Model		AI-HH-60XY-15Z-56RT-LM
Stage		Hybrid Hexapod
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		170 mm x 163.5 mm x 224.5 mm
Drives		Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.03 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	150 mm/s
	Z	15 mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	30 deg/s
	Roll	360 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>1000 deg/s²
Max Payload		5 kg
Assembly Mass		9.022 kg

Model		AI-HH-60XY-15Z-56R
Stage		Hybrid Hexapod
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		174 mm x 176.3 mm x 201 mm
Drives		Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.03 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	100 mm/s
	Z	15 mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	30 deg/s
	Roll	360 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>1000 deg/s²
Max Payload		5 kg
Assembly Mass		5.7 kg

Model		AI-HH-30D-200XY-62Z-80R-LM
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		571 mm x 401 mm x 322.2 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 30 nm
	Z	+/- 200 nm
	Pitch And Roll	+/- 1 arc-sec
	Yaw	+/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	100  mm/s
	Z	15  mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>2000 deg/s²
Max Payload		5-10 kg
Assembly Mass		30 kg

Model		AI-HH-30D-200XY-62Z-80R-CM
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		510 mm x 336.5 mm x 293.2 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 30 nm
	Z	+/- 200 nm
	Pitch And Roll	+/- 1 arc-sec
	Yaw	+/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	50  mm/s
	Z	15  mm/s
Max Linear Acceleration [3]	XY	0.1 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>2000 deg/s²
Max Payload		5 kg
Assembly Mass		14 kg

Model		AI-HH-30D-100XY-62Z-80R-LM
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		415.8 mm x 295.5 mm x 312.2 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 30 nm
	Z	+/- 200 nm
	Pitch And Roll	+/- 1 arc-sec
	Yaw	+/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	100  mm/s
	Z	15  mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>2000 deg/s²
Max Payload		5-10 kg
Assembly Mass		15.29 kg

Model		AI-HH-30D-60XY-62Z-80R-BSD
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		199 mm x 208 mm x 285.2 mm
Drives		XY, Pitch & Roll: Frameless Torque Motor with Precision Ball Screw Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm
	Z	+/- 200 nm
	Pitch And Roll	#colspan# +/- 1 arc-sec
	Yaw	#colspan# +/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec		Pitch And Roll
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	YawPitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	50  mm/s
	Z	15  mm/s
Max Linear Acceleration [3]	XY	0.1 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>2000 deg/s²
Max Payload		5-10 kg
Assembly Mass

Model		AI-HH-200XY-60Z-154RA
Stage		Hybrid Hexapod
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		60 mm (+ 60 mm/- 0 mm)
Travel - Pitch & Roll		+/- 14 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		443.2 mm x 410.1 mm x 378 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw Yaw: Torque Motor
Brake		Pneumatic Release, Spring Lock
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	10 nm	7 nm	4 nm
	Radial Runout	10 nm	7 nm	4 nm
	Wobble	20 arc-sec	10 arc-sec	6 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.02 arc-sec
	Yaw	~0.01 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	500  mm/s
	Z	30  mm/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	60 deg/s
	Yaw	1800 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>3600 deg/s²
Max Payload		20 kg
Assembly Mass		57 kg

Model		AI-HH-200XY-15Z-56RT-CM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		336.5 mm  x 275 mm x 202.7 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc/sec	5 arc/sec	1 arc/sec
	XZ & YZ	250 arc/sec	200 arc/sec	50 arc/sec
Max Linear Velocity [3]	XY	50 mm/s
	Z	15 mm/s
MAX LINEAR ACCELERATION [3]	XY	0.1 G
	Z	0.3 G
Max Angular Velocity [3]	PITCH AND ROLL	30 deg/s
	YAW	3000 deg/s
MAX ANGULAR ACCELERATION [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		16.3 kg

Model		AI-HH-100XY-15Z-56RT-LM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		296 mm x 244 mm x 215.2 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc/sec	5 arc/sec	1 arc/sec
	XZ & YZ	250 arc/sec	200 arc/sec	50 arc/sec
Max Linear Velocity [3]	XY	150 mm/s
	Z	15 mm/s
MAX LINEAR ACCELERATION [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	PITCH AND ROLL	30 deg/s
	YAW	3000 deg/s
MAX ANGULAR ACCELERATION [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		8.9 kg

Model		AI-HH-60XY-15Z-56RT-LM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		165 mm  x 215.2 mm x 222.7 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	150 mm/s
	Z	15 mm/s
MAX LINEAR ACCELERATION [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	PITCH AND ROLL	30 deg/s
	YAW	3000 deg/s
MAX ANGULAR ACCELERATION [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		7.3 kg

Model		AI-HH-60XY-15Z-56RT-BSD
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		171 mm x 177 mm x 191.7 mm
Drives		XY, Pitch & Roll: Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	#colspan#  < 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	100 mm/s
	Z	15 mm/s
MAX LINEAR ACCELERATION [3]	XY	0.3 G
	Z	#colspan#0.3 G
Max Angular Velocity [3]	PITCH AND ROLL	30 deg/s
	YAW	3000 deg/s
MAX ANGULAR ACCELERATION [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		6 kg

Model	AI-HH-ST14-200XY-60Z-104R
Travel - XY	200 mm (+/- 100 mm)
Travel - Z	60 mm (+ 60 mm /- 0 mm)
Travel - Pitch & Roll	+/- 30 deg
Travel - Yaw	360 deg continous
Dimensions (Length x Width x Height)	292 mm x 275 mm x 400 mm
Stage	Hybrid Hexapod
Drives	XY, Pitch & Yaw: Stepper Motor Yaw: Torque Motor
Feedback	Standard: No Encoder Optional: Non-Contact Optical Linear Encoder, Rotary Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder Optional: Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications	(STD)
Linear Resolution with Encoder Option	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution with Encoder Option	~0.01 arc-sec
Yaw Resolution with Encoder Option	0.02 arc-sec
Max Linear Velocity [2]	20 mm/s
Max Angular Velocity (Pitch & Roll) [2]	10 deg/s
Max Angular Velocity (Yaw) [2]	540 deg/s
Max Payload [3]	10 kg
Assembly Mass	28 kg

Model	AI-6D-250XY-92Z
Stage	Hybrid Hexapod  (6 DOF)
Travel - XY	250mm (+/- 125mm)
Travel - Z	92mm (+ 92mm/ - 0mm)
Travel - Pitch & Roll	+/- 20 deg
Travel - Yaw	360 deg continuous
Dimensions (Length x Width x Height)	435 mm x 435 mm x 707.5 mm
Drives	XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder Optional: Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications
Linear Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution	~0.02 arc-sec
Yaw Resolution	~0.01 arc-sec
Max Linear Velocity [10]	0.3 m/s
Max Angular Velocity (Pitch & Roll) [10]	90 deg/s
Max Angular Velocity (Yaw) [10]	180 deg/s
Assembly Mass	130 kg
Max Payload [11]	35 kg

Model	AI-TRI-LM-10600-104R
Stage	Linear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z	106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll	+/- 18  deg
Travel - Yaw	360 deg continuous
Dimensions (Length x Width x Height)	504.2 mm x 462.8 mm x 460 mm
Drives	XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback	Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications	(STD)
Linear Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution	~0.01 arc-sec
Yaw Resolution	0.02 arc-sec
Max Linear Velocity [10]	0.2 m/s
Max Angular Velocity (Pitch & Roll) [10]	90 deg/s
Max Angular Velocity (Yaw) [10]	720 deg/s
Assembly Mass	30 kg
Max Payload [11]	7 kg

Model	AI-TRI-LM-5500-104R
Stage	Linear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z	55 mm (+ 55 mm/- 0 mm)
Travel - Pitch & Roll	+/- 16  deg
Travel - Yaw	360 deg continuous
Dimensions (Length x Width x Height)	403.1 mm x 373.5 mm x 310.9 mm
Drives	XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback	Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications	(STD)
Linear Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution	~0.01 arc-sec
Yaw Resolution	0.02 arc-sec
Max Linear Velocity [10]	0.2 m/s
Max Angular Velocity (Pitch & Roll) [10]	90 deg/s
Max Angular Velocity (Yaw) [10]	720 deg/s
Assembly Mass	20.1 kg
Max Payload [11]	5 kg

Model	AI-TRI-LM-4000-104R
Stage	Linear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z	40 mm (+ 40 mm/- 0 mm)
Travel - Pitch & Roll	+/- 12  deg
Travel - Yaw	360 deg continuous
Dimensions (Length x Width x Height)	399 mm x 359 mm x 250.5 mm
Drives	XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback	Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications	(STD)
Linear Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution	~0.01 arc-sec
Yaw Resolution	0.02 arc-sec
Max Linear Velocity [10]	0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]	90 deg/s
Max Angular Velocity (Yaw) [10]	720 deg/s
Assembly Mass	18 kg
Max Payload [11]	5 kg

Model	AI-TRI-LM-4000-56R
Stage	Linear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z	40 mm (+ 40 mm/- 0 mm)
Travel - Pitch & Roll	+/- 16  deg
Travel - Yaw	360 deg continuous
Dimensions (Length x Width x Height)	331.6 mm x 303.3 mm x 247.9 mm
Drives	XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback	Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications	(STD)
Linear Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution	~0.02 arc-sec
Yaw Resolution	0.04 arc-sec
Max Linear Velocity [10]	0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]	90 deg/s
Max Angular Velocity (Yaw) [10]	720 deg/s
Assembly Mass	14.6 kg
Max Payload [11]	2.5 kg

Model	AI-TRI-LM-2400-56R-MS
Stage	Linear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z	24 mm (+ 24 mm/- 0 mm)
Travel - Pitch & Roll	+/- 12  deg
Travel - Yaw	360 deg continuous
Dimensions (Length x Width x Height)	261 mm x 228.8 mm x 170.9 mm
Drives	XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback	Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications	(STD)
Linear Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution	~0.02 arc-sec
Yaw Resolution	0.04 arc-sec
Max Linear Velocity [10]	0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]	90 deg/s
Max Angular Velocity (Yaw) [10]	720 deg/s
Assembly Mass	6.9 kg
Max Payload [11]	2.5 kg

Model	AI-TRI-LM-2400-56R
Stage	Linear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z	24 mm (+ 24 mm/- 0 mm)
Travel - Pitch & Roll	+/- 12  deg
Travel - Yaw	360 deg continuous
Dimensions (Length x Width x Height)	241.1 mm x 219.1 mm x 176.7 mm
Drives	XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback	Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications	(STD)
Linear Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution	~0.02 arc-sec
Yaw Resolution	0.04 arc-sec
Max Linear Velocity [10]	0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]	90 deg/s
Max Angular Velocity (Yaw) [10]	720 deg/s
Assembly Mass	5.4 kg
Max Payload [11]	2.5 kg

Model	AI-TRI-LM-600-56R
Stage	Linear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z	6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll	+/- 3  deg
Travel - Yaw	360 deg continuous
Dimensions (Length x Width x Height)	200 mm x 191.3 mm x 143.6 mm
Drives	XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback	Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications	(STD)
Linear Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution	~0.03 arc-sec
Yaw Resolution	0.04 arc-sec
Max Linear Velocity [10]	0.08 m/s
Max Angular Velocity (Pitch & Roll) [10]	90 deg/s
Max Angular Velocity (Yaw) [10]	720 deg/s
Assembly Mass	4.2 kg
Max Payload [11]	2 kg

Model	AI-TRI-LM-10600
Stage	Linear Motor Tripod (3 DOF)
Travel - Z	106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll	+/- 20 deg
Dimensions (Length x Width x Height)	399.1 mm x 348.8 mm x 459.1 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)
Linear Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution	~0.02 arc-sec
Max Linear Velocity [10]	0.2 m/s
Max Angular Velocity (Pitch & Roll) [10]	90 deg/s
Max Payload [11]	10 kg
Assembly Mass	23.2 kg

Model	AI-TRI-LM-9200
Stage	Linear Motor Tripod (3 DOF)
Travel - Z	92 mm (+ 92 mm/- 0 mm)
Travel - Pitch & Roll	+/- 20 deg
Dimensions (Length x Width x Height)	435 mm x 380 mm x 482.5 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)
Linear Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution	~0.02 arc-sec
Max Linear Velocity [10]	0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]	90 deg/s
Max Payload [11]	35 kg
Assembly Mass	52 kg

Model	AI-TRI-LM-5500
Stage	Linear Motor Tripod (3 DOF)
Travel - Z	55 mm (+ 55 mm/- 0 mm)
Travel - Pitch & Roll	+/- 20 deg
Dimensions (Length x Width x Height)	363.8 mm x 339.9 mm x 308.6 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)
Linear Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution	~0.02 arc-sec
Max Linear Velocity [10]	0.2 m/s
Max Angular Velocity (Pitch & Roll) [10]	90 deg/s
Max Payload [11]	10 kg
Assembly Mass	15.6 kg

Model	AI-TRI-LM-4000
Stage	Linear Motor Tripod (3 DOF)
Travel - Z	40 mm (+ 40 mm/- 0 mm)
Travel - Pitch & Roll	+/- 16 deg
Dimensions (Length x Width x Height)	331.6 mm x 303.3 mm x 246.9 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)
Linear Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution	~0.02 arc-sec
Max Linear Velocity [10]	0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]	90 deg/s
Max Payload [11]	7.5 kg
Assembly Mass	13.6 kg

Model	AI-TRI-LM-2400-MS
Stage	Linear Motor Tripod (3 DOF)
Travel - Z	12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll	+/- 16 deg
Dimensions (Length x Width x Height)	251.8 mm x 220.8 mm x 169.9 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)
Linear Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution	~0.03 arc-sec
Max Linear Velocity [10]	0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]	90 deg/s
Max Payload [11]	3.5 kg
Assembly Mass	6.3 kg

Model	AI-TRI-LM-2400
Stage	Linear Motor Tripod (3 DOF)
Travel - Z	12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll	+/- 15 deg
Dimensions (Length x Width x Height)	208 mm x 196.3 mm x 173 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)
Linear Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution	~0.04 arc-sec
Max Linear Velocity [10]	0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]	90 deg/s
Max Payload [11]	3.5 kg
Assembly Mass	4.5 kg

Model	AI-TRI-LM-600
Stage	Linear Motor Tripod (3 DOF)
Travel - Z	6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll	+/- 3 deg
Dimensions (Length x Width x Height)	172.5 mm x 164.3 mm x 142.6 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)
Linear Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution	~0.04 arc-sec
Max Linear Velocity [10]	0.08 m/s
Max Angular Velocity (Pitch & Roll) [10]	90 deg/s
Max Payload [11]	2 kg
Assembly Mass	3.4 kg

Model		AI-HH-300XY-206Z-154R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		300 mm (+/- 150 mm)
Travel - Z		206 mm (+ 206 mm/- 0 mm)
Travel - Pitch & Roll		+/- 18 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		504.2 mm x 500 mm x 660 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	10 µm	7 µm	4 µm
	Radial Runout	10 µm	7 µm	4 µm
	Wobble	20 arc-sec	10 arc-sec	6 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	~0.01 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		20 kg
Assembly Mass		122 kg

Model		AI-HH-300XY-106Z-154R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		300 mm (+/- 150 mm)
Travel - Z		106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll		+/- 18 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		504.2
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	10 µm	7 µm	4 µm
	Radial Runout	10 µm	7 µm	4 µm
	Wobble	20 arc-sec	10 arc-sec	6 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	~0.01 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	#colspan#180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		10 kg
Assembly Mass		105 kg

Model		AI-HH-300XY-106Z-104R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		300 mm (+/- 150 mm)
Travel - Z		106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll		+/- 18 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		504.2 mm x 500 mm x 519.9 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	12 µm	9 µm	6 µm
	Radial Runout	12 µm	9 µm	6 µm
	Wobble	25 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	0.02 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		7.5 kg
Assembly Mass		105 kg

Model		AI-HH-200XY-40Z-104R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		200 mm(+/- 100 mm)
Travel - Z		20 mm (+ 20 mm/- 0 mm)
Travel - Pitch & Roll		+/- 11 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		399 mm x 359 mm x 318.9 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	12 µm	9 µm	6 µm
	Radial Runout	12 µm	9 µm	6 µm
	Wobble	25 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	0.02 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		5 kg
Assembly Mass		46 kg

Model		AI-HH-150XY-40Z-104R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		150 mm (+/- 75 mm)
Travel - Z		20 mm (+ 20 mm/- 0 mm)
Travel - Pitch & Roll		+/- 11 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		399 mm x 350 mm x 308.9 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	9 µm	6 µm
	Radial Runout	12 µm	9 µm	6 µm
	Wobble	25 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	#colspan#~0.01 arc-sec
	Yaw	0.02 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.4 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		5 kg
Assembly Mass		34 kg

Model		AI-HH-100XY-24Z-56R-MS
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		262.5 mm x 246 mm x 250.8 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Magnetic Spring (Constant Force)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	#colspan#  < 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
Pitch And Roll	~0.02 arc-sec
Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.5 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		2.5 kg
Assembly Mass		20 kg

Model		AI-HH-100XY-24Z-56R-CM,MS
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		262.5 mm x 246 mm x 218.8 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.02 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.05 m/s
Max Linear Acceleration [3]		0.1 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		2.5 kg
Assembly Mass		13.1 kg

Model		AI-HH-100XY-24Z-56R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll		+/- 11 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		244 mm x 244 mm x 233.8 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.02 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.05 m/s
Max Linear Acceleration [3]		0.5 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		2.5 kg
Assembly Mass		18.4 kg

Model		AI-HH-100XY-6Z-56R-CM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll		+/- 3 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		200 mm x 184 mm x 200.5 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.03 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.05 m/s
Max Linear Acceleration [3]		0.1 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		2 kg
Assembly Mass		10 kg

Model		AI-HH-100XY-6Z-56R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll		+/- 3 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		244 mm x 244 mm x 220.5 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.03 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.4 m/s
Max Linear Acceleration [3]		0.5 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		2 kg
Assembly Mass		17.2 kg