Z-Lift & Vertical Stage - Vertical Z Stage

AI-LM-17000-(“PAYLOAD”)-Z-MCB-BASE

Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Good Fit

Throughput: Fit

ALIO - Z-Lift Stages - Magnetic Counterbalanced_Direct Drive Linear Motor with crossed roller bearings

Product Specifications

ModelAI-LM-17000-("PAYLOAD")-Z-MCB-BASE
StageVertical Z Stage
Travel170 mm (+/- 85 mm)
Payload Options20 N, 30 N, 40 N, 50 N, or 60 N
Dimensions (Length x Width x Height)262 mm x 50 mm x 340 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 2.0 µm +/- 0.4 µm
Bidirectional Linear Repeatability +/- 75 nm +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5.0 µm +/- 2.0 µm +/- 1.5 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm +/- 1.5 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll18 arc-sec
Max Velocity [3]1 m/s
Max Acceleration [3]2.0 G
Payload (Nominal)20 N30 N40 N50 N60 N
Minimum To Maximum Payload Range15-25 N25-35 N35-45 N45-55 N55-65 N
Assembly Mass13.8 kg

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