ModelAI-LM-100000-ABL
StageXY Planar Air Bearing Stage
Travel - XY1000 mm (+/- 500 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)2050 mm x 1600 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options  #colspan#
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-LM-80000-ABL
StageXY Planar Air Bearing Stage
Travel - XY800 mm (+/- 400 mm)
Optional Travel - Yaw ComplianceOptional: +/- 0.1 deg 
Dimensions (Length x Width x Height)1850 mm x 1400 mm x 145 mm
Dimensions Moving Plate (Length x Width)404 mm x 423.4 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, Trackless Cable Routing
Optional: Customer/Payload Cable Routing Available
StructureAnodized Aluminum 6061-T6
Base StructurePrecision Lapped Black Granite 
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
Accuracy< +/- 0.5 µm
Repeatability< +/- 100 nm
Straightness< +/- 0.5 µm
Flatness< +/- 1 µm
Max Velocity> 1 m/s
Max Acceleration> 1 G
Load Capacity20 kg
Optional: 80+ kg
Assembly MassDepending on specific Configuration - Ask ALIO
Configurable Options
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific RequirementsCustom Plate L x W x H
Custom X and/or Y Travel
Custom User Mounting Interface Features
Custom Platen Designs (Open Center Options)
Custom Compact Designs for Small Footprint
Customer Cable Routing 
Customizable Motor Forces
Custom High Payload Options
Custom Granite Features and Sizes
Various Material Options Throughout
Single Axis Versions Available (Y Axis Only)
Various Support and Vibration Isolation Options
Various Safety System Options
Various Control Chassis Options
ModelAI-LM-100000-UII
StageCartesian Gantry
Travel - X And/Or Travel - Y1000 mm (+/- 500 mm)
Dimensions (Length x Width x Height)1300 mm x 1507 mm x 320 mm
Max. Sample Width (Inner Width)1134 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]STDPRCSNULTRA
Linear Displacement Accuracy +/- 40 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 16 µm +/- 5 µm
Flatness [2] +/- 35 µm +/- 10 µm
Pitch30 arc-sec
Yaw30 arc-sec
Roll30 arc-sec
Max Velocity With AC Drive [3]2.5 m/s
Max Velocity With 48VDC Drive [3]0.5 m/s
Max Acceleration With AC Drive [3]1.3 G
Max Acceleration With 48VDC Drive [3]0.3 G
Max (Vertical) Payload Capability 25 kg
Max (Horizontal) Payload Capability 30 kg
Assembly Mass84 kg
Configurable Options 
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific RequirementsY Axis Top Down Mounting (Face Mounting Shown)
Large or Small Cable Tracks
Mix and Match Travel
Risers Available (Custom Height)
Multiple Cable Routing and Connectorization Options
Customer Cable Routing Available
Granite, Optical Table, and Breadboard Bases
Single Axis Versions Available
Z Axis Options Available
X and X' Controlled Yaw Available
Various Material Options Available
Inch Spacing Versions Available (see page 3)
*Increased Gap between X and X' stages
without Increased Y Travel
ModelAI-LM-90000-UII
StageCartesian Gantry
Travel - X And/Or Travel - Y900 mm (+/- 450 mm)
Dimensions (Length x Width x Height)1200 mm x 1407 mm x 320 mm
Max. Sample Width (Inner Width)1034 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]STDPRCSNULTRA
Linear Displacement Accuracy +/- 36 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 14 µm +/- 5 µm
Flatness [2] +/- 28 µm +/- 10 µm
Pitch30 arc-sec
Yaw30 arc-sec
Roll30 arc-sec
Max Velocity With AC Drive [3]2.5 m/s
Max Velocity With 48VDC Drive [3]0.5 m/s
Max Acceleration With AC Drive [3]1.4 G
Max Acceleration With 48VDC Drive [3]0.3 G
Max (Vertical) Payload Capability 25 kg
Max (Horizontal) Payload Capability 30 kg
Assembly Mass73 kg
Configurable Options 
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific RequirementsY Axis Top Down Mounting (Face Mounting Shown)
Large or Small Cable Tracks
Mix and Match Travel
Risers Available (Custom Height)
Multiple Cable Routing and Connectorization Options
Customer Cable Routing Available
Granite, Optical Table, and Breadboard Bases
Single Axis Versions Available
Z Axis Options Available
X and X' Controlled Yaw Available
Various Material Options Available
Inch Spacing Versions Available (see page 3)
*Increased Gap between X and X' stages
without Increased Y Travel
ModelAI-LM-80000-UII
StageCartesian Gantry
Travel - X And/Or Travel - Y800 mm (+/- 400 mm)
Dimensions (Length x Width x Height)1100 mm x 1307 mm x 320 mm
Max. Sample Width (Inner Width)934 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]STDPRCSNULTRA
Linear Displacement Accuracy +/- 32 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 12 µm +/- 5 µm
Flatness [2] +/- 24 µm +/- 10 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll25 arc-sec
Max Velocity With AC Drive [3]2.5 m/s
Max Velocity With 48VDC Drive [3]0.5 m/s
Max Acceleration With AC Drive [3]1.5 G
Max Acceleration With 48VDC Drive [3]0.3 G
Max (Vertical) Payload Capability 25 kg
Max (Horizontal) Payload Capability 30 kg
Assembly Mass63 kg
Configurable Options 
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific RequirementsY Axis Top Down Mounting (Face Mounting Shown)
Large or Small Cable Tracks
Mix and Match Travel
Risers Available (Custom Height)
Multiple Cable Routing and Connectorization Options
Customer Cable Routing Available
Granite, Optical Table, and Breadboard Bases
Single Axis Versions Available
Z Axis Options Available
X and X' Controlled Yaw Available
Various Material Options Available
Inch Spacing Versions Available (see page 3)
*Increased Gap between X and X' stages
without Increased Y Travel
ModelAI-LM-100000-UII-XB
StageLinear Stage
Travel1000 mm (+/- 500 mm)
Dimensions (Length x Width x Height)1366 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy +/- 40 µm +/-10 µm +/- 5 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 30 µm +/- 20 µm+/- 10 µm
Flatness [2] +/- 150 µm +/- 20 µm+/- 15 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-LM-80000-UII-XB
StageLinear Stage
Travel800 mm (+/- 400 mm)
Dimensions (Length x Width x Height)1166 mm x 357 mm x 96.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRAELITE
Linear Displacement Accuracy +/- 32 µm +/- 5 µm +/- 3 µm
Bidirectional Linear Repeatability +/- 1 µm +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 26 µm+/- 18 µm+/- 10 µm
Flatness [2] +/- 100 µm+/- 18 µm+/- 12 µm
Pitch+/- 30 arc-sec+/- 15 arc-sec
Yaw+/- 30 arc-sec+/- 18 arc-sec
Max Velocity [3]2 m/s
Max Acceleration [3]4.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly MassDepending on specific Application - Ask ALIO
ModelAI-LM-100000-UII-WL
StageLinear Stage
Travel1000 mm (+/- 500 mm)
Dimensions (Length x Width x Height)1320 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 40 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 10 µm +/- 5 µm
Flatness [2] +/- 10 µm +/- 5 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass41 kg
ModelAI-LM-80000-UII-WL
StageLinear Stage
Travel800 mm (+/- 400 mm)
Dimensions (Length x Width x Height)1120 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 32 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass37 kg
ModelAI-LM-100000-UII-W
StageLinear Stage
Travel1000 mm (+/- 500 mm)
Dimensions
(Length x Width x Height)
1220 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 40 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 10 µm +/- 5 µm
Flatness [2] +/- 10 µm +/- 5 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass41 kg
ModelAI-LM-80000-UII-W
StageLinear Stage
Travel800 mm (+/- 400 mm)
Dimensions
(Length x Width x Height)
1020 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 32 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
2.0 G
Max (Vertical)
Payload Capability 
100 kg
Max
(Horizontal) Payload Capability 
70 kg
Assembly Mass37 kg
ModelAI-LM-100000-UII-SN
StageLinear Stage
Travel1000 mm (+/- 500 mm)
Dimensions
(Length x Width x Height)
1180 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 40 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 10 µm +/- 5 µm
Flatness [2] +/- 10 µm +/- 5 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass11 kg
ModelAI-LM-90000-UII-SN
StageLinear Stage
Travel900 mm (+/- 450 mm)
Dimensions
(Length x Width x Height)
1080 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 36 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 10 µm +/- 5 µm
Flatness [2] +/- 10 µm +/- 5 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass10 kg
ModelAI-LM-80000-UII-SN
StageLinear Stage
Travel800 mm (+/- 400 mm)
Dimensions
(Length x Width x Height)
980 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 32 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass9 kg
ModelAI-LM-100000-UII-S
StageLinear Stage
Travel1000 mm (+/- 500 mm)
Dimensions
(Length x Width x Height)
1220 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 40 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 10 µm +/- 5 µm
Flatness [2] +/- 10 µm +/- 5 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass23.5 kg
ModelAI-LM-80000-UII-S
StageLinear Stage
Travel800 mm (+/- 400 mm)
Dimensions
(Length x Width x Height)
1020 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 32 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 8 µm +/- 4 µm
Flatness [2] +/- 8 µm +/- 4 µm
Pitch25 arc-sec
Yaw25 arc-sec
Roll15 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass20 kg