Linear Motion System - Enclosed Monolithic XY

AI-LM-45000-XY

Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Best Fit

Throughput: Good Fit

ALIO - Linear Motion Stages - integrated XY

Product Specifications

ModelAI-LM-45000-XY
StageMonolithic XY Stage
Travel450 mm (+/- 225 mm)
Dimensions
(Length x Width x Height)
650 mm x 650 mm x 115 mm
DriveDirect Drive (Ironless Core
Linear Motor)
FeedbackNon-Contact Optical Linear
Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12.0 µm +/- 1.5 µm +/- 1.0 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 16.0 µm +/- 8.0 µm
Pitch [2] +/- 20.0 arc-sec
Yaw +/- 20.0 arc-sec
Roll +/- 14.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.7 m/s
Bot Axis Max
Velocity [3]
1 m/s
Top Axis Max
Peak Acceleration [3]
1.4 G
Bot Axis Max
Peak Acceleration [3]
0.5 G
Max Payload
Capability
80 kg
Assembly Mass135 kg

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