| Model | AI-LM-100000-AB8 | ||
| Stage | Air Bearing Linear Stage | ||
| Travel | 1000 mm (+/- 500 mm) | ||
| Dimensions (Length x Width x Height) | 1387.6 mm x 196.85 mm x 75.90 mm |
||
| Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Air Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
| Environment | Ambient | ||
| Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
| Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1 µm per 100mm Travel | ||
| Flatness [2] | +/- 1 µm per 100mm Travel | ||
| Pitch | +/- 5 arc-sec | ||
| Yaw | +/- 5 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Pitch Moment | 79 nm | ||
| Max Roll Moment | 75 nm | ||
| Max Yaw Moment | 37 nm | ||
| Vertical Z Stiffness | 480 N/µm | ||
| Horizontal Y Stiffness | 140 N/µm | ||
| Max Payload Capacity | 60 kg | ||
| Assembly Mass | 26 kg | ||
| Model | AI-LM-80000-AB8 | ||
| Stage | Air Bearing Linear Stage | ||
| Travel | 800 mm (+/- 400 mm) | ||
| Dimensions (Length x Width x Height) | 1184.4 mm x 196.85 mm x 75.90 mm |
||
| Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Air Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
| Environment | Ambient | ||
| Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
| Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1 µm per 100mm Travel | ||
| Flatness [2] | +/- 1 µm per 100mm Travel | ||
| Pitch | +/- 5 arc-sec | ||
| Yaw | +/- 5 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Pitch Moment | 79 nm | ||
| Max Roll Moment | 75 nm | ||
| Max Yaw Moment | 37 nm | ||
| Vertical Z Stiffness | 480 N/µm | ||
| Horizontal Y Stiffness | 140 N/µm | ||
| Max Payload Capacity | 60 kg | ||
| Assembly Mass | 23 kg | ||
| Model | AI-LM-100000-AB-BR | ||
| Stage | Box Rail Air Bearing Linear Stage | ||
| Travel | 1000 mm (+/- 500 mm) | ||
| Dimensions (Length x Width x Height) | 1320.8 mm x 317.5 mm x 100.84 mm |
||
| Dimensions Moving Plate (Length x Width) | 317.5 mm x 266.7 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Air Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
| Environment | Ambient | ||
| Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Payload Capacity | 100 kg | ||
| Assembly Mass | 29 kg | ||
| Model | AI-LM-80000-AB |
| Stage | Air Bearing Linear Stage |
| Travel | 800 mm (+/- 400 mm) |
| Dimensions (Length x Width x Height) | 1032 mm x 150 mm x 63.8 mm |
| Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
| Drive | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
| Environment | Ambient |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
| Max Pitch Moment [2] | 20 Nm |
| Max Roll Moment [2] | 24 Nm |
| Max Yaw Moment [2] | 10 Nm |
| Vertical Z Stiffness | 250 N/µm |
| Horizontal Y Stiffness | 105 N/µm |
| Max Velocity [3] | 2.0 m/s |
| Max Acceleration [3] | 2.0 G |
| Max Load Capacity | 30 kg |
| Assembly Mass | 14.3 kg |
| Model | AI-LM-100000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 1000 mm (+/- 500 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 2050 mm x 1600 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | #colspan# |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-LM-80000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 800 mm (+/- 400 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1850 mm x 1400 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-LM-100000-UII | ||
| Stage | Cartesian Gantry | ||
| Travel - X And/Or Travel - Y | 1000 mm (+/- 500 mm) | ||
| Dimensions (Length x Width x Height) | 1300 mm x 1507 mm x 320 mm | ||
| Max. Sample Width (Inner Width) | 1134 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient | ||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | STD | PRCSN | ULTRA |
| Linear Displacement Accuracy | +/- 40 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 1.0 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 16 µm | +/- 5 µm | |
| Flatness [2] | +/- 35 µm | +/- 10 µm | |
| Pitch | 30 arc-sec | ||
| Yaw | 30 arc-sec | ||
| Roll | 30 arc-sec | ||
| Max Velocity With AC Drive [3] | 2.5 m/s | ||
| Max Velocity With 48VDC Drive [3] | 0.5 m/s | ||
| Max Acceleration With AC Drive [3] | 1.3 G | ||
| Max Acceleration With 48VDC Drive [3] | 0.3 G | ||
| Max (Vertical) Payload Capability | 25 kg | ||
| Max (Horizontal) Payload Capability | 30 kg | ||
| Assembly Mass | 84 kg | ||
| Configurable Options | |||
| ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements | Y Axis Top Down Mounting (Face Mounting Shown) | ||
| Large or Small Cable Tracks | |||
| Mix and Match Travel | |||
| Risers Available (Custom Height) | |||
| Multiple Cable Routing and Connectorization Options | |||
| Customer Cable Routing Available | |||
| Granite, Optical Table, and Breadboard Bases | |||
| Single Axis Versions Available | |||
| Z Axis Options Available | |||
| X and X' Controlled Yaw Available | |||
| Various Material Options Available | |||
| Inch Spacing Versions Available (see page 3) | |||
| *Increased Gap between X and X' stages without Increased Y Travel |
|||
| Model | AI-LM-90000-UII | ||
| Stage | Cartesian Gantry | ||
| Travel - X And/Or Travel - Y | 900 mm (+/- 450 mm) | ||
| Dimensions (Length x Width x Height) | 1200 mm x 1407 mm x 320 mm | ||
| Max. Sample Width (Inner Width) | 1034 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient | ||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | STD | PRCSN | ULTRA |
| Linear Displacement Accuracy | +/- 36 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 1.0 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 14 µm | +/- 5 µm | |
| Flatness [2] | +/- 28 µm | +/- 10 µm | |
| Pitch | 30 arc-sec | ||
| Yaw | 30 arc-sec | ||
| Roll | 30 arc-sec | ||
| Max Velocity With AC Drive [3] | 2.5 m/s | ||
| Max Velocity With 48VDC Drive [3] | 0.5 m/s | ||
| Max Acceleration With AC Drive [3] | 1.4 G | ||
| Max Acceleration With 48VDC Drive [3] | 0.3 G | ||
| Max (Vertical) Payload Capability | 25 kg | ||
| Max (Horizontal) Payload Capability | 30 kg | ||
| Assembly Mass | 73 kg | ||
| Configurable Options | |||
| ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements | Y Axis Top Down Mounting (Face Mounting Shown) | ||
| Large or Small Cable Tracks | |||
| Mix and Match Travel | |||
| Risers Available (Custom Height) | |||
| Multiple Cable Routing and Connectorization Options | |||
| Customer Cable Routing Available | |||
| Granite, Optical Table, and Breadboard Bases | |||
| Single Axis Versions Available | |||
| Z Axis Options Available | |||
| X and X' Controlled Yaw Available | |||
| Various Material Options Available | |||
| Inch Spacing Versions Available (see page 3) | |||
| *Increased Gap between X and X' stages without Increased Y Travel |
|||
| Model | AI-LM-80000-UII | ||
| Stage | Cartesian Gantry | ||
| Travel - X And/Or Travel - Y | 800 mm (+/- 400 mm) | ||
| Dimensions (Length x Width x Height) | 1100 mm x 1307 mm x 320 mm | ||
| Max. Sample Width (Inner Width) | 934 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient | ||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | STD | PRCSN | ULTRA |
| Linear Displacement Accuracy | +/- 32 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 1.0 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 12 µm | +/- 5 µm | |
| Flatness [2] | +/- 24 µm | +/- 10 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 25 arc-sec | ||
| Max Velocity With AC Drive [3] | 2.5 m/s | ||
| Max Velocity With 48VDC Drive [3] | 0.5 m/s | ||
| Max Acceleration With AC Drive [3] | 1.5 G | ||
| Max Acceleration With 48VDC Drive [3] | 0.3 G | ||
| Max (Vertical) Payload Capability | 25 kg | ||
| Max (Horizontal) Payload Capability | 30 kg | ||
| Assembly Mass | 63 kg | ||
| Configurable Options | |||
| ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements | Y Axis Top Down Mounting (Face Mounting Shown) | ||
| Large or Small Cable Tracks | |||
| Mix and Match Travel | |||
| Risers Available (Custom Height) | |||
| Multiple Cable Routing and Connectorization Options | |||
| Customer Cable Routing Available | |||
| Granite, Optical Table, and Breadboard Bases | |||
| Single Axis Versions Available | |||
| Z Axis Options Available | |||
| X and X' Controlled Yaw Available | |||
| Various Material Options Available | |||
| Inch Spacing Versions Available (see page 3) | |||
| *Increased Gap between X and X' stages without Increased Y Travel |
|||
| Model | AI-LM-100000-UII-XB | ||
| Stage | Linear Stage | ||
| Travel | 1000 mm (+/- 500 mm) | ||
| Dimensions (Length x Width x Height) | 1366 mm x 357 mm x 96.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | ELITE |
| Linear Displacement Accuracy | +/- 40 µm | +/-10 µm | +/- 5 µm |
| Bidirectional Linear Repeatability | +/- 1 µm | +/- 0.5 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 30 µm | +/- 20 µm | +/- 10 µm |
| Flatness [2] | +/- 150 µm | +/- 20 µm | +/- 15 µm |
| Pitch | +/- 30 arc-sec | +/- 15 arc-sec | |
| Yaw | +/- 30 arc-sec | +/- 18 arc-sec | |
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | Depending on specific Application - Ask ALIO | ||
| Model | AI-LM-80000-UII-XB | ||
| Stage | Linear Stage | ||
| Travel | 800 mm (+/- 400 mm) | ||
| Dimensions (Length x Width x Height) | 1166 mm x 357 mm x 96.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | ELITE |
| Linear Displacement Accuracy | +/- 32 µm | +/- 5 µm | +/- 3 µm |
| Bidirectional Linear Repeatability | +/- 1 µm | +/- 0.5 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 26 µm | +/- 18 µm | +/- 10 µm |
| Flatness [2] | +/- 100 µm | +/- 18 µm | +/- 12 µm |
| Pitch | +/- 30 arc-sec | +/- 15 arc-sec | |
| Yaw | +/- 30 arc-sec | +/- 18 arc-sec | |
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | Depending on specific Application - Ask ALIO | ||
| Model | AI-LM-100000-UII-WL | ||
| Stage | Linear Stage | ||
| Travel | 1000 mm (+/- 500 mm) | ||
| Dimensions (Length x Width x Height) | 1320 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 40 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 10 µm | +/- 5 µm | |
| Flatness [2] | +/- 10 µm | +/- 5 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 15 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 41 kg | ||
| Model | AI-LM-80000-UII-WL | ||
| Stage | Linear Stage | ||
| Travel | 800 mm (+/- 400 mm) | ||
| Dimensions (Length x Width x Height) | 1120 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 32 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 15 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 37 kg | ||
| Model | AI-LM-100000-UII-W | ||
| Stage | Linear Stage | ||
| Travel | 1000 mm (+/- 500 mm) | ||
| Dimensions (Length x Width x Height) | 1220 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 40 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 10 µm | +/- 5 µm | |
| Flatness [2] | +/- 10 µm | +/- 5 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 15 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 41 kg | ||
| Model | AI-LM-80000-UII-W | ||
| Stage | Linear Stage | ||
| Travel | 800 mm (+/- 400 mm) | ||
| Dimensions (Length x Width x Height) | 1020 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 32 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 15 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 37 kg | ||
| Model | AI-LM-100000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 1000 mm (+/- 500 mm) | ||
| Dimensions (Length x Width x Height) | 1180 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 40 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 10 µm | +/- 5 µm | |
| Flatness [2] | +/- 10 µm | +/- 5 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 15 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 11 kg | ||
| Model | AI-LM-90000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 900 mm (+/- 450 mm) | ||
| Dimensions (Length x Width x Height) | 1080 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 36 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 10 µm | +/- 5 µm | |
| Flatness [2] | +/- 10 µm | +/- 5 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 15 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 10 kg | ||
| Model | AI-LM-80000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 800 mm (+/- 400 mm) | ||
| Dimensions (Length x Width x Height) | 980 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 32 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 15 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 9 kg | ||
| Model | AI-LM-100000-UII-S | ||
| Stage | Linear Stage | ||
| Travel | 1000 mm (+/- 500 mm) | ||
| Dimensions (Length x Width x Height) | 1220 mm x 208 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10^-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 40 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 10 µm | +/- 5 µm | |
| Flatness [2] | +/- 10 µm | +/- 5 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 15 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 23.5 kg | ||
| Model | AI-LM-80000-UII-S | ||
| Stage | Linear Stage | ||
| Travel | 800 mm (+/- 400 mm) | ||
| Dimensions (Length x Width x Height) | 1020 mm x 208 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10^-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 32 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 15 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 20 kg | ||
