| Model | AI-LM-200000-UII-XB | ||
| Stage | Linear Stage | ||
| Travel | 2000 mm (+/- 1000 mm) | ||
| Dimensions (Length x Width x Height) | 2366 mm x 357 mm x 96.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | ELITE |
| Linear Displacement Accuracy | +/- 200 µm | +/- 10 µm | +/- 5 µm |
| Bidirectional Linear Repeatability | +/- 1 µm | +/- 0.5 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 50 µm | +/- 25 µm | +/- 10 µm |
| Flatness [2] | +/- 200 µm | +/- 50 µm | +/- 15 µm |
| Pitch | +/- 30 arc-sec | +/- 15 arc-sec | |
| Yaw | +/- 30 arc-sec | +/- 18 arc-sec | |
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | Depending on specific Application - Ask ALIO | ||
| Model | AI-LM-150000-UII-XB | ||
| Stage | Linear Stage | ||
| Travel | 1500 mm (+/- 750 mm) | ||
| Dimensions (Length x Width x Height) | 1866 mm x 357 mm x 96.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | ELITE |
| Linear Displacement Accuracy | +/-75 µm | +/-10 µm | +/- 5 µm |
| Bidirectional Linear Repeatability | +/- 1 µm | +/- 0.5 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 40 µm | +/- 25 µm | +/- 10 µm |
| Flatness [2] | +/- 175 µm | +/- 35 µm | +/- 15 µm |
| Pitch | +/- 30 arc-sec | +/- 15 arc-sec | |
| Yaw | +/- 30 arc-sec | +/- 18 arc-sec | |
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | Depending on specific Application - Ask ALIO | ||
| Model | AI-LM-100000-UII-XB | ||
| Stage | Linear Stage | ||
| Travel | 1000 mm (+/- 500 mm) | ||
| Dimensions (Length x Width x Height) | 1366 mm x 357 mm x 96.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | ELITE |
| Linear Displacement Accuracy | +/- 40 µm | +/-10 µm | +/- 5 µm |
| Bidirectional Linear Repeatability | +/- 1 µm | +/- 0.5 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 30 µm | +/- 20 µm | +/- 10 µm |
| Flatness [2] | +/- 150 µm | +/- 20 µm | +/- 15 µm |
| Pitch | +/- 30 arc-sec | +/- 15 arc-sec | |
| Yaw | +/- 30 arc-sec | +/- 18 arc-sec | |
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | Depending on specific Application - Ask ALIO | ||
| Model | AI-LM-80000-UII-XB | ||
| Stage | Linear Stage | ||
| Travel | 800 mm (+/- 400 mm) | ||
| Dimensions (Length x Width x Height) | 1166 mm x 357 mm x 96.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | ELITE |
| Linear Displacement Accuracy | +/- 32 µm | +/- 5 µm | +/- 3 µm |
| Bidirectional Linear Repeatability | +/- 1 µm | +/- 0.5 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 26 µm | +/- 18 µm | +/- 10 µm |
| Flatness [2] | +/- 100 µm | +/- 18 µm | +/- 12 µm |
| Pitch | +/- 30 arc-sec | +/- 15 arc-sec | |
| Yaw | +/- 30 arc-sec | +/- 18 arc-sec | |
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | Depending on specific Application - Ask ALIO | ||
| Model | AI-LM-70000-UII-XB | ||
| Stage | Linear Stage | ||
| Travel | 700 mm (+/- 350 mm) | ||
| Dimensions (Length x Width x Height) | 1066 mm x 357 mm x 96.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | ELITE |
| Linear Displacement Accuracy | +/- 28 µm | +/- 5 µm | +/- 3 µm |
| Bidirectional Linear Repeatability | +/- 1 µm | +/- 0.5 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 24 µm | +/- 18 µm | +/- 10 µm |
| Flatness [2] | +/- 75 µm | +/- 18 µm | +/- 12 µm |
| Pitch | +/- 30 arc-sec | +/- 15 arc-sec | |
| Yaw | +/- 30 arc-sec | +/- 18 arc-sec | |
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | Depending on specific Application - Ask ALIO | ||
| Model | AI-LM-60000-UII-XB | ||
| Stage | Linear Stage | ||
| Travel | 600 mm (+/- 300 mm) | ||
| Dimensions (Length x Width x Height) | 966 mm x 357 mm x 96.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | ELITE |
| Linear Displacement Accuracy | +/- 24 µm | +/- 5 µm | +/- 2 µm |
| Bidirectional Linear Repeatability | +/- 1 µm | +/- 0.5 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 20 µm | +/- 15 µm | +/- 10 µm |
| Flatness [2] | +/- 50 µm | +/- 18 µm | +/- 12 µm |
| Pitch | +/- 30 arc-sec | +/- 15 arc-sec | |
| Yaw | +/- 30 arc-sec | +/- 18 arc-sec | |
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | Depending on specific Application - Ask ALIO | ||
| Model | AI-LM-50000-UII-XB | ||
| Stage | Linear Stage | ||
| Travel | 500 mm (+/- 250 mm) | ||
| Dimensions (Length x Width x Height) | 866 mm x 357 mm x 96.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | ELITE |
| Linear Displacement Accuracy | +/- 20 µm | +/- 5 µm | +/- 2 µm |
| Bidirectional Linear Repeatability | +/- 1 µm | +/- 0.5 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 20 µm | +/- 15 µm | +/- 10 µm |
| Flatness [2] | +/- 40 µm | +/- 15 µm | +/- 10 µm |
| Pitch | +/- 30 arc-sec | +/- 15 arc-sec | |
| Yaw | +/- 30 arc-sec | +/- 18 arc-sec | |
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | Depending on specific Application - Ask ALIO | ||
| Model | AI-LM-40000-UII-XB | ||
| Stage | Linear Stage | ||
| Travel | 400 mm (+/- 200 mm) | ||
| Dimensions (Length x Width x Height) | 766 mm x 357 mm x 96.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | ELITE |
| Linear Displacement Accuracy | +/- 16 µm | +/- 5 µm | +/- 2 µm |
| Bidirectional Linear Repeatability | +/- 1 µm | +/- 0.5 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 18 µm | +/- 13 µm | +/- 10 µm |
| Flatness [2] | +/- 30 µm | +/- 15 µm | +/- 10 µm |
| Pitch | +/- 30 arc-sec | +/- 15 arc-sec | |
| Yaw | +/- 30 arc-sec | +/- 18 arc-sec | |
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | Depending on specific Application - Ask ALIO | ||
| Model | AI-XBS-55000-UII | |
| Stage | Linear Stage | |
| Travel | 550 mm (+/- 275 mm) | |
| Dimensions (Length x Width x Height) | 913 mm x 388 mm x 100 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 958 mm x 388 mm x 100 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
| Straightness In Y | +/- 8 µm | +/- 4 µm |
| Flatness [2] | +/- 8 µm | +/- 4 µm |
| Pitch [2] | +/- 18 arc-sec | |
| Yaw | +/- 18 arc-sec | |
| Roll | +/- 18 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
| Max Payload Capability With Axis Oriented Vertically | 80 kg | |
| Assembly Mass | 40 kg | |
| Model | AI-XBS-50000-UII | |
| Stage | Linear Stage | |
| Travel | 500 mm (+/- 250 mm) | |
| Dimensions (Length x Width x Height) | 863 mm x 388 mm x 100 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 908 mm x 388 mm x 100 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
| Straightness In Y | +/- 8 µm | +/- 4 µm |
| Flatness [2] | +/- 8 µm | +/- 4 µm |
| Pitch [2] | +/- 18 arc-sec | |
| Yaw | +/- 18 arc-sec | |
| Roll | +/- 18 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
| Max Payload Capability With Axis Oriented Vertically | 80 kg | |
| Assembly Mass | 38 kg | |
| Model | AI-XBS-45000-UII | |
| Stage | Linear Stage | |
| Travel | 450 mm (+/- 225 mm) | |
| Dimensions (Length x Width x Height) | 813 mm x 388 mm x 100 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 858 mm x 388 mm x 100 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
| Straightness In Y | +/- 8 µm | +/- 4 µm |
| Flatness [2] | +/- 8 µm | +/- 4 µm |
| Pitch [2] | +/- 18 arc-sec | |
| Yaw | +/- 18 arc-sec | |
| Roll | +/- 18 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
| Max Payload Capability With Axis Oriented Vertically | 80 kg | |
| Assembly Mass | 36 kg | |
| Model | AI-XBS-40000-UII | |
| Stage | Linear Stage | |
| Travel | 400 mm (+/- 200 mm) | |
| Dimensions (Length x Width x Height) | 763 mm x 388 mm x 100 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 808 mm x 388 mm x 100 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 20 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
| Straightness In Y | +/- 6 µm | +/- 4 µm |
| Flatness [2] | +/- 6 µm | +/- 4 µm |
| Pitch [2] | +/- 18 arc-sec | |
| Yaw | +/- 18 arc-sec | |
| Roll | +/- 18 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
| Max Payload Capability With Axis Oriented Vertically | 80 kg | |
| Assembly Mass | 34 kg | |
| Model | AI-XBS-35000-UII | |
| Stage | Linear Stage | |
| Travel | 350 mm (+/- 175 mm) | |
| Dimensions (Length x Width x Height) | 713 mm x 388 mm x 100 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 758 mm x 388 mm x 100 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 16 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
| Straightness In Y | +/- 5 µm | +/- 3 µm |
| Flatness [2] | +/- 5 µm | +/- 3 µm |
| Pitch [2] | +/- 18 arc-sec | |
| Yaw | +/- 18 arc-sec | |
| Roll | +/- 18 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
| Max Payload Capability With Axis Oriented Vertically | 80 kg | |
| Assembly Mass | 32 kg | |
| Model | AI-XBS-30000-UII | |
| Stage | Linear Stage | |
| Travel | 300 mm (+/- 150 mm) | |
| Dimensions (Length x Width x Height) | 663 mm x 388 mm x 100 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 708 mm x 388 mm x 100 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
| Straightness In Y | +/- 5 µm | +/- 3 µm |
| Flatness [2] | +/- 5 µm | +/- 3 µm |
| Pitch [2] | +/- 18 arc-sec | |
| Yaw | +/- 18 arc-sec | |
| Roll | +/- 18 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
| Max Payload Capability With Axis Oriented Vertically | 80 kg | |
| Assembly Mass | 29 kg | |
| Model | AI-XBS-25000-UII | |
| Stage | Linear Stage | |
| Travel | 250 mm (+/- 125 mm) | |
| Dimensions (Length x Width x Height) | 613 mm x 388 mm x 100 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 658 mm x 388 mm x 100 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 10 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
| Straightness In Y | +/- 5 µm | +/- 3 µm |
| Flatness [2] | +/- 5 µm | +/- 3 µm |
| Pitch [2] | +/- 15 arc-sec | |
| Yaw | +/- 15 arc-sec | |
| Roll | +/- 15 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
| Max Payload Capability With Axis Oriented Vertically | 80 kg | |
| Assembly Mass | 28 kg | |
| Model | AI-XBS-20000-UII | |
| Stage | Linear Stage | |
| Travel | 200 mm (+/- 100 mm) | |
| Dimensions (Length x Width x Height) | 563 mm x 388 mm x 100 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 608 mm x 388 mm x 100 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 8 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
| Straightness In Y | +/- 4 µm | +/- 3 µm |
| Flatness [2] | +/- 4 µm | +/- 3 µm |
| Pitch [2] | +/- 15 arc-sec | |
| Yaw | +/- 15 arc-sec | |
| Roll | +/- 15 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
| Max Payload Capability With Axis Oriented Vertically | 80 kg | |
| Assembly Mass | 27 kg | |
| Model | AI-XBS-15000-UII | |
| Stage | Linear Stage | |
| Travel | 150 mm (+/- 75 mm) | |
| Dimensions (Length x Width x Height) | 513 mm x 388 mm x 100 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 558 mm x 388 mm x 100 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 6 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
| Straightness In Y | +/- 3 µm | +/- 2 µm |
| Flatness [2] | +/- 3 µm | +/- 2 µm |
| Pitch [2] | +/- 12 arc-sec | |
| Yaw | +/- 12 arc-sec | |
| Roll | +/- 12 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
| Max Payload Capability With Axis Oriented Vertically | 80 kg | |
| Assembly Mass | 25 kg | |
| Model | AI-XBS-10000-UII | |
| Stage | Linear Stage | |
| Travel | 100 mm (+/- 50 mm) | |
| Dimensions (Length x Width x Height) | 463 mm x 388 mm x 100 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 508 mm x 388 mm x 100 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 5 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
| Straightness In Y | +/- 3 µm | +/- 2 µm |
| Flatness [2] | +/- 3 µm | +/- 2 µm |
| Pitch [2] | +/- 12 arc-sec | |
| Yaw | +/- 12 arc-sec | |
| Roll | +/- 12 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
| Max Payload Capability With Axis Oriented Vertically | 80 kg | |
| Assembly Mass | 24 kg | |
| Model | AI-SBS-50000-UII | |
| Stage | Linear Stage | |
| Travel | 500 mm (+/- 250 mm) | |
| Dimensions (Length x Width x Height) | 793 mm x 258 mm x 69 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 815 mm x 258 mm x 69 mm | |
| (-Ebrk) Dimensions (Length x Width x Height) | 865 mm x 258 mm x 69 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m Length | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
| Straightness In Y | +/- 8 µm | +/- 4 µm |
| Flatness [2] | +/- 8 µm | +/- 4 µm |
| Pitch [2] | +/- 18 arc-sec | |
| Yaw | +/- 18 arc-sec | |
| Roll | +/- 18 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
| Max Payload Capability With Axis Oriented Vertically | 40 kg | |
| Assembly Mass | 15.5 kg | |
| Model | AI-SBS-45000-UII | |
| Stage | Linear Stage | |
| Travel | 450 mm (+/- 225 mm) | |
| Dimensions (Length x Width x Height) | 743 mm x 258 mm x 69 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 765 mm x 258 mm x 69 mm | |
| (-Ebrk) Dimensions (Length x Width x Height) | 815 mm x 258 mm x 69 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m Length | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
| Straightness In Y | +/- 8 µm | +/- 4 µm |
| Flatness [2] | +/- 8 µm | +/- 4 µm |
| Pitch [2] | +/- 18 arc-sec | |
| Yaw | +/- 18 arc-sec | |
| Roll | +/- 18 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
| Max Payload Capability With Axis Oriented Vertically | 40 kg | |
| Assembly Mass | 15 kg | |
| Model | AI-SBS-40000-UII | |
| Stage | Linear Stage | |
| Travel | 400 mm (+/- 200 mm) | |
| Dimensions (Length x Width x Height) | 693 mm x 258 mm x 69 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 715 mm x 258 mm x 69 mm | |
| (-Ebrk) Dimensions (Length x Width x Height) | 765 mm x 258 mm x 69 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m Length | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 20 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
| Straightness In Y | +/- 6 µm | +/- 4 µm |
| Flatness [2] | +/- 6 µm | +/- 4 µm |
| Pitch [2] | +/- 18 arc-sec | |
| Yaw | +/- 18 arc-sec | |
| Roll | +/- 18 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
| Max Payload Capability With Axis Oriented Vertically | 40 kg | |
| Assembly Mass | 14.5 kg | |
| Model | AI-SBS-35000-UII | |
| Stage | Linear Stage | |
| Travel | 350 mm (+/- 175 mm) | |
| Dimensions (Length x Width x Height) | 643 mm x 258 mm x 69 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 665 mm x 258 mm x 69 mm | |
| (-Ebrk) Dimensions (Length x Width x Height) | 715 mm x 258 mm x 69 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m Length | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 16 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
| Straightness In Y | +/- 5 µm | +/- 3 µm |
| Flatness [2] | +/- 5 µm | +/- 3 µm |
| Pitch [2] | +/- 18 arc-sec | |
| Yaw | +/- 18 arc-sec | |
| Roll | +/- 18 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
| Max Payload Capability With Axis Oriented Vertically | 40 kg | |
| Assembly Mass | 13.5 kg | |
| Model | AI-SBS-30000-UII | |
| Stage | Linear Stage | |
| Travel | 300 mm (+/- 150 mm) | |
| Dimensions (Length x Width x Height) | 593 mm x 258 mm x 69 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 615 mm x 258 mm x 69 mm | |
| (-Ebrk) Dimensions (Length x Width x Height) | 665 mm x 258 mm x 69 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m Length | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
| Straightness In Y | +/- 5 µm | +/- 3 µm |
| Flatness [2] | +/- 5 µm | +/- 3 µm |
| Pitch [2] | +/- 18 arc-sec | |
| Yaw | +/- 18 arc-sec | |
| Roll | +/- 18 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
| Max Payload Capability With Axis Oriented Vertically | 40 kg | |
| Assembly Mass | 13 kg | |
| Model | AI-SBS-25000-UII | |
| Stage | Linear Stage | |
| Travel | 250 mm (+/- 125 mm) | |
| Dimensions (Length x Width x Height) | 543 mm x 258 mm x 69 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 565 mm x 258 mm x 69 mm | |
| (-Ebrk) Dimensions (Length x Width x Height) | 615 mm x 258 mm x 69 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m Length | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 10 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
| Straightness In Y | +/- 5 µm | +/- 3 µm |
| Flatness [2] | +/- 5 µm | +/- 3 µm |
| Pitch [2] | +/- 15 arc-sec | |
| Yaw | +/- 15 arc-sec | |
| Roll | +/- 15 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
| Max Payload Capability With Axis Oriented Vertically | 40 kg | |
| Assembly Mass | 12.5 kg | |
| Model | AI-SBS-20000-UII | |
| Stage | Linear Stage | |
| Travel | 200 mm (+/- 100 mm) | |
| Dimensions (Length x Width x Height) | 493 mm x 258 mm x 69 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 515 mm x 258 mm x 69 mm | |
| (-Ebrk) Dimensions (Length x Width x Height) | 565 mm x 258 mm x 69 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m Length | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 8 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
| Straightness In Y | +/- 4 µm | +/- 3 µm |
| Flatness [2] | +/- 4 µm | +/- 3 µm |
| Pitch [2] | +/- 15 arc-sec | |
| Yaw | +/- 15 arc-sec | |
| Roll | +/- 15 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
| Max Payload Capability With Axis Oriented Vertically | 40 kg | |
| Assembly Mass | 12 kg | |
| Model | AI-SBS-15000-UII | |
| Stage | Linear Stage | |
| Travel | 150 mm (+/- 75 mm) | |
| Dimensions (Length x Width x Height) | 443 mm x 258 mm x 69 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 465 mm x 258 mm x 69 mm | |
| (-Ebrk) Dimensions (Length x Width x Height) | 515 mm x 258 mm x 69 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m Length | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 6 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
| Straightness In Y | +/- 3 µm | +/- 2 µm |
| Flatness [2] | +/- 3 µm | +/- 2 µm |
| Pitch [2] | +/- 12 arc-sec | |
| Yaw | +/- 12 arc-sec | |
| Roll | +/- 12 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
| Max Payload Capability With Axis Oriented Vertically | 40 kg | |
| Assembly Mass | 11.5 kg | |
| Model | AI-SBS-10000-UII | |
| Stage | Linear Stage | |
| Travel | 100 mm (+/- 50 mm) | |
| Dimensions (Length x Width x Height) | 393 mm x 258 mm x 69 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 415 mm x 258 mm x 69 mm | |
| (-Ebrk) Dimensions (Length x Width x Height) | 465 mm x 258 mm x 69 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m Length | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 5 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
| Straightness In Y | +/- 3 µm | +/- 2 µm |
| Flatness [2] | +/- 3 µm | +/- 2 µm |
| Pitch [2] | +/- 12 arc-sec | |
| Yaw | +/- 12 arc-sec | |
| Roll | +/- 12 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
| Max Payload Capability With Axis Oriented Vertically | 40 kg | |
| Assembly Mass | 11 kg | |
| Model | AI-SBS-5000-UII | |
| Stage | Linear Stage | |
| Travel | 50 mm (+/- 25 mm) | |
| Dimensions (Length x Width x Height) | 343 mm x 258 mm x 69 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 365 mm x 258 mm x 69 mm | |
| (-Ebrk) Dimensions (Length x Width x Height) | 415 mm x 258 mm x 69 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m Length | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 5 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
| Straightness In Y | +/- 3 µm | +/- 2 µm |
| Flatness [2] | +/- 3 µm | +/- 2 µm |
| Pitch [2] | +/- 12 arc-sec | |
| Yaw | +/- 12 arc-sec | |
| Roll | +/- 12 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
| Max Payload Capability With Axis Oriented Vertically | 40 kg | |
| Assembly Mass | 11 kg | |
| Model | AI-LM-100000-UII-WL | ||
| Stage | Linear Stage | ||
| Travel | 1000 mm (+/- 500 mm) | ||
| Dimensions (Length x Width x Height) | 1320 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 40 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 10 µm | +/- 5 µm | |
| Flatness [2] | +/- 10 µm | +/- 5 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 15 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 41 kg | ||
| Model | AI-LM-80000-UII-WL | ||
| Stage | Linear Stage | ||
| Travel | 800 mm (+/- 400 mm) | ||
| Dimensions (Length x Width x Height) | 1120 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 32 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 15 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 37 kg | ||
| Model | AI-LM-70000-UII-WL | ||
| Stage | Linear Stage | ||
| Travel | 700 mm (+/- 350 mm) | ||
| Dimensions (Length x Width x Height) | 1020 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 28 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 20 arc-sec | ||
| Yaw | 20 arc-sec | ||
| Roll | 12 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 35 kg | ||
| Model | AI-LM-60000-UII-WL | ||
| Stage | Linear Stage | ||
| Travel | 600 mm (+/- 300 mm) | ||
| Dimensions (Length x Width x Height) | 920 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 32 kg | ||
| Model | AI-LM-50000-UII-WL | ||
| Stage | Linear Stage | ||
| Travel | 500 mm (+/- 250 mm) | ||
| Dimensions (Length x Width x Height) | 820 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 20 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 6 µm | +/- 4 µm | |
| Flatness [2] | +/- 6 µm | +/- 4 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 31 kg | ||
| Model | AI-LM-40000-UII-WL | ||
| Stage | Linear Stage | ||
| Travel | 400 mm (+/- 200 mm) | ||
| Dimensions (Length x Width x Height) | 720 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 16 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 27 kg | ||
| Model | AI-LM-30000-UII-WL | ||
| Stage | Linear Stage | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 620 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 25 kg | ||
| Model | AI-LM-25000-UII-WL | ||
| Stage | Linear Stage | ||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 570 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 10 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 15 arc-sec | ||
| Yaw | 15 arc-sec | ||
| Roll | 8 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 24 kg | ||
| Model | AI-LM-20000-UII-WL | ||
| Stage | Linear Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 520 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 8 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4 µm | +/- 3 µm | |
| Flatness [2] | +/- 4 µm | +/- 3 µm | |
| Pitch | 15 arc-sec | ||
| Yaw | 15 arc-sec | ||
| Roll | 8 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 23 kg | ||
| Model | AI-LM-15000-UII-WL | ||
| Stage | Linear Stage | ||
| Travel | 150 mm (+/- 75 mm) | ||
| Dimensions (Length x Width x Height) | 470 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 6 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3 µm | +/- 2 µm | |
| Flatness [2] | +/- 3 µm | +/- 2 µm | |
| Pitch | 10 arc-sec | ||
| Yaw | 10 arc-sec | ||
| Roll | 6 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 22 kg | ||
| Model | AI-LM-10000-UII-WL | ||
| Stage | Linear Stage | ||
| Travel | 100 mm (+/- 50 mm) | ||
| Dimensions (Length x Width x Height) | 420 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3 µm | +/- 2 µm | |
| Flatness [2] | +/- 3 µm | +/- 2 µm | |
| Pitch | 10 arc-sec | ||
| Yaw | 10 arc-sec | ||
| Roll | 6 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 20 kg | ||
| Model | AI-LM-100000-UII-W | ||
| Stage | Linear Stage | ||
| Travel | 1000 mm (+/- 500 mm) | ||
| Dimensions (Length x Width x Height) | 1220 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 40 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 10 µm | +/- 5 µm | |
| Flatness [2] | +/- 10 µm | +/- 5 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 15 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 41 kg | ||
| Model | AI-LM-80000-UII-W | ||
| Stage | Linear Stage | ||
| Travel | 800 mm (+/- 400 mm) | ||
| Dimensions (Length x Width x Height) | 1020 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 32 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 15 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 37 kg | ||
| Model | AI-LM-70000-UII-W | ||
| Stage | Linear Stage | ||
| Travel | 700 mm (+/- 350 mm) | ||
| Dimensions (Length x Width x Height) | 920 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 28 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 20 arc-sec | ||
| Yaw | 20 arc-sec | ||
| Roll | 12 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 35 kg | ||
| Model | AI-LM-60000-UII-W | ||
| Stage | Linear Stage | ||
| Travel | 600 mm (+/- 300 mm) | ||
| Dimensions (Length x Width x Height) | 820 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 32 kg | ||
| Model | AI-LM-50000-UII-W | ||
| Stage | Linear Stage | ||
| Travel | 500 mm (+/- 250 mm) | ||
| Dimensions (Length x Width x Height) | 720 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 20 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 6 µm | +/- 4 µm | |
| Flatness [2] | +/- 6 µm | +/- 4 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 31 kg | ||
| Model | AI-LM-40000-UII-W | ||
| Stage | Linear Stage | ||
| Travel | 400 mm (+/- 200 mm) | ||
| Dimensions (Length x Width x Height) | 620 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 16 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 27 kg | ||
| Model | AI-LM-30000-UII-W | ||
| Stage | Linear Stage | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 520 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 25 kg | ||
| Model | AI-LM-25000-UII-W | ||
| Stage | Linear Stage | ||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 470 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 10 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 15 arc-sec | ||
| Yaw | 15 arc-sec | ||
| Roll | 8 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 24 kg | ||
| Model | AI-LM-20000-UII-W | ||
| Stage | Linear Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 420 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 8 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4 µm | +/- 3 µm | |
| Flatness [2] | +/- 4 µm | +/- 3 µm | |
| Pitch | 15 arc-sec | ||
| Yaw | 15 arc-sec | ||
| Roll | 8 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 23 kg | ||
| Model | AI-LM-15000-UII-W | ||
| Stage | Linear Stage | ||
| Travel | 150 mm (+/- 75 mm) | ||
| Dimensions (Length x Width x Height) | 370 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 6 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3 µm | +/- 2 µm | |
| Flatness [2] | +/- 3 µm | +/- 2 µm | |
| Pitch | 10 arc-sec | ||
| Yaw | 10 arc-sec | ||
| Roll | 6 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 22 kg | ||
| Model | AI-LM-10000-UII-W | ||
| Stage | Linear Stage | ||
| Travel | 100 mm (+/- 50 mm) | ||
| Dimensions (Length x Width x Height) | 320 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3 µm | +/- 2 µm | |
| Flatness [2] | +/- 3 µm | +/- 2 µm | |
| Pitch | 10 arc-sec | ||
| Yaw | 10 arc-sec | ||
| Roll | 6 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 20 kg | ||
| Model | AI-LM-100000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 1000 mm (+/- 500 mm) | ||
| Dimensions (Length x Width x Height) | 1180 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 40 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 10 µm | +/- 5 µm | |
| Flatness [2] | +/- 10 µm | +/- 5 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 15 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 11 kg | ||
| Model | AI-LM-90000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 900 mm (+/- 450 mm) | ||
| Dimensions (Length x Width x Height) | 1080 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 36 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 10 µm | +/- 5 µm | |
| Flatness [2] | +/- 10 µm | +/- 5 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 15 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 10 kg | ||
| Model | AI-LM-80000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 800 mm (+/- 400 mm) | ||
| Dimensions (Length x Width x Height) | 980 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 32 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 15 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 9 kg | ||
| Model | AI-LM-70000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 700 mm (+/- 350 mm) | ||
| Dimensions (Length x Width x Height) | 880 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 28 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 20 arc-sec | ||
| Yaw | 20 arc-sec | ||
| Roll | 12 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 8 kg | ||
| Model | AI-LM-60000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 600 mm (+/- 300 mm) | ||
| Dimensions (Length x Width x Height) | 780 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 7 kg | ||
| Model | AI-LM-50000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 500 mm (+/- 250 mm) | ||
| Dimensions (Length x Width x Height) | 680 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 20 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 6 µm | +/- 4 µm | |
| Flatness [2] | +/- 6 µm | +/- 4 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 6 kg | ||
| Model | AI-LM-40000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 400 mm (+/- 200 mm) | ||
| Dimensions (Length x Width x Height) | 580 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 16 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 5 kg | ||
| Model | AI-LM-30000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 480 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 4 kg | ||
| Model | AI-LM-25000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 430 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 10 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 15 arc-sec | ||
| Yaw | 15 arc-sec | ||
| Roll | 8 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 3.4 kg | ||
| Model | AI-LM-20000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 380 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 8 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 4 µm | +/- 3 µm | |
| Flatness [2] | +/- 4 µm | +/- 3 µm | |
| Pitch | 15 arc-sec | ||
| Yaw | 15 arc-sec | ||
| Roll | 8 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 2.9 kg | ||
| Model | AI-LM-15000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 150 mm (+/- 75 mm) | ||
| Dimensions (Length x Width x Height) | 330 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 6 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 3 µm | +/- 2 µm | |
| Flatness [2] | +/- 3 µm | +/- 2 µm | |
| Pitch | 10 arc-sec | ||
| Yaw | 10 arc-sec | ||
| Roll | 6 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 2.5 kg | ||
| Model | AI-LM-10000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 100 mm (+/- 50 mm) | ||
| Dimensions (Length x Width x Height) | 280 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 3 µm | +/- 2 µm | |
| Flatness [2] | +/- 3 µm | +/- 2 µm | |
| Pitch | 10 arc-sec | ||
| Yaw | 10 arc-sec | ||
| Roll | 6 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 2.1 kg | ||
| Model | AI-LM-100000-UII-S | ||
| Stage | Linear Stage | ||
| Travel | 1000 mm (+/- 500 mm) | ||
| Dimensions (Length x Width x Height) | 1220 mm x 208 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 40 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 10 µm | +/- 5 µm | |
| Flatness [2] | +/- 10 µm | +/- 5 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 15 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 23.5 kg | ||
| Model | AI-LM-80000-UII-S | ||
| Stage | Linear Stage | ||
| Travel | 800 mm (+/- 400 mm) | ||
| Dimensions (Length x Width x Height) | 1020 mm x 208 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 32 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 15 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 20 kg | ||
| Model | AI-LM-70000-UII-S | ||
| Stage | Linear Stage | ||
| Travel | 700 mm (+/- 350 mm) | ||
| Dimensions (Length x Width x Height) | 920 mm x 208 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 28 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 20 arc-sec | ||
| Yaw | 20 arc-sec | ||
| Roll | 12 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 18.5 kg | ||
| Model | AI-LM-60000-UII-S | ||
| Stage | Linear Stage | ||
| Travel | 600 mm (+/- 300 mm) | ||
| Dimensions (Length x Width x Height) | 820 mm x 208 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 16.5 kg | ||
| Model | AI-LM-50000-UII-S | ||
| Stage | Linear Stage | ||
| Travel | 500 mm (+/- 250 mm) | ||
| Dimensions (Length x Width x Height) | 720 mm x 208 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 20 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 6 µm | +/- 4 µm | |
| Flatness [2] | +/- 6 µm | +/- 4 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 15 kg | ||
| Model | AI-LM-40000-UII-S | ||
| Stage | Linear Stage | ||
| Travel | 400 mm (+/- 200 mm) | ||
| Dimensions (Length x Width x Height) | 620 mm x 208 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 16 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 13 kg | ||
| Model | AI-LM-30000-UII-S | ||
| Stage | Linear Stage | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 520 mm x 208 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 12 kg | ||
| Model | AI-LM-25000-UII-S | ||
| Stage | Linear Stage | ||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 470 mm x 208 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10^-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 10 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 15 arc-sec | ||
| Yaw | 15 arc-sec | ||
| Roll | 8 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 11 kg | ||
| Model | AI-LM-20000-UII-S | ||
| Stage | Linear Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 420 mm x 208 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 8 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4 µm | +/- 3 µm | |
| Flatness [2] | +/- 4 µm | +/- 3 µm | |
| Pitch | 15 arc-sec | ||
| Yaw | 15 arc-sec | ||
| Roll | 8 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 10 kg | ||
| Model | AI-LM-15000-UII-S | ||
| Stage | Linear Stage | ||
| Travel | 150 mm (+/- 75 mm) | ||
| Dimensions (Length x Width x Height) | 370 mm x 208 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 6 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3 µm | +/- 2 µm | |
| Flatness [2] | +/- 3 µm | +/- 2 µm | |
| Pitch | 10 arc-sec | ||
| Yaw | 10 arc-sec | ||
| Roll | 6 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 9 kg | ||
| Model | AI-LM-10000-UII-S | ||
| Stage | Linear Stage | ||
| Travel | 100 mm (+/- 50 mm) | ||
| Dimensions (Length x Width x Height) | 320 mm x 208 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3 µm | +/- 2 µm | |
| Flatness [2] | +/- 3 µm | +/- 2 µm | |
| Pitch | 10 arc-sec | ||
| Yaw | 10 arc-sec | ||
| Roll | 6 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 8 kg | ||
| Model | AI-LM-70000-UII | ||
| Stage | Linear Stage | ||
| Travel | 700 mm (+/- 350 mm) | ||
| Dimensions (Length x Width x Height) | 920 mm x 258 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 28 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness In Y | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch [2] | +/- 10 arc-sec | ||
| Yaw | +/- 10 arc-sec | ||
| Roll | +/- 6 arc-sec | ||
| Max Velocity [3] | 5.5 m/s | ||
| Max Peak Acceleration [3] | 10.0 G | ||
| Max Payload Capability | 70 kg | ||
| Assembly Mass | 23 kg | ||
| Model | AI-LM-60000-UII | ||
| Stage | Linear Stage | ||
| Travel | 600 mm (+/- 300 mm) | ||
| Dimensions (Length x Width x Height) | 820 mm x 258 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10^-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness In Y | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch [2] | +/- 9 arc-sec | ||
| Yaw | +/- 9 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 5 m/s | ||
| Max Peak Acceleration [3] | 10.0 G | ||
| Max Payload Capability | 70 kg | ||
| Assembly Mass | 21 kg | ||
| Model | AI-LM-50000-UII | ||
| Stage | Linear Stage | ||
| Travel | 500 mm (+/- 250 mm) | ||
| Dimensions (Length x Width x Height) | 720 mm x 258 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 20 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness In Y | +/- 6 µm | +/- 4 µm | |
| Flatness [2] | +/- 6 µm | +/- 4 µm | |
| Pitch [2] | +/- 9 arc-sec | ||
| Yaw | +/- 9 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 4.5 m/s | ||
| Max Peak Acceleration [3] | 10.0 G | ||
| Max Payload Capability | 70 kg | ||
| Assembly Mass | 19 kg | ||
| Model | AI-LM-40000-UII | ||
| Stage | Linear Stage | ||
| Travel | 400 mm (+/- 200 mm) | ||
| Dimensions (Length x Width x Height) | 620 mm x 258 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 16 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness In Y | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch [2] | +/- 9 arc-sec | ||
| Yaw | +/- 9 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 4 m/s | ||
| Max Peak Acceleration [3] | 10.0 G | ||
| Max Payload Capability | 70 kg | ||
| Assembly Mass | 17 kg | ||
| Model | AI-LM-30000-UII | ||
| Stage | Linear Stage | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 520 mm x 258 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness In Y | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch [2] | +/- 9 arc-sec | ||
| Yaw | +/- 9 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 3.5 m/s | ||
| Max Peak Acceleration [3] | 10.0 G | ||
| Max Payload Capability | 70 kg | ||
| Assembly Mass | 15 kg | ||
| Model | AI-LM-25000-UII | ||
| Stage | Linear Stage | ||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 470 mm x 258 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 10 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness In Y | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch [2] | +/- 7.5 arc-sec | ||
| Yaw | +/- 7.5 arc-sec | ||
| Roll | +/- 4 arc-sec | ||
| Max Velocity [3] | 3.5 m/s | ||
| Max Peak Acceleration [3] | 10.0 G | ||
| Max Payload Capability | 70 kg | ||
| Assembly Mass | 14 kg | ||
| Model | AI-LM-20000-UII | ||
| Stage | Linear Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 420 mm x 258 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings |
||
| Cables | High Flex, 10M Cycle, 3m Length |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 8 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness In Y | +/- 4 µm | +/- 3 µm | |
| Flatness [2] | +/- 4 µm | +/- 3 µm | |
| Pitch [2] | +/- 7.5 arc-sec | ||
| Yaw | +/- 7.5 arc-sec | ||
| Roll | +/- 4 arc-sec | ||
| Max Velocity [3] | 3 m/s | ||
| Max Peak Acceleration [3] | 10.0 G | ||
| Max Payload Capability | 70 kg | ||
| Assembly Mass | 13 kg | ||
| Model | AI-LM-15000-UII | ||
| Stage | Linear Stage | ||
| Travel | 150 mm (+/- 75 mm) | ||
| Dimensions (Length x Width x Height) | 370 mm x 258 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 6 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness In Y | +/- 3 µm | +/- 2 µm | |
| Flatness [2] | +/- 3 µm | +/- 2 µm | |
| Pitch [2] | +/- 5 arc-sec | ||
| Yaw | +/- 5 arc-sec | ||
| Roll | +/- 3 arc-sec | ||
| Max Velocity [3] | 2.5 m/s | ||
| Max Peak Acceleration [3] | 10.0 G | ||
| Max Payload Capability | 70 kg | ||
| Assembly Mass | 12 kg | ||
| Model | AI-LM-10000-UII | ||
| Stage | Linear Stage | ||
| Travel | 100 mm (+/- 50 mm) | ||
| Dimensions (Length x Width x Height) | 320 mm x 258 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness In Y | +/- 3 µm | +/- 2 µm | |
| Flatness [2] | +/- 3 µm | +/- 2 µm | |
| Pitch [2] | +/- 5 arc-sec | ||
| Yaw | +/- 5 arc-sec | ||
| Roll | +/- 3 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Peak Acceleration [3] | 10.0 G | ||
| Max Payload Capability | 70 kg | ||
| Assembly Mass | 11 kg | ||
翻译由我们中国区合作伙伴Aunion Tech Co., Ltd（上海昊量光电设备有限公司）家提供！
