/- 0.5 µm | +/- 0.2 µm |
| Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
| Pitch [2] | +/- 12.0 arc-sec | ||
| Yaw | +/- 12.0 arc-sec | ||
| Roll | +/- 12.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.7 m/s | ||
| Bot Axis Max Velocity [3] | 0.5 | ||
| Top Axis Max Peak Acceleration [3] | 4.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 2.0 G | ||
| Max Payload Capability | 8 kg | ||
| Assembly Mass | 1.6 kg | ||
| Model | AI-CM-6000 | ||
| Stage | Linear Stage | ||
| Travel | 60 mm (+/- 30 mm) | ||
| Dimensions (Length x Width x Height) | 130 mm x 120 mm x 32 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | ||
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2.5 µm | +/- 1.5 µm | +/- 1.0 µm |
| Flatness [2] | +/- 2.5 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 12.0 arc-sec | ||
| Yaw | +/- 12.0 arc-sec | ||
| Roll | +/- 12.0 arc-sec | ||
| Max Velocity [3] | 0.9 m/s | ||
| Max Acceleration [3] | 3.0 G | ||
| Max Payload Capability | 10 kg | ||
| Assembly Mass | 1.4 kg | ||
| Model | AI-CM-3000 | ||
| Stage | Linear Stage | ||
| Travel | 30 mm (+/- 15 mm) | ||
| Dimensions (Length x Width x Height) | 104 mm x 120 mm x 32 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.5 µm | +/- 0.2 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2.5 µm | +/- 1.5 µm | +/- 1.0 µm |
| Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
| Pitch [2] | +/- 12.0 arc-sec | ||
| Yaw | +/- 12.0 arc-sec | ||
| Roll | +/- 12.0 arc-sec | ||
| Max Velocity [3] | 0.7 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max Payload Capability | 8 kg | ||
| Assembly Mass | 1.1 kg | ||
| Model | AI-LM-3000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 30 mm ( +/- 15 mm) | ||
| Dimensions (Length x Width x Height) | 108 mm x 108 mm x 65 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.0 µm | +/- 0.2 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3.0 µm | +/- 1.0 µm | +/- 0.2 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.0 µm | |
| Pitch [2] | +/- 12.0 arc-sec | ||
| Yaw | +/- 12.0 arc-sec | ||
| Roll | +/- 6.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.2 m/s | ||
| Bot Axis Max Velocity [3] | 0.7 m/s | ||
| Top Axis Max Peak Acceleration [3] | 11.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 4.0 G | ||
| Max Payload Capability | 10 kg | ||
| Assembly Mass | 2.3 kg | ||
