ModelAI-LM-50000-ABL
StageXY Planar Air Bearing Stage
Travel - XY500 mm (+/- 250 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)1550 mm x 1100 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1] #colspan#
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options  #colspan#
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-LM-40000-ABL
StageXY Planar Air Bearing Stage
Travel - XY400 mm (+/- 200 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)1450 mm x 1000 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-LM-50000-UII
StageCartesian Gantry
Travel - X And/Or Travel - Y500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)800 mm x 1007 mm x 320 mm
Max. Sample Width (Inner Width)634 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]STDPRCSNULTRA
Linear Displacement Accuracy +/- 20 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 6 µm +/- 4 µm
Flatness [2] +/- 12 µm +/- 8 µm
Pitch20 arc-sec
Yaw20 arc-sec
Roll20 arc-sec
Max Velocity With AC Drive [3]2.5 m/s
Max Velocity With 48VDC Drive [3]0.5 m/s
Max Acceleration With AC Drive [3]2 G
Max Acceleration With 48VDC Drive [3]0.4 G
Max (Vertical) Payload Capability 25 kg
Max (Horizontal) Payload Capability 30 kg
Assembly Mass38 kg
Configurable Options 
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific RequirementsY Axis Top Down Mounting (Face Mounting Shown)
Large or Small Cable Tracks
Mix and Match Travel
Risers Available (Custom Height)
Multiple Cable Routing and Connectorization Options
Customer Cable Routing Available
Granite, Optical Table, and Breadboard Bases
Single Axis Versions Available
Z Axis Options Available
X and X' Controlled Yaw Available
Various Material Options Available
Inch Spacing Versions Available (see page 3)
*Increased Gap between X and X' stages
without Increased Y Travel
ModelAI-LM-40000-UII
StageCartesian Gantry
Travel - X And/Or Travel - Y400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)700 mm  907 mm x 320 mm
Max. Sample Width (Inner Width)534 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]STDPRCSNULTRA
Linear Displacement Accuracy +/- 16 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 10 µm +/- 6 µm
Pitch20 arc-sec
Yaw20 arc-sec
Roll20 arc-sec
Max Velocity With AC Drive [3]2.0  m/s
Max Velocity With 48VDC Drive [3]0.5 m/s
Max Acceleration With AC Drive [3]2.2 G
Max Acceleration With 48VDC Drive [3]0.5 G
Max (Vertical) Payload Capability 25 kg
Max (Horizontal) Payload Capability 30 kg
Assembly Mass33 kg
Configurable Options 
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific RequirementsY Axis Top Down Mounting (Face Mounting Shown)
Large or Small Cable Tracks
Mix and Match Travel
Risers Available (Custom Height)
Multiple Cable Routing and Connectorization Options
Customer Cable Routing Available
Granite, Optical Table, and Breadboard Bases
Single Axis Versions Available
Z Axis Options Available
X and X' Controlled Yaw Available
Various Material Options Available
Inch Spacing Versions Available (see page 3)
*Increased Gap between X and X' stages
without Increased Y Travel
ModelAI-LM-50000-UII-XB
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)866 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy +/- 20 µm +/- 5 µm +/- 2 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 20 µm +/- 15 µm +/- 10 µm
Flatness [2] +/- 40 µm +/- 15 µm +/- 10 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-LM-40000-UII-XB
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)766 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy +/- 16 µm +/- 5 µm +/- 2 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 18 µm +/- 13 µm +/- 10 µm
Flatness [2] +/- 30 µm +/- 15 µm +/- 10 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-XBS-50000-UII
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)863 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)908 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 24 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass38 kg
ModelAI-XBS-45000-UII
StageLinear Stage
Travel450 mm (+/- 225 mm)
Dimensions (Length x Width x Height)813 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)858 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 24 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass36 kg
ModelAI-XBS-40000-UII
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)763 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)808 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 20 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass34 kg
ModelAI-XBS-35000-UII
StageLinear Stage
Travel350 mm (+/- 175 mm)
Dimensions (Length x Width x Height)713 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)758 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 16 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass32 kg
ModelAI-SBS-50000-UII
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)793 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)815 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)865 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 24 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass15.5 kg
ModelAI-SBS-45000-UII
StageLinear Stage
Travel450 mm (+/- 225 mm)
Dimensions (Length x Width x Height)743 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)765 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)815 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 24 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass15 kg
ModelAI-SBS-40000-UII
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)693 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)715 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)765 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 20 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass14.5 kg
ModelAI-SBS-35000-UII
StageLinear Stage
Travel350 mm (+/- 175 mm)
Dimensions (Length x Width x Height)643 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)665 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)715 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 16 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass13.5 kg
ModelAI-LM-50000-UII-WL
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions (Length x Width x Height)820 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 20 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass31 kg
ModelAI-LM-40000-UII-WL
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions (Length x Width x Height)720 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 16 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass27 kg
ModelAI-LM-50000-UII-W
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions
(Length x Width x Height)
720 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 20 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass31 kg
ModelAI-LM-40000-UII-W
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
620 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 16 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass27 kg
ModelAI-LM-50000-UII-SN
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions
(Length x Width x Height)
680 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 20 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass6 kg
ModelAI-LM-40000-UII-SN
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
580 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 16 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass5 kg
ModelAI-LM-50000-UII-S
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions
(Length x Width x Height)
720 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 20 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass15 kg
ModelAI-LM-40000-UII-S
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
620 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 16 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch18 arc-sec
Yaw18 arc-sec
Roll10 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass13 kg
ModelAI-LM-50000-UII
StageLinear Stage
Travel500 mm (+/- 250 mm)
Dimensions
(Length x Width x Height)
720 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 20 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 6 µm +/- 4 µm
Flatness [2] +/- 6 µm +/- 4 µm
Pitch [2] +/- 9 arc-sec
Yaw +/- 9 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
4.5 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass19 kg
ModelAI-LM-40000-UII
StageLinear Stage
Travel400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
620 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 16 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 9 arc-sec
Yaw +/- 9 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
4 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass17 kg
ModelAI-SLM-395x320-XY
StageMonolithic XY Stage
(Asymmetrical)
Travel - X395 mm
Travel - Y320 mm
Dimensions
(Length X Width X Height)
672 mm x 525 mm x 145 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
STDULTRANANO
Linear
Displacement Accuracy
+/- 5.0 µm+/- 2.0 µm+/- 1.0 µm
Bidirectional
Linear Repeatability
+/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness+/- 5.0 µm+/- 2.0 µm+/- 1.0 µm
Flatness [2]+/- 10.0 µm+/- 5.0 µm+/- 2.0 µm
Pitch [2]+/- 18.0 arc-sec+/- 18.0 arc-sec+/- 10.0 arc-sec
Yaw+/- 18.0 arc-sec+/- 18.0 arc-sec+/- 10.0 arc-sec
Roll+/- 10.0 arc-sec+/- 10.0 arc-sec+/- 10.0 arc-sec
Orthogonality+/- 20.0 arc-sec+/- 5.0 arc-sec+/- 2.0 arc-sec
Max Velocity
[3]
1.5 m/s
Max Peak
Acceleration [3]
0.59 G
Max Payload
Capability
200 kg
Assembly Mass98 kg
ModelAI-LM-40000-400-XY
StageMonolithic XY Stage with Open Center
Travel 400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
650 mm x 650 mm x 120 mm
Aperture /
Thru
400 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 16.0 µm +/- 2.5 µm +/- 1.5 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 10.0 µm +/- 2.5 µm +/- 1.5 µm
Flatness [2] +/- 12.0 µm +/- 5.0 µm
Pitch [2] +/- 20.0 arc-sec
Yaw +/- 20.0 arc-sec
Roll +/- 20.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.8 m/s
Bot Axis Max
Velocity [3]
1.0 m/s
Top Axis Max
Peak Acceleration [3]
1.8 G
Top Axis Max
Peak Acceleration [3]
0.6 G
Max Payload
Capability
50 kg
Assembly Mass104 kg
ModelAI-LM-35000-350-XY
StageMonolithic XY Stage with Open Center
Travel350 mm (+/- 175 mm)
Dimensions
(Length x Width x Height)
550 mm x 550 mm x 120 mm
Aperture /
Thru
350 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 10.0 µm +/- 2.0 µm +/- 1.5 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 2.0 µm +/- 1.5 µm
Flatness [2] +/- 10.0 µm +/- 4.0 µm
Pitch [2] +/- 20.0 arc-sec
Yaw +/- 20.0 arc-sec
Roll +/- 20.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.8 m/s
Bot Axis Max
Velocity [3]
1.1 m/s
Top Axis Max
Peak Acceleration [3]
2.0 G
Top Axis Max
Peak Acceleration [3]
0.8 G
Max Payload
Capability
50 kg
Assembly Mass64 kg
ModelAI-LM-45000-XY
StageMonolithic XY Stage
Travel450 mm (+/- 225 mm)
Dimensions
(Length x Width x Height)
650 mm x 650 mm x 115 mm
DriveDirect Drive (Ironless Core
Linear Motor)
FeedbackNon-Contact Optical Linear
Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12.0 µm +/- 1.5 µm +/- 1.0 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 16.0 µm +/- 8.0 µm
Pitch [2] +/- 20.0 arc-sec
Yaw +/- 20.0 arc-sec
Roll +/- 14.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.7 m/s
Bot Axis Max
Velocity [3]
1 m/s
Top Axis Max
Peak Acceleration [3]
1.4 G
Bot Axis Max
Peak Acceleration [3]
0.5 G
Max Payload
Capability
80 kg
Assembly Mass135 kg
ModelAI-LM-40000-XY
StageMonolithic XY Stage
Travel400 mm (+/- 200 mm)
Dimensions
(Length x Width x Height)
650 mm x 650 mm x 115 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 12.0 µm +/- 1.5 µm +/- 1.0 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 16.0 µm +/- 8.0 µm
Pitch [2] +/- 20.0 arc-sec
Yaw +/- 20.0 arc-sec
Roll +/- 14.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.6 m/s
Bot Axis Max
Velocity [3]
1 m/s
Top Axis Max
Peak Acceleration [3]
1.4 G
Bot Axis Max
Peak Acceleration [3]
0.5 G
Max Payload
Capability
80 kg
Assembly Mass135 kg
ModelAI-LM-35000-XY
StageMonolithic XY Stage
Travel 350 mm (+/- 175 mm)
Dimensions
(Length x Width x Height)
500 mm x 500 mm x 115 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8.0 µm +/- 1.5 µm +/- 0.8 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 1.5 µm +/- 0.8 µm
Flatness [2] +/- 8.0 µm +/- 4.0 µm
Pitch [2] +/- 20.0 arc-sec
Yaw +/- 20.0 arc-sec
Roll +/- 14.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.7 m/s
Bot Axis Max
Velocity [3]
1.1 m/s
Top Axis Max
Peak Acceleration [3]
1.9 G
Bot Axis Max
Peak Acceleration [3]
0.7 G
Max Payload
Capability
50 kg
Assembly Mass75 kg