Model | AI-LM-100000-AB8 | ||
Stage | Air Bearing Linear Stage | ||
Travel | 1000 mm (+/- 500 mm) | ||
Dimensions (Length x Width x Height) | 1387.6 mm x 196.85 mm x 75.90 mm |
||
Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) |
||
Feedback | Non-Contact Optical Linear Encoder |
||
Bearings | Air Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
Structure | Anodized Aluminum 6061-T6 | ||
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
Environment | Ambient | ||
Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 1 µm per 100mm Travel | ||
Flatness [2] | +/- 1 µm per 100mm Travel | ||
Pitch | +/- 5 arc-sec | ||
Yaw | +/- 5 arc-sec | ||
Roll | +/- 5 arc-sec | ||
Max Velocity [3] | 2.0 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max Pitch Moment | 79 nm | ||
Max Roll Moment | 75 nm | ||
Max Yaw Moment | 37 nm | ||
Vertical Z Stiffness | 480 N/µm | ||
Horizontal Y Stiffness | 140 N/µm | ||
Max Payload Capacity | 60 kg | ||
Assembly Mass | 26 kg |
Model | AI-LM-80000-AB8 | ||
Stage | Air Bearing Linear Stage | ||
Travel | 800 mm (+/- 400 mm) | ||
Dimensions (Length x Width x Height) | 1184.4 mm x 196.85 mm x 75.90 mm |
||
Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) |
||
Feedback | Non-Contact Optical Linear Encoder |
||
Bearings | Air Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
Structure | Anodized Aluminum 6061-T6 | ||
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
Environment | Ambient | ||
Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 1 µm per 100mm Travel | ||
Flatness [2] | +/- 1 µm per 100mm Travel | ||
Pitch | +/- 5 arc-sec | ||
Yaw | +/- 5 arc-sec | ||
Roll | +/- 5 arc-sec | ||
Max Velocity [3] | 2.0 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max Pitch Moment | 79 nm | ||
Max Roll Moment | 75 nm | ||
Max Yaw Moment | 37 nm | ||
Vertical Z Stiffness | 480 N/µm | ||
Horizontal Y Stiffness | 140 N/µm | ||
Max Payload Capacity | 60 kg | ||
Assembly Mass | 23 kg |
Model | AI-LM-60000-AB8 | ||
Stage | Air Bearing Linear Stage | ||
Travel | 600 mm (+/- 300 mm) | ||
Dimensions (Length x Width x Height) | 981.2 mm x 196.85 mm x 75.90 mm |
||
Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) |
||
Feedback | Non-Contact Optical Linear Encoder |
||
Bearings | Air Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
Structure | Anodized Aluminum 6061-T6 | ||
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
Environment | Ambient | ||
Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 1 µm per 100mm Travel | ||
Flatness [2] | +/- 1 µm per 100mm Travel | ||
Pitch | +/- 5 arc-sec | ||
Yaw | +/- 5 arc-sec | ||
Roll | +/- 5 arc-sec | ||
Max Velocity [3] | 2.0 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max Pitch Moment | 79 nm | ||
Max Roll Moment | 75 nm | ||
Max Yaw Moment | 37 nm | ||
Vertical Z Stiffness | 480 N/µm | ||
Horizontal Y Stiffness | 140 N/µm | ||
Max Payload Capacity | 60 kg | ||
Assembly Mass | 20 kg |
Model | AI-LM-50000-AB8 | ||
Stage | Air Bearing Linear Stage | ||
Travel | 500 mm (+/- 250 mm) | ||
Dimensions (Length x Width x Height) | 879.6 mm x 196.85 mm x 75.90 mm |
||
Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) |
||
Feedback | Non-Contact Optical Linear Encoder |
||
Bearings | Air Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
Structure | Anodized Aluminum 6061-T6 | ||
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
Environment | Ambient | ||
Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 1 µm per 100mm Travel | ||
Flatness [2] | +/- 1 µm per 100mm Travel | ||
Pitch | +/- 5 arc-sec | ||
Yaw | +/- 5 arc-sec | ||
Roll | +/- 5 arc-sec | ||
Max Velocity [3] | 2.0 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max Pitch Moment | 79 nm | ||
Max Roll Moment | 75 nm | ||
Max Yaw Moment | 37 nm | ||
Vertical Z Stiffness | 480 N/µm | ||
Horizontal Y Stiffness | 140 N/µm | ||
Max Payload Capacity | 60 kg | ||
Assembly Mass | 18.5 kg |
Model | AI-LM-40000-AB8 | ||
Stage | Air Bearing Linear Stage | ||
Travel | 400 mm (+/- 200 mm) | ||
Dimensions (Length x Width x Height) | 778 mm x 196.85 mm x 75.90 mm |
||
Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) |
||
Feedback | Non-Contact Optical Linear Encoder |
||
Bearings | Air Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
Structure | Anodized Aluminum 6061-T6 | ||
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
Environment | Ambient | ||
Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 1 µm per 100mm Travel | ||
Flatness [2] | +/- 1 µm per 100mm Travel | ||
Pitch | +/- 5 arc-sec | ||
Yaw | +/- 5 arc-sec | ||
Roll | +/- 5 arc-sec | ||
Max Velocity [3] | 2.0 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max Pitch Moment | 79 nm | ||
Max Roll Moment | 75 nm | ||
Max Yaw Moment | 37 nm | ||
Vertical Z Stiffness | 480 N/µm | ||
Horizontal Y Stiffness | 140 N/µm | ||
Max Payload Capacity | 60 kg | ||
Assembly Mass | 17 kg |
Model | AI-LM-30000-AB8 | ||
Stage | Air Bearing Linear Stage | ||
Travel | 300 mm (+/- 150 mm) | ||
Dimensions (Length x Width x Height) | 676.4 mm x 196.85 mm x 75.90 mm |
||
Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) |
||
Feedback | Non-Contact Optical Linear Encoder |
||
Bearings | Air Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
Structure | Anodized Aluminum 6061-T6 | ||
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
Environment | Ambient | ||
Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 1 µm per 100mm Travel | ||
Flatness [2] | +/- 1 µm per 100mm Travel | ||
Pitch | +/- 5 arc-sec | ||
Yaw | +/- 5 arc-sec | ||
Roll | +/- 5 arc-sec | ||
Max Velocity [3] | 2.0 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max Pitch Moment | 79 nm | ||
Max Roll Moment | 75 nm | ||
Max Yaw Moment | 37 nm | ||
Vertical Z Stiffness | 480 N/µm | ||
Horizontal Y Stiffness | 140 N/µm | ||
Max Payload Capacity | 60 kg | ||
Assembly Mass | 15.5 kg |
Model | AI-LM-20000-AB8 | ||
Stage | Air Bearing Linear Stage | ||
Travel | 200 mm (+/- 100 mm) | ||
Dimensions (Length x Width x Height) | 574.8 mm x 196.85 mm x 75.90 mm |
||
Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) |
||
Feedback | Non-Contact Optical Linear Encoder |
||
Bearings | Air Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
Structure | Anodized Aluminum 6061-T6 | ||
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
Environment | Ambient | ||
Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 1 µm per 100mm Travel | ||
Flatness [2] | +/- 1 µm per 100mm Travel | ||
Pitch | +/- 5 arc-sec | ||
Yaw | +/- 5 arc-sec | ||
Roll | +/- 5 arc-sec | ||
Max Velocity [3] | 2.0 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max Pitch Moment | 79 nm | ||
Max Roll Moment | 75 nm | ||
Max Yaw Moment | 37 nm | ||
Vertical Z Stiffness | 480 N/µm | ||
Horizontal Y Stiffness | 140 N/µm | ||
Max Payload Capacity | 60 kg | ||
Assembly Mass | 14 kg |
Model | AI-LM-15000-AB8 | ||
Stage | Air Bearing Linear Stage | ||
Travel | 150 mm (+/- 75 mm) | ||
Dimensions (Length x Width x Height) | 524 mm x 196.85 mm x 75.90 mm |
||
Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) |
||
Feedback | Non-Contact Optical Linear Encoder |
||
Bearings | Air Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
Structure | Anodized Aluminum 6061-T6 | ||
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
Environment | Ambient | ||
Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 1 µm per 100mm Travel | ||
Flatness [2] | +/- 1 µm per 100mm Travel | ||
Pitch | +/- 5 arc-sec | ||
Yaw | +/- 5 arc-sec | ||
Roll | +/- 5 arc-sec | ||
Max Velocity [3] | 2.0 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max Pitch Moment | 79 nm | ||
Max Roll Moment | 75 nm | ||
Max Yaw Moment | 37 nm | ||
Vertical Z Stiffness | 480 N/µm | ||
Horizontal Y Stiffness | 140 N/µm | ||
Max Payload Capacity | 60 kg | ||
Assembly Mass | 13 kg |
Model | AI-LM-10000-AB8 | ||
Stage | Air Bearing Linear Stage | ||
Travel | 50 mm (+/- 25 mm) | ||
Dimensions (Length x Width x Height) | 473.2 mm x 196.85 mm x 75.90 mm |
||
Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) |
||
Feedback | Non-Contact Optical Linear Encoder |
||
Bearings | Air Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
Structure | Anodized Aluminum 6061-T6 | ||
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
Environment | Ambient | ||
Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 1 µm per 100mm Travel | ||
Flatness [2] | +/- 1 µm per 100mm Travel | ||
Pitch | +/- 5 arc-sec | ||
Yaw | +/- 5 arc-sec | ||
Roll | +/- 5 arc-sec | ||
Max Velocity [3] | 2.0 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max Pitch Moment | 79 nm | ||
Max Roll Moment | 75 nm | ||
Max Yaw Moment | 37 nm | ||
Vertical Z Stiffness | 480 N/µm | ||
Horizontal Y Stiffness | 140 N/µm | ||
Max Payload Capacity | 60 kg | ||
Assembly Mass | 12.5 kg |
Model | AI-LM-100000-AB-BR | ||
Stage | Box Rail Air Bearing Linear Stage | ||
Travel | 1000 mm (+/- 500 mm) | ||
Dimensions (Length x Width x Height) | 1320.8 mm x 317.5 mm x 100.84 mm |
||
Dimensions Moving Plate (Length x Width) | 317.5 mm x 266.7 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) |
||
Feedback | Non-Contact Optical Linear Encoder |
||
Bearings | Air Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
Structure | Anodized Aluminum 6061-T6 | ||
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
Environment | Ambient | ||
Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Max Velocity [3] | 2.0 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max Payload Capacity | 100 kg | ||
Assembly Mass | 29 kg |
Model | AI-LM-80000-AB |
Stage | Air Bearing Linear Stage |
Travel | 800 mm (+/- 400 mm) |
Dimensions (Length x Width x Height) | 1032 mm x 150 mm x 63.8 mm |
Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
Drive | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
Environment | Ambient |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
Max Pitch Moment [2] | 20 Nm |
Max Roll Moment [2] | 24 Nm |
Max Yaw Moment [2] | 10 Nm |
Vertical Z Stiffness | 250 N/µm |
Horizontal Y Stiffness | 105 N/µm |
Max Velocity [3] | 2.0 m/s |
Max Acceleration [3] | 2.0 G |
Max Load Capacity | 30 kg |
Assembly Mass | 14.3 kg |
Model | AI-LM-60000-AB |
Stage | Air Bearing Linear Stage |
Travel | 600 mm (+/- 300 mm) |
Dimensions (Length x Width x Height) | 828.8 mm x 150 mm x 63.8 mm |
Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
Drive | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
Environment | Ambient |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
Max Pitch Moment [2] | 20 Nm |
Max Roll Moment [2] | 24 Nm |
Max Yaw Moment [2] | 10 Nm |
Vertical Z Stiffness | 250 N/µm |
Horizontal Y Stiffness | 105 N/µm |
Max Velocity [3] | 2.0 m/s |
Max Acceleration [3] | 2.0 G |
Max Load Capacity | 30 kg |
Assembly Mass | 11.7 kg |
Model | AI-LM-50000-AB |
Stage | Air Bearing Linear Stage |
Travel | 500 mm (+/- 250 mm) |
Dimensions (Length x Width x Height) | 727.2 mm x 150 mm x 63.8 mm |
Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
Drive | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
Environment | Ambient |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
Max Pitch Moment [2] | 20 Nm |
Max Roll Moment [2] | 24 Nm |
Max Yaw Moment [2] | 10 Nm |
Vertical Z Stiffness | 250 N/µm |
Horizontal Y Stiffness | 105 N/µm |
Max Velocity [3] | 2.0 m/s |
Max Acceleration [3] | 2.0 G |
Max Load Capacity | 30 kg |
Assembly Mass | 10.4 kg |
Model | AI-LM-40000-AB |
Stage | Air Bearing Linear Stage |
Travel | 400 mm (+/- 200 mm) |
Dimensions (Length x Width x Height) | 625.6 mm x 150 mm x 63.8 mm |
Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
Drive | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
Environment | Ambient |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
Max Pitch Moment [2] | 20 Nm |
Max Roll Moment [2] | 24 Nm |
Max Yaw Moment [2] | 10 Nm |
Vertical Z Stiffness | 250 N/µm |
Horizontal Y Stiffness | 105 N/µm |
Max Velocity [3] | 2.0 m/s |
Max Acceleration [3] | 2.0 G |
Max Load Capacity | 30 kg |
Assembly Mass | 9.1 kg |
Model | AI-LM-30000-AB |
Stage | Air Bearing Linear Stage |
Travel | 300 mm (+/- 150 mm) |
Dimensions (Length x Width x Height) | 524 mm x 150 mm x 63.8 mm |
Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
Drive | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
Environment | Ambient |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
Max Pitch Moment [2] | 20 Nm |
Max Roll Moment [2] | 24 Nm |
Max Yaw Moment [2] | 10 Nm |
Vertical Z Stiffness | 250 N/µm |
Horizontal Y Stiffness | 105 N/µm |
Max Velocity [3] | 2.0 m/s |
Max Acceleration [3] | 2.0 G |
Max Load Capacity | 30 kg |
Assembly Mass | 7.8 kg |
Model | AI-LM-20000-AB |
Stage | Air Bearing Linear Stage |
Travel | 200 mm (+/- 100 mm) |
Dimensions (Length x Width x Height) | 422.4 mm x 150 mm x 63.8 mm |
Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
Drive | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
Environment | Ambient |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
Max Pitch Moment [2] | 20 Nm |
Max Roll Moment [2] | 24 Nm |
Max Yaw Moment [2] | 10 Nm |
Vertical Z Stiffness | 250 N/µm |
Horizontal Y Stiffness | 105 N/µm |
Max Velocity [3] | 2.0 m/s |
Max Acceleration [3] | 2.0 G |
Max Load Capacity | 30 kg |
Assembly Mass | 6.5 kg |
Model | AI-LM-15000-AB |
Stage | Air Bearing Linear Stage |
Travel | 150 mm (+/- 75 mm) |
Dimensions (Length x Width x Height) | 371.6 mm x 150 mm x 63.8 mm |
Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
Drive | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
Environment | Ambient |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
Max Pitch Moment [2] | 20 Nm |
Max Roll Moment [2] | 24 Nm |
Max Yaw Moment [2] | 10 Nm |
Vertical Z Stiffness | 250 N/µm |
Horizontal Y Stiffness | 105 N/µm |
Max Velocity [3] | 2.0 m/s |
Max Acceleration [3] | 2.0 G |
Max Load Capacity | 30 kg |
Assembly Mass | 5.9 kg |
Model | AI-LM-10000-AB |
Stage | Air Bearing Linear Stage |
Travel | 100 mm (+/- 50 mm) |
Dimensions (Length x Width x Height) | 320.8 mm x 150 mm x 63.8 mm |
Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
Drive | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
Environment | Ambient |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
Max Pitch Moment [2] | 20 Nm |
Max Roll Moment [2] | 24 Nm |
Max Yaw Moment [2] | 10 Nm |
Vertical Z Stiffness | 250 N/µm |
Horizontal Y Stiffness | 105 N/µm |
Max Velocity [3] | 2.0 m/s |
Max Acceleration [3] | 2.0 G |
Max Load Capacity | 30 kg |
Assembly Mass | 5.2 kg |
Model | AI-LM-5000-AB |
Stage | Air Bearing Linear Stage |
Travel | 50 mm (+/- 25 mm) |
Dimensions (Length x Width x Height) | 270 mm x 150 mm x 63.8 mm |
Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
Drive | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
Environment | Ambient |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
Max Pitch Moment [2] | 20 Nm |
Max Roll Moment [2] | 24 Nm |
Max Yaw Moment [2] | 10 Nm |
Vertical Z Stiffness | 250 N/µm |
Horizontal Y Stiffness | 105 N/µm |
Max Velocity [3] | 2.0 m/s |
Max Acceleration [3] | 2.0 G |
Max Load Capacity | 30 kg |
Assembly Mass | 4.6 kg |
Model | AI-TM-125R-AB |
Stage | Rotary Stage |
Travel | 360 deg continuous |
Diameter | 125 mm |
Dimensions (Length x Width x Height) | 145 mm x 145 mm x 150 mm |
Aperture / Thru | 19 mm |
Drive | Torque Motor |
Feedback | Non-Contact Optical Rotary Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, 3m Length |
Structure | Anodized Aluminum 6061-T6 |
Environment | Ambient Optional: Clean Room |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications | |
Axial Runout (Standard) | 0.5 µm |
Radial Runout (Standard) | 0.5 µm |
Axial Stiffness [7] | 263 N/µm |
Radial Stiffness [7] | 87 N/µm |
Tilt Stiffness [7] | 0.18 Nm/µrad |
Resolution (Standard) [8] | Standard: 0.02 arc-sec (Analog) Optional: 0.021 - 21.0 arc-sec (Digital) |
Max Velocity [6] | 1800 deg/s |
Max Axial Load [7] | 37 kg |
Max Radial Load [7] | 14 kg |
Assembly Mass | 9.6 kg |
Model | AI-TM-104R-AB |
Stage | Rotary Stage |
Travel | 360 deg continuous |
Diameter | 104 mm |
Dimensions (Length x Width x Height) | 123 mm x 104 mm x 94 mm |
Aperture / Thru | 32 mm |
Drive | Torque Motor |
Feedback | Non-Contact Optical Rotary Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, 3m Length |
Structure | Anodized Aluminum 6061-T6 |
Environment | Ambient Optional: Clean Room |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications | |
Axial Runout | +/- 1 µm |
Radial Runout | +/- 1 µm |
Resolution [8] | Standard: 0.02 arc-sec (Analog) Optional: 0.021 - 21.0 arc-sec (Digital) |
Max Velocity [7] | 1440 deg/s |
Max Axial Load | 8 kg |
Max Radial Load | 4 kg |
Assembly Mass | 3.1 kg |
Model | AI-LM-100000-ABL |
Stage | XY Planar Air Bearing Stage |
Travel - XY | 1000 mm (+/- 500 mm) |
Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
Dimensions (Length x Width x Height) | 2050 mm x 1600 mm x 145 mm |
Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
Drives | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Precision Lapped Black Granite |
Environment | Ambient Optional: Clean Room |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Accuracy | < +/- 0.5 µm |
Repeatability | < +/- 100 nm |
Straightness | < +/- 0.5 µm |
Flatness | < +/- 1 µm |
Max Velocity | > 1 m/s |
Max Acceleration | > 1 G |
Load Capacity | 20 kg Optional: 80+ kg |
Assembly Mass | Depending on specific Configuration - Ask ALIO |
Configurable Options | #colspan# |
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
Custom X and/or Y Travel | |
Custom User Mounting Interface Features | |
Custom Platen Designs (Open Center Options) | |
Custom Compact Designs for Small Footprint | |
Customer Cable Routing | |
Customizable Motor Forces | |
Custom High Payload Options | |
Custom Granite Features and Sizes | |
Various Material Options Throughout | |
Single Axis Versions Available (Y Axis Only) | |
Various Support and Vibration Isolation Options | |
Various Safety System Options | |
Various Control Chassis Options |
Model | AI-LM-80000-ABL |
Stage | XY Planar Air Bearing Stage |
Travel - XY | 800 mm (+/- 400 mm) |
Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
Dimensions (Length x Width x Height) | 1850 mm x 1400 mm x 145 mm |
Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
Drives | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Precision Lapped Black Granite |
Environment | Ambient Optional: Clean Room |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Accuracy | < +/- 0.5 µm |
Repeatability | < +/- 100 nm |
Straightness | < +/- 0.5 µm |
Flatness | < +/- 1 µm |
Max Velocity | > 1 m/s |
Max Acceleration | > 1 G |
Load Capacity | 20 kg Optional: 80+ kg |
Assembly Mass | Depending on specific Configuration - Ask ALIO |
Configurable Options | |
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
Custom X and/or Y Travel | |
Custom User Mounting Interface Features | |
Custom Platen Designs (Open Center Options) | |
Custom Compact Designs for Small Footprint | |
Customer Cable Routing | |
Customizable Motor Forces | |
Custom High Payload Options | |
Custom Granite Features and Sizes | |
Various Material Options Throughout | |
Single Axis Versions Available (Y Axis Only) | |
Various Support and Vibration Isolation Options | |
Various Safety System Options | |
Various Control Chassis Options |
Model | AI-LM-60000-ABL |
Stage | XY Planar Air Bearing Stage |
Travel - XY | 600 mm (+/- 300 mm) |
Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
Dimensions (Length x Width x Height) | 1650 mm x 1200 mm x 145 mm |
Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
Drives | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Precision Lapped Black Granite |
Environment | Ambient Optional: Clean Room |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | #colspan# |
Accuracy | < +/- 0.5 µm |
Repeatability | < +/- 100 nm |
Straightness | < +/- 0.5 µm |
Flatness | < +/- 1 µm |
Max Velocity | > 1 m/s |
Max Acceleration | > 1 G |
Load Capacity | 20 kg Optional: 80+ kg |
Assembly Mass | Depending on specific Configuration - Ask ALIO |
Configurable Options | #colspan# |
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
Custom X and/or Y Travel | |
Custom User Mounting Interface Features | |
Custom Platen Designs (Open Center Options) | |
Custom Compact Designs for Small Footprint | |
Customer Cable Routing | |
Customizable Motor Forces | |
Custom High Payload Options | |
Custom Granite Features and Sizes | |
Various Material Options Throughout | |
Single Axis Versions Available (Y Axis Only) | |
Various Support and Vibration Isolation Options | |
Various Safety System Options | |
Various Control Chassis Options |
Model | AI-LM-50000-ABL |
Stage | XY Planar Air Bearing Stage |
Travel - XY | 500 mm (+/- 250 mm) |
Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
Dimensions (Length x Width x Height) | 1550 mm x 1100 mm x 145 mm |
Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
Drives | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Precision Lapped Black Granite |
Environment | Ambient Optional: Clean Room |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | #colspan# |
Accuracy | < +/- 0.5 µm |
Repeatability | < +/- 100 nm |
Straightness | < +/- 0.5 µm |
Flatness | < +/- 1 µm |
Max Velocity | > 1 m/s |
Max Acceleration | > 1 G |
Load Capacity | 20 kg Optional: 80+ kg |
Assembly Mass | Depending on specific Configuration - Ask ALIO |
Configurable Options | #colspan# |
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
Custom X and/or Y Travel | |
Custom User Mounting Interface Features | |
Custom Platen Designs (Open Center Options) | |
Custom Compact Designs for Small Footprint | |
Customer Cable Routing | |
Customizable Motor Forces | |
Custom High Payload Options | |
Custom Granite Features and Sizes | |
Various Material Options Throughout | |
Single Axis Versions Available (Y Axis Only) | |
Various Support and Vibration Isolation Options | |
Various Safety System Options | |
Various Control Chassis Options |
Model | AI-LM-40000-ABL |
Stage | XY Planar Air Bearing Stage |
Travel - XY | 400 mm (+/- 200 mm) |
Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
Dimensions (Length x Width x Height) | 1450 mm x 1000 mm x 145 mm |
Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
Drives | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Precision Lapped Black Granite |
Environment | Ambient Optional: Clean Room |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Accuracy | < +/- 0.5 µm |
Repeatability | < +/- 100 nm |
Straightness | < +/- 0.5 µm |
Flatness | < +/- 1 µm |
Max Velocity | > 1 m/s |
Max Acceleration | > 1 G |
Load Capacity | 20 kg Optional: 80+ kg |
Assembly Mass | Depending on specific Configuration - Ask ALIO |
Configurable Options | |
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
Custom X and/or Y Travel | |
Custom User Mounting Interface Features | |
Custom Platen Designs (Open Center Options) | |
Custom Compact Designs for Small Footprint | |
Customer Cable Routing | |
Customizable Motor Forces | |
Custom High Payload Options | |
Custom Granite Features and Sizes | |
Various Material Options Throughout | |
Single Axis Versions Available (Y Axis Only) | |
Various Support and Vibration Isolation Options | |
Various Safety System Options | |
Various Control Chassis Options |
Model | AI-LM-30000-ABL |
Stage | XY Planar Air Bearing Stage |
Travel - XY | 300 mm (+/- 150 mm) |
Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
Dimensions (Length x Width x Height) | 1350 mm x 800 mm x 145 mm |
Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
Drives | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Precision Lapped Black Granite |
Environment | Ambient Optional: Clean Room |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Accuracy | < +/- 0.5 µm |
Repeatability | < +/- 100 nm |
Straightness | < +/- 0.5 µm |
Flatness | < +/- 1 µm |
Max Velocity | > 1 m/s |
Max Acceleration | > 1 G |
Load Capacity | 20 kg Optional: 80+ kg |
Assembly Mass | Depending on specific Configuration - Ask ALIO |
Configurable Options | |
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
Custom X and/or Y Travel | |
Custom User Mounting Interface Features | |
Custom Platen Designs (Open Center Options) | |
Custom Compact Designs for Small Footprint | |
Customer Cable Routing | |
Customizable Motor Forces | |
Custom High Payload Options | |
Custom Granite Features and Sizes | |
Various Material Options Throughout | |
Single Axis Versions Available (Y Axis Only) | |
Various Support and Vibration Isolation Options | |
Various Safety System Options | |
Various Control Chassis Options |
Model | AI-LM-20000-ABL |
Stage | XY Planar Air Bearing Stage |
Travel - XY | 200 mm (+/- 100 mm) |
Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
Dimensions (Length x Width x Height) | 1250 mm x 700 mm x 145 mm |
Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
Drives | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Precision Lapped Black Granite |
Environment | Ambient Optional: Clean Room |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Accuracy | < +/- 0.5 µm |
Repeatability | < +/- 100 nm |
Straightness | < +/- 0.5 µm |
Flatness | < +/- 1 µm |
Max Velocity | > 1 m/s |
Max Acceleration | > 1 G |
Load Capacity | 20 kg Optional: 80+ kg |
Assembly Mass | Depending on specific Configuration - Ask ALIO |
Configurable Options | |
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
Custom X and/or Y Travel | |
Custom User Mounting Interface Features | |
Custom Platen Designs (Open Center Options) | |
Custom Compact Designs for Small Footprint | |
Customer Cable Routing | |
Customizable Motor Forces | |
Custom High Payload Options | |
Custom Granite Features and Sizes | |
Various Material Options Throughout | |
Single Axis Versions Available (Y Axis Only) | |
Various Support and Vibration Isolation Options | |
Various Safety System Options | |
Various Control Chassis Options |
Model | AI-VC-2400-NANO-Z-CB | ||
Travel | 24 mm (+ 24 mm/- 0 mm) | ||
Dimensions (Diameter x Height) | 200 mm x 112 mm | ||
Stage | Vertical Z Stage | ||
Motor | Dual Voice Coil Motor (VC) | ||
Feedback | Dual Non-Contact Optical Linear Encoder | ||
Bearings | Air Bearings | ||
Counterbalance | Pneumatic Cylinder | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm | +/- 0.8 µm | +/- 0.4 µm |
Bidirectional Linear Repeatability | +/- 75 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 2.0 µm | +/- 0.8 µm | +/- 0.4 µm |
Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | +/- 0.4 µm |
Pitch | +/- 10 arc-sec | ||
Yaw | +/- 10 arc-sec | ||
Roll | +/- 10 arc-sec | ||
Max Velocity | 0.2 m/s | ||
Max Acceleration | 0.5 G | ||
Assembly Mass | 6.5 kg | ||
Max Payload | 20 kg |