ModelAI-LM-200000-UII-XB
StageLinear Stage
Travel2000 mm (+/- 1000 mm)
Dimensions (Length x Width x Height)2366 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy+/- 200 µm+/- 10 µm+/- 5 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 50 µm +/- 25 µm +/- 10 µm
Flatness [2] +/- 200 µm +/- 50 µm +/- 15 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-LM-150000-UII-XB
StageLinear Stage
Travel1500 mm (+/- 750 mm)
Dimensions (Length x Width x Height)1866 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy+/-75 µm +/-10 µm +/- 5 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness+/- 40 µm +/- 25 µm +/- 10 µm
Flatness [2]+/- 175 µm +/- 35 µm +/- 15 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO