| Model | AI-LM-100000-AB8 | ||
| Stage | Air Bearing Linear Stage | ||
| Travel | 1000 mm (+/- 500 mm) | ||
| Dimensions (Length x Width x Height) | 1387.6 mm x 196.85 mm x 75.90 mm |
||
| Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Air Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
| Environment | Ambient | ||
| Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
| Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1 µm per 100mm Travel | ||
| Flatness [2] | +/- 1 µm per 100mm Travel | ||
| Pitch | +/- 5 arc-sec | ||
| Yaw | +/- 5 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Pitch Moment | 79 nm | ||
| Max Roll Moment | 75 nm | ||
| Max Yaw Moment | 37 nm | ||
| Vertical Z Stiffness | 480 N/µm | ||
| Horizontal Y Stiffness | 140 N/µm | ||
| Max Payload Capacity | 60 kg | ||
| Assembly Mass | 26 kg | ||
| Model | AI-LM-80000-AB8 | ||
| Stage | Air Bearing Linear Stage | ||
| Travel | 800 mm (+/- 400 mm) | ||
| Dimensions (Length x Width x Height) | 1184.4 mm x 196.85 mm x 75.90 mm |
||
| Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Air Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
| Environment | Ambient | ||
| Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
| Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1 µm per 100mm Travel | ||
| Flatness [2] | +/- 1 µm per 100mm Travel | ||
| Pitch | +/- 5 arc-sec | ||
| Yaw | +/- 5 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Pitch Moment | 79 nm | ||
| Max Roll Moment | 75 nm | ||
| Max Yaw Moment | 37 nm | ||
| Vertical Z Stiffness | 480 N/µm | ||
| Horizontal Y Stiffness | 140 N/µm | ||
| Max Payload Capacity | 60 kg | ||
| Assembly Mass | 23 kg | ||
| Model | AI-LM-60000-AB8 | ||
| Stage | Air Bearing Linear Stage | ||
| Travel | 600 mm (+/- 300 mm) | ||
| Dimensions (Length x Width x Height) | 981.2 mm x 196.85 mm x 75.90 mm |
||
| Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Air Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
| Environment | Ambient | ||
| Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
| Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1 µm per 100mm Travel | ||
| Flatness [2] | +/- 1 µm per 100mm Travel | ||
| Pitch | +/- 5 arc-sec | ||
| Yaw | +/- 5 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Pitch Moment | 79 nm | ||
| Max Roll Moment | 75 nm | ||
| Max Yaw Moment | 37 nm | ||
| Vertical Z Stiffness | 480 N/µm | ||
| Horizontal Y Stiffness | 140 N/µm | ||
| Max Payload Capacity | 60 kg | ||
| Assembly Mass | 20 kg | ||
| Model | AI-LM-50000-AB8 | ||
| Stage | Air Bearing Linear Stage | ||
| Travel | 500 mm (+/- 250 mm) | ||
| Dimensions (Length x Width x Height) | 879.6 mm x 196.85 mm x 75.90 mm |
||
| Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Air Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
| Environment | Ambient | ||
| Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
| Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1 µm per 100mm Travel | ||
| Flatness [2] | +/- 1 µm per 100mm Travel | ||
| Pitch | +/- 5 arc-sec | ||
| Yaw | +/- 5 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Pitch Moment | 79 nm | ||
| Max Roll Moment | 75 nm | ||
| Max Yaw Moment | 37 nm | ||
| Vertical Z Stiffness | 480 N/µm | ||
| Horizontal Y Stiffness | 140 N/µm | ||
| Max Payload Capacity | 60 kg | ||
| Assembly Mass | 18.5 kg | ||
| Model | AI-LM-40000-AB8 | ||
| Stage | Air Bearing Linear Stage | ||
| Travel | 400 mm (+/- 200 mm) | ||
| Dimensions (Length x Width x Height) | 778 mm x 196.85 mm x 75.90 mm |
||
| Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Air Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
| Environment | Ambient | ||
| Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
| Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1 µm per 100mm Travel | ||
| Flatness [2] | +/- 1 µm per 100mm Travel | ||
| Pitch | +/- 5 arc-sec | ||
| Yaw | +/- 5 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Pitch Moment | 79 nm | ||
| Max Roll Moment | 75 nm | ||
| Max Yaw Moment | 37 nm | ||
| Vertical Z Stiffness | 480 N/µm | ||
| Horizontal Y Stiffness | 140 N/µm | ||
| Max Payload Capacity | 60 kg | ||
| Assembly Mass | 17 kg | ||
| Model | AI-LM-30000-AB8 | ||
| Stage | Air Bearing Linear Stage | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 676.4 mm x 196.85 mm x 75.90 mm |
||
| Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Air Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
| Environment | Ambient | ||
| Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
| Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1 µm per 100mm Travel | ||
| Flatness [2] | +/- 1 µm per 100mm Travel | ||
| Pitch | +/- 5 arc-sec | ||
| Yaw | +/- 5 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Pitch Moment | 79 nm | ||
| Max Roll Moment | 75 nm | ||
| Max Yaw Moment | 37 nm | ||
| Vertical Z Stiffness | 480 N/µm | ||
| Horizontal Y Stiffness | 140 N/µm | ||
| Max Payload Capacity | 60 kg | ||
| Assembly Mass | 15.5 kg | ||
| Model | AI-LM-20000-AB8 | ||
| Stage | Air Bearing Linear Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 574.8 mm x 196.85 mm x 75.90 mm |
||
| Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Air Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
| Environment | Ambient | ||
| Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
| Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1 µm per 100mm Travel | ||
| Flatness [2] | +/- 1 µm per 100mm Travel | ||
| Pitch | +/- 5 arc-sec | ||
| Yaw | +/- 5 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Pitch Moment | 79 nm | ||
| Max Roll Moment | 75 nm | ||
| Max Yaw Moment | 37 nm | ||
| Vertical Z Stiffness | 480 N/µm | ||
| Horizontal Y Stiffness | 140 N/µm | ||
| Max Payload Capacity | 60 kg | ||
| Assembly Mass | 14 kg | ||
| Model | AI-LM-15000-AB8 | ||
| Stage | Air Bearing Linear Stage | ||
| Travel | 150 mm (+/- 75 mm) | ||
| Dimensions (Length x Width x Height) | 524 mm x 196.85 mm x 75.90 mm |
||
| Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Air Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
| Environment | Ambient | ||
| Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
| Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1 µm per 100mm Travel | ||
| Flatness [2] | +/- 1 µm per 100mm Travel | ||
| Pitch | +/- 5 arc-sec | ||
| Yaw | +/- 5 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Pitch Moment | 79 nm | ||
| Max Roll Moment | 75 nm | ||
| Max Yaw Moment | 37 nm | ||
| Vertical Z Stiffness | 480 N/µm | ||
| Horizontal Y Stiffness | 140 N/µm | ||
| Max Payload Capacity | 60 kg | ||
| Assembly Mass | 13 kg | ||
| Model | AI-LM-10000-AB8 | ||
| Stage | Air Bearing Linear Stage | ||
| Travel | 50 mm (+/- 25 mm) | ||
| Dimensions (Length x Width x Height) | 473.2 mm x 196.85 mm x 75.90 mm |
||
| Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Air Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
| Environment | Ambient | ||
| Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
| Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1 µm per 100mm Travel | ||
| Flatness [2] | +/- 1 µm per 100mm Travel | ||
| Pitch | +/- 5 arc-sec | ||
| Yaw | +/- 5 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Pitch Moment | 79 nm | ||
| Max Roll Moment | 75 nm | ||
| Max Yaw Moment | 37 nm | ||
| Vertical Z Stiffness | 480 N/µm | ||
| Horizontal Y Stiffness | 140 N/µm | ||
| Max Payload Capacity | 60 kg | ||
| Assembly Mass | 12.5 kg | ||
| Model | AI-LM-100000-AB-BR | ||
| Stage | Box Rail Air Bearing Linear Stage | ||
| Travel | 1000 mm (+/- 500 mm) | ||
| Dimensions (Length x Width x Height) | 1320.8 mm x 317.5 mm x 100.84 mm |
||
| Dimensions Moving Plate (Length x Width) | 317.5 mm x 266.7 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Air Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
| Environment | Ambient | ||
| Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Payload Capacity | 100 kg | ||
| Assembly Mass | 29 kg | ||
| Model | AI-LM-80000-AB |
| Stage | Air Bearing Linear Stage |
| Travel | 800 mm (+/- 400 mm) |
| Dimensions (Length x Width x Height) | 1032 mm x 150 mm x 63.8 mm |
| Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
| Drive | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
| Environment | Ambient |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
| Max Pitch Moment [2] | 20 Nm |
| Max Roll Moment [2] | 24 Nm |
| Max Yaw Moment [2] | 10 Nm |
| Vertical Z Stiffness | 250 N/µm |
| Horizontal Y Stiffness | 105 N/µm |
| Max Velocity [3] | 2.0 m/s |
| Max Acceleration [3] | 2.0 G |
| Max Load Capacity | 30 kg |
| Assembly Mass | 14.3 kg |
| Model | AI-LM-60000-AB |
| Stage | Air Bearing Linear Stage |
| Travel | 600 mm (+/- 300 mm) |
| Dimensions (Length x Width x Height) | 828.8 mm x 150 mm x 63.8 mm |
| Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
| Drive | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
| Environment | Ambient |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
| Max Pitch Moment [2] | 20 Nm |
| Max Roll Moment [2] | 24 Nm |
| Max Yaw Moment [2] | 10 Nm |
| Vertical Z Stiffness | 250 N/µm |
| Horizontal Y Stiffness | 105 N/µm |
| Max Velocity [3] | 2.0 m/s |
| Max Acceleration [3] | 2.0 G |
| Max Load Capacity | 30 kg |
| Assembly Mass | 11.7 kg |
| Model | AI-LM-50000-AB |
| Stage | Air Bearing Linear Stage |
| Travel | 500 mm (+/- 250 mm) |
| Dimensions (Length x Width x Height) | 727.2 mm x 150 mm x 63.8 mm |
| Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
| Drive | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
| Environment | Ambient |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
| Max Pitch Moment [2] | 20 Nm |
| Max Roll Moment [2] | 24 Nm |
| Max Yaw Moment [2] | 10 Nm |
| Vertical Z Stiffness | 250 N/µm |
| Horizontal Y Stiffness | 105 N/µm |
| Max Velocity [3] | 2.0 m/s |
| Max Acceleration [3] | 2.0 G |
| Max Load Capacity | 30 kg |
| Assembly Mass | 10.4 kg |
| Model | AI-LM-40000-AB |
| Stage | Air Bearing Linear Stage |
| Travel | 400 mm (+/- 200 mm) |
| Dimensions (Length x Width x Height) | 625.6 mm x 150 mm x 63.8 mm |
| Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
| Drive | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
| Environment | Ambient |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
| Max Pitch Moment [2] | 20 Nm |
| Max Roll Moment [2] | 24 Nm |
| Max Yaw Moment [2] | 10 Nm |
| Vertical Z Stiffness | 250 N/µm |
| Horizontal Y Stiffness | 105 N/µm |
| Max Velocity [3] | 2.0 m/s |
| Max Acceleration [3] | 2.0 G |
| Max Load Capacity | 30 kg |
| Assembly Mass | 9.1 kg |
| Model | AI-LM-30000-AB |
| Stage | Air Bearing Linear Stage |
| Travel | 300 mm (+/- 150 mm) |
| Dimensions (Length x Width x Height) | 524 mm x 150 mm x 63.8 mm |
| Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
| Drive | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
| Environment | Ambient |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
| Max Pitch Moment [2] | 20 Nm |
| Max Roll Moment [2] | 24 Nm |
| Max Yaw Moment [2] | 10 Nm |
| Vertical Z Stiffness | 250 N/µm |
| Horizontal Y Stiffness | 105 N/µm |
| Max Velocity [3] | 2.0 m/s |
| Max Acceleration [3] | 2.0 G |
| Max Load Capacity | 30 kg |
| Assembly Mass | 7.8 kg |
| Model | AI-LM-20000-AB |
| Stage | Air Bearing Linear Stage |
| Travel | 200 mm (+/- 100 mm) |
| Dimensions (Length x Width x Height) | 422.4 mm x 150 mm x 63.8 mm |
| Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
| Drive | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
| Environment | Ambient |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
| Max Pitch Moment [2] | 20 Nm |
| Max Roll Moment [2] | 24 Nm |
| Max Yaw Moment [2] | 10 Nm |
| Vertical Z Stiffness | 250 N/µm |
| Horizontal Y Stiffness | 105 N/µm |
| Max Velocity [3] | 2.0 m/s |
| Max Acceleration [3] | 2.0 G |
| Max Load Capacity | 30 kg |
| Assembly Mass | 6.5 kg |
| Model | AI-LM-15000-AB |
| Stage | Air Bearing Linear Stage |
| Travel | 150 mm (+/- 75 mm) |
| Dimensions (Length x Width x Height) | 371.6 mm x 150 mm x 63.8 mm |
| Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
| Drive | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
| Environment | Ambient |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
| Max Pitch Moment [2] | 20 Nm |
| Max Roll Moment [2] | 24 Nm |
| Max Yaw Moment [2] | 10 Nm |
| Vertical Z Stiffness | 250 N/µm |
| Horizontal Y Stiffness | 105 N/µm |
| Max Velocity [3] | 2.0 m/s |
| Max Acceleration [3] | 2.0 G |
| Max Load Capacity | 30 kg |
| Assembly Mass | 5.9 kg |
| Model | AI-LM-10000-AB |
| Stage | Air Bearing Linear Stage |
| Travel | 100 mm (+/- 50 mm) |
| Dimensions (Length x Width x Height) | 320.8 mm x 150 mm x 63.8 mm |
| Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
| Drive | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
| Environment | Ambient |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
| Max Pitch Moment [2] | 20 Nm |
| Max Roll Moment [2] | 24 Nm |
| Max Yaw Moment [2] | 10 Nm |
| Vertical Z Stiffness | 250 N/µm |
| Horizontal Y Stiffness | 105 N/µm |
| Max Velocity [3] | 2.0 m/s |
| Max Acceleration [3] | 2.0 G |
| Max Load Capacity | 30 kg |
| Assembly Mass | 5.2 kg |
| Model | AI-LM-5000-AB |
| Stage | Air Bearing Linear Stage |
| Travel | 50 mm (+/- 25 mm) |
| Dimensions (Length x Width x Height) | 270 mm x 150 mm x 63.8 mm |
| Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
| Drive | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
| Environment | Ambient |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
| Max Pitch Moment [2] | 20 Nm |
| Max Roll Moment [2] | 24 Nm |
| Max Yaw Moment [2] | 10 Nm |
| Vertical Z Stiffness | 250 N/µm |
| Horizontal Y Stiffness | 105 N/µm |
| Max Velocity [3] | 2.0 m/s |
| Max Acceleration [3] | 2.0 G |
| Max Load Capacity | 30 kg |
| Assembly Mass | 4.6 kg |
| Model | AI-TM-125R-AB |
| Stage | Rotary Stage |
| Travel | 360 deg continuous |
| Diameter | 125 mm |
| Dimensions (Length x Width x Height) | 145 mm x 145 mm x 150 mm |
| Aperture / Thru | 19 mm |
| Drive | Torque Motor |
| Feedback | Non-Contact Optical Rotary Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications | |
| Axial Runout (Standard) | 0.5 µm |
| Radial Runout (Standard) | 0.5 µm |
| Axial Stiffness [7] | 263 N/µm |
| Radial Stiffness [7] | 87 N/µm |
| Tilt Stiffness [7] | 0.18 Nm/µrad |
| Resolution (Standard) [8] | Standard: 0.02 arc-sec (Analog) Optional: 0.021 - 21.0 arc-sec (Digital) |
| Max Velocity [6] | 1800 deg/s |
| Max Axial Load [7] | 37 kg |
| Max Radial Load [7] | 14 kg |
| Assembly Mass | 9.6 kg |
| Model | AI-TM-104R-AB |
| Stage | Rotary Stage |
| Travel | 360 deg continuous |
| Diameter | 104 mm |
| Dimensions (Length x Width x Height) | 123 mm x 104 mm x 94 mm |
| Aperture / Thru | 32 mm |
| Drive | Torque Motor |
| Feedback | Non-Contact Optical Rotary Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications | |
| Axial Runout | +/- 1 µm |
| Radial Runout | +/- 1 µm |
| Resolution [8] | Standard: 0.02 arc-sec (Analog) Optional: 0.021 - 21.0 arc-sec (Digital) |
| Max Velocity [7] | 1440 deg/s |
| Max Axial Load | 8 kg |
| Max Radial Load | 4 kg |
| Assembly Mass | 3.1 kg |
| Model | AI-LM-100000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 1000 mm (+/- 500 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 2050 mm x 1600 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | #colspan# |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-LM-80000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 800 mm (+/- 400 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1850 mm x 1400 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-LM-60000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 600 mm (+/- 300 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1650 mm x 1200 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | #colspan# |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | #colspan# |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options |
| Model | AI-LM-50000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 500 mm (+/- 250 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1550 mm x 1100 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | #colspan# |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | #colspan# |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options |
| Model | AI-LM-40000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 400 mm (+/- 200 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1450 mm x 1000 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-LM-30000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 300 mm (+/- 150 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1350 mm x 800 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-LM-20000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 200 mm (+/- 100 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1250 mm x 700 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-VC-2400-NANO-Z-CB |
| Travel | 24 mm (+ 24 mm/- 0 mm) |
| Dimensions (Diameter x Height) | 200 mm x 112 mm |
| Stage | Vertical Z Stage |
| Motor | Dual Voice Coil Motor (VC) |
| Feedback | Dual Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Counterbalance | Pneumatic Cylinder |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | Depending on specific application - Ask ALIO |
| Max Velocity | 0.2 m/s |
| Max Acceleration | 0.5 G |
| Assembly Mass | 6.5 kg |
| Max Payload | 20 kg |
