ModelAI-TM-80RA-UII
StageRotary Stage
Travel360 deg continuous
Diameter80 mm
Dimensions (Length x Width x Height)86 mm x 80 mm x 84 mm
Aperture / Thru10.75 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 1.5m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [2](STD)ULTRANANO
Bidirectional Angular Repeatability +/- 1.5 arc-sec +/- 0.5 arc-sec +/- 0.3 arc-sec
Resolution0.32 - 32.0 arc-sec (Digital)
Axial Runout25 µm
Radial Runout25 µm
Wobble50 arc-sec
Max Velocity [3]720 deg/s
Max Acceleration [3]> 3600 deg/s²
Assembly Mass1 kg
Max Load (Axial)2.5 kg
Max Load (Radial)2.5 kg
ModelAI-LM-420RA
StageRotary Stage
Travel +/- 5 deg
Diameter420 mm
Dimensions (Length x Width x Height)490 mm x 420 mm x 40 mm
Thru330 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Rotary Encoder
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 1.0 arc-sec
Bidirectional Angular Repeatability +/- 0.4 arc-sec +/- 0.3 arc-sec +/- 0.2 arc-sec
Resolution [2]Standard: 0.005 arc-sec (Analog)
Optional: 0.002 - 5.0 arc-sec (Digital)
Axial Runout +/- 1.5 µmN/A
Radial Runout +/- 1.5 µmN/A
Wobble +/- 2.5 arc-secN/A
Max Velocity [3]900 deg/s
Max Acceleration [3]800000 deg/s²
Max Load (Axial)40 kg
Max Load (Radial)20 kg
Assembly Mass8.7 kg
ModelAI-LM-200RA
StageRotary Stage
Travel +/- 7.5 deg
Diameter200 mm
Dimensions (Length x Width x Height)270 mm x 200 mm x 36 mm
Thru100 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Rotary Encoder
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 1.0 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec +/- 0.4 arc-sec +/- 0.2 arc-sec
Resolution [2]Standard: 0.01 arc-sec (Analog)
Optional: 0.003 - 10.0 arc-sec (Digital)
Axial Runout +/- 2.0 µmN/A
Radial Runout +/- 2.0 µmN/A
Wobble +/- 4.0 arc-secN/A
Max Velocity [3]1500 deg/s
Max Acceleration [3]2000000 deg/s²
Max Load (Axial)40 kg
Max Load (Radial)20 kg
Assembly Mass4 kg
ModelAI-TM-312RA
StageRotary Stage
Travel360 deg continuous
Diameter312 mm
Dimensions (Length x Width x Height)332 mm x 312 mm x 80 mm
Aperture / Thru75 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
SensorsIntegrated Home
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec +/- 0.4 arc-sec +/- 0.2 arc-sec
Axial Runout +/- 5.0 µm +/- 2.5 µm +/- 1.5 µm
Radial Runout +/- 5.0 µm +/- 2.5 µm +/- 1.5 µm
Wobble +/- 7.5 arc-sec +/- 5.0 arc-sec +/- 2.5 arc-sec
Resolution [2]Standard: 0.007 arc-sec (Analog)
Optional: 0.002 - 7.0 arc-sec (Digital)
Max Velocity [3]2400 deg/s
Max Acceleration [3]30000 deg/s²
Max Load (Axial)50 kg
Max Load (Radial)33 kg
Assembly Mass19 kg
ModelAI-TM-240RA
StageRotary Stage
Travel360 deg continuous
Diameter240 mm
Dimensions (Length x Width x Height)260 mm x 240 mm x 45 mm
Aperture / Thru100 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
SensorsIntegrated Home
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec +/- 0.4 arc-sec +/- 0.2 arc-sec
Axial Runout +/- 5.0 µm +/- 2.5 µm +/- 1.5 µm
Radial Runout +/- 5.0 µm +/- 2.5 µm +/- 1.5 µm
Wobble +/- 7.5 arc-sec +/- 5.0 arc-sec +/- 2.5 arc-sec
Resolution [2]Standard: 0.009 arc-sec (Analog)
Optional: 0.003 - 9.0 arc-sec (Digital)
Max Velocity [3]3600 deg/s
Max Acceleration [3]70000 deg/s²
Max Load (Axial)8 kg
Max Load (Radial)8 kg
Assembly Mass10 kg
ModelAI-TM-208RA
StageRotary Stage
Travel360 deg continuous
Diameter208 mm
Dimensions (Length x Width x Height)228 mm x 208 mm x 110 mm
Aperture / Thru75 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
SensorsIntegrated Home
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec +/- 0.4 arc-sec +/- 0.3 arc-sec
Axial Runout +/- 5.0 µm +/- 2.5 µm +/- 1.5 µm
Radial Runout +/- 5.0 µm +/- 2.5 µm +/- 1.5 µm
Wobble +/- 8.0 arc-sec +/- 5.0 arc-sec +/- 2.5 arc-sec
Resolution [2]Standard: 0.01 arc-sec (Analog)
Optional: 0.003 - 10.0 arc-sec (Digital)
Max Velocity [3]5500 deg/s
Max Acceleration [3]170000 deg/s²
Max Load (Axial)40 kg
Max Load (Radial)27 kg
Assembly Mass11 kg
ModelAI-TM-154RA
StageRotary Stage
Travel360 deg continuous
Diameter154 mm
Dimensions (Length x Width x Height)173 mm x 154 mm x 84 mm
Aperture / Thru72 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
SensorsIntegrated Home
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec
Axial Runout +/- 5.0 µm +/- 3.5 µm +/- 2.0 µm
Radial Runout +/- 5.0 µm +/- 3.5 µm +/- 2.0 µm
Wobble +/- 10.0 arc-sec +/- 5.0 arc-sec +/- 3.0 arc-sec
Resolution [2]Standard: 0.013 arc-sec (Analog)
Optional: 0.004 - 14.0 arc-sec (Digital)
Max Velocity [3]5500 deg/s
Max Acceleration [3]160000 deg/s²
Max Load (Axial)20 kg
Max Load (Radial)20 kg
Assembly Mass4.4 kg
ModelAI-TM-104RA
StageRotary Stage
Travel360 deg continuous
Diameter104 mm
Dimensions (Length x Width x Height)123 mm x 104 mm x 80 mm
Aperture / Thru32 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
SensorsIntegrated Home
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec +/- 0.5 arc-sec +/- 0.3 arc-sec
Axial Runout +/- 5.0 µm +/- 3.5 µm +/- 2.0 µm
Radial Runout +/- 5.0 µm +/- 3.5 µm +/- 2.0 µm
Wobble +/- 10.0 arc-sec +/- 5.0 arc-sec +/- 3.0 arc-sec
Resolution [2]Standard: 0.02 arc-sec (Analog)
Optional: 0.05 - 21.0 arc-sec (Digital)
Max Velocity [3]10000 deg/s
Max Acceleration [3]500000 deg/s²
Max Load (Axial)10 kg
Max Load (Radial)10 kg
Assembly Mass2.7 kg
ModelAI-TM-125R-AB
StageRotary Stage
Travel360 deg continuous
Diameter125 mm
Dimensions (Length x Width x Height)145 mm x 145 mm x 150 mm
Aperture / Thru19 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications 
Axial Runout (Standard)0.5 µm
Radial Runout (Standard)0.5 µm
Axial Stiffness [7]263 N/µm
Radial Stiffness [7]87 N/µm
Tilt Stiffness [7]0.18 Nm/µrad
Resolution (Standard) [8]Standard: 0.02 arc-sec (Analog)
Optional: 0.021 - 21.0 arc-sec (Digital)
Max Velocity [6]1800 deg/s
Max Axial Load [7]37 kg
Max Radial Load [7]14 kg
Assembly Mass9.6 kg
ModelAI-TM-104R-AB
StageRotary Stage
Travel360 deg continuous
Diameter104 mm
Dimensions (Length x Width x Height)123 mm x 104 mm x 94 mm
Aperture / Thru 32 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications 
Axial Runout +/- 1 µm
Radial Runout +/- 1 µm
Resolution [8]Standard: 0.02 arc-sec (Analog)
Optional: 0.021 - 21.0 arc-sec (Digital)
Max Velocity [7]1440  deg/s
Max Axial Load 8 kg
Max Radial Load4 kg
Assembly Mass3.1 kg
ModelAI-TM-104R
StageRotary Stage
Travel360 deg continuous
Diameter104 mm
Dimensions (Length x Width x Height)123 mm x 104 mm x 80 mm
Aperture / Thru32 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.6 arc-sec +/- 0.5 arc-sec +/- 0.3 arc-sec
Resolution [2]Standard: 0.02 arc-sec (Analog)
Optional: 0.005 - 21.0 arc-sec (Digital)
Axial Runout +/- 6.0 µm +/- 4.5 µm +/- 3.0 µm
Radial Runout +/- 6.0 µm +/- 4.5 µm +/- 3.0 µm
Wobble +/- 12.5 arc-sec +/- 7.5 arc-sec +/- 5.0 arc-sec
Max Velocity [3]>8000 deg/s
Max Acceleration [3]400000 deg/s²
Max Load (Axial)12 kg
Max Load (Radial)12 kg
Assembly Mass2.7 kg
ModelAI-TM-80R
StageRotary Stage
Travel360 deg continuous
Diameter80 mm
Dimensions (Length x Width x Height)96mm x 80 mm x 60 mm
Aperture / Thru6 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.7 arc-sec +/- 0.6 arc-sec +/- 0.4 arc-sec
Resolution [2]Standard: 0.027 arc-sec (Analog)
Optional: 0.007 - 27.0 arc-sec (Digital)
Axial Runout +/- 6.0 µm +/- 5.0 µm +/- 4.0 µm
Radial Runout +/- 6.0 µm +/- 5.0 µm +/- 4.0 µm
Wobble +/- 12.5 arc-sec +/- 10.0 arc-sec +/- 7.5 arc-sec
Max Velocity [3]>6000 deg/s
Max Acceleration [3]200000 deg/s²
Max Load (Axial)2.5 kg
Max Load (Radial)2.5 kg
Assembly Mass1.1 kg
ModelAI-TM-56R
StageRotary Stage
Travel360 deg continuous
Diameter56 mm
Dimensions (Length x Width x Height)72 mm x 56 mm x 62 mm
Aperture / Thru8 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.7 arc-sec +/- 0.6 arc-sec +/- 0.4 arc-sec
Resolution [2]Standard: 0.039 arc-sec (Analog)
Optional: 0.01 - 40.0 arc-sec (Digital)
Axial Runout +/- 7.5 µm +/- 6.0 µm +/- 5.0 µm
Radial Runout +/- 7.5 µm +/- 6.0 µm +/- 5.0 µm
Wobble +/- 12.5 arc-sec +/- 10.0 arc-sec +/- 7.5 arc-sec
Max Velocity [3]>3000 deg/s
Max Acceleration [3]60000 deg/s²
Max Load (Axial)2.5 kg
Max Load (Radial)2.5 kg
Assembly Mass0.65 kg
ModelAI-TM-154RA + AI-TM-208RA-GMB-CB
Stage2 Axis Rotary Gimbal
Travel (Theta Z) 360 degrees continuous (Theta Z)
Travel (Theta Y)+/- 100 degrees (Theta Y)
Optional: up to +/- 172 deg
Dimensions (Length x Width x Height)571 mm x 230 mm x 362.5 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
BearingsAngular Contact (Duplex Pair)
CounterbalanceCounterweight Capability (Adjustable with Provided Weights)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
AxisA (THETA Z)B (THETA Y)
Performance Specifications [2]STDULTRANANOSTDULTRANANO
Angular Accuracy With Compensationn/a +/-3 arc-secn/a +/-3 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec +/- 0.4 arc-sec
Resolution0.01 arc-sec (analog)0.01 arc-sec (analog)
Axial Runout10 µm4 µm2 µm10 µm5 µm3 µm
Radial Runout10 µm4 µm2 µm10 µm5 µm3 µm
Axis Wobble16 arc-sec10 arc-sec8 arc-sec10 arc-sec7 arc-sec5 arc-sec
B Axis To A Mount Surface Distance60 mm +/- 0.5 mm Nominal
(exact distance provided for each S/N at shipment)
Max Velocity [3]360 deg/s (~6.28 rad/s)360 deg/s (~6.28 rad/s)
Max Acceleration [3]`2300 deg/s (~40 rad/s)
Max Load (Axial)12 kg40 kg
Max Load (Radial)12 kg40 kg
Customer Specified Payload8 kg (+/- 4 kg or 12 kg maximum)
Assembly Mass (With Counterweight)39 kg
ModelAI-TM-104RA + AI-TM-208RA-GMB-CB
Stage2 Axis Rotary Gimbal
Travel (Theta Z) 360 deg continuous (Theta Z)
Travel (Theta Y)+/- 100 degrees (Theta Y)
Optional: up to +/- 172 deg
Dimensions (Length x Width x Height)571 mm x 230 mm x 362.5 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
BearingsAngular Contact (Duplex Pair)
CounterbalanceCounterweight Capability (Adjustable with Provided Weights)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
AxisA (THETA Z)B (THETA Y)
Performance Specifications [2]STDULTRANANOSTDULTRANANO
Angular Accuracy With Compensationn/a +/-3 arc-secn/a +/-3 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec +/- 0.4 arc-sec
Resolution0.02 arc-sec (analog)0.01 arc-sec (analog)
Axial Runout10 µm4 µm2 µm10 µm5 µm3 µm
Radial Runout10 µm4 µm2 µm10 µm5 µm3 µm
Axis Wobble12 arc-sec8 arc-sec6 arc-sec10 arc-sec7 arc-sec5 arc-sec
B Axis To A Mount Surface Distance60 mm +/- 0.5 mm Nominal
(exact distance provided for each S/N at shipment)
Max Velocity [3]360 deg/s (~6.28 rad/s)360 deg/s (~6.28 rad/s)
Max Acceleration [3]1600 deg/s (~28 rad/s)2300 deg/s (~40 rad/s)
Max Load (Axial)12 kg40 kg
Max Load (Radial)12 kg40 kg
Customer Specified Payload8 kg (+/- 4 kg or 12 kg maximum)
Assembly Mass (With Counterweight)39 kg
ModelAI-HH-ST14-200XY-60Z-104R
Travel - XY200 mm (+/- 100 mm)
Travel - Z60 mm (+ 60 mm /- 0 mm)
Travel - Pitch & Roll  +/- 30 deg
Travel - Yaw360 deg continous
Dimensions (Length x Width x Height)292 mm x 275 mm x 400 mm
StageHybrid Hexapod 
DrivesXY, Pitch & Yaw: Stepper Motor
Yaw: Torque Motor
FeedbackStandard: No Encoder
Optional: Non-Contact Optical Linear Encoder, Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
Optional: Magnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications(STD)
Linear Resolution with Encoder OptionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution with Encoder Option ~0.01 arc-sec
Yaw Resolution with Encoder Option0.02 arc-sec
Max Linear Velocity [2]20 mm/s
Max Angular Velocity (Pitch & Roll) [2]10 deg/s
Max Angular Velocity (Yaw) [2]540 deg/s
Max Payload [3]10 kg
Assembly Mass28 kg
ModelAI-6D-250XY-92Z
StageHybrid Hexapod  (6 DOF)
Travel - XY250mm (+/- 125mm)
Travel - Z92mm (+ 92mm/ - 0mm) 
Travel - Pitch & Roll  +/- 20 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)435 mm x 435 mm x 707.5 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
Optional: Magnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications 
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.02 arc-sec
Yaw Resolution ~0.01 arc-sec
Max Linear Velocity [10]0.3 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]180 deg/s
Assembly Mass130 kg
Max Payload [11]35 kg
ModelAI-TRI-LM-10600-104R
StageLinear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll  +/- 18  deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)504.2 mm x 462.8 mm x 460 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications(STD)
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.01 arc-sec
Yaw Resolution0.02 arc-sec
Max Linear Velocity [10]0.2 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]720 deg/s
Assembly Mass30 kg
Max Payload [11]7 kg
ModelAI-TRI-LM-5500-104R
StageLinear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z 55 mm (+ 55 mm/- 0 mm)
Travel - Pitch & Roll  +/- 16  deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)403.1 mm x 373.5 mm x 310.9 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications(STD)
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.01 arc-sec
Yaw Resolution0.02 arc-sec
Max Linear Velocity [10]0.2 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]720 deg/s
Assembly Mass20.1 kg
Max Payload [11]5 kg
ModelAI-TRI-LM-4000-104R
StageLinear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z40 mm (+ 40 mm/- 0 mm)
Travel - Pitch & Roll  +/- 12  deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)399 mm x 359 mm x 250.5 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications(STD)
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.01 arc-sec
Yaw Resolution0.02 arc-sec
Max Linear Velocity [10]0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]720 deg/s
Assembly Mass18 kg
Max Payload [11]5 kg
ModelAI-TRI-LM-4000-56R
StageLinear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z40 mm (+ 40 mm/- 0 mm)
Travel - Pitch & Roll  +/- 16  deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)331.6 mm x 303.3 mm x 247.9 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications(STD)
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.02 arc-sec
Yaw Resolution0.04 arc-sec
Max Linear Velocity [10]0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]720 deg/s
Assembly Mass14.6 kg
Max Payload [11]2.5 kg
ModelAI-TRI-LM-2400-56R-MS
StageLinear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z24 mm (+ 24 mm/- 0 mm)
Travel - Pitch & Roll  +/- 12  deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)261 mm x 228.8 mm x 170.9 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications(STD)
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.02 arc-sec
Yaw Resolution0.04 arc-sec
Max Linear Velocity [10]0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]720 deg/s
Assembly Mass6.9 kg
Max Payload [11]2.5 kg
ModelAI-TRI-LM-2400-56R
StageLinear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z24 mm (+ 24 mm/- 0 mm)
Travel - Pitch & Roll  +/- 12  deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)241.1 mm x 219.1 mm x 176.7 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications(STD)
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.02 arc-sec
Yaw Resolution0.04 arc-sec
Max Linear Velocity [10]0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]720 deg/s
Assembly Mass5.4 kg
Max Payload [11]2.5 kg
ModelAI-TRI-LM-600-56R
StageLinear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll  +/- 3  deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)200 mm x 191.3 mm x 143.6 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications(STD)
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.03 arc-sec
Yaw Resolution0.04 arc-sec
Max Linear Velocity [10]0.08 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]720 deg/s
Assembly Mass4.2 kg
Max Payload [11]2 kg
ModelAI-TRI-LM-10600
StageLinear Motor Tripod (3 DOF)
Travel - Z106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll  +/- 20 deg
Dimensions (Length x Width x Height)399.1 mm x 348.8 mm x 459.1 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)
Linear Resolution Standard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Pitch And Roll Resolution ~0.02 arc-sec
Max Linear Velocity [10]0.2 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Payload [11]10 kg
Assembly Mass23.2 kg
ModelAI-TRI-LM-9200
StageLinear Motor Tripod (3 DOF)
Travel - Z92 mm (+ 92 mm/- 0 mm)
Travel - Pitch & Roll  +/- 20 deg
Dimensions (Length x Width x Height)435 mm x 380 mm x 482.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)
Linear Resolution Standard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Pitch And Roll Resolution ~0.02 arc-sec
Max Linear Velocity [10]0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Payload [11]35 kg
Assembly Mass52 kg
ModelAI-TRI-LM-5500
StageLinear Motor Tripod (3 DOF)
Travel - Z55 mm (+ 55 mm/- 0 mm)
Travel - Pitch & Roll  +/- 20 deg
Dimensions (Length x Width x Height)363.8 mm x 339.9 mm x 308.6 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)
Linear Resolution Standard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Pitch And Roll Resolution ~0.02 arc-sec
Max Linear Velocity [10]0.2 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Payload [11]10 kg
Assembly Mass15.6 kg
ModelAI-TRI-LM-4000
StageLinear Motor Tripod (3 DOF)
Travel - Z40 mm (+ 40 mm/- 0 mm)
Travel - Pitch & Roll  +/- 16 deg
Dimensions (Length x Width x Height)331.6 mm x 303.3 mm x 246.9 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)
Linear Resolution Standard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Pitch And Roll Resolution ~0.02 arc-sec
Max Linear Velocity [10]0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Payload [11]7.5 kg
Assembly Mass13.6 kg
ModelAI-TRI-LM-2400-MS
StageLinear Motor Tripod (3 DOF)
Travel - Z12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll  +/- 16 deg
Dimensions (Length x Width x Height)251.8 mm x 220.8 mm x 169.9 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)
Linear Resolution Standard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Pitch And Roll Resolution ~0.03 arc-sec
Max Linear Velocity [10]0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Payload [11]3.5 kg
Assembly Mass6.3 kg
ModelAI-TRI-LM-2400
StageLinear Motor Tripod (3 DOF)
Travel - Z12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll  +/- 15 deg
Dimensions (Length x Width x Height)208 mm x 196.3 mm x 173 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)
Linear Resolution Standard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Pitch And Roll Resolution ~0.04 arc-sec
Max Linear Velocity [10]0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Payload [11]3.5 kg
Assembly Mass4.5 kg
ModelAI-TRI-LM-600
StageLinear Motor Tripod (3 DOF)
Travel - Z6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll  +/- 3 deg
Dimensions (Length x Width x Height)172.5 mm x 164.3 mm x 142.6 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)
Linear Resolution Standard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Pitch And Roll Resolution ~0.04 arc-sec
Max Linear Velocity [10]0.08 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Payload [11]2 kg
Assembly Mass 3.4 kg