ModelAI-LM-100000-ABL
StageXY Planar Air Bearing Stage
Travel - XY1000 mm (+/- 500 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)2050 mm x 1600 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options  #colspan#
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-LM-80000-ABL
StageXY Planar Air Bearing Stage
Travel - XY800 mm (+/- 400 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)1850 mm x 1400 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-LM-60000-ABL
StageXY Planar Air Bearing Stage
Travel - XY600 mm (+/- 300 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)1650 mm x 1200 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1] #colspan#
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options  #colspan#
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-LM-50000-ABL
StageXY Planar Air Bearing Stage
Travel - XY500 mm (+/- 250 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)1550 mm x 1100 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1] #colspan#
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options  #colspan#
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-LM-40000-ABL
StageXY Planar Air Bearing Stage
Travel - XY400 mm (+/- 200 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)1450 mm x 1000 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-LM-30000-ABL
StageXY Planar Air Bearing Stage
Travel - XY300 mm (+/- 150 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)1350 mm x 800 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-LM-20000-ABL
StageXY Planar Air Bearing Stage
Travel - XY200 mm (+/- 100 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)1250 mm x 700 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-VC-2400-NANO-Z-CB
Travel24 mm (+ 24 mm/- 0 mm) 
Dimensions (Diameter x Height)200 mm x 112 mm
StageVertical Z Stage
MotorDual Voice Coil Motor (VC)
FeedbackDual Non-Contact Optical Linear Encoder
BearingsAir Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]Depending on specific application - Ask ALIO
Max Velocity0.2 m/s
Max Acceleration0.5 G
Assembly Mass6.5 kg
Max Payload20 kg