Hybrid Hexapod - Hybrid Hexapod


Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: Good Fit

Precision: Best Fit

Throughput: Best Fit

ALIO - Hybrid Hexapod BSD Tripod with Frameless Torque Motor with Ball Screw

Product Specifications

StageHybrid Hexapod 
Travel - XY200 mm (+/- 100 mm)
Travel - Z60 mm (+ 60 mm/- 0 mm)
Travel - Pitch & Roll  +/- 14 deg
Travel - Yaw360 deg continous
Dimensions (Length x Width x Height)443.2 mm x 410.1 mm x 378 mm
DrivesXY: Direct Drive (Ironless Core Linear Motor)
Pitch & Roll: Frameless Torque Motor with Precision Ball Screw
Yaw: Torque Motor
BrakePneumatic Release, Spring Lock
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm +/- 70 nm
Z +/- 100 nm +/- 70 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Pitch And Roll
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout10 nm7 nm4 nm
Radial Runout10 nm7 nm4 nm
Wobble20 arc-sec10 arc-sec6 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll~0.02 arc-sec
Yaw~0.01 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]XY500  mm/s
Z30  mm/s
Max Linear Acceleration [3]0.3 G
Max Angular Velocity [3]Pitch And Roll60 deg/s
Yaw1800 deg/s
Max Angular Acceleration [3]Pitch And Roll>1000 deg/s²
Yaw>3600 deg/s²
Max Payload20 kg
Assembly Mass57 kg

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