Model | AI-LM-10000-AB8 | ||
Stage | Air Bearing Linear Stage | ||
Travel | 50 mm (+/- 25 mm) | ||
Dimensions (Length x Width x Height) | 473.2 mm x 196.85 mm x 75.90 mm |
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Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) |
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Feedback | Non-Contact Optical Linear Encoder |
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Bearings | Air Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
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Structure | Anodized Aluminum 6061-T6 | ||
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
Environment | Ambient | ||
Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
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Straightness | +/- 1 µm per 100mm Travel | ||
Flatness [2] | +/- 1 µm per 100mm Travel | ||
Pitch | +/- 5 arc-sec | ||
Yaw | +/- 5 arc-sec | ||
Roll | +/- 5 arc-sec | ||
Max Velocity [3] | 2.0 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max Pitch Moment | 79 nm | ||
Max Roll Moment | 75 nm | ||
Max Yaw Moment | 37 nm | ||
Vertical Z Stiffness | 480 N/µm | ||
Horizontal Y Stiffness | 140 N/µm | ||
Max Payload Capacity | 60 kg | ||
Assembly Mass | 12.5 kg |
Model | AI-VC-600-Z-SCB-ATRAK |
Stage | Vertical Z Stage |
Travel | 6 mm (+/- 3 mm) |
Dimensions (Length x Width x Height) | 73.6 mm x 60 mm x 59 mm |
Drive | Voice Coil Motor (VC) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Crossed Roller Bearings |
Counterbalance | Spring Counterbalance |
Cables | High Flex, 10M Cycle, 3m Length |
Structure | Anodized Aluminum 6061-T6 |
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Linear Displacement Accuracy | +/- 2.0 µm |
Bidirectional Linear Repeatability | +/- 75 nm |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
Straightness In X | +/- 5 µm |
Flatness [2] | +/- 5 µm |
Max Payload Capability | 350 g |
Force | 15 N |
Assembly Mass | 620 g |
Model | AI-LM-5000-AB |
Stage | Air Bearing Linear Stage |
Travel | 50 mm (+/- 25 mm) |
Dimensions (Length x Width x Height) | 270 mm x 150 mm x 63.8 mm |
Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
Drive | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
Environment | Ambient |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
Max Pitch Moment [2] | 20 Nm |
Max Roll Moment [2] | 24 Nm |
Max Yaw Moment [2] | 10 Nm |
Vertical Z Stiffness | 250 N/µm |
Horizontal Y Stiffness | 105 N/µm |
Max Velocity [3] | 2.0 m/s |
Max Acceleration [3] | 2.0 G |
Max Load Capacity | 30 kg |
Assembly Mass | 4.6 kg |
Model | AI-HH-60XY-15Z-56RT-LM | |||
Stage | Hybrid Hexapod | |||
Travel - XY | 60 mm (+/- 30 mm) | |||
Travel - Z | 15 mm (+ 15 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 10 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 170 mm x 163.5 mm x 224.5 mm | |||
Drives | Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut | |||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
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Bearings | Crossed Roller Bearings | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient | |||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidirectional Repeatability | XY | +/- 100 nm | +/- 70 nm | |
Z | +/- 100 nm | +/- 70 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
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Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.04 arc-sec | |||
Yaw | 0.03 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | XY | 150 mm/s | ||
Z | 15 mm/s | |||
Max Linear Acceleration [3] | XY | 0.3 G | ||
Z | 0.3 G | |||
Max Angular Velocity [3] | Pitch And Roll | 30 deg/s | ||
Roll | 360 deg/s | |||
Max Angular Acceleration [3] | Pitch And Roll | >1000 deg/s² | ||
Yaw | >1000 deg/s² | |||
Max Payload | 5 kg | |||
Assembly Mass | 9.1 kg |
Model | AI-HH-60XY-15Z-56R | |||
Stage | Hybrid Hexapod | |||
Travel - XY | 60 mm (+/- 30 mm) | |||
Travel - Z | 15 mm (+ 15 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 10 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 174 mm x 176.3 mm x 201 mm | |||
Drives | Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut | |||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
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Bearings | Crossed Roller Bearings | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient | |||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidirectional Repeatability | XY | +/- 100 nm | +/- 70 nm | |
Z | +/- 100 nm | +/- 70 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.04 arc-sec | |||
Yaw | 0.03 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | XY | 100 mm/s | ||
Z | 15 mm/s | |||
Max Linear Acceleration [3] | XY | 0.3 G | ||
Z | 0.3 G | |||
Max Angular Velocity [3] | Pitch And Roll | 30 deg/s | ||
Roll | 360 deg/s | |||
Max Angular Acceleration [3] | Pitch And Roll | >1000 deg/s² | ||
Yaw | >1000 deg/s² | |||
Max Payload | 5 kg | |||
Assembly Mass | 5.7 kg |
Model | AI-HH-200XY-15Z-56RT-CM | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 200 mm (+/- 100 mm) | |||
Travel - Z | 15 mm (+ 15 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 10 deg | |||
Travel - Yaw | 360 deg continous | |||
Dimensions (Length x Width x Height) | 336.5 mm x 275 mm x 202.7 mm | |||
Drives | XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor |
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Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
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Bearings | Crossed Roller Bearings | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient | |||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidirectional Repeatability | XY | +/- 100 nm | +/- 70 nm | |
Z | +/- 100 nm | +/- 70 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
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Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.04 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Orthogonality | XY | 20 arc/sec | 5 arc/sec | 1 arc/sec |
XZ & YZ | 250 arc/sec | 200 arc/sec | 50 arc/sec | |
Max Linear Velocity [3] | XY | 50 mm/s | ||
Z | 15 mm/s | |||
Max Linear Acceleration[3] | XY | 0.1 G | ||
Z | 0.3 G | |||
Max Angular Velocity [3] | Pitch and Roll | 30 deg/s | ||
Yaw | 3000 deg/s | |||
Max Angular Acceleration [3] | Pitch and Roll | >1000 deg/s² | ||
Yaw | >7200 deg/s² | |||
Max Payload | 5 kg | |||
Assembly Mass | 16.3 kg |
Model | AI-HH-100XY-15Z-56RT-LM | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 100 mm (+/- 50 mm) | |||
Travel - Z | 15 mm (+ 15 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 10 deg | |||
Travel - Yaw | 360 deg continous | |||
Dimensions (Length x Width x Height) | 296 mm x 244 mm x 215.2 mm | |||
Drives | XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor |
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Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
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Bearings | Crossed Roller Bearings | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient | |||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidirectional Repeatability | XY | +/- 100 nm | +/- 70 nm | |
Z | +/- 100 nm | +/- 70 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
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Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.04 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Orthogonality | XY | 20 arc/sec | 5 arc/sec | 1 arc/sec |
XZ & YZ | 250 arc/sec | 200 arc/sec | 50 arc/sec | |
Max Linear Velocity [3] | XY | 150 mm/s | ||
Z | 15 mm/s | |||
Max Linear Acceleration [3] | XY | 0.3 G | ||
Z | 0.3 G | |||
Max Angular Velocity [3] | Pitch And Roll | 30 deg/s | ||
Yaw | 3000 deg/s | |||
Max Angular Acceleration [3] | Pitch And Roll | >1000 deg/s² | ||
Yaw | >7200 deg/s² | |||
Max Payload | 5 kg | |||
Assembly Mass | 8.9 kg |
Model | AI-HH-60XY-15Z-56RT-LM | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 60 mm (+/- 30 mm) | |||
Travel - Z | 15 mm (+ 15 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 10 deg | |||
Travel - Yaw | 360 deg continous | |||
Dimensions (Length x Width x Height) | 165 mm x 215.2 mm x 222.7 mm | |||
Drives | XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor |
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Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient | |||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidirectional Repeatability | XY | +/- 100 nm | +/- 70 nm | |
Z | +/- 100 nm | +/- 70 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.04 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | XY | 150 mm/s | ||
Z | 15 mm/s | |||
Max Linear Acceleration [3] | XY | 0.3 G | ||
Z | 0.3 G | |||
Max Angular Velocity [3] | Pitch And Roll | 30 deg/s | ||
Yaw | 3000 deg/s | |||
Max Angular Acceleration [3] | Pitch And Roll | >1000 deg/s² | ||
Yaw | >7200 deg/s² | |||
Max Payload | 5 kg | |||
Assembly Mass | 7.3 kg |
Model | AI-HH-60XY-15Z-56RT-BSD | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 60 mm (+/- 30 mm) | |||
Travel - Z | 15 mm (+ 15 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 10 deg | |||
Travel - Yaw | 360 deg continous | |||
Dimensions (Length x Width x Height) | 171 mm x 177 mm x 191.7 mm | |||
Drives | XY, Pitch & Roll: Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) Yaw: Torque Motor |
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Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
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Bearings | Crossed Roller Bearings | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient | |||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidirectional Repeatability | XY | +/- 100 nm | +/- 70 nm | |
Z | +/- 100 nm | +/- 70 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.04 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | XY | 100 mm/s | ||
Z | 15 mm/s | |||
Max Linear Acceleration [3] | XY | 0.3 G | ||
Z | 0.3 G | |||
Max Angular Velocity [3] | Pitch And Roll | 30 deg/s | ||
Yaw | 3000 deg/s | |||
Max Angular Acceleration [3] | Pitch And Roll | >1000 deg/s² | ||
Yaw | >7200 deg/s² | |||
Max Payload | 5 kg | |||
Assembly Mass | 6 kg |
Model | AI-HH-150XY-40Z-104R | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 150 mm (+/- 75 mm) | |||
Travel - Z | 40 mm (+ 40 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 11 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 399 mm x 350 mm x 308.9 mm | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
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Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
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Bearings | Crossed Roller Bearings | |||
Counterbalance | Pneumatic Cylinder | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
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Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidirectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
Z | +/- 80 nm | +/- 50 nm | ||
Pitch And Roll | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
Yaw | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 12 µm | 9 µm | 6 µm |
Radial Runout | 12 µm | 9 µm | 6 µm | |
Wobble | 25 arc-sec | 15 arc-sec | 10 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | #colspan#~0.01 arc-sec | |||
Yaw | 0.02 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | 0.5 m/s | |||
Max Linear Acceleration [3] | 0.4 G | |||
Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
Roll | 180 deg/s | |||
Max Angular Acceleration [3] | Pitch And Roll | >1800 deg/s² | ||
Yaw | >3600 deg/s² | |||
Max Payload | 5 kg | |||
Assembly Mass | 34 kg |
Model | AI-HH-100XY-24Z-56R-MS | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 100 mm (+/- 50 mm) | |||
Travel - Z | 12 mm (+ 12 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 10 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 262.5 mm x 246 mm x 250.8 mm | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
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Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Counterbalance | Magnetic Spring (Constant Force) | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidirectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
Z | +/- 80 nm | +/- 50 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.02 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | 0.5 m/s | |||
Max Linear Acceleration [3] | 0.5 G | |||
Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
Roll | 180 deg/s | |||
Max Angular Acceleration [3] | Pitch And Roll | >1800 deg/s² | ||
Yaw | >3600 deg/s² | |||
Max Payload | 2.5 kg | |||
Assembly Mass | 20 kg |
Model | AI-HH-100XY-24Z-56R-CM,MS | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 100 mm (+/- 50 mm) | |||
Travel - Z | 12 mm (+ 12 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 10 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 262.5 mm x 246 mm x 218.8 mm | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
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Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Counterbalance | Pneumatic Cylinder | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidirectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
Z | +/- 80 nm | +/- 50 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.02 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | 50 mm/s | |||
Max Linear Acceleration [3] | 0.1 G | |||
Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
Roll | 180 deg/s | |||
Max Angular Acceleration [3] | Pitch And Roll | >1800 deg/s² | ||
Yaw | >3600 deg/s² | |||
Max Payload | 2.5 kg | |||
Assembly Mass | 13.1 kg |
Model | AI-HH-100XY-24Z-56R | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 100 mm (+/- 50 mm) | |||
Travel - Z | 24 mm (+ 24 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 11 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 244 mm x 244 mm x 233.8 mm | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Counterbalance | Pneumatic Cylinder | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidirectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
Z | +/- 80 nm | +/- 50 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.02 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | 0.5 m/s | |||
Max Linear Acceleration [3] | 0.5 G | |||
Max Angular Velocity [3] | Pitch and Roll | 180 deg/s | ||
Roll | 180 deg/s | |||
Max Angular Acceleration [3] | Pitch and Roll | >1800 deg/s² | ||
Yaw | >3600 deg/s² | |||
Max Payload | 2.5 kg | |||
Assembly Mass | 18.4 kg |
Model | AI-HH-100XY-6Z-56R-CM | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 100 mm (+/- 50 mm) | |||
Travel - Z | 6 mm (+ 6 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 3 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 200 mm x 184 mm x 200.5 mm | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Counterbalance | Pneumatic Cylinder | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidirectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
Z | +/- 80 nm | +/- 50 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.03 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | 0.05 m/s | |||
Max Linear Acceleration [3] | 0.1 G | |||
Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
Roll | 180 deg/s | |||
Max Angular Acceleration [3] | Pitch And Roll | >1800 deg/s² | ||
Yaw | >3600 deg/s² | |||
Max Payload | 2 kg | |||
Assembly Mass | 10 kg |
Model | AI-HH-100XY-6Z-56R | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 100 mm (+/- 50 mm) | |||
Travel - Z | 6 mm (+ 6 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 3 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 244 mm x 244 mm x 220.5 mm | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Counterbalance | Pneumatic Cylinder | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidirectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
Z | +/- 80 nm | +/- 50 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.03 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | 0.4 m/s | |||
Max Linear Acceleration [3] | 0.5 G | |||
Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
Yaw | 180 deg/s | |||
Max Angular Acceleration [3] | Pitch And Roll | >1800 deg/s² | ||
Yaw | >3600 deg/s² | |||
Max Payload | 2 kg | |||
Assembly Mass | 17.2 kg |
Model | AI-BSD-5000-Z | ||
Stage | Vertical Z Stage | ||
Travel | 50 mm (+/- 25 mm) | ||
Dimensions (Length x Width x Height) | 175 mm x 100 mm 229 mm | ||
Motor | Frameless Torque Motor, Precision Ball Screw | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Brake | Standard: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: No Brake |
||
Counterbalance | Standard: None Needed Optional: Pneumatic Counterbalance to Increase Payload Capability |
||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 5 µm | +/- 1.0 µm | +/- 0.5 µm |
Bidirectional Linear Repeatability | +/- 125 nm | +/- 100 nm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 4 µm | +/- 1.0 µm | +/- 0.5 µm |
Flatness [2] | +/- 4.0 µm | +/- 2.0 µm | |
Pitch | +/- 15 arc-sec | ||
Yaw | +/- 15 arc-sec | ||
Roll | +/- 15 arc-sec | ||
Max Velocity [3] | 0.1 m/s | ||
Max Acceleration [3] | 1.0 G | ||
Max Payload Capability | 20 kg | ||
Max Payload Capability (With Pneuboost) | 50 kg | ||
Assembly Mass | 7.6 kg |
Model | AI-BSD-3200-Z | ||
Stage | Vertical Z Stage | ||
Travel | 32 mm (+/- 16 mm) | ||
Dimensions (Length x Width x Height) | 175 mm x 100 mm x 202 mm | ||
Motor | Frameless Torque Motor, Precision Ball Screw | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Brake | Standard: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: No Brake |
||
Counterbalance | Standard: None Needed Optional: Pneumatic Counterbalance to Increase Payload Capability |
||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 5 µm | +/- 1.0 µm | +/- 0.5 µm |
Bidirectional Linear Repeatability | +/- 125 nm | +/- 100 nm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 4 µm | +/- 1.0 µm | +/- 0.5 µm |
Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
Pitch | +/- 15 arc-sec | ||
Yaw | +/- 15 arc-sec | ||
Roll | +/- 15 arc-sec | ||
Max Velocity [3] | 0.1 m/s | ||
Max Acceleration [3] | 1.0 G | ||
Max Payload Capability | 20 kg | ||
Max Payload Capability (With Pneuboost) | 50 kg | ||
Assembly Mass | 6.9 kg |
Model | AI-BSD-2400-Z | ||
Stage | Vertical Z Stage | ||
Travel | 24 mm (+/- 12 mm) | ||
Dimensions (Length x Width x Height) | 175 mm x 100 mm x 188 mm | ||
Motor | Frameless Torque Motor, Precision Ball Screw | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Brake | Standard: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: No Brake |
||
Counterbalance | Standard: None Needed Optional: Pneumatic Counterbalance to Increase Payload Capability |
||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm | +/- 0.8 µm | +/- 0.4 µm |
Bidirectional Linear Repeatability | +/- 125 nm | +/- 100 nm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 2 µm | +/- 0.8 µm | +/- 0.4 µm |
Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
Pitch | +/- 15 arc-sec | ||
Yaw | +/- 15 arc-sec | ||
Roll | +/- 15 arc-sec | ||
Max Velocity [3] | 0.1 m/s | ||
Max Acceleration [3] | 1.0 G | ||
Max Payload Capability | 20 kg | ||
Max Payload Capability (With Pneuboost) | 50 kg | ||
Assembly Mass | 6.6 kg |
Model | AI-LM-5000-("PAYLOAD")-Z-MCB-("ORIENTATION") | |||||
Stage | Vertical Z Stage | |||||
Travel | 50 mm (+/- 25 mm) | |||||
Payload Options | 30 N, 50 N, 60 N, 70 N, 80 N, or 90 N | |||||
Dimensions (Length x Width x Height) | 182 mm x 106 mm x 176 mm | |||||
Drive | Direct Drive (Ironless Core Linear Motor) | |||||
Feedback | Non-Contact Optical Linear Encoder | |||||
Bearings | Crossed Roller Bearings | |||||
Counterbalance | Magnetic Spring (Constant Force) | |||||
Cables | High Flex, 10M Cycle, 3m Length | |||||
Structure | Anodized Aluminum 6061-T6 Optional: Stainless Steel |
|||||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
|||||
Operating Temperature | 0°C to 50°C | |||||
Humidity | 10% to 80% Non-Condensing | |||||
Performance Specifications [1] | (STD) | ULTRA | NANO | |||
Linear Displacement Accuracy | +/- 7 µm | +/- 1.0 µm | +/- 0.4 µm | |||
Bidirectional Linear Repeatability | +/- 100 nm | +/- 75 nm | ||||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|||||
Straightness | +/- 6.0 µm | +/- 3.0 µm | ||||
Flatness [2] | +/- 6.0 µm | +/- 3.0 µm | ||||
Pitch | 15 arc-sec | |||||
Yaw | 15 arc-sec | |||||
Roll | 15 arc-sec | |||||
Max Velocity [3] | 0.05 m/s | |||||
Payload (Nominal) | 30 N, 50 N, 60 N, 70 N, 80 N, or 90 N | 50 N | 60 N | 70 N | 80 N | 90 N |
Minimum To Maximum Payload Range | 24-36 N | 44-56 N | 54-66 N | 64-76 N | 74-86 N | 84-96 N |
Assembly Mass | 7.1 kg | |||||
Moving Mass | 3.3 kg |
Model | AI-LM-5000-("PAYLOAD")-Z-MCB-("ORIENTATION") | |||||
Stage | Vertical Z Stage | |||||
Travel | 50 mm (+/- 25 mm) | |||||
Payload Options | 2 N, 8 N, 14 N, 19 N, or 24 N | |||||
Dimensions (Length x Width x Height) | 165 mm x 96 mm x 156 mm | |||||
Drive | Direct Drive (Ironless Core Linear Motor) | |||||
Feedback | Non-Contact Optical Linear Encoder | |||||
Bearings | Crossed Roller Bearings | |||||
Counterbalance | Magnetic Spring (Constant Force) | |||||
Cables | High Flex, 10M Cycle, 3m Length | |||||
Structure | Anodized Aluminum 6061-T6 Optional: Stainless Steel |
|||||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
|||||
Operating Temperature | 0°C to 50°C | |||||
Humidity | 10% to 80% Non-Condensing | |||||
Performance Specifications [1] | (STD) | ULTRA | NANO | |||
Linear Displacement Accuracy | +/- 7 µm | +/- 1.0 µm | +/- 0.4 µm | |||
Bidirectional Linear Repeatability | +/- 75 nm | +/- 45 nm | ||||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|||||
Straightness | +/- 5.0 µm | +/- 2.5 µm | ||||
Flatness [2] | +/- 5.0 µm | +/- 2.5 µm | ||||
Pitch | 14 arc-sec | |||||
Yaw | 14 arc-sec | |||||
Roll | 14 arc-sec | |||||
Max Velocity [3] | 0.1 m/s | |||||
Payload (Nominal) | -- | 2 N | 8 N | 14 N | 19 N | 24 N |
Minimum To Maximum Payload Range | -- | 0-6 N | 4-12 N | 10-18 N | 15-23 N | 18-30 N |
Assembly Mass | 5.2 kg | |||||
Moving Mass | 2.1 kg |
Model | AI-LM-2400-("PAYLOAD")-Z-MCB-("ORIENTATION") | |||||
Stage | Vertical Z Stage | |||||
Travel | 24 mm (+/-12 mm) | |||||
Payload Options | 2 N, 8 N, 14 N, 19 N, or 24 N | |||||
Dimensions (Length x Width x Height) | 165 mm x 96 mm x 130 mm | |||||
Drive | Direct Drive (Ironless Core Linear Motor) | |||||
Feedback | Non-Contact Optical Linear Encoder | |||||
Bearings | Crossed Roller Bearings | |||||
Counterbalance | Magnetic Spring (Constant Force) | |||||
Cables | High Flex, 10M Cycle, 3m Length | |||||
Structure | Anodized Aluminum 6061-T6 Optional: Stainless Steel |
|||||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
|||||
Operating Temperature | 0°C to 50°C | |||||
Humidity | 10% to 80% Non-Condensing | |||||
Performance Specifications [1] | (STD) | ULTRA | NANO | |||
Linear Displacement Accuracy | +/- 5 µm | +/- 0.7 µm | +/- 0.3 µm | |||
Bidirectional Linear Repeatability | +/- 75 nm | +/- 45 nm | ||||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|||||
Straightness | +/- 3.0 µm | +/- 2.0 µm | ||||
Flatness [2] | +/- 3.0 µm | +/- 2.0 µm | ||||
Pitch | 10 arc-sec | |||||
Yaw | 10 arc-sec | |||||
Roll | 10 arc-sec | |||||
Max Velocity [3] | 0.1 m/s | |||||
Payload (Nominal) | -- | 2 N | 8 N | 14 N | 19 N | 24 N |
Minimum To Maximum Payload Range | -- | 0-6 N | 4-12 N | 10-18 N | 15-23 N | 18-30 N |
Assembly Mass | 4.6 kg | |||||
Moving Mass | 2 kg |
Model | AI-VC-600-Z-SCB | ||
Stage | Vertical Z Stage | ||
Travel | 6 mm (+/- 3 mm) | ||
Dimensions (Length x Width x Height) | 80 mm x 60 mm x 70 mm | ||
Drive | Voice Coil Motor (VC) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Counterbalance | Spring Counterbalance | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | Depending on specific Application - Ask ALIO | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Max Velocity [3] | 0.3 m/s | ||
Max Peak Acceleration [3] | 4.0 G | ||
Max Payload Capability | 2.5 kg | ||
Assembly Mass | 0.9 kg |
Model | AI-LM-2500-Z-MCB-15N | ||
Stage | Vertical Z Stage | ||
Travel | 25 mm (+/- 12.5 mm) | ||
Dimensions (Length x Width x Height) | 56 mm x 88 mm x 144 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Counterbalance | Magnetic Spring (Constant Force) | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 Optional: Stainless Steel |
||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | Depending on specific Application - Ask ALIO | ||
Max Payload [6] | 15N | ||
Payload Range [6] | 7.5 - 15 N | ||
Max Velocity | 0.1 m/s | ||
Max Acceleration | 0.5 G | ||
Assembly Mass | 1.9 kg |
Model | AI-LM-2500-Z-MCB-7N | ||
Stage | Vertical Z Stage | ||
Travel | 25 mm (+/- 12.5 mm) | ||
Dimensions (Length x Width x Height) | 56 mm x 88 mm x 144 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Counterbalance | Magnetic Spring (Constant Force) | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 Optional: Stainless Steel |
||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | Depending on specific Application - Ask ALIO | ||
Max Payload [6] | 7.5 N | ||
Payload Range [6] | 2.5 - 7.5 N | ||
Max Velocity | 0.1 m/s | ||
Max Acceleration | 0.5 G | ||
Assembly Mass | 1.9 kg |
Model | AI-LM-2500-Z-MCB-2N | ||
Stage | Vertical Z Stage | ||
Travel | 25 mm (+/- 12.5 mm) | ||
Dimensions (Length x Width x Height) | 56 mm x 88 mm x 144 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Counterbalance | Magnetic Spring (Constant Force) | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 Optional: Stainless Steel |
||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | Depending on specific Application - Ask ALIO | ||
Max Payload [6] | 2.5 N | ||
Payload Range [6] | 0 - 2.5 N | ||
Max Velocity | 0.1 m/s | ||
Max Acceleration | 0.5 G | ||
Assembly Mass | 1.9 kg |
Model | AI-VC-2400-NANO-Z-CB | ||
Travel | 24 mm (+ 24 mm/- 0 mm) | ||
Dimensions (Diameter x Height) | 200 mm x 112 mm | ||
Stage | Vertical Z Stage | ||
Motor | Dual Voice Coil Motor (VC) | ||
Feedback | Dual Non-Contact Optical Linear Encoder | ||
Bearings | Air Bearings | ||
Counterbalance | Pneumatic Cylinder | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm | +/- 0.8 µm | +/- 0.4 µm |
Bidirectional Linear Repeatability | +/- 75 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 2.0 µm | +/- 0.8 µm | +/- 0.4 µm |
Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | +/- 0.4 µm |
Pitch | +/- 10 arc-sec | ||
Yaw | +/- 10 arc-sec | ||
Roll | +/- 10 arc-sec | ||
Max Velocity | 0.2 m/s | ||
Max Acceleration | 0.5 G | ||
Assembly Mass | 6.5 kg | ||
Max Payload | 20 kg |
Model | AI-VC-2400-120N-Z-CB | ||
Stage | Vertical Z Stage | ||
Travel | 24 mm (+ 24 mm/- 0 mm) | ||
Dimensions (Length x Width x Height) | 175 mm x 125 mm x 170 mm | ||
Motor | Voice Coil Motor (VC) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Counterbalance | Pneumatic Cylinder | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm | +/- 0.8 µm | +/- 0.4 µm |
Bidirectional Linear Repeatability | +/- 75 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 2 µm | +/- 0.8 µm | +/- 0.4 µm |
Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
Pitch | +/- 10 arc-sec | ||
Yaw | +/- 10 arc-sec | ||
Roll | +/- 10 arc-sec | ||
Max Velocity [3] | 0.25 m/s | ||
Max Acceleration [3] | 1.0 G | ||
Max Payload Capability | 16 kg | ||
Force | 120 N | ||
Assembly Mass | 8.0 kg |
Model | AI-LM-5000-15N-Z-CB | ||
Stage | Vertical Z Stage | ||
Travel | 50 mm (+/- 25 mm) | ||
Dimensions (Length x Width x Height) | 165 mm x 96 mm x 136 mm | ||
Drive | Direct Drive Ironless Core Linear Motor | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Counterbalance | Pneumatic Cylinder | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 8.0 µm | +/- 1.0 µm | +/- 0.5 µm |
Bidirectional Linear Repeatability | +/- 75 nm | +/- 45 nm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Straightness In X | +/- 5.0 µm | +/- 2.5 µm | |
Flatness [2] | +/- 5.0 µm | +/- 2.5 µm | |
Pitch [2] | +/- 12.0 arc-sec | ||
Yaw | +/- 12.0 arc-sec | ||
Roll | +/- 12.0 arc-sec | ||
Max Velocity [3] | 0.2 m/s | ||
Max Peak Acceleration [3] | 1.5 G | ||
Max Payload Capability | 10 kg | ||
Force | 15 N | ||
Assembly Mass | 4.4 kg |
Model | AI-LM-3000-47N-Z-CB | ||
Stage | Vertical Z Stage | ||
Travel | 30 mm (+/- 15 mm) | ||
Dimensions (Length x Width x Height) | 165 mm x 96 mm x 136 mm | ||
Drive | Direct Drive Ironless Core Linear Motor | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Counterbalance | Pneumatic Cylinder | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 6.0 µm | +/- 0.8 µm | +/- 0.5 µm |
Bidirectional Linear Repeatability | +/- 75 nm | +/- 45 nm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Straightness In X | +/- 4.0 µm | +/- 2.0 µm | |
Flatness [2] | +/- 4.0 µm | +/- 2.0 µm | |
Pitch [2] | +/- 10.0 arc-sec | ||
Yaw | +/- 10.0 arc-sec | ||
Roll | +/- 10.0 arc-sec | ||
Max Velocity [3] | 0.2 m/s | ||
Max Peak Acceleration [3] | 3.0 G | ||
Max Payload Capability | 10 kg | ||
Force | 47 N | ||
Assembly Mass | 4.4 kg |
Model | AI-VC-2400-11N-Z-CB | ||
Stage | Vertical Z Stage | ||
Travel | 24 mm (+/- 12 mm) | ||
Dimensions (Length x Width x Height) | 165 mm x 96 mm x 98 mm | ||
Drive | Voice Coil Motor (VC) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Counterbalance | Pneumatic Cylinder | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 5.0 µm | +/- 0.7 µm | +/- 0.3 µm |
Bidirectional Linear Repeatability | +/- 75 nm | +/- 45 nm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Straightness In X | +/- 3.0 µm | +/- 2.0 µm | |
Flatness [2] | +/- 3.0 µm | +/- 2.0 µm | |
Pitch [2] | +/- 10.0 arc-sec | ||
Yaw | +/- 10.0 arc-sec | ||
Roll | +/- 10.0 arc-sec | ||
Max Velocity [3] | 0.1 m/s | ||
Max Peak Acceleration [3] | 1.0 G | ||
Max Payload Capability | 10 kg | ||
Force | 11 N | ||
Assembly Mass | 3.6 kg |
Model | AI-VC-600-24N-Z-CB | ||
Stage | Vertical Z Stage | ||
Travel | 6 mm (+/- 3 mm) | ||
Dimensions (Length x Width x Height) | 165 mm x 96 mm x 98 mm | ||
Drive | Voice Coil Motor (VC) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Counterbalance | Pneumatic Cylinder | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.5 µm | +/- 0.2 µm |
Bidirectional Linear Repeatability | +/- 75 nm | +/- 45 nm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Straightness In X | +/- 1.5 µm | +/- 1.0 µm | |
Flatness [2] | +/- 1.5 µm | +/- 1.0 µm | |
Pitch [2] | +/- 10.0 arc-sec | ||
Yaw | +/- 10.0 arc-sec | ||
Roll | +/- 10.0 arc-sec | ||
Max Velocity [3] | 0.1 m/s | ||
Max Peak Acceleration [3] | 2.5 G | ||
Max Payload Capability | 10 kg | ||
Force | 24 N | ||
Assembly Mass | 3.6 kg |
Model | AI-SBS-5000-UII | |
Stage | Linear Stage | |
Travel | 50 mm (+/- 25 mm) | |
Dimensions (Length x Width x Height) | 343 mm x 258 mm x 69 mm | |
Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
(-Pbrk) Dimensions (Length x Width x Height) | 365 mm x 258 mm x 69 mm | |
(-Ebrk) Dimensions (Length x Width x Height) | 415 mm x 258 mm x 69 mm | |
Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
Feedback | Non-Contact Optical Linear Encoder | |
Bearings | Dual Recirculating Ball Rail Bearings | |
Cables | High Flex, 10M Cycle, 3m Length | |
Structure | Anodized Aluminum 6061-T6 | |
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
|
Operating Temperature | 0°C to 50°C | |
Humidity | 10% to 80% Non-Condensing | |
Performance Specifications [1] | (STD) | ULTRA |
Linear Displacement Accuracy | +/- 5 µm | +/- 2 µm |
Backlash | 0 nm | |
Bidirectional Repeatability | +/- 1.0 µm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
Straightness In Y | +/- 3 µm | +/- 2 µm |
Flatness [2] | +/- 3 µm | +/- 2 µm |
Pitch [2] | +/- 12 arc-sec | |
Yaw | +/- 12 arc-sec | |
Roll | +/- 12 arc-sec | |
Max Velocity [3] | 0.3 m/s | |
Max Peak Acceleration [3] | 0.5 G | |
Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
Max Payload Capability With Axis Oriented Vertically | 40 kg | |
Assembly Mass | 11 kg |
Model | AI-CM-3000-030-XY | ||
Stage | Monolithic XY Stage with Open Center |
||
Travel | 30 mm (+/- 15 mm) | ||
Dimensions (Length x Width x Height) | 140 mm x 140 mm x 45 mm | ||
Aperture / Thru | 30 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.5 µm | +/- 0.3 µm |
Bidirectional Linear Repeatability | +/- 50 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 2.0 µm | +/- 0.5 µm | +/- 0.3 µm |
Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
Pitch [2] | +/- 12.0 arc-sec | ||
Yaw | +/- 12.0 arc-sec | ||
Roll | +/- 12.0 arc-sec | ||
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
Top Axis Max Velocity [3] | 0.8 m/s | ||
Bot Axis Max Velocity [3] | 0.5 m/s | ||
Top Axis Max Peak Acceleration [3] | 5.0 G | ||
Bot Axis Max Peak Acceleration [3] | 1.8 G | ||
Max Payload Capability | 8 kg | ||
Assembly Mass | 1.9 kg |
Model | AI-CM-3000-XY | ||
Stage | Monolithic XY Stage | ||
Travel | 30 mm (+/- 15 mm) | ||
Dimensions (Length x Width x Height) | 112 mm x 112 mm x 50 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 |
||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.5 µm | +/- 0.2 µm |
Bidirectional Linear Repeatability | +/- 30 | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 1.0 µm | +/- 0.5 µm | +/- 0.2 µm |
Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
Pitch [2] | +/- 12.0 arc-sec | ||
Yaw | +/- 12.0 arc-sec | ||
Roll | +/- 12.0 arc-sec | ||
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
Top Axis Max Velocity [3] | 0.7 m/s | ||
Bot Axis Max Velocity [3] | 0.5 | ||
Top Axis Max Peak Acceleration [3] | 4.0 G | ||
Bot Axis Max Peak Acceleration [3] | 2.0 G | ||
Max Payload Capability | 8 kg | ||
Assembly Mass | 1.6 kg |
Model | AI-CM-3000 | ||
Stage | Linear Stage | ||
Travel | 30 mm (+/- 15 mm) | ||
Dimensions (Length x Width x Height) | 104 mm x 120 mm x 32 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.5 µm | +/- 0.2 µm |
Bidirectional Linear Repeatability | +/- 30 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 2.5 µm | +/- 1.5 µm | +/- 1.0 µm |
Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
Pitch [2] | +/- 12.0 arc-sec | ||
Yaw | +/- 12.0 arc-sec | ||
Roll | +/- 12.0 arc-sec | ||
Max Velocity [3] | 0.7 m/s | ||
Max Acceleration [3] | 4.0 G | ||
Max Payload Capability | 8 kg | ||
Assembly Mass | 1.1 kg |
Model | AI-LM-3000-XY | ||
Stage | Monolithic XY Stage | ||
Travel | 30 mm ( +/- 15 mm) | ||
Dimensions (Length x Width x Height) | 108 mm x 108 mm x 65 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) |
||
Feedback | Non-Contact Optical Linear Encoder |
||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length |
||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.0 µm | +/- 0.2 µm |
Bidirectional Linear Repeatability | +/- 30 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 3.0 µm | +/- 1.0 µm | +/- 0.2 µm |
Flatness [2] | +/- 3.0 µm | +/- 1.0 µm | |
Pitch [2] | +/- 12.0 arc-sec | ||
Yaw | +/- 12.0 arc-sec | ||
Roll | +/- 6.0 arc-sec | ||
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
Top Axis Max Velocity [3] | 1.2 m/s | ||
Bot Axis Max Velocity [3] | 0.7 m/s | ||
Top Axis Max Peak Acceleration [3] | 11.0 G | ||
Bot Axis Max Peak Acceleration [3] | 4.0 G | ||
Max Payload Capability | 10 kg | ||
Assembly Mass | 2.3 kg |