Model	AI-LM-100000-AB8
Stage	Air Bearing Linear Stage
Travel	1000 mm (+/- 500 mm)
Dimensions (Length x Width x Height)	1387.6 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	26 kg

Model	AI-LM-80000-AB8
Stage	Air Bearing Linear Stage
Travel	800 mm (+/- 400 mm)
Dimensions (Length x Width x Height)	1184.4 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	23 kg

Model	AI-LM-60000-AB8
Stage	Air Bearing Linear Stage
Travel	600 mm (+/- 300 mm)
Dimensions (Length x Width x Height)	981.2 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	20 kg

Model	AI-LM-50000-AB8
Stage	Air Bearing Linear Stage
Travel	500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)	879.6 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	18.5 kg

Model	AI-LM-40000-AB8
Stage	Air Bearing Linear Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	778 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	17 kg

Model	AI-LM-30000-AB8
Stage	Air Bearing Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	676.4 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	15.5 kg

Model	AI-LM-20000-AB8
Stage	Air Bearing Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	574.8 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	14 kg

Model	AI-LM-15000-AB8
Stage	Air Bearing Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	524 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	13 kg

Model	AI-LM-10000-AB8
Stage	Air Bearing Linear Stage
Travel	50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)	473.2 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	12.5 kg

Model	AI-LM-100000-AB-BR
Stage	Box Rail Air Bearing Linear Stage
Travel	1000 mm (+/- 500 mm)
Dimensions (Length x Width x Height)	1320.8 mm x 317.5 mm x 100.84 mm
Dimensions Moving Plate (Length x Width)	317.5 mm x 266.7 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Payload Capacity	100 kg
Assembly Mass	29 kg

Model	AI-LM-80000-AB
Stage	Air Bearing Linear Stage
Travel	800 mm (+/- 400 mm)
Dimensions (Length x Width x Height)	1032 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	14.3 kg

Model	AI-LM-60000-AB
Stage	Air Bearing Linear Stage
Travel	600 mm (+/- 300 mm)
Dimensions (Length x Width x Height)	828.8 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	11.7 kg

Model	AI-LM-50000-AB
Stage	Air Bearing Linear Stage
Travel	500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)	727.2 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	10.4 kg

Model	AI-LM-40000-AB
Stage	Air Bearing Linear Stage
Travel	400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)	625.6 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	9.1 kg

Model	AI-LM-30000-AB
Stage	Air Bearing Linear Stage
Travel	300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)	524 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	7.8 kg

Model	AI-LM-20000-AB
Stage	Air Bearing Linear Stage
Travel	200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)	422.4 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	6.5 kg

Model	AI-LM-15000-AB
Stage	Air Bearing Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	371.6 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	5.9 kg

Model	AI-LM-10000-AB
Stage	Air Bearing Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	320.8 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	5.2 kg

Model	AI-LM-5000-AB
Stage	Air Bearing Linear Stage
Travel	50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)	270 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	4.6 kg

Model	AI-TM-125R-AB
Stage	Rotary Stage
Travel	360 deg continuous
Diameter	125 mm
Dimensions (Length x Width x Height)	145 mm x 145 mm x 150 mm
Aperture / Thru	19 mm
Drive	Torque Motor
Feedback	Non-Contact Optical Rotary Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications
Axial Runout (Standard)	0.5 µm
Radial Runout (Standard)	0.5 µm
Axial Stiffness [7]	263 N/µm
Radial Stiffness [7]	87 N/µm
Tilt Stiffness [7]	0.18 Nm/µrad
Resolution (Standard) [8]	Standard: 0.02 arc-sec (Analog) Optional: 0.021 - 21.0 arc-sec (Digital)
Max Velocity [6]	1800 deg/s
Max Axial Load [7]	37 kg
Max Radial Load [7]	14 kg
Assembly Mass	9.6 kg

Model	AI-TM-104R-AB
Stage	Rotary Stage
Travel	360 deg continuous
Diameter	104 mm
Dimensions (Length x Width x Height)	123 mm x 104 mm x 94 mm
Aperture / Thru	32 mm
Drive	Torque Motor
Feedback	Non-Contact Optical Rotary Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications
Axial Runout	+/- 1 µm
Radial Runout	+/- 1 µm
Resolution [8]	Standard: 0.02 arc-sec (Analog) Optional: 0.021 - 21.0 arc-sec (Digital)
Max Velocity [7]	1440  deg/s
Max Axial Load	8 kg
Max Radial Load	4 kg
Assembly Mass	3.1 kg

Model	AI-LM-100000-ABL
Stage	XY Planar Air Bearing Stage
Travel - XY	1000 mm (+/- 500 mm)
Optional Travel - Yaw Compliance	Optional: +/- 0.1 deg
Dimensions (Length x Width x Height)	2050 mm x 1600 mm x 145 mm
Dimensions Moving Plate (Length x Width)	404 mm x 423.4 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available
Structure	Anodized Aluminum 6061-T6
Base Structure	Precision Lapped Black Granite
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy	< +/- 0.5 µm
Repeatability	< +/- 100 nm
Straightness	< +/- 0.5 µm
Flatness	< +/- 1 µm
Max Velocity	> 1 m/s
Max Acceleration	> 1 G
Load Capacity	20 kg Optional: 80+ kg
Assembly Mass	Depending on specific Configuration - Ask ALIO
Configurable Options	#colspan#
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements	Custom Plate L x W x H
	Custom X and/or Y Travel
	Custom User Mounting Interface Features
	Custom Platen Designs (Open Center Options)
	Custom Compact Designs for Small Footprint
	Customer Cable Routing
	Customizable Motor Forces
	Custom High Payload Options
	Custom Granite Features and Sizes
	Various Material Options Throughout
	Single Axis Versions Available (Y Axis Only)
	Various Support and Vibration Isolation Options
	Various Safety System Options
	Various Control Chassis Options

Model	AI-LM-80000-ABL
Stage	XY Planar Air Bearing Stage
Travel - XY	800 mm (+/- 400 mm)
Optional Travel - Yaw Compliance	Optional: +/- 0.1 deg
Dimensions (Length x Width x Height)	1850 mm x 1400 mm x 145 mm
Dimensions Moving Plate (Length x Width)	404 mm x 423.4 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available
Structure	Anodized Aluminum 6061-T6
Base Structure	Precision Lapped Black Granite
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy	< +/- 0.5 µm
Repeatability	< +/- 100 nm
Straightness	< +/- 0.5 µm
Flatness	< +/- 1 µm
Max Velocity	> 1 m/s
Max Acceleration	> 1 G
Load Capacity	20 kg Optional: 80+ kg
Assembly Mass	Depending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements	Custom Plate L x W x H
	Custom X and/or Y Travel
	Custom User Mounting Interface Features
	Custom Platen Designs (Open Center Options)
	Custom Compact Designs for Small Footprint
	Customer Cable Routing
	Customizable Motor Forces
	Custom High Payload Options
	Custom Granite Features and Sizes
	Various Material Options Throughout
	Single Axis Versions Available (Y Axis Only)
	Various Support and Vibration Isolation Options
	Various Safety System Options
	Various Control Chassis Options

Model	AI-LM-60000-ABL
Stage	XY Planar Air Bearing Stage
Travel - XY	600 mm (+/- 300 mm)
Optional Travel - Yaw Compliance	Optional: +/- 0.1 deg
Dimensions (Length x Width x Height)	1650 mm x 1200 mm x 145 mm
Dimensions Moving Plate (Length x Width)	404 mm x 423.4 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available
Structure	Anodized Aluminum 6061-T6
Base Structure	Precision Lapped Black Granite
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	#colspan#
Accuracy	< +/- 0.5 µm
Repeatability	< +/- 100 nm
Straightness	< +/- 0.5 µm
Flatness	< +/- 1 µm
Max Velocity	> 1 m/s
Max Acceleration	> 1 G
Load Capacity	20 kg Optional: 80+ kg
Assembly Mass	Depending on specific Configuration - Ask ALIO
Configurable Options	#colspan#
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements	Custom Plate L x W x H
	Custom X and/or Y Travel
	Custom User Mounting Interface Features
	Custom Platen Designs (Open Center Options)
	Custom Compact Designs for Small Footprint
	Customer Cable Routing
	Customizable Motor Forces
	Custom High Payload Options
	Custom Granite Features and Sizes
	Various Material Options Throughout
	Single Axis Versions Available (Y Axis Only)
	Various Support and Vibration Isolation Options
	Various Safety System Options
	Various Control Chassis Options

Model	AI-LM-50000-ABL
Stage	XY Planar Air Bearing Stage
Travel - XY	500 mm (+/- 250 mm)
Optional Travel - Yaw Compliance	Optional: +/- 0.1 deg
Dimensions (Length x Width x Height)	1550 mm x 1100 mm x 145 mm
Dimensions Moving Plate (Length x Width)	404 mm x 423.4 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available
Structure	Anodized Aluminum 6061-T6
Base Structure	Precision Lapped Black Granite
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	#colspan#
Accuracy	< +/- 0.5 µm
Repeatability	< +/- 100 nm
Straightness	< +/- 0.5 µm
Flatness	< +/- 1 µm
Max Velocity	> 1 m/s
Max Acceleration	> 1 G
Load Capacity	20 kg Optional: 80+ kg
Assembly Mass	Depending on specific Configuration - Ask ALIO
Configurable Options	#colspan#
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements	Custom Plate L x W x H
	Custom X and/or Y Travel
	Custom User Mounting Interface Features
	Custom Platen Designs (Open Center Options)
	Custom Compact Designs for Small Footprint
	Customer Cable Routing
	Customizable Motor Forces
	Custom High Payload Options
	Custom Granite Features and Sizes
	Various Material Options Throughout
	Single Axis Versions Available (Y Axis Only)
	Various Support and Vibration Isolation Options
	Various Safety System Options
	Various Control Chassis Options

Model	AI-LM-40000-ABL
Stage	XY Planar Air Bearing Stage
Travel - XY	400 mm (+/- 200 mm)
Optional Travel - Yaw Compliance	Optional: +/- 0.1 deg
Dimensions (Length x Width x Height)	1450 mm x 1000 mm x 145 mm
Dimensions Moving Plate (Length x Width)	404 mm x 423.4 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available
Structure	Anodized Aluminum 6061-T6
Base Structure	Precision Lapped Black Granite
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy	< +/- 0.5 µm
Repeatability	< +/- 100 nm
Straightness	< +/- 0.5 µm
Flatness	< +/- 1 µm
Max Velocity	> 1 m/s
Max Acceleration	> 1 G
Load Capacity	20 kg Optional: 80+ kg
Assembly Mass	Depending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements	Custom Plate L x W x H
	Custom X and/or Y Travel
	Custom User Mounting Interface Features
	Custom Platen Designs (Open Center Options)
	Custom Compact Designs for Small Footprint
	Customer Cable Routing
	Customizable Motor Forces
	Custom High Payload Options
	Custom Granite Features and Sizes
	Various Material Options Throughout
	Single Axis Versions Available (Y Axis Only)
	Various Support and Vibration Isolation Options
	Various Safety System Options
	Various Control Chassis Options

Model	AI-LM-30000-ABL
Stage	XY Planar Air Bearing Stage
Travel - XY	300 mm (+/- 150 mm)
Optional Travel - Yaw Compliance	Optional: +/- 0.1 deg
Dimensions (Length x Width x Height)	1350 mm x 800 mm x 145 mm
Dimensions Moving Plate (Length x Width)	404 mm x 423.4 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available
Structure	Anodized Aluminum 6061-T6
Base Structure	Precision Lapped Black Granite
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy	< +/- 0.5 µm
Repeatability	< +/- 100 nm
Straightness	< +/- 0.5 µm
Flatness	< +/- 1 µm
Max Velocity	> 1 m/s
Max Acceleration	> 1 G
Load Capacity	20 kg Optional: 80+ kg
Assembly Mass	Depending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements	Custom Plate L x W x H
	Custom X and/or Y Travel
	Custom User Mounting Interface Features
	Custom Platen Designs (Open Center Options)
	Custom Compact Designs for Small Footprint
	Customer Cable Routing
	Customizable Motor Forces
	Custom High Payload Options
	Custom Granite Features and Sizes
	Various Material Options Throughout
	Single Axis Versions Available (Y Axis Only)
	Various Support and Vibration Isolation Options
	Various Safety System Options
	Various Control Chassis Options

Model	AI-LM-20000-ABL
Stage	XY Planar Air Bearing Stage
Travel - XY	200 mm (+/- 100 mm)
Optional Travel - Yaw Compliance	Optional: +/- 0.1 deg
Dimensions (Length x Width x Height)	1250 mm x 700 mm x 145 mm
Dimensions Moving Plate (Length x Width)	404 mm x 423.4 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available
Structure	Anodized Aluminum 6061-T6
Base Structure	Precision Lapped Black Granite
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy	< +/- 0.5 µm
Repeatability	< +/- 100 nm
Straightness	< +/- 0.5 µm
Flatness	< +/- 1 µm
Max Velocity	> 1 m/s
Max Acceleration	> 1 G
Load Capacity	20 kg Optional: 80+ kg
Assembly Mass	Depending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements	Custom Plate L x W x H
	Custom X and/or Y Travel
	Custom User Mounting Interface Features
	Custom Platen Designs (Open Center Options)
	Custom Compact Designs for Small Footprint
	Customer Cable Routing
	Customizable Motor Forces
	Custom High Payload Options
	Custom Granite Features and Sizes
	Various Material Options Throughout
	Single Axis Versions Available (Y Axis Only)
	Various Support and Vibration Isolation Options
	Various Safety System Options
	Various Control Chassis Options

Model	AI-VC-2400-NANO-Z-CB
Travel	24 mm (+ 24 mm/- 0 mm)
Dimensions (Diameter x Height)	200 mm x 112 mm
Stage	Vertical Z Stage
Motor	Dual Voice Coil Motor (VC)
Feedback	Dual Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.8 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 0.8 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm	+/- 0.4 µm
Pitch	+/- 10 arc-sec
Yaw	+/- 10 arc-sec
Roll	+/- 10 arc-sec
Max Velocity	0.2 m/s
Max Acceleration	0.5 G
Assembly Mass	6.5 kg
Max Payload	20 kg