Model	AI-LM-10000-AB8
Stage	Air Bearing Linear Stage
Travel	50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)	473.2 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	12.5 kg

Model	AI-VC-600-Z-SCB-ATRAK
Stage	Vertical Z Stage
Travel	6 mm (+/- 3 mm)
Dimensions (Length x Width x Height)	73.6 mm x 60 mm x 59 mm
Drive	Voice Coil Motor (VC)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Spring Counterbalance
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Linear Displacement Accuracy	+/- 2.0 µm
Bidirectional Linear Repeatability	+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 5 µm
Flatness [2]	+/- 5 µm
Max Payload Capability	350 g
Force	15 N
Assembly Mass	620 g

Model	AI-LM-5000-AB
Stage	Air Bearing Linear Stage
Travel	50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)	270 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	4.6 kg

Model		AI-HH-60XY-15Z-56RT-LM
Stage		Hybrid Hexapod
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		170 mm x 163.5 mm x 224.5 mm
Drives		Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.03 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	150 mm/s
	Z	15 mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	30 deg/s
	Roll	360 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>1000 deg/s²
Max Payload		5 kg
Assembly Mass		9.1 kg

Model		AI-HH-60XY-15Z-56R
Stage		Hybrid Hexapod
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		174 mm x 176.3 mm x 201 mm
Drives		Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.03 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	100 mm/s
	Z	15 mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	30 deg/s
	Roll	360 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>1000 deg/s²
Max Payload		5 kg
Assembly Mass		5.7 kg

Model		AI-HH-200XY-15Z-56RT-CM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		336.5 mm  x 275 mm x 202.7 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc/sec	5 arc/sec	1 arc/sec
	XZ & YZ	250 arc/sec	200 arc/sec	50 arc/sec
Max Linear Velocity [3]	XY	50 mm/s
	Z	15 mm/s
Max Linear Acceleration[3]	XY	0.1 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch and Roll	30 deg/s
	Yaw	3000 deg/s
Max Angular Acceleration [3]	Pitch and Roll	>1000 deg/s²
	Yaw	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		16.3 kg

Model		AI-HH-100XY-15Z-56RT-LM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		296 mm x 244 mm x 215.2 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc/sec	5 arc/sec	1 arc/sec
	XZ & YZ	250 arc/sec	200 arc/sec	50 arc/sec
Max Linear Velocity [3]	XY	150 mm/s
	Z	15 mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	30 deg/s
	Yaw	3000 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		8.9 kg

Model		AI-HH-60XY-15Z-56RT-LM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		165 mm  x 215.2 mm x 222.7 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	150 mm/s
	Z	15 mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	30 deg/s
	Yaw	3000 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		7.3 kg

Model		AI-HH-60XY-15Z-56RT-BSD
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		171 mm x 177 mm x 191.7 mm
Drives		XY, Pitch & Roll: Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	100 mm/s
	Z	15 mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	30 deg/s
	Yaw	3000 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		6 kg

Model		AI-HH-150XY-40Z-104R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		150 mm (+/- 75 mm)
Travel - Z		40 mm (+ 40 mm/- 0 mm)
Travel - Pitch & Roll		+/- 11 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		399 mm x 350 mm x 308.9 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	9 µm	6 µm
	Radial Runout	12 µm	9 µm	6 µm
	Wobble	25 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	#colspan#~0.01 arc-sec
	Yaw	0.02 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.4 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		5 kg
Assembly Mass		34 kg

Model		AI-HH-100XY-24Z-56R-MS
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		262.5 mm x 246 mm x 250.8 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Magnetic Spring (Constant Force)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
Pitch And Roll	~0.02 arc-sec
Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.5 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		2.5 kg
Assembly Mass		20 kg

Model		AI-HH-100XY-24Z-56R-CM,MS
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		262.5 mm x 246 mm x 218.8 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.02 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		50 mm/s
Max Linear Acceleration [3]		0.1 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		2.5 kg
Assembly Mass		13.1 kg

Model		AI-HH-100XY-24Z-56R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		24 mm (+ 24 mm/- 0 mm)
Travel - Pitch & Roll		+/- 11 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		244 mm x 244 mm x 233.8 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.02 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.5 G
Max Angular Velocity [3]	Pitch and Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	Pitch and Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		2.5 kg
Assembly Mass		18.4 kg

Model		AI-HH-100XY-6Z-56R-CM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll		+/- 3 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		200 mm x 184 mm x 200.5 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.03 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.05 m/s
Max Linear Acceleration [3]		0.1 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		2 kg
Assembly Mass		10 kg

Model		AI-HH-100XY-6Z-56R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll		+/- 3 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		244 mm x 244 mm x 220.5 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.03 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.4 m/s
Max Linear Acceleration [3]		0.5 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Yaw	180 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1800 deg/s²
	Yaw	>3600 deg/s²
Max Payload		2 kg
Assembly Mass		17.2 kg

Model	AI-BSD-5000-Z
Stage	Vertical Z Stage
Travel	50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)	175 mm x 100 mm 229 mm
Motor	Frameless Torque Motor, Precision Ball Screw
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Brake	Standard: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: No Brake
Counterbalance	Standard: None Needed Optional: Pneumatic Counterbalance to Increase Payload Capability
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 125 nm		+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.1 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	20 kg
Max Payload Capability (With Pneuboost)	50 kg
Assembly Mass	7.6 kg

Model	AI-BSD-3200-Z
Stage	Vertical Z Stage
Travel	32 mm (+/- 16 mm)
Dimensions (Length x Width x Height)	175 mm x 100 mm x 202 mm
Motor	Frameless Torque Motor, Precision Ball Screw
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Brake	Standard: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: No Brake
Counterbalance	Standard: None Needed Optional: Pneumatic Counterbalance to Increase Payload Capability
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 125 nm		+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.1 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	20 kg
Max Payload Capability (With Pneuboost)	50 kg
Assembly Mass	6.9 kg

Model	AI-BSD-2400-Z
Stage	Vertical Z Stage
Travel	24 mm (+/- 12 mm)
Dimensions (Length x Width x Height)	175 mm x 100 mm x 188 mm
Motor	Frameless Torque Motor, Precision Ball Screw
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Brake	Standard: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: No Brake
Counterbalance	Standard: None Needed Optional: Pneumatic Counterbalance to Increase Payload Capability
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.8 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 125 nm		+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2 µm	+/- 0.8 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.1 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	20 kg
Max Payload Capability (With Pneuboost)	50 kg
Assembly Mass	6.6 kg

Model	AI-LM-5000-("PAYLOAD")-Z-MCB-("ORIENTATION")
Stage	Vertical Z Stage
Travel	50 mm (+/- 25 mm)
Payload Options	30 N, 50 N, 60 N, 70 N, 80 N, or 90 N
Dimensions (Length x Width x Height)	182 mm x 106 mm x 176 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)		ULTRA		NANO
Linear Displacement Accuracy	+/- 7 µm		+/- 1.0 µm		+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 100 nm				+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm		+/- 3.0 µm
Flatness [2]	+/- 6.0 µm		+/- 3.0 µm
Pitch	15 arc-sec
Yaw	15 arc-sec
Roll	15 arc-sec
Max Velocity [3]	0.05 m/s
Payload (Nominal)	30 N, 50 N, 60 N, 70 N, 80 N, or 90 N	50 N	60 N	70 N	80 N	90 N
Minimum To Maximum Payload Range	24-36 N	44-56 N	54-66 N	64-76 N	74-86 N	84-96 N
Assembly Mass	7.1 kg
Moving Mass	3.3 kg

Model	AI-LM-5000-("PAYLOAD")-Z-MCB-("ORIENTATION")
Stage	Vertical Z Stage
Travel	50 mm (+/- 25 mm)
Payload Options	2 N, 8 N, 14 N, 19 N, or 24 N
Dimensions (Length x Width x Height)	165 mm x 96 mm x 156 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)		ULTRA		NANO
Linear Displacement Accuracy	+/- 7 µm		+/- 1.0 µm		+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 75 nm				+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm		+/- 2.5 µm
Flatness [2]	+/- 5.0 µm		+/- 2.5 µm
Pitch	14 arc-sec
Yaw	14 arc-sec
Roll	14 arc-sec
Max Velocity [3]	0.1 m/s
Payload (Nominal)	--	2 N	8 N	14 N	19 N	24 N
Minimum To Maximum Payload Range	--	0-6 N	4-12 N	10-18 N	15-23 N	18-30 N
Assembly Mass	5.2 kg
Moving Mass	2.1 kg

Model	AI-LM-2400-("PAYLOAD")-Z-MCB-("ORIENTATION")
Stage	Vertical Z Stage
Travel	24 mm (+/-12 mm)
Payload Options	2 N, 8 N, 14 N, 19 N, or 24 N
Dimensions (Length x Width x Height)	165 mm x 96 mm x 130 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)		ULTRA		NANO
Linear Displacement Accuracy	+/- 5 µm		+/- 0.7 µm		+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 75 nm				+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm		+/- 2.0 µm
Flatness [2]	+/- 3.0 µm		+/- 2.0 µm
Pitch	10 arc-sec
Yaw	10 arc-sec
Roll	10 arc-sec
Max Velocity [3]	0.1 m/s
Payload (Nominal)	--	2 N	8 N	14 N	19 N	24 N
Minimum To Maximum Payload Range	--	0-6 N	4-12 N	10-18 N	15-23 N	18-30 N
Assembly Mass	4.6 kg
Moving Mass	2 kg

Model	AI-VC-600-Z-SCB
Stage	Vertical Z Stage
Travel	6 mm (+/- 3 mm)
Dimensions (Length x Width x Height)	80 mm x 60 mm x 70 mm
Drive	Voice Coil Motor (VC)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Spring Counterbalance
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	Depending on specific Application - Ask ALIO
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	4.0 G
Max Payload Capability	2.5 kg
Assembly Mass	0.9 kg

Model	AI-LM-2500-Z-MCB-15N
Stage	Vertical Z Stage
Travel	25 mm (+/- 12.5 mm)
Dimensions (Length x Width x Height)	56 mm x 88 mm x 144 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	Depending on specific Application - Ask ALIO
Max Payload [6]	15N
Payload Range [6]	7.5 - 15 N
Max Velocity	0.1 m/s
Max Acceleration	0.5 G
Assembly Mass	1.9 kg

Model	AI-LM-2500-Z-MCB-7N
Stage	Vertical Z Stage
Travel	25 mm (+/- 12.5 mm)
Dimensions (Length x Width x Height)	56 mm x 88 mm x 144 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	Depending on specific Application - Ask ALIO
Max Payload [6]	7.5 N
Payload Range [6]	2.5 - 7.5 N
Max Velocity	0.1 m/s
Max Acceleration	0.5 G
Assembly Mass	1.9 kg

Model	AI-LM-2500-Z-MCB-2N
Stage	Vertical Z Stage
Travel	25 mm (+/- 12.5 mm)
Dimensions (Length x Width x Height)	56 mm x 88 mm x 144 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	Depending on specific Application - Ask ALIO
Max Payload [6]	2.5 N
Payload Range [6]	0 - 2.5 N
Max Velocity	0.1 m/s
Max Acceleration	0.5 G
Assembly Mass	1.9 kg

Model	AI-VC-2400-NANO-Z-CB
Travel	24 mm (+ 24 mm/- 0 mm)
Dimensions (Diameter x Height)	200 mm x 112 mm
Stage	Vertical Z Stage
Motor	Dual Voice Coil Motor (VC)
Feedback	Dual Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.8 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 0.8 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm	+/- 0.4 µm
Pitch	+/- 10 arc-sec
Yaw	+/- 10 arc-sec
Roll	+/- 10 arc-sec
Max Velocity	0.2 m/s
Max Acceleration	0.5 G
Assembly Mass	6.5 kg
Max Payload	20 kg

Model	AI-VC-2400-120N-Z-CB
Stage	Vertical Z Stage
Travel	24 mm (+ 24 mm/- 0 mm)
Dimensions (Length x Width x Height)	175 mm x 125 mm x 170 mm
Motor	Voice Coil Motor (VC)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.8 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2 µm	+/- 0.8 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch	+/- 10 arc-sec
Yaw	+/- 10 arc-sec
Roll	+/- 10 arc-sec
Max Velocity [3]	0.25 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	16 kg
Force	120 N
Assembly Mass	8.0 kg

Model	AI-LM-5000-15N-Z-CB
Stage	Vertical Z Stage
Travel	50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)	165 mm x 96 mm x 136 mm
Drive	Direct Drive Ironless Core Linear Motor
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 8.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 5.0 µm	+/- 2.5 µm
Flatness [2]	+/- 5.0 µm	+/- 2.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Max Velocity [3]	0.2 m/s
Max Peak Acceleration [3]	1.5 G
Max Payload Capability	10 kg
Force	15 N
Assembly Mass	4.4 kg

Model	AI-LM-3000-47N-Z-CB
Stage	Vertical Z Stage
Travel	30 mm (+/- 15 mm)
Dimensions (Length x Width x Height)	165 mm x 96 mm x 136 mm
Drive	Direct Drive Ironless Core Linear Motor
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6.0 µm	+/- 0.8 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 4.0 µm	+/- 2.0 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch [2]	+/- 10.0  arc-sec
Yaw	+/- 10.0  arc-sec
Roll	+/- 10.0  arc-sec
Max Velocity [3]	0.2 m/s
Max Peak Acceleration [3]	3.0 G
Max Payload Capability	10 kg
Force	47 N
Assembly Mass	4.4 kg

Model	AI-VC-2400-11N-Z-CB
Stage	Vertical Z Stage
Travel	24 mm (+/- 12 mm)
Dimensions (Length x Width x Height)	165 mm x 96 mm x 98 mm
Drive	Voice Coil Motor (VC)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 3.0 µm	+/- 2.0 µm
Flatness [2]	+/- 3.0 µm	+/- 2.0 µm
Pitch [2]	+/- 10.0  arc-sec
Yaw	+/- 10.0  arc-sec
Roll	+/- 10.0  arc-sec
Max Velocity [3]	0.1 m/s
Max Peak Acceleration [3]	1.0 G
Max Payload Capability	10 kg
Force	11 N
Assembly Mass	3.6 kg

Model	AI-VC-600-24N-Z-CB
Stage	Vertical Z Stage
Travel	6 mm (+/- 3 mm)
Dimensions (Length x Width x Height)	165 mm x 96 mm x 98 mm
Drive	Voice Coil Motor (VC)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 1.5 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0  arc-sec
Yaw	+/- 10.0  arc-sec
Roll	+/- 10.0  arc-sec
Max Velocity [3]	0.1 m/s
Max Peak Acceleration [3]	2.5 G
Max Payload Capability	10 kg
Force	24 N
Assembly Mass	3.6 kg

Model	AI-SBS-5000-UII
Stage	Linear Stage
Travel	50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)	343 mm x 258 mm x 69 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	365 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)	415 mm x 258 mm x 69 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 5 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 3 µm	+/- 2 µm
Flatness [2]	+/- 3 µm	+/- 2 µm
Pitch [2]	+/- 12 arc-sec
Yaw	+/- 12 arc-sec
Roll	+/- 12 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	70 kg
Max Payload Capability With Axis Oriented Vertically	40 kg
Assembly Mass	11 kg

Model	AI-CM-3000-030-XY
Stage	Monolithic XY Stage with Open Center
Travel	30 mm (+/- 15 mm)
Dimensions (Length x Width x Height)	140 mm x 140 mm x 45 mm
Aperture / Thru	30 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 0.5 µm	+/- 0.3 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.8 m/s
Bot Axis Max Velocity [3]	0.5 m/s
Top Axis Max Peak Acceleration [3]	5.0 G
Bot Axis Max Peak Acceleration [3]	1.8 G
Max Payload Capability	8 kg
Assembly Mass	1.9 kg

Model	AI-CM-3000-XY
Stage	Monolithic XY Stage
Travel	30 mm (+/- 15 mm)
Dimensions (Length x Width x Height)	112 mm x 112 mm x 50 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.0 µm	+/- 0.5 µm	+/- 0.2 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.7 m/s
Bot Axis Max Velocity [3]	0.5
Top Axis Max Peak Acceleration [3]	4.0 G
Bot Axis Max Peak Acceleration [3]	2.0 G
Max Payload Capability	8 kg
Assembly Mass	1.6 kg

Model	AI-CM-3000
Stage	Linear Stage
Travel	30 mm (+/- 15 mm)
Dimensions (Length x Width x Height)	104 mm x 120 mm x 32 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Max Velocity [3]	0.7 m/s
Max Acceleration [3]	4.0 G
Max Payload Capability	8 kg
Assembly Mass	1.1 kg

Model	AI-LM-3000-XY
Stage	Monolithic XY Stage
Travel	30 mm ( +/- 15 mm)
Dimensions (Length x Width x Height)	108 mm x 108 mm x 65 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 1.0 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 1.0 µm	+/- 0.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.0 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 6.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.2 m/s
Bot Axis Max Velocity [3]	0.7 m/s
Top Axis Max Peak Acceleration [3]	11.0 G
Bot Axis Max Peak Acceleration [3]	4.0 G
Max Payload Capability	10 kg
Assembly Mass	2.3 kg