Micron 2 (µII) Stage - Linear Stage

AI-LM-30000-UII-W

Scanning / Smooth Continuous Movement: Good Fit

Step and Settle: Good Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Good Fit

Throughput: Good Fit

micron II Linear Motion -W_Wide Dual Rail X

Product Specifications

ModelAI-LM-30000-UII-W
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
520 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass25 kg

Contact ALIO.

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