ModelAI-LM-100000-AB8
StageAir Bearing Linear Stage
Travel1000 mm (+/- 500 mm)
Dimensions
(Length x Width x Height)
1387.6 mm x 196.85 mm x
75.90 mm
Dimensions
Moving Plate (Length x Width)
305 mm x 196.85 mm
DriveDirect Drive (Ironless Core
Linear Motor)
FeedbackNon-Contact Optical Linear
Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m
Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base StructureGranite, Aluminum, or
Steel

Designed per System Requirements
EnvironmentAmbient
Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm per 100mm Travel  +/- 1 µm  +/- 0.5 µm
Bidirectional
Repeatability
 +/- 30 µm +/- 30 µm +/- 10 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1 µm per 100mm Travel 
Flatness [2] +/- 1 µm per 100mm Travel 
Pitch +/- 5 arc-sec
Yaw +/- 5 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
2.0 m/s
Max
Acceleration [3]
2.0 G
Max Pitch
Moment
79 nm
Max Roll
Moment
75 nm
Max Yaw Moment37 nm
Vertical Z
Stiffness
480 N/µm
Horizontal Y
Stiffness
140 N/µm
Max Payload
Capacity
60 kg
Assembly Mass26 kg
ModelAI-LM-80000-AB8
StageAir Bearing Linear Stage
Travel800 mm (+/- 400 mm)
Dimensions
(Length x Width x Height)
1184.4 mm x 196.85 mm x
75.90 mm
Dimensions
Moving Plate (Length x Width)
305 mm x 196.85 mm
DriveDirect Drive (Ironless Core
Linear Motor)
FeedbackNon-Contact Optical Linear
Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m
Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base StructureGranite, Aluminum, or
Steel

Designed per System Requirements
EnvironmentAmbient
Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm per 100mm Travel  +/- 1 µm  +/- 0.5 µm
Bidirectional
Repeatability
 +/- 30 µm +/- 30 µm +/- 10 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1 µm per 100mm Travel 
Flatness [2] +/- 1 µm per 100mm Travel 
Pitch +/- 5 arc-sec
Yaw +/- 5 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
2.0 m/s
Max
Acceleration [3]
2.0 G
Max Pitch
Moment
79 nm
Max Roll
Moment
75 nm
Max Yaw Moment37 nm
Vertical Z
Stiffness
480 N/µm
Horizontal Y
Stiffness
140 N/µm
Max Payload
Capacity
60 kg
Assembly Mass23 kg
ModelAI-LM-60000-AB8
StageAir Bearing Linear Stage
Travel600 mm (+/- 300 mm)
Dimensions
(Length x Width x Height)
981.2 mm x 196.85 mm x
75.90 mm
Dimensions
Moving Plate (Length x Width)
305 mm x 196.85 mm
DriveDirect Drive (Ironless Core
Linear Motor)
FeedbackNon-Contact Optical Linear
Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m
Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base StructureGranite, Aluminum, or
Steel

Designed per System Requirements
EnvironmentAmbient
Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm per 100mm Travel  +/- 1 µm  +/- 0.5 µm
Bidirectional
Repeatability
 +/- 30 µm +/- 30 µm +/- 10 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1 µm per 100mm Travel 
Flatness [2] +/- 1 µm per 100mm Travel 
Pitch +/- 5 arc-sec
Yaw +/- 5 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
2.0 m/s
Max
Acceleration [3]
2.0 G
Max Pitch
Moment
79 nm
Max Roll
Moment
75 nm
Max Yaw Moment37 nm
Vertical Z
Stiffness
480 N/µm
Horizontal Y
Stiffness
140 N/µm
Max Payload
Capacity
60 kg
Assembly Mass20 kg
ModelAI-LM-50000-AB8
StageAir Bearing Linear Stage
Travel500 mm (+/- 250 mm)
Dimensions
(Length x Width x Height)
879.6 mm x 196.85 mm x
75.90 mm
Dimensions
Moving Plate (Length x Width)
305 mm x 196.85 mm
DriveDirect Drive (Ironless Core
Linear Motor)
FeedbackNon-Contact Optical Linear
Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m
Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base StructureGranite, Aluminum, or
Steel

Designed per System Requirements
EnvironmentAmbient
Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm per 100mm Travel  +/- 1 µm  +/- 0.5 µm
Bidirectional
Repeatability
 +/- 30 µm +/- 30 µm +/- 10 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1 µm per 100mm Travel 
Flatness [2] +/- 1 µm per 100mm Travel 
Pitch +/- 5 arc-sec
Yaw +/- 5 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
2.0 m/s
Max
Acceleration [3]
2.0 G
Max Pitch
Moment
79 nm
Max Roll
Moment
75 nm
Max Yaw Moment37 nm
Vertical Z
Stiffness
480 N/µm
Horizontal Y
Stiffness
140 N/µm
Max Payload
Capacity
60 kg
Assembly Mass18.5 kg
ModelAI-LM-40000-AB8
StageAir Bearing Linear Stage
Travel400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
778 mm x 196.85 mm x 75.90
mm
Dimensions
Moving Plate (Length x Width)
305 mm x 196.85 mm
DriveDirect Drive (Ironless Core
Linear Motor)
FeedbackNon-Contact Optical Linear
Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m
Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base StructureGranite, Aluminum, or
Steel

Designed per System Requirements
EnvironmentAmbient
Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm per 100mm Travel  +/- 1 µm  +/- 0.5 µm
Bidirectional
Repeatability
 +/- 30 µm +/- 30 µm +/- 10 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1 µm per 100mm Travel 
Flatness [2] +/- 1 µm per 100mm Travel 
Pitch +/- 5 arc-sec
Yaw +/- 5 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
2.0 m/s
Max
Acceleration [3]
2.0 G
Max Pitch
Moment
79 nm
Max Roll
Moment
75 nm
Max Yaw Moment37 nm
Vertical Z
Stiffness
480 N/µm
Horizontal Y
Stiffness
140 N/µm
Max Payload
Capacity
60 kg
Assembly Mass17 kg
ModelAI-LM-30000-AB8
StageAir Bearing Linear Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
676.4 mm x 196.85 mm x
75.90 mm
Dimensions
Moving Plate (Length x Width)
305 mm x 196.85 mm
DriveDirect Drive (Ironless Core
Linear Motor)
FeedbackNon-Contact Optical Linear
Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m
Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base StructureGranite, Aluminum, or
Steel

Designed per System Requirements
EnvironmentAmbient
Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm per 100mm Travel  +/- 1 µm  +/- 0.5 µm
Bidirectional
Repeatability
 +/- 30 µm +/- 30 µm +/- 10 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1 µm per 100mm Travel 
Flatness [2] +/- 1 µm per 100mm Travel 
Pitch +/- 5 arc-sec
Yaw +/- 5 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
2.0 m/s
Max
Acceleration [3]
2.0 G
Max Pitch
Moment
79 nm
Max Roll
Moment
75 nm
Max Yaw Moment37 nm
Vertical Z
Stiffness
480 N/µm
Horizontal Y
Stiffness
140 N/µm
Max Payload
Capacity
60 kg
Assembly Mass15.5 kg
ModelAI-LM-20000-AB8
StageAir Bearing Linear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
574.8 mm x 196.85 mm x
75.90 mm
Dimensions
Moving Plate (Length x Width)
305 mm x 196.85 mm
DriveDirect Drive (Ironless Core
Linear Motor)
FeedbackNon-Contact Optical Linear
Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m
Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base StructureGranite, Aluminum, or
Steel

Designed per System Requirements
EnvironmentAmbient
Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm per 100mm Travel  +/- 1 µm  +/- 0.5 µm
Bidirectional
Repeatability
 +/- 30 µm +/- 30 µm +/- 10 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1 µm per 100mm Travel 
Flatness [2] +/- 1 µm per 100mm Travel 
Pitch +/- 5 arc-sec
Yaw +/- 5 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
2.0 m/s
Max
Acceleration [3]
2.0 G
Max Pitch
Moment
79 nm
Max Roll
Moment
75 nm
Max Yaw Moment37 nm
Vertical Z
Stiffness
480 N/µm
Horizontal Y
Stiffness
140 N/µm
Max Payload
Capacity
60 kg
Assembly Mass14 kg
ModelAI-LM-15000-AB8
StageAir Bearing Linear Stage
Travel150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
524 mm x 196.85 mm x 75.90
mm
Dimensions
Moving Plate (Length x Width)
305 mm x 196.85 mm
DriveDirect Drive (Ironless Core
Linear Motor)
FeedbackNon-Contact Optical Linear
Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m
Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base StructureGranite, Aluminum, or
Steel

Designed per System Requirements
EnvironmentAmbient
Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm per 100mm Travel  +/- 1 µm  +/- 0.5 µm
Bidirectional
Repeatability
 +/- 30 µm +/- 30 µm +/- 10 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1 µm per 100mm Travel 
Flatness [2] +/- 1 µm per 100mm Travel 
Pitch +/- 5 arc-sec
Yaw +/- 5 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
2.0 m/s
Max
Acceleration [3]
2.0 G
Max Pitch
Moment
79 nm
Max Roll
Moment
75 nm
Max Yaw Moment37 nm
Vertical Z
Stiffness
480 N/µm
Horizontal Y
Stiffness
140 N/µm
Max Payload
Capacity
60 kg
Assembly Mass13 kg
ModelAI-LM-10000-AB8
StageAir Bearing Linear Stage
Travel50 mm (+/- 25 mm)
Dimensions
(Length x Width x Height)
473.2 mm x 196.85 mm x
75.90 mm
Dimensions
Moving Plate (Length x Width)
305 mm x 196.85 mm
DriveDirect Drive (Ironless Core
Linear Motor)
FeedbackNon-Contact Optical Linear
Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m
Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base StructureGranite, Aluminum, or
Steel

Designed per System Requirements
EnvironmentAmbient
Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm per 100mm Travel  +/- 1 µm  +/- 0.5 µm
Bidirectional
Repeatability
 +/- 30 µm +/- 30 µm +/- 10 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1 µm per 100mm Travel 
Flatness [2] +/- 1 µm per 100mm Travel 
Pitch +/- 5 arc-sec
Yaw +/- 5 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
2.0 m/s
Max
Acceleration [3]
2.0 G
Max Pitch
Moment
79 nm
Max Roll
Moment
75 nm
Max Yaw Moment37 nm
Vertical Z
Stiffness
480 N/µm
Horizontal Y
Stiffness
140 N/µm
Max Payload
Capacity
60 kg
Assembly Mass12.5 kg
ModelAI-LM-100000-AB-BR
StageBox Rail Air Bearing Linear Stage
Travel1000 mm (+/- 500 mm)
Dimensions
(Length x Width x Height)
1320.8 mm x 317.5 mm x
100.84 mm
Dimensions
Moving Plate (Length x Width)
317.5 mm x 266.7 mm
DriveDirect Drive (Ironless Core
Linear Motor)
FeedbackNon-Contact Optical Linear
Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m
Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base StructureGranite, Aluminum, or
Steel

Designed per System Requirements
EnvironmentAmbient
Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Velocity
[3]
2.0 m/s
Max
Acceleration [3]
2.0 G
Max Payload
Capacity
100 kg
Assembly Mass29 kg
ModelAI-LM-80000-AB
StageAir Bearing Linear Stage
Travel800 mm (+/- 400 mm)
Dimensions (Length x Width x Height)1032 mm x 150 mm x
63.8 mm
Dimensions Moving Plate (Length x Width)150 mm x 150 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle,
3m Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base
Structure
Granite, Aluminum, or Steel

Designed per System Requirements
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
ResolutionStandard: ~4.88 nm after 4096
Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max
Pitch Moment [2]
20 Nm
Max Roll Moment [2]24 Nm
Max Yaw Moment [2]10 Nm
Vertical Z Stiffness250 N/µm
Horizontal Y Stiffness105 N/µm
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max Load Capacity30 kg
Assembly Mass14.3 kg
ModelAI-LM-60000-AB
StageAir Bearing Linear Stage
Travel600 mm (+/- 300 mm)
Dimensions (Length x Width x Height)828.8 mm x 150 mm x
63.8 mm
Dimensions Moving Plate (Length x Width)150 mm x 150 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle,
3m Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base
Structure
Granite, Aluminum, or Steel

Designed per System Requirements
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
ResolutionStandard: ~4.88 nm after 4096
Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max
Pitch Moment [2]
20 Nm
Max Roll Moment [2]24 Nm
Max Yaw Moment [2]10 Nm
Vertical Z Stiffness250 N/µm
Horizontal Y Stiffness105 N/µm
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max Load Capacity30 kg
Assembly Mass11.7 kg
ModelAI-LM-50000-AB
StageAir Bearing Linear Stage
Travel500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)727.2 mm x 150 mm x
63.8 mm
Dimensions Moving Plate (Length x Width)150 mm x 150 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle,
3m Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base
Structure
Granite, Aluminum, or Steel

Designed per System Requirements
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
ResolutionStandard: ~4.88 nm after 4096
Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max
Pitch Moment [2]
20 Nm
Max Roll Moment [2]24 Nm
Max Yaw Moment [2]10 Nm
Vertical Z Stiffness250 N/µm
Horizontal Y Stiffness105 N/µm
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max Load Capacity30 kg
Assembly Mass10.4 kg
ModelAI-LM-40000-AB
StageAir Bearing Linear Stage
Travel400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)625.6 mm x 150 mm x
63.8 mm
Dimensions Moving Plate (Length x Width)150 mm x 150 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle,
3m Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base
Structure
Granite, Aluminum, or Steel

Designed per System Requirements
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
ResolutionStandard: ~4.88 nm after 4096
Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max
Pitch Moment [2]
20 Nm
Max Roll Moment [2]24 Nm
Max Yaw Moment [2]10 Nm
Vertical Z Stiffness250 N/µm
Horizontal Y Stiffness105 N/µm
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max Load Capacity30 kg
Assembly Mass9.1 kg
ModelAI-LM-30000-AB
StageAir Bearing Linear Stage
Travel300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)524 mm x 150 mm x
63.8 mm
Dimensions Moving Plate (Length x Width)150 mm x 150 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle,
3m Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base
Structure
Granite, Aluminum, or Steel

Designed per System Requirements
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
ResolutionStandard: ~4.88 nm after 4096
Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max
Pitch Moment [2]
20 Nm
Max Roll Moment [2]24 Nm
Max Yaw Moment [2]10 Nm
Vertical Z Stiffness250 N/µm
Horizontal Y Stiffness105 N/µm
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max Load Capacity30 kg
Assembly Mass7.8 kg
ModelAI-LM-20000-AB
StageAir Bearing Linear Stage
Travel200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)422.4 mm x 150 mm x
63.8 mm
Dimensions Moving Plate (Length x Width)150 mm x 150 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle,
3m Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base
Structure
Granite, Aluminum, or Steel

Designed per System Requirements
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
ResolutionStandard: ~4.88 nm after 4096
Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]20 Nm
Max Roll Moment [2]24 Nm
Max Yaw Moment [2]10 Nm
Vertical Z Stiffness250 N/µm
Horizontal Y Stiffness105 N/µm
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max Load Capacity30 kg
Assembly Mass6.5 kg
ModelAI-LM-15000-AB
StageAir Bearing Linear
Stage
Travel150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)371.6 mm x 150 mm x
63.8 mm
Dimensions Moving Plate (Length x Width)150 mm x 150 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle,
3m Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base
Structure
Granite, Aluminum, or Steel

Designed per System Requirements
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
ResolutionStandard: ~4.88 nm after 4096
Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max
Pitch Moment [2]
20 Nm
Max Roll Moment [2]24 Nm
Max Yaw Moment [2]10 Nm
Vertical Z Stiffness250 N/µm
Horizontal Y Stiffness105 N/µm
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max Load Capacity30 kg
Assembly Mass5.9 kg
ModelAI-LM-10000-AB
StageAir Bearing Linear
Stage
Travel100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)320.8 mm x 150 mm x
63.8 mm
Dimensions Moving Plate (Length x Width)150 mm x 150 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m Length
Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base StructureGranite, Aluminum, or Steel
Designed per System Requirements
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]20 Nm
Max Roll
Moment [2]
24 Nm
Max Yaw Moment
[2]
10 Nm
Vertical Z
Stiffness
250 N/µm
Horizontal Y
Stiffness
105 N/µm
Max Velocity
[3]
2.0 m/s
Max
Acceleration [3]
2.0 G
Max Load
Capacity
30 kg
Assembly Mass5.2 kg
ModelAI-LM-5000-AB
StageAir Bearing Linear Stage
Travel50 mm (+/- 25 mm)
Dimensions
(Length x Width x Height)
270 mm x 150 mm x
63.8 mm
Dimensions Moving Plate (Length x Width)150 mm x 150 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m Length
Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base StructureGranite, Aluminum, or Steel
Designed per System Requirements
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80%
Non-Condensing
Performance Specifications [1]
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]20 Nm
Max Roll
Moment [2]
24 Nm
Max Yaw Moment
[2]
10 Nm
Vertical Z
Stiffness
250 N/µm
Horizontal Y
Stiffness
105 N/µm
Max Velocity
[3]
2.0 m/s
Max
Acceleration [3]
2.0 G
Max Load
Capacity
30 kg
Assembly Mass4.6 kg
ModelAI-TM-125R-AB
StageRotary Stage
Travel360 deg continuous
Diameter125 mm
Dimensions (Length x Width x Height)145 mm x 145 mm x 150 mm
Aperture / Thru19 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications 
Axial Runout (Standard)0.5 µm
Radial Runout (Standard)0.5 µm
Axial Stiffness [7]263 N/µm
Radial Stiffness [7]87 N/µm
Tilt Stiffness [7]0.18 Nm/µrad
Resolution (Standard) [8]Standard: 0.02 arc-sec (Analog)
Optional: 0.021 - 21.0 arc-sec (Digital)
Max Velocity [6]1800 deg/s
Max Axial Load [7]37 kg
Max Radial Load [7]14 kg
Assembly Mass9.6 kg
ModelAI-TM-104R-AB
StageRotary Stage
Travel360 deg continuous
Diameter104 mm
Dimensions (Length x Width x Height)123 mm x 104 mm x 94 mm
Aperture / Thru 32 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications 
Axial Runout +/- 1 µm
Radial Runout +/- 1 µm
Resolution [8]Standard: 0.02 arc-sec (Analog)
Optional: 0.021 - 21.0 arc-sec (Digital)
Max Velocity [7]1440  deg/s
Max Axial Load 8 kg
Max Radial Load4 kg
Assembly Mass3.1 kg
ModelAI-LM-100000-ABL
StageXY Planar Air Bearing Stage
Travel - XY1000 mm (+/- 500 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)2050 mm x 1600 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options  #colspan#
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-LM-80000-ABL
StageXY Planar Air Bearing Stage
Travel - XY800 mm (+/- 400 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)1850 mm x 1400 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-LM-60000-ABL
StageXY Planar Air Bearing Stage
Travel - XY600 mm (+/- 300 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)1650 mm x 1200 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1] #colspan#
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options  #colspan#
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-LM-50000-ABL
StageXY Planar Air Bearing Stage
Travel - XY500 mm (+/- 250 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)1550 mm x 1100 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1] #colspan#
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options  #colspan#
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-LM-40000-ABL
StageXY Planar Air Bearing Stage
Travel - XY400 mm (+/- 200 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)1450 mm x 1000 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-LM-30000-ABL
StageXY Planar Air Bearing Stage
Travel - XY300 mm (+/- 150 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)1350 mm x 800 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-LM-20000-ABL
StageXY Planar Air Bearing Stage
Travel - XY200 mm (+/- 100 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)1250 mm x 700 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-VC-2400-NANO-Z-CB
Travel24 mm (+ 24 mm/- 0 mm) 
Dimensions (Diameter x Height)200 mm x 112 mm
StageVertical Z Stage
MotorDual Voice Coil Motor (VC)
FeedbackDual Non-Contact Optical Linear Encoder
BearingsAir Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]Depending on specific application - Ask ALIO
Max Velocity0.2 m/s
Max Acceleration0.5 G
Assembly Mass6.5 kg
Max Payload20 kg