ModelAI-LM-30000-ABL
StageXY Planar Air Bearing Stage
Travel - XY300 mm (+/- 150 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)1350 mm x 800 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-LM-20000-ABL
StageXY Planar Air Bearing Stage
Travel - XY200 mm (+/- 100 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)1250 mm x 700 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-HH-30D-200XY-62Z-80R-LM
StageHybrid Hexapod (Angulares® )
Travel - XY200 mm (+/- 100 mm)
Travel - Z62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll  +/- 30 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)571 mm x 401 mm x 322.2 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
Rotary BrakeStandard: No Brake
Optional: Pneumatic Release, Spring Engage Brake (B)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 30 nm
Z +/- 200 nm
Pitch And Roll +/- 1 arc-sec
Yaw +/- 0.5 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout12 µm10 µm5 µm
Radial Runout12 µm10 µm5 µm
Wobble20 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.15 arc-sec
Yaw0.04 arc-sec
Max Linear Velocity [3]XY100  mm/s
Z15  mm/s
Max Linear Acceleration [3]XY0.3 G
Z0.3 G
Max Angular Velocity [3]Pitch And Roll20 deg/s
Roll>3000 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1000 deg/s²
YAW>2000 deg/s²
Max Payload5-10 kg
Assembly Mass30 kg
ModelAI-HH-30D-200XY-62Z-80R-CM
StageHybrid Hexapod (Angulares® )
Travel - XY200 mm (+/- 100 mm)
Travel - Z62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll  +/- 30 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)510 mm x 336.5 mm x 293.2 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
Rotary BrakeStandard: No Brake
Optional: Pneumatic Release, Spring Engage Brake (B)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 30 nm
Z +/- 200 nm
Pitch And Roll +/- 1 arc-sec
Yaw +/- 0.5 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout12 µm10 µm5 µm
Radial Runout12 µm10 µm5 µm
Wobble20 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.15 arc-sec
Yaw0.04 arc-sec
Max Linear Velocity [3]XY50  mm/s
Z15  mm/s
Max Linear Acceleration [3]XY0.1 G
Z0.3 G
Max Angular Velocity [3]Pitch And Roll20 deg/s
Roll>3000 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1000 deg/s²
YAW>2000 deg/s²
Max Payload5 kg
Assembly Mass14 kg
ModelAI-HH-200XY-60Z-154RA
StageHybrid Hexapod 
Travel - XY200 mm (+/- 100 mm)
Travel - Z60 mm (+ 60 mm/- 0 mm)
Travel - Pitch & Roll  +/- 14 deg
Travel - Yaw360 deg continous
Dimensions (Length x Width x Height)443.2 mm x 410.1 mm x 378 mm
DrivesXY: Direct Drive (Ironless Core Linear Motor)
Pitch & Roll: Frameless Torque Motor with Precision Ball Screw
Yaw: Torque Motor
BrakePneumatic Release, Spring Lock
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm +/- 70 nm
Z +/- 100 nm +/- 70 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout10 nm7 nm4 nm
Radial Runout10 nm7 nm4 nm
Wobble20 arc-sec10 arc-sec6 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.02 arc-sec
Yaw~0.01 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]XY500  mm/s
Z30  mm/s
Max Linear Acceleration [3]0.3 G
Max Angular Velocity [3]Pitch And Roll60 deg/s
Yaw1800 deg/s
Max Angular Acceleration [3]Pitch And Roll>1000 deg/s²
Yaw>3600 deg/s²
Max Payload20 kg
Assembly Mass57 kg
ModelAI-HH-200XY-15Z-56RT-CM
StageHybrid Hexapod (6 DOF)
Travel - XY200 mm (+/- 100 mm)
Travel - Z15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continous
Dimensions (Length x Width x Height)336.5 mm  x 275 mm x 202.7 mm
DrivesXY: Direct Drive (Ironless Core Linear Motor)
Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm +/- 70 nm
Z +/- 100 nm +/- 70 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.04 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc/sec5 arc/sec1 arc/sec
XZ & YZ250 arc/sec200 arc/sec50 arc/sec
Max Linear Velocity [3]XY50 mm/s
Z15 mm/s
MAX LINEAR ACCELERATION [3]XY0.1 G
Z0.3 G
Max Angular Velocity [3]PITCH AND ROLL30 deg/s
YAW3000 deg/s
MAX ANGULAR ACCELERATION [3]PITCH AND ROLL>1000 deg/s²
YAW>7200 deg/s²
Max Payload5 kg
Assembly Mass16.3 kg
ModelAI-6D-250XY-92Z
StageHybrid Hexapod  (6 DOF)
Travel - XY250mm (+/- 125mm)
Travel - Z92mm (+ 92mm/ - 0mm) 
Travel - Pitch & Roll  +/- 20 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)435 mm x 435 mm x 707.5 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
Optional: Magnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications 
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.02 arc-sec
Yaw Resolution ~0.01 arc-sec
Max Linear Velocity [10]0.3 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]180 deg/s
Assembly Mass130 kg
Max Payload [11]35 kg
ModelAI-HH-300XY-206Z-154R
StageHybrid Hexapod (6 DOF)
Travel - XY300 mm (+/- 150 mm)
Travel - Z206 mm (+ 206 mm/- 0 mm)
Travel - Pitch & Roll  +/- 18 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)504.2 mm x 500 mm x 660 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.5 arc-sec +/- 0.3 arc-sec
Yaw +/- 0.5 arc-sec +/- 0.3 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z < 20  nm
Pitch And Roll  < 0.08 arc-sec
Yaw  < 0.08 arc-sec
Yaw RunoutAxial Runout10 µm7 µm4 µm
Radial Runout10 µm7 µm4 µm
Wobble20 arc-sec10 arc-sec6 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.01 arc-sec
Yaw~0.01 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.5 m/s
Max Linear Acceleration [3]0.3 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload20 kg
Assembly Mass122 kg
ModelAI-HH-300XY-106Z-154R
StageHybrid Hexapod (6 DOF)
Travel - XY300 mm (+/- 150 mm)
Travel - Z106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll  +/- 18 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)504.2
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.5 arc-sec +/- 0.3 arc-sec
Yaw +/- 0.5 arc-sec +/- 0.3 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z  < 20  nm
Pitch And Roll  < 0.08 arc-sec
Yaw  < 0.08 arc-sec
Yaw RunoutAxial Runout10 µm7 µm4 µm
Radial Runout10 µm7 µm4 µm
Wobble20 arc-sec10 arc-sec6 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.01 arc-sec
Yaw~0.01 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.5 m/s
Max Linear Acceleration [3]0.3 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll#colspan#180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload10 kg
Assembly Mass105 kg
ModelAI-HH-300XY-106Z-104R
StageHybrid Hexapod (6 DOF)
Travel - XY300 mm (+/- 150 mm)
Travel - Z106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll  +/- 18 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)504.2 mm x 500 mm x 519.9 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.5 arc-sec +/- 0.3 arc-sec
Yaw +/- 0.5 arc-sec +/- 0.3 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z  < 20  nm
Pitch And Roll  < 0.08 arc-sec
Yaw  < 0.08 arc-sec
Yaw RunoutAxial Runout12 µm9 µm6 µm
Radial Runout12 µm9 µm6 µm
Wobble25 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.01 arc-sec
Yaw0.02 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.5 m/s
Max Linear Acceleration [3]0.3 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload7.5 kg
Assembly Mass105 kg
ModelAI-HH-200XY-40Z-104R
StageHybrid Hexapod (6 DOF)
Travel - XY200 mm(+/- 100 mm)
Travel - Z20 mm (+ 20 mm/- 0 mm)
Travel - Pitch & Roll  +/- 11 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)399 mm x 359 mm x 318.9 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.5 arc-sec +/- 0.3 arc-sec
Yaw +/- 0.5 arc-sec +/- 0.3 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z  < 20  nm
Pitch And Roll  < 0.08 arc-sec
Yaw  < 0.08 arc-sec
Yaw RunoutAxial Runout12 µm9 µm6 µm
Radial Runout12 µm9 µm6 µm
Wobble25 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.01 arc-sec
Yaw0.02 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.5 m/s
Max Linear Acceleration [3]0.3 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload5 kg
Assembly Mass46 kg
ModelAI-LM-20000-Z-ABCB
StageVertical Z Stage
Travel200mm (+/- 100mm)
Dimensions (Length x Width x Height)230mm x 50mm x 484mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceAir Bearing Pneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 3.0 µm +/- 2.0 µm +/- 1.5 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Max Velocity [3]0.25 m/s
Max Peak Acceleration [3]2.5 G
Max Payload Capability25 kg
Assembly Mass9.3 kg
ModelAI-LM-17000-("PAYLOAD")-Z-MCB-BASE
StageVertical Z Stage
Travel170 mm (+/- 85 mm)
Payload Options20 N, 30 N, 40 N, 50 N, or 60 N
Dimensions (Length x Width x Height)262 mm x 50 mm x 340 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 2.0 µm +/- 0.4 µm
Bidirectional Linear Repeatability +/- 75 nm +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5.0 µm +/- 2.0 µm +/- 1.5 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm +/- 1.5 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll18 arc-sec
Max Velocity [3]1 m/s
Max Acceleration [3]2.0 G
Payload (Nominal)20 N30 N40 N50 N60 N
Minimum To Maximum Payload Range15-25 N25-35 N35-45 N45-55 N55-65 N
Assembly Mass13.8 kg
ModelAI-LM-30000-UII
StageCartesian Gantry
Travel - X And/Or Travel - Y300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)600 mm x 807 mm x 320 mm
Max. Sample Width (Inner Width)434 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]STDPRCSNULTRA
Linear Displacement Accuracy +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 10 µm +/- 6 µm
Pitch20 arc-sec
Yaw20 arc-sec
Roll20 arc-sec
Max Velocity With AC Drive [3]2.0  m/s
Max Velocity With 48VDC Drive [3]0.5 m/s
Max Acceleration With AC Drive [3]2.5 G
Max Acceleration With 48VDC Drive [3]0.5 G
Max (Vertical) Payload Capability 25 kg
Max (Horizontal) Payload Capability 30 kg
Assembly Mass30 kg
Configurable Options 
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific RequirementsY Axis Top Down Mounting (Face Mounting Shown)
Large or Small Cable Tracks
Mix and Match Travel
Risers Available (Custom Height)
Multiple Cable Routing and Connectorization Options
Customer Cable Routing Available
Granite, Optical Table, and Breadboard Bases
Single Axis Versions Available
Z Axis Options Available
X and X' Controlled Yaw Available
Various Material Options Available
Inch Spacing Versions Available (see page 3)
*Increased Gap between X and X' stages
without Increased Y Travel
ModelAI-LM-20000-UII
StageCartesian Gantry
Travel - X And/Or Travel - Y200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)500 mm x 707 mm x 320 mm
Max. Sample Width (Inner Width)334 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]STDPRCSNULTRA
Linear Displacement Accuracy +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 10 µm +/- 6 µm
Pitch20 arc-sec
Yaw20 arc-sec
Roll20 arc-sec
Max Velocity With AC Drive [3]2.0  m/s
Max Velocity With 48VDC Drive [3]0.5 m/s
Max Acceleration With AC Drive [3]2.5 G
Max Acceleration With 48VDC Drive [3]0.5 G
Max (Vertical) Payload Capability 25 kg
Max (Horizontal) Payload Capability 30 kg
Assembly Mass28 kg
Configurable Options
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific RequirementsY Axis Top Down Mounting (Face Mounting Shown)
Large or Small Cable Tracks
Mix and Match Travel
Risers Available (Custom Height)
Multiple Cable Routing and Connectorization Options
Customer Cable Routing Available
Granite, Optical Table, and Breadboard Bases
Single Axis Versions Available
Z Axis Options Available
X and X' Controlled Yaw Available
Various Material Options Available
Inch Spacing Versions Available (see page 3)
*Increased Gap between X and X' stages
without Increased Y Travel
ModelAI-XBS-30000-UII
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)663 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)708 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 12 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass29 kg
ModelAI-XBS-25000-UII
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)613 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)658 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 10 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass28 kg
ModelAI-XBS-20000-UII
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)563 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)608 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 8 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch [2] +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass27 kg
ModelAI-SBS-30000-UII
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)593 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)615 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)665 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 12 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass13 kg
ModelAI-SBS-25000-UII
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)543 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)565 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)615 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 10 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass12.5 kg
ModelAI-SBS-20000-UII
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)493 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)515 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)565 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 8 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch [2] +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass12 kg
ModelAI-LM-30000-UII-WL
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions (Length x Width x Height)620 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass25 kg
ModelAI-LM-25000-UII-WL
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)570 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 10 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass24 kg
ModelAI-LM-20000-UII-WL
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)520 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 8 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass23 kg
ModelAI-LM-30000-UII-W
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
520 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass25 kg
ModelAI-LM-25000-UII-W
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
470 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 10 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass24 kg
ModelAI-LM-20000-UII-W
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
420 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass23 kg
ModelAI-LM-30000-UII-SN
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
480 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass4 kg
ModelAI-LM-25000-UII-SN
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
430 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 10 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass3.4 kg
ModelAI-LM-20000-UII-SN
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
380 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass2.9 kg
ModelAI-LM-30000-UII-S
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
520 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass12 kg
ModelAI-LM-25000-UII-S
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
470 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 10 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass11 kg
ModelAI-LM-20000-UII-S
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
420 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass10 kg
ModelAI-LM-30000-UII
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
520 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 9 arc-sec
Yaw +/- 9 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
3.5 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass15 kg
ModelAI-LM-25000-UII
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
470 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 10 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 7.5 arc-sec
Yaw +/- 7.5 arc-sec
Roll +/- 4 arc-sec
Max Velocity
[3]
3.5 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass14 kg
ModelAI-LM-20000-UII
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
420 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball
Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch [2] +/- 7.5 arc-sec
Yaw +/- 7.5 arc-sec
Roll +/- 4 arc-sec
Max Velocity
[3]
3 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass13 kg
ModelAI-LM-300x200-XY
StageMonolithic XY Stage
(Asymmetrical)
Travel - X300 mm (+/- 150 mm)
Travel - Y200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
500 mm x 336 mm x 100mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 5 µm +/- 2 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Orthogonality20 arc-sec5 arc-sec1 arc-sec
Max Velocity
[3]
1 m/s
Max
Acceleration [3]
0.7 G
Max Payload
Capability
30 kg
Assembly Mass28 kg
ModelAI-LM-160x100-XY
StageMonolithic XY Stage
(Asymmetrical)
Travel - X160 mm (+/- 80 mm)
Travel - Y100 mm (+/- 50 mm)
Dimensions
(Length X Width X Height)
275 mm x 175 mm x 80 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm +/- 0.7 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1.0 µm +/- 0.7 µm +/- 0.4 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 7.5 arc-sec
Yaw +/- 7.5 arc-sec
Roll +/- 4.0 arc-sec
Orthogonality +/- 10.0 arc-sec +/- 2.5 arc-sec +/- 0.5 arc-sec
Max Velocity
[3]
1 m/s
Max Peak
Acceleration [3]
1.5 G
Max Payload
Capability
25 kg
Assembly Mass11.4 kg
ModelAI-VBS-20000
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
492 mm x 154 mm x 50 mm
Brake OptionsStandard: No Brake

Optional: Pneumatic Release, Spring Engage Brake (-PBRK)

Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk)
Dimensions (Length x Width x Height)
524 mm x 154 mm x 50 mm
(-Ebrk)
Dimensions (Length x Width x Height)
571 mm x 154 mm x 50 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 4 µm +/- 1.0 µm +/- 0.4 µm
Backlash0 nm
Bidirectional
Linear Repeatability
 +/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 4 µm +/- 3 µm
Flatness [2] +/- 5.0 µm +/- 3.0 µm
Pitch [2]+/- 15 arc-sec
Yaw+/- 15 arc-sec
Roll+/- 15 arc-sec
Max Velocity
[3]
0.3 m/s
Max Peak
Acceleration [3]
1.0 G
Max Payload
Capability

W/ Axis Oriented Horizontal
25 kg
Max Payload
Capability

W/ Axis Oriented Vertical
12 kg
Assembly Mass8 kg
ModelAI-CM-25000-250-XY
StageMonolithic XY Stage with
Open Center
Travel250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)468.5 mm x 468.5 mm x 80 mm
Aperture /
Thru
250 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.2 µm +/- 0.7 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 1.2 µm +/- 0.7 µm
Flatness [2] +/- 4.0 µm +/- 3.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Orthogonality+/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.1 m/s
Bot Axis Max
Velocity [3]
0.6 m/s
Top Axis Max
Peak Acceleration [3]
1.0 G
Bot Axis Max
Peak Acceleration [3]
0.3 G
Max Payload
Capability
25 kg
Assembly Mass33 kg
ModelAI-CM-20000-200-XY
StageMonolithic XY Stage with
Open Center
Travel200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)332.5 mm x 332.5 mm x 65 mm
Aperture /
Thru
200 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.2 µm +/- 0.7 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 1.2 µm +/- 0.7 µm
Flatness [2] +/- 4.0 µm +/- 3.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Orthogonality+/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1 m/s
Bot Axis Max
Velocity [3]
0.6 m/s
Top Axis Max
Peak Acceleration [3]
1.0 G
Bot Axis Max
Peak Acceleration [3]
0.4 G
Max Payload
Capability
15 kg
Assembly Mass11.4 kg
ModelAI-CM-30000-XY
StageMonolithic XY Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
500 mm x 500 mm x 100 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 6.0 µm +/- 1.0 µm +/- 0.6 µm
Bidirectional
Linear Repeatability
 +/- 30
ResolutionStandard:
~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 10.0 µm +/- 2.0 µm +/- 1.0 µm
Flatness [2] +/- 8.0 µm +/- 5.0 µm
Pitch [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 18.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
0.7 m/s
Bot Axis Max
Velocity [3]
0.3
Top Axis Max
Peak Acceleration [3]
0.4 G
Bot Axis Max
Peak Acceleration [3]
0.1
Max Payload
Capability
35 kg
Assembly Mass69 kg
ModelAI-CM-25000-XY
StageMonolithic XY Stage
Travel250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
400 mm x 400 mm x 100 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 30
ResolutionStandard:
~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 2.0 µm +/- 1.0 µm
Flatness [2] +/- 6.0 µm +/- 4.0 µm
Pitch [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 18.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
0.8 m/s
Bot Axis Max
Velocity [3]
0.5
Top Axis Max
Peak Acceleration [3]
0.6 G
Bot Axis Max
Peak Acceleration [3]
0.2 G
Max Payload
Capability
25 kg
Assembly Mass48 kg
ModelAI-CM-20000-XY
StageMonolithic XY Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
275 mm x 275 mm x 60 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 4.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30
ResolutionStandard:
~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 1.0 µm +/- 0.4 µm
Flatness [2] +/- 4.0 µm +/- 3.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1 m/s
Bot Axis Max
Velocity [3]
0.6
Top Axis Max
Peak Acceleration [3]
1.0 G
Bot Axis Max
Peak Acceleration [3]
0.4 G
Max Payload
Capability
15 kg
Assembly Mass12 kg
ModelAI-CM-30000
StageLinear Stage
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
506 mm x 120 mm x 48 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 6.0 µm +/- 1.0 µm +/- 0.6 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8.0 µm +/- 6.0 µm +/- 4.0 µm
Flatness [2] +/- 8.0 µm +/- 5.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Max Velocity
[3]
Depending on application - Ask ALIO
Max
Acceleration [3]
Depending on application - Ask ALIO
Max Payload
Capability
Depending on application - Ask ALIO
Assembly MassDepending on application - Ask ALIO
ModelAI-CM-25000
StageLinear Stage
Travel250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
404 mm x 154 mm x 48 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 4.0 µm +/- 3.0 µm
Flatness [2] +/- 6.0 µm +/- 4.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Max Velocity
[3]
Depending on application - Ask ALIO
Max
Acceleration [3]
Depending on application - Ask ALIO
Max Payload
Capability
Depending on application - Ask ALIO
Assembly MassDepending on application - Ask ALIO
ModelAI-CM-20000
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
279 mm x 120 mm x 32 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 4.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5.0 µm +/- 4.0 µm +/- 3.0 µm
Flatness [2] +/- 5.0 µm +/- 3.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Max Velocity
[3]
1.4 m/s
Max
Acceleration [3]
2.0 G
Max Payload
Capability
12 kg
Assembly Mass3.2 kg
ModelAI-LM-30000
StageLinear Stage
Travel 300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
506 mm x 178 mm x 55 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.0 µm +/- 0.6 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 4.5 µm +/- 3.0 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm
Pitch Y [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 10.0 arc-sec
Max Velocity
[3]
2.4 m/s
Max
Acceleration [3]
4.0 G
Max Payload
Capability
50 kg
Assembly Mass15.2 kg
ModelAI-LM-25000
StageLinear Stage
Travel 250 mm (+ /-125 mm)
Dimensions
(Length x Width x Height)
404 mm x 154 mm x 55 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 3.0 µm +/- 2.0 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm
Pitch Y [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 10.0 arc-sec
Max Velocity
[3]
2.5 m/s
Max
Acceleration [3]
5.0 G
Max Payload
Capability
40 kg
Assembly Mass9.4 kg
ModelAI-LM-20000
StageLinear Stage
Travel 200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
340 mm x 154 mm x 46 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.0 µm +/- 2.0 µm +/- 1.5 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch Y [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Max Velocity
[3]
2.4 m/s
Max
Acceleration [3]
6.0 G
Max Payload
Capability
30 kg
Assembly Mass7.8 kg
ModelAI-LM-30000-300-XY
StageMonolithic XY Stage with Open Center
Travel300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
500 mm x 500 mm x 120 mm
Aperture /
Thru
300 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8.0 µm +/- 1.5 µm +/- 1.0 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5.0 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 6.0 µm +/- 3.0 µm
Pitch [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 18.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.7 m/s
Bot Axis Max
Velocity [3]
1.2 m/s
Top Axis Max
Peak Acceleration [3]
2.0 G
Top Axis Max
Peak Acceleration [3]
1.0 G
Max Payload
Capability
50 kg
Assembly Mass58 kg
ModelAI-LM-25000-250-XY
StageMonolithic XY Stage with Open Center
Travel 250 mm (+/- 125 mm)
Dimensions (Length x Width x Height)460 mm x 460 mm x 95 mm
Aperture / Thru250 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 6.0 µm +/- 1.5 µm +/- 1.0 µm
Bidirectional Linear Repeatability +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm
Pitch [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 18.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max Velocity [3]1.9 m/s
Bot Axis Max Velocity [3]1.3 m/s
Top Axis Max Peak Acceleration [3]3.0 G
Top Axis Max Peak Acceleration [3]1.4 G
Max Payload Capability40 kg
Assembly Mass37 kg
ModelAI-LM-20000-200-XY
StageMonolithic XY Stage with Open Center
Travel 200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
392 mm x 392 mm x 80 mm
Aperture /
Thru
200 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 6.0 µm +/- 1.5 µm +/- 0.8 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.0 µm +/- 1.5 µm +/- 0.8 µm
Flatness [2] +/- 4.0 µm +/- 2.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
2 m/s
Bot Axis Max
Velocity [3]
1.1 m/s
Top Axis Max
Peak Acceleration [3]
4.0 G
Top Axis Max
Peak Acceleration [3]
1.4 G
Max Payload
Capability
30 kg
Assembly Mass23 kg
ModelAI-LM-30000-XY
StageMonolithic XY Stage
Travel 300 mm (+/- 150 mm)
Dimensions
(Length x Width x Height)
500 mm x 500 mm x 115 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.0 µm +/- 0.6 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.0 µm +/- 1.0 µm +/- 0.6 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm
Pitch [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 10.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.6 m/s
Bot Axis Max
Velocity [3]
1 m/s
Top Axis Max
Peak Acceleration [3]
1.9 G
Bot Axis Max
Peak Acceleration [3]
0.7 G
Max Payload
Capability
50 kg
Assembly Mass75 kg
ModelAI-LM-25000-XY
StageMonolithic XY Stage
Travel 250 mm (+/- 125 mm)
Dimensions
(Length x Width x Height)
400 mm x 400 mm x 115 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.0 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm
Pitch [2] +/- 18.0 arc-sec
Yaw +/- 18.0 arc-sec
Roll +/- 10.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.5 m/s
Bot Axis Max
Velocity [3]
0.9 m/s
Top Axis Max
Peak Acceleration [3]
1.9 G
Bot Axis Max
Peak Acceleration [3]
0.7 G
Max Payload
Capability
40 kg
Assembly Mass52 kg
ModelAI-LM-20000-XY-HF
StageMonolithic XY Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
336 mm x 336 mm x 90 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1.5 µm +/- 1.0 µm +/- 0.4 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
2.0 m/s
Bot Axis Max
Velocity [3]
1.2 m/s
Top Axis Max
Peak Acceleration [3]
5.6 G
Bot Axis Max
Peak Acceleration [3]
2 G
Max Payload
Capability
30 kg
Assembly Mass28 kg
ModelAI-LM-20000-XY
StageMonolithic XY Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
336 mm x 336 mm x 90 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1.5 µm +/- 1.0 µm +/- 0.4 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.7 m/s
Bot Axis Max
Velocity [3]
1 m/s
Top Axis Max
Peak Acceleration [3]
3.0 G
Bot Axis Max
Peak Acceleration [3]
1.3 G
Max Payload
Capability
30 kg
Assembly Mass28 kg
ModelAI-LM-16000-XY
StageMonolithic XY Stage
Travel 160 mm (+/- 80 mm)
Dimensions
(Length x Width x Height)
275 mm x 275 mm x 80 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 0.7 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1.5 µm +/- 0.7 µm +/- 0.4 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.5 m/s
Bot Axis Max
Velocity [3]
1 m/s
Top Axis Max
Peak Acceleration [3]
3.0 G
Bot Axis Max
Peak Acceleration [3]
1.3 G
Max Payload
Capability
25 kg
Assembly Mass16 kg