| Model | AI-TM-80RA-UII | ||
| Stage | Rotary Stage | ||
| Travel | 360 deg continuous | ||
| Diameter | 80 mm | ||
| Dimensions (Length x Width x Height) | 86 mm x 80 mm x 84 mm | ||
| Aperture / Thru | 10.75 mm | ||
| Drive | Torque Motor | ||
| Feedback | Non-Contact Optical Rotary Encoder | ||
| Bearings | Angular Contact (Duplex Pair) | ||
| Cables | High Flex, 10M Cycle, 1.5m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [2] | (STD) | ULTRA | NANO |
| Bidirectional Angular Repeatability | +/- 1.5 arc-sec | +/- 0.5 arc-sec | +/- 0.3 arc-sec |
| Resolution | 0.32 - 32.0 arc-sec (Digital) | ||
| Axial Runout | 25 µm | ||
| Radial Runout | 25 µm | ||
| Wobble | 50 arc-sec | ||
| Max Velocity [3] | 720 deg/s | ||
| Max Acceleration [3] | > 3600 deg/s² | ||
| Assembly Mass | 1 kg | ||
| Max Load (Axial) | 2.5 kg | ||
| Max Load (Radial) | 2.5 kg | ||
| Model | AI-LM-420RA | ||
| Stage | Rotary Stage | ||
| Travel | +/- 5 deg | ||
| Diameter | 420 mm | ||
| Dimensions (Length x Width x Height) | 490 mm x 420 mm x 40 mm | ||
| Thru | 330 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Rotary Encoder | ||
| Bearings | Angular Contact (Duplex Pair) | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Angular Accuracy | N/A | +/- 1.0 arc-sec | |
| Bidirectional Angular Repeatability | +/- 0.4 arc-sec | +/- 0.3 arc-sec | +/- 0.2 arc-sec |
| Resolution [2] | Standard: 0.005 arc-sec (Analog) Optional: 0.002 - 5.0 arc-sec (Digital) |
||
| Axial Runout | +/- 1.5 µm | N/A | |
| Radial Runout | +/- 1.5 µm | N/A | |
| Wobble | +/- 2.5 arc-sec | N/A | |
| Max Velocity [3] | 900 deg/s | ||
| Max Acceleration [3] | 800000 deg/s² | ||
| Max Load (Axial) | 40 kg | ||
| Max Load (Radial) | 20 kg | ||
| Assembly Mass | 8.7 kg | ||
| Model | AI-LM-200RA | ||
| Stage | Rotary Stage | ||
| Travel | +/- 7.5 deg | ||
| Diameter | 200 mm | ||
| Dimensions (Length x Width x Height) | 270 mm x 200 mm x 36 mm | ||
| Thru | 100 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Rotary Encoder | ||
| Bearings | Angular Contact (Duplex Pair) | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Angular Accuracy | N/A | +/- 1.0 arc-sec | |
| Bidirectional Angular Repeatability | +/- 0.5 arc-sec | +/- 0.4 arc-sec | +/- 0.2 arc-sec |
| Resolution [2] | Standard: 0.01 arc-sec (Analog) Optional: 0.003 - 10.0 arc-sec (Digital) |
||
| Axial Runout | +/- 2.0 µm | N/A | |
| Radial Runout | +/- 2.0 µm | N/A | |
| Wobble | +/- 4.0 arc-sec | N/A | |
| Max Velocity [3] | 1500 deg/s | ||
| Max Acceleration [3] | 2000000 deg/s² | ||
| Max Load (Axial) | 40 kg | ||
| Max Load (Radial) | 20 kg | ||
| Assembly Mass | 4 kg | ||
| Model | AI-TM-312RA | ||
| Stage | Rotary Stage | ||
| Travel | 360 deg continuous | ||
| Diameter | 312 mm | ||
| Dimensions (Length x Width x Height) | 332 mm x 312 mm x 80 mm | ||
| Aperture / Thru | 75 mm | ||
| Drive | Torque Motor | ||
| Feedback | Non-Contact Optical Rotary Encoder | ||
| Sensors | Integrated Home | ||
| Bearings | Angular Contact (Duplex Pair) | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Angular Accuracy | N/A | +/- 3.0 arc-sec | |
| Bidirectional Angular Repeatability | +/- 0.5 arc-sec | +/- 0.4 arc-sec | +/- 0.2 arc-sec |
| Axial Runout | +/- 5.0 µm | +/- 2.5 µm | +/- 1.5 µm |
| Radial Runout | +/- 5.0 µm | +/- 2.5 µm | +/- 1.5 µm |
| Wobble | +/- 7.5 arc-sec | +/- 5.0 arc-sec | +/- 2.5 arc-sec |
| Resolution [2] | Standard: 0.007 arc-sec (Analog) Optional: 0.002 - 7.0 arc-sec (Digital) |
||
| Max Velocity [3] | 2400 deg/s | ||
| Max Acceleration [3] | 30000 deg/s² | ||
| Max Load (Axial) | 50 kg | ||
| Max Load (Radial) | 33 kg | ||
| Assembly Mass | 19 kg | ||
| Model | AI-TM-240RA | ||
| Stage | Rotary Stage | ||
| Travel | 360 deg continuous | ||
| Diameter | 240 mm | ||
| Dimensions (Length x Width x Height) | 260 mm x 240 mm x 45 mm | ||
| Aperture / Thru | 100 mm | ||
| Drive | Torque Motor | ||
| Feedback | Non-Contact Optical Rotary Encoder | ||
| Sensors | Integrated Home | ||
| Bearings | Angular Contact (Duplex Pair) | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Angular Accuracy | N/A | +/- 3.0 arc-sec | |
| Bidirectional Angular Repeatability | +/- 0.5 arc-sec | +/- 0.4 arc-sec | +/- 0.2 arc-sec |
| Axial Runout | +/- 5.0 µm | +/- 2.5 µm | +/- 1.5 µm |
| Radial Runout | +/- 5.0 µm | +/- 2.5 µm | +/- 1.5 µm |
| Wobble | +/- 7.5 arc-sec | +/- 5.0 arc-sec | +/- 2.5 arc-sec |
| Resolution [2] | Standard: 0.009 arc-sec (Analog) Optional: 0.003 - 9.0 arc-sec (Digital) |
||
| Max Velocity [3] | 3600 deg/s | ||
| Max Acceleration [3] | 70000 deg/s² | ||
| Max Load (Axial) | 8 kg | ||
| Max Load (Radial) | 8 kg | ||
| Assembly Mass | 10 kg | ||
| Model | AI-TM-208RA | ||
| Stage | Rotary Stage | ||
| Travel | 360 deg continuous | ||
| Diameter | 208 mm | ||
| Dimensions (Length x Width x Height) | 228 mm x 208 mm x 110 mm | ||
| Aperture / Thru | 75 mm | ||
| Drive | Torque Motor | ||
| Feedback | Non-Contact Optical Rotary Encoder | ||
| Sensors | Integrated Home | ||
| Bearings | Angular Contact (Duplex Pair) | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Angular Accuracy | N/A | +/- 3.0 arc-sec | |
| Bidirectional Angular Repeatability | +/- 0.5 arc-sec | +/- 0.4 arc-sec | +/- 0.3 arc-sec |
| Axial Runout | +/- 5.0 µm | +/- 2.5 µm | +/- 1.5 µm |
| Radial Runout | +/- 5.0 µm | +/- 2.5 µm | +/- 1.5 µm |
| Wobble | +/- 8.0 arc-sec | +/- 5.0 arc-sec | +/- 2.5 arc-sec |
| Resolution [2] | Standard: 0.01 arc-sec (Analog) Optional: 0.003 - 10.0 arc-sec (Digital) |
||
| Max Velocity [3] | 5500 deg/s | ||
| Max Acceleration [3] | 170000 deg/s² | ||
| Max Load (Axial) | 40 kg | ||
| Max Load (Radial) | 27 kg | ||
| Assembly Mass | 11 kg | ||
| Model | AI-TM-154RA | ||
| Stage | Rotary Stage | ||
| Travel | 360 deg continuous | ||
| Diameter | 154 mm | ||
| Dimensions (Length x Width x Height) | 173 mm x 154 mm x 84 mm | ||
| Aperture / Thru | 72 mm | ||
| Drive | Torque Motor | ||
| Feedback | Non-Contact Optical Rotary Encoder | ||
| Sensors | Integrated Home | ||
| Bearings | Angular Contact (Duplex Pair) | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Angular Accuracy | N/A | +/- 3.0 arc-sec | |
| Bidirectional Angular Repeatability | +/- 0.5 arc-sec | ||
| Axial Runout | +/- 5.0 µm | +/- 3.5 µm | +/- 2.0 µm |
| Radial Runout | +/- 5.0 µm | +/- 3.5 µm | +/- 2.0 µm |
| Wobble | +/- 10.0 arc-sec | +/- 5.0 arc-sec | +/- 3.0 arc-sec |
| Resolution [2] | Standard: 0.013 arc-sec (Analog) Optional: 0.004 - 14.0 arc-sec (Digital) |
||
| Max Velocity [3] | 5500 deg/s | ||
| Max Acceleration [3] | 160000 deg/s² | ||
| Max Load (Axial) | 20 kg | ||
| Max Load (Radial) | 20 kg | ||
| Assembly Mass | 4.4 kg | ||
| Model | AI-TM-104RA | ||
| Stage | Rotary Stage | ||
| Travel | 360 deg continuous | ||
| Diameter | 104 mm | ||
| Dimensions (Length x Width x Height) | 123 mm x 104 mm x 80 mm | ||
| Aperture / Thru | 32 mm | ||
| Drive | Torque Motor | ||
| Feedback | Non-Contact Optical Rotary Encoder | ||
| Sensors | Integrated Home | ||
| Bearings | Angular Contact (Duplex Pair) | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Angular Accuracy | N/A | +/- 3.0 arc-sec | |
| Bidirectional Angular Repeatability | +/- 0.5 arc-sec | +/- 0.5 arc-sec | +/- 0.3 arc-sec |
| Axial Runout | +/- 5.0 µm | +/- 3.5 µm | +/- 2.0 µm |
| Radial Runout | +/- 5.0 µm | +/- 3.5 µm | +/- 2.0 µm |
| Wobble | +/- 10.0 arc-sec | +/- 5.0 arc-sec | +/- 3.0 arc-sec |
| Resolution [2] | Standard: 0.02 arc-sec (Analog) Optional: 0.05 - 21.0 arc-sec (Digital) |
||
| Max Velocity [3] | 10000 deg/s | ||
| Max Acceleration [3] | 500000 deg/s² | ||
| Max Load (Axial) | 10 kg | ||
| Max Load (Radial) | 10 kg | ||
| Assembly Mass | 2.7 kg | ||
| Model | AI-TM-125R-AB |
| Stage | Rotary Stage |
| Travel | 360 deg continuous |
| Diameter | 125 mm |
| Dimensions (Length x Width x Height) | 145 mm x 145 mm x 150 mm |
| Aperture / Thru | 19 mm |
| Drive | Torque Motor |
| Feedback | Non-Contact Optical Rotary Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications | |
| Axial Runout (Standard) | 0.5 µm |
| Radial Runout (Standard) | 0.5 µm |
| Axial Stiffness [7] | 263 N/µm |
| Radial Stiffness [7] | 87 N/µm |
| Tilt Stiffness [7] | 0.18 Nm/µrad |
| Resolution (Standard) [8] | Standard: 0.02 arc-sec (Analog) Optional: 0.021 - 21.0 arc-sec (Digital) |
| Max Velocity [6] | 1800 deg/s |
| Max Axial Load [7] | 37 kg |
| Max Radial Load [7] | 14 kg |
| Assembly Mass | 9.6 kg |
| Model | AI-TM-104R-AB |
| Stage | Rotary Stage |
| Travel | 360 deg continuous |
| Diameter | 104 mm |
| Dimensions (Length x Width x Height) | 123 mm x 104 mm x 94 mm |
| Aperture / Thru | 32 mm |
| Drive | Torque Motor |
| Feedback | Non-Contact Optical Rotary Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications | |
| Axial Runout | +/- 1 µm |
| Radial Runout | +/- 1 µm |
| Resolution [8] | Standard: 0.02 arc-sec (Analog) Optional: 0.021 - 21.0 arc-sec (Digital) |
| Max Velocity [7] | 1440 deg/s |
| Max Axial Load | 8 kg |
| Max Radial Load | 4 kg |
| Assembly Mass | 3.1 kg |
| Model | AI-TM-104R | ||
| Stage | Rotary Stage | ||
| Travel | 360 deg continuous | ||
| Diameter | 104 mm | ||
| Dimensions (Length x Width x Height) | 123 mm x 104 mm x 80 mm | ||
| Aperture / Thru | 32 mm | ||
| Drive | Torque Motor | ||
| Feedback | Non-Contact Optical Rotary Encoder | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Angular Accuracy | N/A | +/- 3.0 arc-sec | |
| Bidirectional Angular Repeatability | +/- 0.6 arc-sec | +/- 0.5 arc-sec | +/- 0.3 arc-sec |
| Resolution [2] | Standard: 0.02 arc-sec (Analog) Optional: 0.005 - 21.0 arc-sec (Digital) |
||
| Axial Runout | +/- 6.0 µm | +/- 4.5 µm | +/- 3.0 µm |
| Radial Runout | +/- 6.0 µm | +/- 4.5 µm | +/- 3.0 µm |
| Wobble | +/- 12.5 arc-sec | +/- 7.5 arc-sec | +/- 5.0 arc-sec |
| Max Velocity [3] | >8000 deg/s | ||
| Max Acceleration [3] | 400000 deg/s² | ||
| Max Load (Axial) | 12 kg | ||
| Max Load (Radial) | 12 kg | ||
| Assembly Mass | 2.7 kg | ||
| Model | AI-TM-80R | ||
| Stage | Rotary Stage | ||
| Travel | 360 deg continuous | ||
| Diameter | 80 mm | ||
| Dimensions (Length x Width x Height) | 96mm x 80 mm x 60 mm | ||
| Aperture / Thru | 6 mm | ||
| Drive | Torque Motor | ||
| Feedback | Non-Contact Optical Rotary Encoder | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Angular Accuracy | N/A | +/- 3.0 arc-sec | |
| Bidirectional Angular Repeatability | +/- 0.7 arc-sec | +/- 0.6 arc-sec | +/- 0.4 arc-sec |
| Resolution [2] | Standard: 0.027 arc-sec (Analog) Optional: 0.007 - 27.0 arc-sec (Digital) |
||
| Axial Runout | +/- 6.0 µm | +/- 5.0 µm | +/- 4.0 µm |
| Radial Runout | +/- 6.0 µm | +/- 5.0 µm | +/- 4.0 µm |
| Wobble | +/- 12.5 arc-sec | +/- 10.0 arc-sec | +/- 7.5 arc-sec |
| Max Velocity [3] | >6000 deg/s | ||
| Max Acceleration [3] | 200000 deg/s² | ||
| Max Load (Axial) | 2.5 kg | ||
| Max Load (Radial) | 2.5 kg | ||
| Assembly Mass | 1.1 kg | ||
| Model | AI-TM-56R | ||
| Stage | Rotary Stage | ||
| Travel | 360 deg continuous | ||
| Diameter | 56 mm | ||
| Dimensions (Length x Width x Height) | 72 mm x 56 mm x 62 mm | ||
| Aperture / Thru | 8 mm | ||
| Drive | Torque Motor | ||
| Feedback | Non-Contact Optical Rotary Encoder | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Angular Accuracy | N/A | +/- 3.0 arc-sec | |
| Bidirectional Angular Repeatability | +/- 0.7 arc-sec | +/- 0.6 arc-sec | +/- 0.4 arc-sec |
| Resolution [2] | Standard: 0.039 arc-sec (Analog) Optional: 0.01 - 40.0 arc-sec (Digital) |
||
| Axial Runout | +/- 7.5 µm | +/- 6.0 µm | +/- 5.0 µm |
| Radial Runout | +/- 7.5 µm | +/- 6.0 µm | +/- 5.0 µm |
| Wobble | +/- 12.5 arc-sec | +/- 10.0 arc-sec | +/- 7.5 arc-sec |
| Max Velocity [3] | >3000 deg/s | ||
| Max Acceleration [3] | 60000 deg/s² | ||
| Max Load (Axial) | 2.5 kg | ||
| Max Load (Radial) | 2.5 kg | ||
| Assembly Mass | 0.65 kg | ||
| Model | AI-TM-154RA + AI-TM-208RA-GMB-CB | |||||
| Stage | 2 Axis Rotary Gimbal | |||||
| Travel (Theta Z) | 360 degrees continuous (Theta Z) | |||||
| Travel (Theta Y) | +/- 100 degrees (Theta Y) Optional: up to +/- 172 deg |
|||||
| Dimensions (Length x Width x Height) | 571 mm x 230 mm x 362.5 mm | |||||
| Drive | Torque Motor | |||||
| Feedback | Non-Contact Optical Rotary Encoder | |||||
| Bearings | Angular Contact (Duplex Pair) | |||||
| Counterbalance | Counterweight Capability (Adjustable with Provided Weights) | |||||
| Cables | High Flex, 10M Cycle, 3m Length | |||||
| Structure | Anodized Aluminum 6061-T6 | |||||
| Environment | Ambient | |||||
| Operating Temperature | 0°C to 50°C | |||||
| Humidity | 10% to 80% Non-Condensing | |||||
| Axis | A (THETA Z) | B (THETA Y) | ||||
| Performance Specifications [2] | STD | ULTRA | NANO | STD | ULTRA | NANO |
| Angular Accuracy With Compensation | n/a | +/-3 arc-sec | n/a | +/-3 arc-sec | ||
| Bidirectional Angular Repeatability | +/- 0.5 arc-sec | +/- 0.4 arc-sec | ||||
| Resolution | 0.01 arc-sec (analog) | 0.01 arc-sec (analog) | ||||
| Axial Runout | 10 µm | 4 µm | 2 µm | 10 µm | 5 µm | 3 µm |
| Radial Runout | 10 µm | 4 µm | 2 µm | 10 µm | 5 µm | 3 µm |
| Axis Wobble | 16 arc-sec | 10 arc-sec | 8 arc-sec | 10 arc-sec | 7 arc-sec | 5 arc-sec |
| B Axis To A Mount Surface Distance | 60 mm +/- 0.5 mm Nominal (exact distance provided for each S/N at shipment) |
|||||
| Max Velocity [3] | 360 deg/s (~6.28 rad/s) | 360 deg/s (~6.28 rad/s) | ||||
| Max Acceleration [3] | ` | 2300 deg/s (~40 rad/s) | ||||
| Max Load (Axial) | 12 kg | 40 kg | ||||
| Max Load (Radial) | 12 kg | 40 kg | ||||
| Customer Specified Payload | 8 kg (+/- 4 kg or 12 kg maximum) | |||||
| Assembly Mass (With Counterweight) | 39 kg | |||||
| Model | AI-TM-104RA + AI-TM-208RA-GMB-CB | |||||
| Stage | 2 Axis Rotary Gimbal | |||||
| Travel (Theta Z) | 360 deg continuous (Theta Z) | |||||
| Travel (Theta Y) | +/- 100 degrees (Theta Y) Optional: up to +/- 172 deg |
|||||
| Dimensions (Length x Width x Height) | 571 mm x 230 mm x 362.5 mm | |||||
| Drive | Torque Motor | |||||
| Feedback | Non-Contact Optical Rotary Encoder | |||||
| Bearings | Angular Contact (Duplex Pair) | |||||
| Counterbalance | Counterweight Capability (Adjustable with Provided Weights) | |||||
| Cables | High Flex, 10M Cycle, 3m Length | |||||
| Structure | Anodized Aluminum 6061-T6 | |||||
| Environment | Ambient | |||||
| Operating Temperature | 0°C to 50°C | |||||
| Humidity | 10% to 80% Non-Condensing | |||||
| Axis | A (THETA Z) | B (THETA Y) | ||||
| Performance Specifications [2] | STD | ULTRA | NANO | STD | ULTRA | NANO |
| Angular Accuracy With Compensation | n/a | +/-3 arc-sec | n/a | +/-3 arc-sec | ||
| Bidirectional Angular Repeatability | +/- 0.5 arc-sec | +/- 0.4 arc-sec | ||||
| Resolution | 0.02 arc-sec (analog) | 0.01 arc-sec (analog) | ||||
| Axial Runout | 10 µm | 4 µm | 2 µm | 10 µm | 5 µm | 3 µm |
| Radial Runout | 10 µm | 4 µm | 2 µm | 10 µm | 5 µm | 3 µm |
| Axis Wobble | 12 arc-sec | 8 arc-sec | 6 arc-sec | 10 arc-sec | 7 arc-sec | 5 arc-sec |
| B Axis To A Mount Surface Distance | 60 mm +/- 0.5 mm Nominal (exact distance provided for each S/N at shipment) |
|||||
| Max Velocity [3] | 360 deg/s (~6.28 rad/s) | 360 deg/s (~6.28 rad/s) | ||||
| Max Acceleration [3] | 1600 deg/s (~28 rad/s) | 2300 deg/s (~40 rad/s) | ||||
| Max Load (Axial) | 12 kg | 40 kg | ||||
| Max Load (Radial) | 12 kg | 40 kg | ||||
| Customer Specified Payload | 8 kg (+/- 4 kg or 12 kg maximum) | |||||
| Assembly Mass (With Counterweight) | 39 kg | |||||
| Model | AI-HH-ST14-200XY-60Z-104R |
| Travel - XY | 200 mm (+/- 100 mm) |
| Travel - Z | 60 mm (+ 60 mm /- 0 mm) |
| Travel - Pitch & Roll | +/- 30 deg |
| Travel - Yaw | 360 deg continous |
| Dimensions (Length x Width x Height) | 292 mm x 275 mm x 400 mm |
| Stage | Hybrid Hexapod |
| Drives | XY, Pitch & Yaw: Stepper Motor Yaw: Torque Motor |
| Feedback | Standard: No Encoder Optional: Non-Contact Optical Linear Encoder, Rotary Encoder |
| Bearings | Crossed Roller Bearings |
| Counterbalance | Pneumatic Cylinder Optional: Magnetic Spring (Constant Force) |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications | (STD) |
| Linear Resolution with Encoder Option | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
| Pitch And Roll Resolution with Encoder Option | ~0.01 arc-sec |
| Yaw Resolution with Encoder Option | 0.02 arc-sec |
| Max Linear Velocity [2] | 20 mm/s |
| Max Angular Velocity (Pitch & Roll) [2] | 10 deg/s |
| Max Angular Velocity (Yaw) [2] | 540 deg/s |
| Max Payload [3] | 10 kg |
| Assembly Mass | 28 kg |
| Model | AI-6D-250XY-92Z |
| Stage | Hybrid Hexapod (6 DOF) |
| Travel - XY | 250mm (+/- 125mm) |
| Travel - Z | 92mm (+ 92mm/ - 0mm) |
| Travel - Pitch & Roll | +/- 20 deg |
| Travel - Yaw | 360 deg continuous |
| Dimensions (Length x Width x Height) | 435 mm x 435 mm x 707.5 mm |
| Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
| Bearings | Crossed Roller Bearings |
| Counterbalance | Pneumatic Cylinder Optional: Magnetic Spring (Constant Force) |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications | |
| Linear Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
| Pitch And Roll Resolution | ~0.02 arc-sec |
| Yaw Resolution | ~0.01 arc-sec |
| Max Linear Velocity [10] | 0.3 m/s |
| Max Angular Velocity (Pitch & Roll) [10] | 90 deg/s |
| Max Angular Velocity (Yaw) [10] | 180 deg/s |
| Assembly Mass | 130 kg |
| Max Payload [11] | 35 kg |
