Air Bearing System - XY Planar Air Bearing Stage


Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: Good Fit

Precision: Best Fit

Throughput: Good Fit

ALIO - Air Bearing Systems - Linear Air Bearing Planar XY

Product Specifications

StageXY Planar Air Bearing Stage
Travel - XY400 mm (+/- 200 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)1450 mm x 1000 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options

Contact ALIO.

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