ModelAI-LM-200000-UII-XB
StageLinear Stage
Travel2000 mm (+/- 1000 mm)
Dimensions (Length x Width x Height)2366 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy+/- 200 µm+/- 10 µm+/- 5 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 50 µm +/- 25 µm +/- 10 µm
Flatness [2] +/- 200 µm +/- 50 µm +/- 15 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-LM-150000-UII-XB
StageLinear Stage
Travel1500 mm (+/- 750 mm)
Dimensions (Length x Width x Height)1866 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy+/-75 µm +/-10 µm +/- 5 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness+/- 40 µm +/- 25 µm +/- 10 µm
Flatness [2]+/- 175 µm +/- 35 µm +/- 15 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-LM-100000-UII-XB
StageLinear Stage
Travel1000 mm (+/- 500 mm)
Dimensions (Length x Width x Height)1366 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy +/- 40 µm +/-10 µm +/- 5 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 30 µm +/- 20 µm+/- 10 µm
Flatness [2] +/- 150 µm +/- 20 µm+/- 15 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-LM-80000-UII-XB
StageLinear Stage
Travel800 mm (+/- 400 mm)
Dimensions (Length x Width x Height)1166 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy +/- 32 µm +/- 5 µm +/- 3 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 26 µm+/- 18 µm+/- 10 µm
Flatness [2] +/- 100 µm+/- 18 µm+/- 12 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-LM-70000-UII-XB
StageLinear Stage
Travel700 mm (+/- 350 mm)
Dimensions (Length x Width x Height)1066 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy +/- 28 µm +/- 5 µm +/- 3 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 24 µm+/- 18 µm+/- 10 µm
Flatness [2] +/- 75 µm+/- 18 µm+/- 12 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-LM-60000-UII-XB
StageLinear Stage
Travel600 mm (+/- 300 mm)
Dimensions (Length x Width x Height)966 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy +/- 24 µm +/- 5 µm +/- 2 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 20 µm+/- 15 µm+/- 10 µm
Flatness [2] +/- 50 µm+/- 18 µm+/- 12 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-LM-50000-UII-XB
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)866 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy +/- 20 µm +/- 5 µm +/- 2 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 20 µm +/- 15 µm +/- 10 µm
Flatness [2] +/- 40 µm +/- 15 µm +/- 10 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-LM-40000-UII-XB
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)766 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy +/- 16 µm +/- 5 µm +/- 2 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 18 µm +/- 13 µm +/- 10 µm
Flatness [2] +/- 30 µm +/- 15 µm +/- 10 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-XBS-55000-UII
StageLinear Stage
Travel550 mm (+/- 275 mm)
Dimensions (Length x Width x Height)913 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)958 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 24 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass40 kg
ModelAI-XBS-50000-UII
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)863 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)908 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 24 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass38 kg
ModelAI-XBS-45000-UII
StageLinear Stage
Travel450 mm (+/- 225 mm)
Dimensions (Length x Width x Height)813 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)858 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 24 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass36 kg
ModelAI-XBS-40000-UII
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)763 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)808 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 20 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass34 kg
ModelAI-XBS-35000-UII
StageLinear Stage
Travel350 mm (+/- 175 mm)
Dimensions (Length x Width x Height)713 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)758 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 16 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass32 kg
ModelAI-XBS-30000-UII
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)663 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)708 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 12 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass29 kg
ModelAI-XBS-25000-UII
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)613 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)658 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 10 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass28 kg
ModelAI-XBS-20000-UII
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)563 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)608 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 8 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch [2] +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass27 kg
ModelAI-XBS-15000-UII
StageLinear Stage
Travel150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)513 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)558 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 6 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch [2] +/- 12 arc-sec
Yaw +/- 12 arc-sec
Roll +/- 12 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass25 kg
ModelAI-XBS-10000-UII
StageLinear Stage
Travel100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)463 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)508 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 5 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch [2] +/- 12 arc-sec
Yaw +/- 12 arc-sec
Roll +/- 12 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass24 kg
ModelAI-SBS-50000-UII
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)793 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)815 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)865 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 24 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass15.5 kg
ModelAI-SBS-45000-UII
StageLinear Stage
Travel450 mm (+/- 225 mm)
Dimensions (Length x Width x Height)743 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)765 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)815 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 24 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass15 kg
ModelAI-SBS-40000-UII
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)693 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)715 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)765 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 20 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass14.5 kg
ModelAI-SBS-35000-UII
StageLinear Stage
Travel350 mm (+/- 175 mm)
Dimensions (Length x Width x Height)643 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)665 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)715 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 16 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass13.5 kg
ModelAI-SBS-30000-UII
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)593 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)615 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)665 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 12 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass13 kg
ModelAI-SBS-25000-UII
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)543 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)565 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)615 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 10 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass12.5 kg
ModelAI-SBS-20000-UII
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)493 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)515 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)565 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 8 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch [2] +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass12 kg
ModelAI-SBS-15000-UII
StageLinear Stage
Travel150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)443 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)465 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)515 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 6 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch [2] +/- 12 arc-sec
Yaw +/- 12 arc-sec
Roll +/- 12 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass11.5 kg
ModelAI-SBS-10000-UII
StageLinear Stage
Travel100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)393 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)415 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)465 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 5 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch [2] +/- 12 arc-sec
Yaw +/- 12 arc-sec
Roll +/- 12 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass11 kg
ModelAI-SBS-5000-UII
StageLinear Stage
Travel50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)343 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)365 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)415 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 5 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch [2] +/- 12 arc-sec
Yaw +/- 12 arc-sec
Roll +/- 12 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass11 kg
ModelAI-LM-100000-UII-WL
StageLinear Stage
Travel1000 mm (+/- 500 mm)
Dimensions (Length x Width x Height)1320 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 40 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 10 µm +/- 5 µm
Flatness [2] +/- 10 µm +/- 5 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass41 kg
ModelAI-LM-80000-UII-WL
StageLinear Stage
Travel800 mm (+/- 400 mm)
Dimensions (Length x Width x Height)1120 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 32 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass37 kg
ModelAI-LM-70000-UII-WL
StageLinear Stage
Travel700 mm (+/- 350 mm)
Dimensions (Length x Width x Height)1020 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 28 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch20 arc-sec
Yaw20 arc-sec
Roll12 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass35 kg
ModelAI-LM-60000-UII-WL
StageLinear Stage
Travel600 mm (+/- 300 mm)
Dimensions (Length x Width x Height)920 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 24 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass32 kg
ModelAI-LM-50000-UII-WL
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)820 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 20 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass31 kg
ModelAI-LM-40000-UII-WL
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)720 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 16 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass27 kg
ModelAI-LM-30000-UII-WL
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)620 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass25 kg
ModelAI-LM-25000-UII-WL
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)570 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 10 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass24 kg
ModelAI-LM-20000-UII-WL
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)520 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 8 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass23 kg
ModelAI-LM-15000-UII-WL
StageLinear Stage
Travel150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)470 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 6 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll6 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass22 kg
ModelAI-LM-10000-UII-WL
StageLinear Stage
Travel100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)420 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll6 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass20 kg
ModelAI-LM-100000-UII-W
StageLinear Stage
Travel1000 mm (+/- 500 mm)
Dimensions
(Length x Width x Height)
1220 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 40 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 10 µm +/- 5 µm
Flatness [2] +/- 10 µm +/- 5 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass41 kg
ModelAI-LM-80000-UII-W
StageLinear Stage
Travel800 mm (+/- 400 mm)
Dimensions
(Length x Width x Height)
1020 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 32 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass37 kg
ModelAI-LM-70000-UII-W
StageLinear Stage
Travel700 mm (+/- 350 mm)
Dimensions
(Length x Width x Height)
920 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 28 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch20 arc-sec
Yaw20 arc-sec
Roll12 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass35 kg
ModelAI-LM-60000-UII-W
StageLinear Stage
Travel600 mm (+/- 300 mm)
Dimensions
(Length x Width x Height)
820 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 24 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass32 kg
ModelAI-LM-50000-UII-W
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions
(Length x Width x Height)
720 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 20 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass31 kg
ModelAI-LM-40000-UII-W
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
620 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 16 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass27 kg
ModelAI-LM-30000-UII-W
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
520 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass25 kg
ModelAI-LM-25000-UII-W
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
470 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 10 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass24 kg
ModelAI-LM-20000-UII-W
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
420 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass23 kg
ModelAI-LM-15000-UII-W
StageLinear Stage
Travel150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
370 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 6 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll6 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass22 kg
ModelAI-LM-10000-UII-W
StageLinear Stage
Travel100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
320 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll6 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass20 kg
ModelAI-LM-100000-UII-SN
StageLinear Stage
Travel1000 mm (+/- 500 mm)
Dimensions
(Length x Width x Height)
1180 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 40 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 10 µm +/- 5 µm
Flatness [2] +/- 10 µm +/- 5 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass11 kg
ModelAI-LM-90000-UII-SN
StageLinear Stage
Travel900 mm (+/- 450 mm)
Dimensions
(Length x Width x Height)
1080 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 36 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 10 µm +/- 5 µm
Flatness [2] +/- 10 µm +/- 5 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass10 kg
ModelAI-LM-80000-UII-SN
StageLinear Stage
Travel800 mm (+/- 400 mm)
Dimensions
(Length x Width x Height)
980 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 32 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass9 kg
ModelAI-LM-70000-UII-SN
StageLinear Stage
Travel700 mm (+/- 350 mm)
Dimensions
(Length x Width x Height)
880 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 28 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch20 arc-sec
Yaw20 arc-sec
Roll12 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass8 kg
ModelAI-LM-60000-UII-SN
StageLinear Stage
Travel600 mm (+/- 300 mm)
Dimensions
(Length x Width x Height)
780 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 24 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass7 kg
ModelAI-LM-50000-UII-SN
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions
(Length x Width x Height)
680 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 20 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass6 kg
ModelAI-LM-40000-UII-SN
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
580 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 16 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass5 kg
ModelAI-LM-30000-UII-SN
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
480 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass4 kg
ModelAI-LM-25000-UII-SN
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
430 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 10 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass3.4 kg
ModelAI-LM-20000-UII-SN
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
380 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass2.9 kg
ModelAI-LM-15000-UII-SN
StageLinear Stage
Travel150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
330 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 6 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll6 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass2.5 kg
ModelAI-LM-10000-UII-SN
StageLinear Stage
Travel100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
280 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll6 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass2.1 kg
ModelAI-LM-100000-UII-S
StageLinear Stage
Travel1000 mm (+/- 500 mm)
Dimensions
(Length x Width x Height)
1220 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 40 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 10 µm +/- 5 µm
Flatness [2] +/- 10 µm +/- 5 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass23.5 kg
ModelAI-LM-80000-UII-S
StageLinear Stage
Travel800 mm (+/- 400 mm)
Dimensions
(Length x Width x Height)
1020 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 32 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass20 kg
ModelAI-LM-70000-UII-S
StageLinear Stage
Travel700 mm (+/- 350 mm)
Dimensions
(Length x Width x Height)
920 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 28 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch20 arc-sec
Yaw20 arc-sec
Roll12 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass18.5 kg
ModelAI-LM-60000-UII-S
StageLinear Stage
Travel600 mm (+/- 300 mm)
Dimensions
(Length x Width x Height)
820 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 24 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass16.5 kg
ModelAI-LM-50000-UII-S
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions
(Length x Width x Height)
720 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 20 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass15 kg
ModelAI-LM-40000-UII-S
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
620 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 16 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass13 kg
ModelAI-LM-30000-UII-S
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
520 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass12 kg
ModelAI-LM-25000-UII-S
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
470 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 10 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass11 kg
ModelAI-LM-20000-UII-S
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
420 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass10 kg
ModelAI-LM-15000-UII-S
StageLinear Stage
Travel150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
370 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 6 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll6 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass9 kg
ModelAI-LM-10000-UII-S
StageLinear Stage
Travel100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
320 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll6 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass8 kg
ModelAI-LM-70000-UII
StageLinear Stage
Travel700 mm (+/- 350 mm)
Dimensions
(Length x Width x Height)
920 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 28 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch [2] +/- 10 arc-sec
Yaw +/- 10 arc-sec
Roll +/- 6 arc-sec
Max Velocity
[3]
5.5 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass23 kg
ModelAI-LM-60000-UII
StageLinear Stage
Travel600 mm (+/- 300 mm)
Dimensions
(Length x Width x Height)
820 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 24 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch [2] +/- 9 arc-sec
Yaw +/- 9 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
5 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass21 kg
ModelAI-LM-50000-UII
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions
(Length x Width x Height)
720 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 20 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch [2] +/- 9 arc-sec
Yaw +/- 9 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
4.5 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass19 kg
ModelAI-LM-40000-UII
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
620 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 16 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 9 arc-sec
Yaw +/- 9 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
4 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass17 kg
ModelAI-LM-30000-UII
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
520 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 9 arc-sec
Yaw +/- 9 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
3.5 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass15 kg
ModelAI-LM-25000-UII
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
470 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 10 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 7.5 arc-sec
Yaw +/- 7.5 arc-sec
Roll +/- 4 arc-sec
Max Velocity
[3]
3.5 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass14 kg
ModelAI-LM-20000-UII
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
420 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball
Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch [2] +/- 7.5 arc-sec
Yaw +/- 7.5 arc-sec
Roll +/- 4 arc-sec
Max Velocity
[3]
3 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass13 kg
ModelAI-LM-15000-UII
StageLinear Stage
Travel150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
370 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 6 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch [2] +/- 5 arc-sec
Yaw +/- 5 arc-sec
Roll +/- 3 arc-sec
Max Velocity
[3]
2.5 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass12 kg
ModelAI-LM-10000-UII
StageLinear Stage
Travel100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
320 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch [2] +/- 5 arc-sec
Yaw +/- 5 arc-sec
Roll +/- 3 arc-sec
Max Velocity
[3]
2 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass11 kg