| Model | AI-LM-30000-AB8 | ||
| Stage | Air Bearing Linear Stage | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 676.4 mm x 196.85 mm x 75.90 mm |
||
| Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Air Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
| Environment | Ambient | ||
| Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
| Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1 µm per 100mm Travel | ||
| Flatness [2] | +/- 1 µm per 100mm Travel | ||
| Pitch | +/- 5 arc-sec | ||
| Yaw | +/- 5 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Pitch Moment | 79 nm | ||
| Max Roll Moment | 75 nm | ||
| Max Yaw Moment | 37 nm | ||
| Vertical Z Stiffness | 480 N/µm | ||
| Horizontal Y Stiffness | 140 N/µm | ||
| Max Payload Capacity | 60 kg | ||
| Assembly Mass | 15.5 kg | ||
| Model | AI-LM-20000-AB8 | ||
| Stage | Air Bearing Linear Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 574.8 mm x 196.85 mm x 75.90 mm |
||
| Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Air Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
| Environment | Ambient | ||
| Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
| Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1 µm per 100mm Travel | ||
| Flatness [2] | +/- 1 µm per 100mm Travel | ||
| Pitch | +/- 5 arc-sec | ||
| Yaw | +/- 5 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Pitch Moment | 79 nm | ||
| Max Roll Moment | 75 nm | ||
| Max Yaw Moment | 37 nm | ||
| Vertical Z Stiffness | 480 N/µm | ||
| Horizontal Y Stiffness | 140 N/µm | ||
| Max Payload Capacity | 60 kg | ||
| Assembly Mass | 14 kg | ||
| Model | AI-LM-30000-AB |
| Stage | Air Bearing Linear Stage |
| Travel | 300 mm (+/- 150 mm) |
| Dimensions (Length x Width x Height) | 524 mm x 150 mm x 63.8 mm |
| Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
| Drive | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
| Environment | Ambient |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
| Max Pitch Moment [2] | 20 Nm |
| Max Roll Moment [2] | 24 Nm |
| Max Yaw Moment [2] | 10 Nm |
| Vertical Z Stiffness | 250 N/µm |
| Horizontal Y Stiffness | 105 N/µm |
| Max Velocity [3] | 2.0 m/s |
| Max Acceleration [3] | 2.0 G |
| Max Load Capacity | 30 kg |
| Assembly Mass | 7.8 kg |
| Model | AI-LM-20000-AB |
| Stage | Air Bearing Linear Stage |
| Travel | 200 mm (+/- 100 mm) |
| Dimensions (Length x Width x Height) | 422.4 mm x 150 mm x 63.8 mm |
| Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
| Drive | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
| Environment | Ambient |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
| Max Pitch Moment [2] | 20 Nm |
| Max Roll Moment [2] | 24 Nm |
| Max Yaw Moment [2] | 10 Nm |
| Vertical Z Stiffness | 250 N/µm |
| Horizontal Y Stiffness | 105 N/µm |
| Max Velocity [3] | 2.0 m/s |
| Max Acceleration [3] | 2.0 G |
| Max Load Capacity | 30 kg |
| Assembly Mass | 6.5 kg |
| Model | AI-LM-30000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 300 mm (+/- 150 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1350 mm x 800 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-LM-20000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 200 mm (+/- 100 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1250 mm x 700 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-HH-30D-200XY-62Z-80R-LM | |||
| Stage | Hybrid Hexapod (Angulares® ) | |||
| Travel - XY | 200 mm (+/- 100 mm) | |||
| Travel - Z | 62 mm (+ 62 mm/- 0 mm) | |||
| Travel - Pitch & Roll | +/- 30 deg | |||
| Travel - Yaw | 360 deg continuous | |||
| Dimensions (Length x Width x Height) | 571 mm x 401 mm x 322.2 mm | |||
| Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
| Bearings | Crossed Roller Bearings | |||
| Rotary Brake | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B) |
|||
| Cables | High Flex, 10M Cycle, 3m Length | |||
| Structure | Anodized Aluminum 6061-T6 | |||
| Environment | Ambient | |||
| Operating Temperature | 0°C to 50°C | |||
| Humidity | 10% to 80% Non-Condensing | |||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |
| Bidrectional Repeatability | XY | +/- 30 nm | ||
| Z | +/- 200 nm | |||
| Pitch And Roll | +/- 1 arc-sec | |||
| Yaw | +/- 0.5 arc-sec | |||
| Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
| Z | ||||
| Pitch And Roll | ||||
| Yaw | ||||
| Minimum Incremental Step Size | XY | < 20 nm | ||
| Z | < 20 nm | |||
| Pitch And Roll | < 0.1 arc-sec | |||
| Yaw | < 0.1 arc-sec | |||
| Yaw Runout | Axial Runout | 12 µm | 10 µm | 5 µm |
| Radial Runout | 12 µm | 10 µm | 5 µm | |
| Wobble | 20 arc-sec | 15 arc-sec | 10 arc-sec | |
| Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Z | ||||
| Pitch And Roll | ~0.15 arc-sec | |||
| Yaw | 0.04 arc-sec | |||
| Max Linear Velocity [3] | XY | 100 mm/s | ||
| Z | 15 mm/s | |||
| Max Linear Acceleration [3] | XY | 0.3 G | ||
| Z | 0.3 G | |||
| Max Angular Velocity [3] | Pitch And Roll | 20 deg/s | ||
| Roll | >3000 deg/s | |||
| Max Angular Acceleration [3] | PITCH AND ROLL | >1000 deg/s² | ||
| YAW | >2000 deg/s² | |||
| Max Payload | 5-10 kg | |||
| Assembly Mass | 30 kg | |||
| Model | AI-HH-30D-200XY-62Z-80R-CM | |||
| Stage | Hybrid Hexapod (Angulares® ) | |||
| Travel - XY | 200 mm (+/- 100 mm) | |||
| Travel - Z | 62 mm (+ 62 mm/- 0 mm) | |||
| Travel - Pitch & Roll | +/- 30 deg | |||
| Travel - Yaw | 360 deg continuous | |||
| Dimensions (Length x Width x Height) | 510 mm x 336.5 mm x 293.2 mm | |||
| Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
| Bearings | Crossed Roller Bearings | |||
| Rotary Brake | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B) |
|||
| Cables | High Flex, 10M Cycle, 3m Length | |||
| Structure | Anodized Aluminum 6061-T6 | |||
| Environment | Ambient | |||
| Operating Temperature | 0°C to 50°C | |||
| Humidity | 10% to 80% Non-Condensing | |||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |
| Bidrectional Repeatability | XY | +/- 30 nm | ||
| Z | +/- 200 nm | |||
| Pitch And Roll | +/- 1 arc-sec | |||
| Yaw | +/- 0.5 arc-sec | |||
| Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
| Z | ||||
| Pitch And Roll | ||||
| Yaw | ||||
| Minimum Incremental Step Size | XY | < 20 nm | ||
| Z | < 20 nm | |||
| Pitch And Roll | < 0.1 arc-sec | |||
| Yaw | < 0.1 arc-sec | |||
| Yaw Runout | Axial Runout | 12 µm | 10 µm | 5 µm |
| Radial Runout | 12 µm | 10 µm | 5 µm | |
| Wobble | 20 arc-sec | 15 arc-sec | 10 arc-sec | |
| Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Z | ||||
| Pitch And Roll | ~0.15 arc-sec | |||
| Yaw | 0.04 arc-sec | |||
| Max Linear Velocity [3] | XY | 50 mm/s | ||
| Z | 15 mm/s | |||
| Max Linear Acceleration [3] | XY | 0.1 G | ||
| Z | 0.3 G | |||
| Max Angular Velocity [3] | Pitch And Roll | 20 deg/s | ||
| Roll | >3000 deg/s | |||
| Max Angular Acceleration [3] | PITCH AND ROLL | >1000 deg/s² | ||
| YAW | >2000 deg/s² | |||
| Max Payload | 5 kg | |||
| Assembly Mass | 14 kg | |||
| Model | AI-HH-200XY-60Z-154RA | |||
| Stage | Hybrid Hexapod | |||
| Travel - XY | 200 mm (+/- 100 mm) | |||
| Travel - Z | 60 mm (+ 60 mm/- 0 mm) | |||
| Travel - Pitch & Roll | +/- 14 deg | |||
| Travel - Yaw | 360 deg continous | |||
| Dimensions (Length x Width x Height) | 443.2 mm x 410.1 mm x 378 mm | |||
| Drives | XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw Yaw: Torque Motor |
|||
| Brake | Pneumatic Release, Spring Lock | |||
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
| Bearings | Crossed Roller Bearings | |||
| Cables | High Flex, 10M Cycle, 3m Length | |||
| Structure | Anodized Aluminum 6061-T6 | |||
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
| Operating Temperature | 0°C to 50°C | |||
| Humidity | 10% to 80% Non-Condensing | |||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |
| Bidrectional Repeatability | XY | +/- 100 nm | +/- 70 nm | |
| Z | +/- 100 nm | +/- 70 nm | ||
| Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
| Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
| Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
| Z | ||||
| Pitch And Roll | ||||
| Yaw | ||||
| Minimum Incremental Step Size | XY | < 20 nm | ||
| Z | < 20 nm | |||
| Pitch And Roll | < 0.1 arc-sec | |||
| Yaw | < 0.1 arc-sec | |||
| Yaw Runout | Axial Runout | 10 nm | 7 nm | 4 nm |
| Radial Runout | 10 nm | 7 nm | 4 nm | |
| Wobble | 20 arc-sec | 10 arc-sec | 6 arc-sec | |
| Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Z | ||||
| Pitch And Roll | ~0.02 arc-sec | |||
| Yaw | ~0.01 arc-sec | |||
| Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
| XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
| Max Linear Velocity [3] | XY | 500 mm/s | ||
| Z | 30 mm/s | |||
| Max Linear Acceleration [3] | 0.3 G | |||
| Max Angular Velocity [3] | Pitch And Roll | 60 deg/s | ||
| Yaw | 1800 deg/s | |||
| Max Angular Acceleration [3] | Pitch And Roll | >1000 deg/s² | ||
| Yaw | >3600 deg/s² | |||
| Max Payload | 20 kg | |||
| Assembly Mass | 57 kg | |||
| Model | AI-HH-200XY-15Z-56RT-CM | |||
| Stage | Hybrid Hexapod (6 DOF) | |||
| Travel - XY | 200 mm (+/- 100 mm) | |||
| Travel - Z | 15 mm (+ 15 mm/- 0 mm) | |||
| Travel - Pitch & Roll | +/- 10 deg | |||
| Travel - Yaw | 360 deg continous | |||
| Dimensions (Length x Width x Height) | 336.5 mm x 275 mm x 202.7 mm | |||
| Drives | XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor |
|||
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
| Bearings | Crossed Roller Bearings | |||
| Cables | High Flex, 10M Cycle, 3m Length | |||
| Structure | Anodized Aluminum 6061-T6 | |||
| Environment | Ambient | |||
| Operating Temperature | 0°C to 50°C | |||
| Humidity | 10% to 80% Non-Condensing | |||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |
| Bidrectional Repeatability | XY | +/- 100 nm | +/- 70 nm | |
| Z | +/- 100 nm | +/- 70 nm | ||
| Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
| Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
| Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
| Z | ||||
| Pitch And Roll | ||||
| Yaw | ||||
| Minimum Incremental Step Size | XY | < 20 nm | ||
| Z | < 20 nm | |||
| Pitch And Roll | < 0.1 arc-sec | |||
| Yaw | < 0.1 arc-sec | |||
| Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
| Radial Runout | 15 µm | 12 µm | 10 µm | |
| Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
| Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Z | ||||
| Pitch And Roll | ~0.04 arc-sec | |||
| Yaw | 0.04 arc-sec | |||
| Orthogonality | XY | 20 arc/sec | 5 arc/sec | 1 arc/sec |
| XZ & YZ | 250 arc/sec | 200 arc/sec | 50 arc/sec | |
| Max Linear Velocity [3] | XY | 50 mm/s | ||
| Z | 15 mm/s | |||
| MAX LINEAR ACCELERATION [3] | XY | 0.1 G | ||
| Z | 0.3 G | |||
| Max Angular Velocity [3] | PITCH AND ROLL | 30 deg/s | ||
| YAW | 3000 deg/s | |||
| MAX ANGULAR ACCELERATION [3] | PITCH AND ROLL | >1000 deg/s² | ||
| YAW | >7200 deg/s² | |||
| Max Payload | 5 kg | |||
| Assembly Mass | 16.3 kg | |||
| Model | AI-6D-250XY-92Z |
| Stage | Hybrid Hexapod (6 DOF) |
| Travel - XY | 250mm (+/- 125mm) |
| Travel - Z | 92mm (+ 92mm/ - 0mm) |
| Travel - Pitch & Roll | +/- 20 deg |
| Travel - Yaw | 360 deg continuous |
| Dimensions (Length x Width x Height) | 435 mm x 435 mm x 707.5 mm |
| Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
| Bearings | Crossed Roller Bearings |
| Counterbalance | Pneumatic Cylinder Optional: Magnetic Spring (Constant Force) |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications | |
| Linear Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
| Pitch And Roll Resolution | ~0.02 arc-sec |
| Yaw Resolution | ~0.01 arc-sec |
| Max Linear Velocity [10] | 0.3 m/s |
| Max Angular Velocity (Pitch & Roll) [10] | 90 deg/s |
| Max Angular Velocity (Yaw) [10] | 180 deg/s |
| Assembly Mass | 130 kg |
| Max Payload [11] | 35 kg |
| Model | AI-HH-300XY-206Z-154R | |||
| Stage | Hybrid Hexapod (6 DOF) | |||
| Travel - XY | 300 mm (+/- 150 mm) | |||
| Travel - Z | 206 mm (+ 206 mm/- 0 mm) | |||
| Travel - Pitch & Roll | +/- 18 deg | |||
| Travel - Yaw | 360 deg continuous | |||
| Dimensions (Length x Width x Height) | 504.2 mm x 500 mm x 660 mm | |||
| Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
| Bearings | Crossed Roller Bearings | |||
| Counterbalance | Pneumatic Cylinder | |||
| Cables | High Flex, 10M Cycle, 3m Length | |||
| Structure | Anodized Aluminum 6061-T6 | |||
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
| Operating Temperature | 0°C to 50°C | |||
| Humidity | 10% to 80% Non-Condensing | |||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |
| Bidrectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
| Z | +/- 80 nm | +/- 50 nm | ||
| Pitch And Roll | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
| Yaw | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
| Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
| Z | ||||
| Pitch And Roll | ||||
| Yaw | ||||
| Minimum Incremental Step Size | XY | < 20 nm | ||
| Z | < 20 nm | |||
| Pitch And Roll | < 0.08 arc-sec | |||
| Yaw | < 0.08 arc-sec | |||
| Yaw Runout | Axial Runout | 10 µm | 7 µm | 4 µm |
| Radial Runout | 10 µm | 7 µm | 4 µm | |
| Wobble | 20 arc-sec | 10 arc-sec | 6 arc-sec | |
| Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Z | ||||
| Pitch And Roll | ~0.01 arc-sec | |||
| Yaw | ~0.01 arc-sec | |||
| Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
| XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
| Max Linear Velocity [3] | 0.5 m/s | |||
| Max Linear Acceleration [3] | 0.3 G | |||
| Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
| Roll | 180 deg/s | |||
| Max Angular Acceleration [3] | PITCH AND ROLL | >1800 deg/s² | ||
| YAW | >3600 deg/s² | |||
| Max Payload | 20 kg | |||
| Assembly Mass | 122 kg | |||
| Model | AI-HH-300XY-106Z-154R | |||
| Stage | Hybrid Hexapod (6 DOF) | |||
| Travel - XY | 300 mm (+/- 150 mm) | |||
| Travel - Z | 106 mm (+ 106 mm/- 0 mm) | |||
| Travel - Pitch & Roll | +/- 18 deg | |||
| Travel - Yaw | 360 deg continuous | |||
| Dimensions (Length x Width x Height) | 504.2 | |||
| Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
| Bearings | Crossed Roller Bearings | |||
| Counterbalance | Pneumatic Cylinder | |||
| Cables | High Flex, 10M Cycle, 3m Length | |||
| Structure | Anodized Aluminum 6061-T6 | |||
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
| Operating Temperature | 0°C to 50°C | |||
| Humidity | 10% to 80% Non-Condensing | |||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |
| Bidrectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
| Z | +/- 80 nm | +/- 50 nm | ||
| Pitch And Roll | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
| Yaw | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
| Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
| Z | ||||
| Pitch And Roll | ||||
| Yaw | ||||
| Minimum Incremental Step Size | XY | < 20 nm | ||
| Z | < 20 nm | |||
| Pitch And Roll | < 0.08 arc-sec | |||
| Yaw | < 0.08 arc-sec | |||
| Yaw Runout | Axial Runout | 10 µm | 7 µm | 4 µm |
| Radial Runout | 10 µm | 7 µm | 4 µm | |
| Wobble | 20 arc-sec | 10 arc-sec | 6 arc-sec | |
| Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Z | ||||
| Pitch And Roll | ~0.01 arc-sec | |||
| Yaw | ~0.01 arc-sec | |||
| Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
| XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
| Max Linear Velocity [3] | 0.5 m/s | |||
| Max Linear Acceleration [3] | 0.3 G | |||
| Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
| Roll | #colspan#180 deg/s | |||
| Max Angular Acceleration [3] | PITCH AND ROLL | >1800 deg/s² | ||
| YAW | >3600 deg/s² | |||
| Max Payload | 10 kg | |||
| Assembly Mass | 105 kg | |||
| Model | AI-HH-300XY-106Z-104R | |||
| Stage | Hybrid Hexapod (6 DOF) | |||
| Travel - XY | 300 mm (+/- 150 mm) | |||
| Travel - Z | 106 mm (+ 106 mm/- 0 mm) | |||
| Travel - Pitch & Roll | +/- 18 deg | |||
| Travel - Yaw | 360 deg continuous | |||
| Dimensions (Length x Width x Height) | 504.2 mm x 500 mm x 519.9 mm | |||
| Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
| Bearings | Crossed Roller Bearings | |||
| Counterbalance | Pneumatic Cylinder | |||
| Cables | High Flex, 10M Cycle, 3m Length | |||
| Structure | Anodized Aluminum 6061-T6 | |||
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
| Operating Temperature | 0°C to 50°C | |||
| Humidity | 10% to 80% Non-Condensing | |||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |
| Bidrectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
| Z | +/- 80 nm | +/- 50 nm | ||
| Pitch And Roll | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
| Yaw | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
| Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
| Z | ||||
| Pitch And Roll | ||||
| Yaw | ||||
| Minimum Incremental Step Size | XY | < 20 nm | ||
| Z | < 20 nm | |||
| Pitch And Roll | < 0.08 arc-sec | |||
| Yaw | < 0.08 arc-sec | |||
| Yaw Runout | Axial Runout | 12 µm | 9 µm | 6 µm |
| Radial Runout | 12 µm | 9 µm | 6 µm | |
| Wobble | 25 arc-sec | 15 arc-sec | 10 arc-sec | |
| Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Z | ||||
| Pitch And Roll | ~0.01 arc-sec | |||
| Yaw | 0.02 arc-sec | |||
| Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
| XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
| Max Linear Velocity [3] | 0.5 m/s | |||
| Max Linear Acceleration [3] | 0.3 G | |||
| Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
| Roll | 180 deg/s | |||
| Max Angular Acceleration [3] | PITCH AND ROLL | >1800 deg/s² | ||
| YAW | >3600 deg/s² | |||
| Max Payload | 7.5 kg | |||
| Assembly Mass | 105 kg | |||
| Model | AI-HH-200XY-40Z-104R | |||
| Stage | Hybrid Hexapod (6 DOF) | |||
| Travel - XY | 200 mm(+/- 100 mm) | |||
| Travel - Z | 20 mm (+ 20 mm/- 0 mm) | |||
| Travel - Pitch & Roll | +/- 11 deg | |||
| Travel - Yaw | 360 deg continuous | |||
| Dimensions (Length x Width x Height) | 399 mm x 359 mm x 318.9 mm | |||
| Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
| Bearings | Crossed Roller Bearings | |||
| Counterbalance | Pneumatic Cylinder | |||
| Cables | High Flex, 10M Cycle, 3m Length | |||
| Structure | Anodized Aluminum 6061-T6 | |||
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
| Operating Temperature | 0°C to 50°C | |||
| Humidity | 10% to 80% Non-Condensing | |||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |
| Bidrectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
| Z | +/- 80 nm | +/- 50 nm | ||
| Pitch And Roll | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
| Yaw | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
| Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
| Z | ||||
| Pitch And Roll | ||||
| Yaw | ||||
| Minimum Incremental Step Size | XY | < 20 nm | ||
| Z | < 20 nm | |||
| Pitch And Roll | < 0.08 arc-sec | |||
| Yaw | < 0.08 arc-sec | |||
| Yaw Runout | Axial Runout | 12 µm | 9 µm | 6 µm |
| Radial Runout | 12 µm | 9 µm | 6 µm | |
| Wobble | 25 arc-sec | 15 arc-sec | 10 arc-sec | |
| Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Z | ||||
| Pitch And Roll | ~0.01 arc-sec | |||
| Yaw | 0.02 arc-sec | |||
| Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
| XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
| Max Linear Velocity [3] | 0.5 m/s | |||
| Max Linear Acceleration [3] | 0.3 G | |||
| Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
| Roll | 180 deg/s | |||
| Max Angular Acceleration [3] | PITCH AND ROLL | >1800 deg/s² | ||
| YAW | >3600 deg/s² | |||
| Max Payload | 5 kg | |||
| Assembly Mass | 46 kg | |||
| Model | AI-LM-20000-Z-ABCB | ||
| Stage | Vertical Z Stage | ||
| Travel | 200mm (+/- 100mm) | ||
| Dimensions (Length x Width x Height) | 230mm x 50mm x 484mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Counterbalance | Air Bearing Pneumatic Cylinder | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Bidirectional Repeatability | +/- 75 nm | +/- 45 nm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness In Y | +/- 3.0 µm | +/- 2.0 µm | +/- 1.5 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 8.0 arc-sec | ||
| Max Velocity [3] | 0.25 m/s | ||
| Max Peak Acceleration [3] | 2.5 G | ||
| Max Payload Capability | 25 kg | ||
| Assembly Mass | 9.3 kg | ||
| Model | AI-LM-17000-("PAYLOAD")-Z-MCB-BASE | ||||
| Stage | Vertical Z Stage | ||||
| Travel | 170 mm (+/- 85 mm) | ||||
| Payload Options | 20 N, 30 N, 40 N, 50 N, or 60 N | ||||
| Dimensions (Length x Width x Height) | 262 mm x 50 mm x 340 mm | ||||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||||
| Feedback | Non-Contact Optical Linear Encoder | ||||
| Bearings | Crossed Roller Bearings | ||||
| Counterbalance | Magnetic Spring (Constant Force) | ||||
| Cables | High Flex, 10M Cycle, 3m Length | ||||
| Structure | Anodized Aluminum 6061-T6 | ||||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||||
| Operating Temperature | 0°C to 50°C | ||||
| Humidity | 10% to 80% Non-Condensing | ||||
| Performance Specifications [1] | (STD) | ULTRA | NANO | ||
| Linear Displacement Accuracy | +/- 5 µm | +/- 2.0 µm | +/- 0.4 µm | ||
| Bidirectional Linear Repeatability | +/- 75 nm | +/- 50 nm | |||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||||
| Straightness | +/- 5.0 µm | +/- 2.0 µm | +/- 1.5 µm | ||
| Flatness [2] | +/- 5.0 µm | +/- 2.0 µm | +/- 1.5 µm | ||
| Pitch | 18 arc-sec | ||||
| Yaw | 18 arc-sec | ||||
| Roll | 18 arc-sec | ||||
| Max Velocity [3] | 1 m/s | ||||
| Max Acceleration [3] | 2.0 G | ||||
| Payload (Nominal) | 20 N | 30 N | 40 N | 50 N | 60 N |
| Minimum To Maximum Payload Range | 15-25 N | 25-35 N | 35-45 N | 45-55 N | 55-65 N |
| Assembly Mass | 13.8 kg | ||||
| Model | AI-LM-30000-UII | ||
| Stage | Cartesian Gantry | ||
| Travel - X And/Or Travel - Y | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 600 mm x 807 mm x 320 mm | ||
| Max. Sample Width (Inner Width) | 434 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient | ||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | STD | PRCSN | ULTRA |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 1.0 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 10 µm | +/- 6 µm | |
| Pitch | 20 arc-sec | ||
| Yaw | 20 arc-sec | ||
| Roll | 20 arc-sec | ||
| Max Velocity With AC Drive [3] | 2.0 m/s | ||
| Max Velocity With 48VDC Drive [3] | 0.5 m/s | ||
| Max Acceleration With AC Drive [3] | 2.5 G | ||
| Max Acceleration With 48VDC Drive [3] | 0.5 G | ||
| Max (Vertical) Payload Capability | 25 kg | ||
| Max (Horizontal) Payload Capability | 30 kg | ||
| Assembly Mass | 30 kg | ||
| Configurable Options | |||
| ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements | Y Axis Top Down Mounting (Face Mounting Shown) | ||
| Large or Small Cable Tracks | |||
| Mix and Match Travel | |||
| Risers Available (Custom Height) | |||
| Multiple Cable Routing and Connectorization Options | |||
| Customer Cable Routing Available | |||
| Granite, Optical Table, and Breadboard Bases | |||
| Single Axis Versions Available | |||
| Z Axis Options Available | |||
| X and X' Controlled Yaw Available | |||
| Various Material Options Available | |||
| Inch Spacing Versions Available (see page 3) | |||
| *Increased Gap between X and X' stages without Increased Y Travel |
|||
| Model | AI-LM-20000-UII | ||
| Stage | Cartesian Gantry | ||
| Travel - X And/Or Travel - Y | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 500 mm x 707 mm x 320 mm | ||
| Max. Sample Width (Inner Width) | 334 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient | ||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | STD | PRCSN | ULTRA |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 1.0 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 10 µm | +/- 6 µm | |
| Pitch | 20 arc-sec | ||
| Yaw | 20 arc-sec | ||
| Roll | 20 arc-sec | ||
| Max Velocity With AC Drive [3] | 2.0 m/s | ||
| Max Velocity With 48VDC Drive [3] | 0.5 m/s | ||
| Max Acceleration With AC Drive [3] | 2.5 G | ||
| Max Acceleration With 48VDC Drive [3] | 0.5 G | ||
| Max (Vertical) Payload Capability | 25 kg | ||
| Max (Horizontal) Payload Capability | 30 kg | ||
| Assembly Mass | 28 kg | ||
| Configurable Options | |||
| ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements | Y Axis Top Down Mounting (Face Mounting Shown) | ||
| Large or Small Cable Tracks | |||
| Mix and Match Travel | |||
| Risers Available (Custom Height) | |||
| Multiple Cable Routing and Connectorization Options | |||
| Customer Cable Routing Available | |||
| Granite, Optical Table, and Breadboard Bases | |||
| Single Axis Versions Available | |||
| Z Axis Options Available | |||
| X and X' Controlled Yaw Available | |||
| Various Material Options Available | |||
| Inch Spacing Versions Available (see page 3) | |||
| *Increased Gap between X and X' stages without Increased Y Travel |
|||
| Model | AI-XBS-30000-UII | |
| Stage | Linear Stage | |
| Travel | 300 mm (+/- 150 mm) | |
| Dimensions (Length x Width x Height) | 663 mm x 388 mm x 100 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 708 mm x 388 mm x 100 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
| Straightness In Y | +/- 5 µm | +/- 3 µm |
| Flatness [2] | +/- 5 µm | +/- 3 µm |
| Pitch [2] | +/- 18 arc-sec | |
| Yaw | +/- 18 arc-sec | |
| Roll | +/- 18 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
| Max Payload Capability With Axis Oriented Vertically | 80 kg | |
| Assembly Mass | 29 kg | |
| Model | AI-XBS-25000-UII | |
| Stage | Linear Stage | |
| Travel | 250 mm (+/- 125 mm) | |
| Dimensions (Length x Width x Height) | 613 mm x 388 mm x 100 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 658 mm x 388 mm x 100 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 10 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
| Straightness In Y | +/- 5 µm | +/- 3 µm |
| Flatness [2] | +/- 5 µm | +/- 3 µm |
| Pitch [2] | +/- 15 arc-sec | |
| Yaw | +/- 15 arc-sec | |
| Roll | +/- 15 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
| Max Payload Capability With Axis Oriented Vertically | 80 kg | |
| Assembly Mass | 28 kg | |
| Model | AI-XBS-20000-UII | |
| Stage | Linear Stage | |
| Travel | 200 mm (+/- 100 mm) | |
| Dimensions (Length x Width x Height) | 563 mm x 388 mm x 100 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 608 mm x 388 mm x 100 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 8 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
| Straightness In Y | +/- 4 µm | +/- 3 µm |
| Flatness [2] | +/- 4 µm | +/- 3 µm |
| Pitch [2] | +/- 15 arc-sec | |
| Yaw | +/- 15 arc-sec | |
| Roll | +/- 15 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
| Max Payload Capability With Axis Oriented Vertically | 80 kg | |
| Assembly Mass | 27 kg | |
| Model | AI-SBS-30000-UII | |
| Stage | Linear Stage | |
| Travel | 300 mm (+/- 150 mm) | |
| Dimensions (Length x Width x Height) | 593 mm x 258 mm x 69 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 615 mm x 258 mm x 69 mm | |
| (-Ebrk) Dimensions (Length x Width x Height) | 665 mm x 258 mm x 69 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m Length | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
| Straightness In Y | +/- 5 µm | +/- 3 µm |
| Flatness [2] | +/- 5 µm | +/- 3 µm |
| Pitch [2] | +/- 18 arc-sec | |
| Yaw | +/- 18 arc-sec | |
| Roll | +/- 18 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
| Max Payload Capability With Axis Oriented Vertically | 40 kg | |
| Assembly Mass | 13 kg | |
| Model | AI-SBS-25000-UII | |
| Stage | Linear Stage | |
| Travel | 250 mm (+/- 125 mm) | |
| Dimensions (Length x Width x Height) | 543 mm x 258 mm x 69 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 565 mm x 258 mm x 69 mm | |
| (-Ebrk) Dimensions (Length x Width x Height) | 615 mm x 258 mm x 69 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m Length | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 10 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
| Straightness In Y | +/- 5 µm | +/- 3 µm |
| Flatness [2] | +/- 5 µm | +/- 3 µm |
| Pitch [2] | +/- 15 arc-sec | |
| Yaw | +/- 15 arc-sec | |
| Roll | +/- 15 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
| Max Payload Capability With Axis Oriented Vertically | 40 kg | |
| Assembly Mass | 12.5 kg | |
| Model | AI-SBS-20000-UII | |
| Stage | Linear Stage | |
| Travel | 200 mm (+/- 100 mm) | |
| Dimensions (Length x Width x Height) | 493 mm x 258 mm x 69 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 515 mm x 258 mm x 69 mm | |
| (-Ebrk) Dimensions (Length x Width x Height) | 565 mm x 258 mm x 69 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m Length | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 8 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
| Straightness In Y | +/- 4 µm | +/- 3 µm |
| Flatness [2] | +/- 4 µm | +/- 3 µm |
| Pitch [2] | +/- 15 arc-sec | |
| Yaw | +/- 15 arc-sec | |
| Roll | +/- 15 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
| Max Payload Capability With Axis Oriented Vertically | 40 kg | |
| Assembly Mass | 12 kg | |
| Model | AI-LM-30000-UII-WL | ||
| Stage | Linear Stage | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 620 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 25 kg | ||
| Model | AI-LM-25000-UII-WL | ||
| Stage | Linear Stage | ||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 570 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 10 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 15 arc-sec | ||
| Yaw | 15 arc-sec | ||
| Roll | 8 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 24 kg | ||
| Model | AI-LM-20000-UII-WL | ||
| Stage | Linear Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 520 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 8 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4 µm | +/- 3 µm | |
| Flatness [2] | +/- 4 µm | +/- 3 µm | |
| Pitch | 15 arc-sec | ||
| Yaw | 15 arc-sec | ||
| Roll | 8 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 23 kg | ||
| Model | AI-LM-30000-UII-W | ||
| Stage | Linear Stage | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 520 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 25 kg | ||
| Model | AI-LM-25000-UII-W | ||
| Stage | Linear Stage | ||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 470 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 10 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 15 arc-sec | ||
| Yaw | 15 arc-sec | ||
| Roll | 8 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 24 kg | ||
| Model | AI-LM-20000-UII-W | ||
| Stage | Linear Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 420 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 8 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4 µm | +/- 3 µm | |
| Flatness [2] | +/- 4 µm | +/- 3 µm | |
| Pitch | 15 arc-sec | ||
| Yaw | 15 arc-sec | ||
| Roll | 8 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 23 kg | ||
| Model | AI-LM-30000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 480 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 4 kg | ||
| Model | AI-LM-25000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 430 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 10 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 15 arc-sec | ||
| Yaw | 15 arc-sec | ||
| Roll | 8 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 3.4 kg | ||
| Model | AI-LM-20000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 380 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 8 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 4 µm | +/- 3 µm | |
| Flatness [2] | +/- 4 µm | +/- 3 µm | |
| Pitch | 15 arc-sec | ||
| Yaw | 15 arc-sec | ||
| Roll | 8 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 2.9 kg | ||
| Model | AI-LM-30000-UII-S | ||
| Stage | Linear Stage | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 520 mm x 208 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10^-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 12 kg | ||
| Model | AI-LM-25000-UII-S | ||
| Stage | Linear Stage | ||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 470 mm x 208 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10^-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 10 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch | 15 arc-sec | ||
| Yaw | 15 arc-sec | ||
| Roll | 8 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 11 kg | ||
| Model | AI-LM-20000-UII-S | ||
| Stage | Linear Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 420 mm x 208 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10^-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 8 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4 µm | +/- 3 µm | |
| Flatness [2] | +/- 4 µm | +/- 3 µm | |
| Pitch | 15 arc-sec | ||
| Yaw | 15 arc-sec | ||
| Roll | 8 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 10 kg | ||
| Model | AI-LM-30000-UII | ||
| Stage | Linear Stage | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 520 mm x 258 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10^-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness In Y | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch [2] | +/- 9 arc-sec | ||
| Yaw | +/- 9 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 3.5 m/s | ||
| Max Peak Acceleration [3] | 10.0 G | ||
| Max Payload Capability | 70 kg | ||
| Assembly Mass | 15 kg | ||
| Model | AI-LM-25000-UII | ||
| Stage | Linear Stage | ||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 470 mm x 258 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10^-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 10 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness In Y | +/- 5 µm | +/- 3 µm | |
| Flatness [2] | +/- 5 µm | +/- 3 µm | |
| Pitch [2] | +/- 7.5 arc-sec | ||
| Yaw | +/- 7.5 arc-sec | ||
| Roll | +/- 4 arc-sec | ||
| Max Velocity [3] | 3.5 m/s | ||
| Max Peak Acceleration [3] | 10.0 G | ||
| Max Payload Capability | 70 kg | ||
| Assembly Mass | 14 kg | ||
| Model | AI-LM-20000-UII | ||
| Stage | Linear Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 420 mm x 258 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings |
||
| Cables | High Flex, 10M Cycle, 3m Length |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10^-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 8 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness In Y | +/- 4 µm | +/- 3 µm | |
| Flatness [2] | +/- 4 µm | +/- 3 µm | |
| Pitch [2] | +/- 7.5 arc-sec | ||
| Yaw | +/- 7.5 arc-sec | ||
| Roll | +/- 4 arc-sec | ||
| Max Velocity [3] | 3 m/s | ||
| Max Peak Acceleration [3] | 10.0 G | ||
| Max Payload Capability | 70 kg | ||
| Assembly Mass | 13 kg | ||
| Model | AI-LM-300x200-XY | ||
| Stage | Monolithic XY Stage (Asymmetrical) |
||
| Travel - X | 300 mm (+/- 150 mm) | ||
| Travel - Y | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 500 mm x 336 mm x 100mm | ||
| Drives | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5 µm | +/- 1.0 µm | +/- 0.5 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2 µm | +/- 1.0 µm | +/- 0.5 µm |
| Flatness [2] | +/- 5 µm | +/- 2 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Orthogonality | 20 arc-sec | 5 arc-sec | 1 arc-sec |
| Max Velocity [3] | 1 m/s | ||
| Max Acceleration [3] | 0.7 G | ||
| Max Payload Capability | 30 kg | ||
| Assembly Mass | 28 kg | ||
| Model | AI-LM-160x100-XY | ||
| Stage | Monolithic XY Stage (Asymmetrical) |
||
| Travel - X | 160 mm (+/- 80 mm) | ||
| Travel - Y | 100 mm (+/- 50 mm) | ||
| Dimensions (Length X Width X Height) | 275 mm x 175 mm x 80 mm | ||
| Drives | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm | +/- 0.7 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1.0 µm | +/- 0.7 µm | +/- 0.4 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 7.5 arc-sec | ||
| Yaw | +/- 7.5 arc-sec | ||
| Roll | +/- 4.0 arc-sec | ||
| Orthogonality | +/- 10.0 arc-sec | +/- 2.5 arc-sec | +/- 0.5 arc-sec |
| Max Velocity [3] | 1 m/s | ||
| Max Peak Acceleration [3] | 1.5 G | ||
| Max Payload Capability | 25 kg | ||
| Assembly Mass | 11.4 kg | ||
| Model | AI-VBS-20000 | ||
| Stage | Linear Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 492 mm x 154 mm x 50 mm | ||
| Brake Options | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
||
| (-Pbrk) Dimensions (Length x Width x Height) | 524 mm x 154 mm x 50 mm | ||
| (-Ebrk) Dimensions (Length x Width x Height) | 571 mm x 154 mm x 50 mm | ||
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 4 µm | +/- 1.0 µm | +/- 0.4 µm |
| Backlash | 0 nm | ||
| Bidirectional Linear Repeatability | +/- 100 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5 µm | +/- 4 µm | +/- 3 µm |
| Flatness [2] | +/- 5.0 µm | +/- 3.0 µm | |
| Pitch [2] | +/- 15 arc-sec | ||
| Yaw | +/- 15 arc-sec | ||
| Roll | +/- 15 arc-sec | ||
| Max Velocity [3] | 0.3 m/s | ||
| Max Peak Acceleration [3] | 1.0 G | ||
| Max Payload Capability W/ Axis Oriented Horizontal | 25 kg | ||
| Max Payload Capability W/ Axis Oriented Vertical | 12 kg | ||
| Assembly Mass | 8 kg | ||
| Model | AI-CM-25000-250-XY | ||
| Stage | Monolithic XY Stage with Open Center |
||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 468.5 mm x 468.5 mm x 80 mm | ||
| Aperture / Thru | 250 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.2 µm | +/- 0.7 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4.0 µm | +/- 1.2 µm | +/- 0.7 µm |
| Flatness [2] | +/- 4.0 µm | +/- 3.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.1 m/s | ||
| Bot Axis Max Velocity [3] | 0.6 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.3 G | ||
| Max Payload Capability | 25 kg | ||
| Assembly Mass | 33 kg | ||
| Model | AI-CM-20000-200-XY | ||
| Stage | Monolithic XY Stage with Open Center |
||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 332.5 mm x 332.5 mm x 65 mm | ||
| Aperture / Thru | 200 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.2 µm | +/- 0.7 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4.0 µm | +/- 1.2 µm | +/- 0.7 µm |
| Flatness [2] | +/- 4.0 µm | +/- 3.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1 m/s | ||
| Bot Axis Max Velocity [3] | 0.6 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.4 G | ||
| Max Payload Capability | 15 kg | ||
| Assembly Mass | 11.4 kg | ||
| Model | AI-CM-30000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 500 mm x 500 mm x 100 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 6.0 µm | +/- 1.0 µm | +/- 0.6 µm |
| Bidirectional Linear Repeatability | +/- 30 | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 10.0 µm | +/- 2.0 µm | +/- 1.0 µm |
| Flatness [2] | +/- 8.0 µm | +/- 5.0 µm | |
| Pitch [2] | +/- 18.0 arc-sec | ||
| Yaw | +/- 18.0 arc-sec | ||
| Roll | +/- 18.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.7 m/s | ||
| Bot Axis Max Velocity [3] | 0.3 | ||
| Top Axis Max Peak Acceleration [3] | 0.4 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.1 | ||
| Max Payload Capability | 35 kg | ||
| Assembly Mass | 69 kg | ||
| Model | AI-CM-25000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 400 mm x 400 mm x 100 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Bidirectional Linear Repeatability | +/- 30 | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 6.0 µm | +/- 2.0 µm | +/- 1.0 µm |
| Flatness [2] | +/- 6.0 µm | +/- 4.0 µm | |
| Pitch [2] | +/- 18.0 arc-sec | ||
| Yaw | +/- 18.0 arc-sec | ||
| Roll | +/- 18.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.8 m/s | ||
| Bot Axis Max Velocity [3] | 0.5 | ||
| Top Axis Max Peak Acceleration [3] | 0.6 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.2 G | ||
| Max Payload Capability | 25 kg | ||
| Assembly Mass | 48 kg | ||
| Model | AI-CM-20000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 275 mm x 275 mm x 60 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 4.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 30 | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Flatness [2] | +/- 4.0 µm | +/- 3.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1 m/s | ||
| Bot Axis Max Velocity [3] | 0.6 | ||
| Top Axis Max Peak Acceleration [3] | 1.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.4 G | ||
| Max Payload Capability | 15 kg | ||
| Assembly Mass | 12 kg | ||
| Model | AI-CM-30000 | ||
| Stage | Linear Stage | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 506 mm x 120 mm x 48 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 6.0 µm | +/- 1.0 µm | +/- 0.6 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8.0 µm | +/- 6.0 µm | +/- 4.0 µm |
| Flatness [2] | +/- 8.0 µm | +/- 5.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Max Velocity [3] | Depending on application - Ask ALIO | ||
| Max Acceleration [3] | Depending on application - Ask ALIO | ||
| Max Payload Capability | Depending on application - Ask ALIO | ||
| Assembly Mass | Depending on application - Ask ALIO | ||
| Model | AI-CM-25000 | ||
| Stage | Linear Stage | ||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 404 mm x 154 mm x 48 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 6.0 µm | +/- 4.0 µm | +/- 3.0 µm |
| Flatness [2] | +/- 6.0 µm | +/- 4.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Max Velocity [3] | Depending on application - Ask ALIO | ||
| Max Acceleration [3] | Depending on application - Ask ALIO | ||
| Max Payload Capability | Depending on application - Ask ALIO | ||
| Assembly Mass | Depending on application - Ask ALIO | ||
| Model | AI-CM-20000 | ||
| Stage | Linear Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 279 mm x 120 mm x 32 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 4.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5.0 µm | +/- 4.0 µm | +/- 3.0 µm |
| Flatness [2] | +/- 5.0 µm | +/- 3.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Max Velocity [3] | 1.4 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Payload Capability | 12 kg | ||
| Assembly Mass | 3.2 kg | ||
| Model | AI-LM-30000 | ||
| Stage | Linear Stage | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 506 mm x 178 mm x 55 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.0 µm | +/- 0.6 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 6.0 µm | +/- 4.5 µm | +/- 3.0 µm |
| Flatness [2] | +/- 5.0 µm | +/- 2.0 µm | |
| Pitch Y [2] | +/- 18.0 arc-sec | ||
| Yaw | +/- 18.0 arc-sec | ||
| Roll | +/- 10.0 arc-sec | ||
| Max Velocity [3] | 2.4 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max Payload Capability | 50 kg | ||
| Assembly Mass | 15.2 kg | ||
| Model | AI-LM-25000 | ||
| Stage | Linear Stage | ||
| Travel | 250 mm (+ /-125 mm) | ||
| Dimensions (Length x Width x Height) | 404 mm x 154 mm x 55 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4.0 µm | +/- 3.0 µm | +/- 2.0 µm |
| Flatness [2] | +/- 5.0 µm | +/- 2.0 µm | |
| Pitch Y [2] | +/- 18.0 arc-sec | ||
| Yaw | +/- 18.0 arc-sec | ||
| Roll | +/- 10.0 arc-sec | ||
| Max Velocity [3] | 2.5 m/s | ||
| Max Acceleration [3] | 5.0 G | ||
| Max Payload Capability | 40 kg | ||
| Assembly Mass | 9.4 kg | ||
| Model | AI-LM-20000 | ||
| Stage | Linear Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 340 mm x 154 mm x 46 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3.0 µm | +/- 2.0 µm | +/- 1.5 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch Y [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 8.0 arc-sec | ||
| Max Velocity [3] | 2.4 m/s | ||
| Max Acceleration [3] | 6.0 G | ||
| Max Payload Capability | 30 kg | ||
| Assembly Mass | 7.8 kg | ||
| Model | AI-LM-30000-300-XY | ||
| Stage | Monolithic XY Stage with Open Center | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 500 mm x 500 mm x 120 mm | ||
| Aperture / Thru | 300 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 8.0 µm | +/- 1.5 µm | +/- 1.0 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5.0 µm | +/- 1.5 µm | +/- 1.0 µm |
| Flatness [2] | +/- 6.0 µm | +/- 3.0 µm | |
| Pitch [2] | +/- 18.0 arc-sec | ||
| Yaw | +/- 18.0 arc-sec | ||
| Roll | +/- 18.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.7 m/s | ||
| Bot Axis Max Velocity [3] | 1.2 m/s | ||
| Top Axis Max Peak Acceleration [3] | 2.0 G | ||
| Top Axis Max Peak Acceleration [3] | 1.0 G | ||
| Max Payload Capability | 50 kg | ||
| Assembly Mass | 58 kg | ||
| Model | AI-LM-25000-250-XY | ||
| Stage | Monolithic XY Stage with Open Center | ||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 460 mm x 460 mm x 95 mm | ||
| Aperture / Thru | 250 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 6.0 µm | +/- 1.5 µm | +/- 1.0 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4.0 µm | +/- 1.5 µm | +/- 1.0 µm |
| Flatness [2] | +/- 5.0 µm | +/- 2.0 µm | |
| Pitch [2] | +/- 18.0 arc-sec | ||
| Yaw | +/- 18.0 arc-sec | ||
| Roll | +/- 18.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.9 m/s | ||
| Bot Axis Max Velocity [3] | 1.3 m/s | ||
| Top Axis Max Peak Acceleration [3] | 3.0 G | ||
| Top Axis Max Peak Acceleration [3] | 1.4 G | ||
| Max Payload Capability | 40 kg | ||
| Assembly Mass | 37 kg | ||
| Model | AI-LM-20000-200-XY | ||
| Stage | Monolithic XY Stage with Open Center | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 392 mm x 392 mm x 80 mm | ||
| Aperture / Thru | 200 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 6.0 µm | +/- 1.5 µm | +/- 0.8 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3.0 µm | +/- 1.5 µm | +/- 0.8 µm |
| Flatness [2] | +/- 4.0 µm | +/- 2.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 2 m/s | ||
| Bot Axis Max Velocity [3] | 1.1 m/s | ||
| Top Axis Max Peak Acceleration [3] | 4.0 G | ||
| Top Axis Max Peak Acceleration [3] | 1.4 G | ||
| Max Payload Capability | 30 kg | ||
| Assembly Mass | 23 kg | ||
| Model | AI-LM-30000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 300 mm (+/- 150 mm) | ||
| Dimensions (Length x Width x Height) | 500 mm x 500 mm x 115 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.0 µm | +/- 0.6 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2.0 µm | +/- 1.0 µm | +/- 0.6 µm |
| Flatness [2] | +/- 5.0 µm | +/- 2.0 µm | |
| Pitch [2] | +/- 18.0 arc-sec | ||
| Yaw | +/- 18.0 arc-sec | ||
| Roll | +/- 10.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.6 m/s | ||
| Bot Axis Max Velocity [3] | 1 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.9 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.7 G | ||
| Max Payload Capability | 50 kg | ||
| Assembly Mass | 75 kg | ||
| Model | AI-LM-25000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 250 mm (+/- 125 mm) | ||
| Dimensions (Length x Width x Height) | 400 mm x 400 mm x 115 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Flatness [2] | +/- 5.0 µm | +/- 2.0 µm | |
| Pitch [2] | +/- 18.0 arc-sec | ||
| Yaw | +/- 18.0 arc-sec | ||
| Roll | +/- 10.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.5 m/s | ||
| Bot Axis Max Velocity [3] | 0.9 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.9 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.7 G | ||
| Max Payload Capability | 40 kg | ||
| Assembly Mass | 52 kg | ||
| Model | AI-LM-20000-XY-HF | ||
| Stage | Monolithic XY Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 336 mm x 336 mm x 90 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1.5 µm | +/- 1.0 µm | +/- 0.4 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 8.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 2.0 m/s | ||
| Bot Axis Max Velocity [3] | 1.2 m/s | ||
| Top Axis Max Peak Acceleration [3] | 5.6 G | ||
| Bot Axis Max Peak Acceleration [3] | 2 G | ||
| Max Payload Capability | 30 kg | ||
| Assembly Mass | 28 kg | ||
| Model | AI-LM-20000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 336 mm x 336 mm x 90 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1.5 µm | +/- 1.0 µm | +/- 0.4 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 8.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.7 m/s | ||
| Bot Axis Max Velocity [3] | 1 m/s | ||
| Top Axis Max Peak Acceleration [3] | 3.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 1.3 G | ||
| Max Payload Capability | 30 kg | ||
| Assembly Mass | 28 kg | ||
| Model | AI-LM-16000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 160 mm (+/- 80 mm) | ||
| Dimensions (Length x Width x Height) | 275 mm x 275 mm x 80 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.7 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1.5 µm | +/- 0.7 µm | +/- 0.4 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 8.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.5 m/s | ||
| Bot Axis Max Velocity [3] | 1 m/s | ||
| Top Axis Max Peak Acceleration [3] | 3.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 1.3 G | ||
| Max Payload Capability | 25 kg | ||
| Assembly Mass | 16 kg | ||
