ModelAI-TM-80RA-UII
StageRotary Stage
Travel360 deg continuous
Diameter80 mm
Dimensions (Length x Width x Height)86 mm x 80 mm x 84 mm
Aperture / Thru10.75 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 1.5m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [2](STD)ULTRANANO
Bidirectional Angular Repeatability +/- 1.5 arc-sec +/- 0.5 arc-sec +/- 0.3 arc-sec
Resolution0.32 - 32.0 arc-sec (Digital)
Axial Runout25 µm
Radial Runout25 µm
Wobble50 arc-sec
Max Velocity [3]720 deg/s
Max Acceleration [3]> 3600 deg/s²
Assembly Mass1 kg
Max Load (Axial)2.5 kg
Max Load (Radial)2.5 kg
ModelAI-TM-312RA
StageRotary Stage
Travel360 deg continuous
Diameter312 mm
Dimensions (Length x Width x Height)332 mm x 312 mm x 80 mm
Aperture / Thru75 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
SensorsIntegrated Home
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec +/- 0.4 arc-sec +/- 0.2 arc-sec
Axial Runout +/- 5.0 µm +/- 2.5 µm +/- 1.5 µm
Radial Runout +/- 5.0 µm +/- 2.5 µm +/- 1.5 µm
Wobble +/- 7.5 arc-sec +/- 5.0 arc-sec +/- 2.5 arc-sec
Resolution [2]Standard: 0.007 arc-sec (Analog)
Optional: 0.002 - 7.0 arc-sec (Digital)
Max Velocity [3]2400 deg/s
Max Acceleration [3]30000 deg/s²
Max Load (Axial)50 kg
Max Load (Radial)33 kg
Assembly Mass19 kg
ModelAI-TM-240RA
StageRotary Stage
Travel360 deg continuous
Diameter240 mm
Dimensions (Length x Width x Height)260 mm x 240 mm x 45 mm
Aperture / Thru100 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
SensorsIntegrated Home
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec +/- 0.4 arc-sec +/- 0.2 arc-sec
Axial Runout +/- 5.0 µm +/- 2.5 µm +/- 1.5 µm
Radial Runout +/- 5.0 µm +/- 2.5 µm +/- 1.5 µm
Wobble +/- 7.5 arc-sec +/- 5.0 arc-sec +/- 2.5 arc-sec
Resolution [2]Standard: 0.009 arc-sec (Analog)
Optional: 0.003 - 9.0 arc-sec (Digital)
Max Velocity [3]3600 deg/s
Max Acceleration [3]70000 deg/s²
Max Load (Axial)8 kg
Max Load (Radial)8 kg
Assembly Mass10 kg
ModelAI-TM-208RA
StageRotary Stage
Travel360 deg continuous
Diameter208 mm
Dimensions (Length x Width x Height)228 mm x 208 mm x 110 mm
Aperture / Thru75 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
SensorsIntegrated Home
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec +/- 0.4 arc-sec +/- 0.3 arc-sec
Axial Runout +/- 5.0 µm +/- 2.5 µm +/- 1.5 µm
Radial Runout +/- 5.0 µm +/- 2.5 µm +/- 1.5 µm
Wobble +/- 8.0 arc-sec +/- 5.0 arc-sec +/- 2.5 arc-sec
Resolution [2]Standard: 0.01 arc-sec (Analog)
Optional: 0.003 - 10.0 arc-sec (Digital)
Max Velocity [3]5500 deg/s
Max Acceleration [3]170000 deg/s²
Max Load (Axial)40 kg
Max Load (Radial)27 kg
Assembly Mass11 kg
ModelAI-TM-154RA
StageRotary Stage
Travel360 deg continuous
Diameter154 mm
Dimensions (Length x Width x Height)173 mm x 154 mm x 84 mm
Aperture / Thru72 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
SensorsIntegrated Home
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec
Axial Runout +/- 5.0 µm +/- 3.5 µm +/- 2.0 µm
Radial Runout +/- 5.0 µm +/- 3.5 µm +/- 2.0 µm
Wobble +/- 10.0 arc-sec +/- 5.0 arc-sec +/- 3.0 arc-sec
Resolution [2]Standard: 0.013 arc-sec (Analog)
Optional: 0.004 - 14.0 arc-sec (Digital)
Max Velocity [3]5500 deg/s
Max Acceleration [3]160000 deg/s²
Max Load (Axial)20 kg
Max Load (Radial)20 kg
Assembly Mass4.4 kg
ModelAI-TM-104RA
StageRotary Stage
Travel360 deg continuous
Diameter104 mm
Dimensions (Length x Width x Height)123 mm x 104 mm x 80 mm
Aperture / Thru32 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
SensorsIntegrated Home
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec +/- 0.5 arc-sec +/- 0.3 arc-sec
Axial Runout +/- 5.0 µm +/- 3.5 µm +/- 2.0 µm
Radial Runout +/- 5.0 µm +/- 3.5 µm +/- 2.0 µm
Wobble +/- 10.0 arc-sec +/- 5.0 arc-sec +/- 3.0 arc-sec
Resolution [2]Standard: 0.02 arc-sec (Analog)
Optional: 0.05 - 21.0 arc-sec (Digital)
Max Velocity [3]10000 deg/s
Max Acceleration [3]500000 deg/s²
Max Load (Axial)10 kg
Max Load (Radial)10 kg
Assembly Mass2.7 kg
ModelAI-TM-125R-AB
StageRotary Stage
Travel360 deg continuous
Diameter125 mm
Dimensions (Length x Width x Height)145 mm x 145 mm x 150 mm
Aperture / Thru19 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications 
Axial Runout (Standard)0.5 µm
Radial Runout (Standard)0.5 µm
Axial Stiffness [7]263 N/µm
Radial Stiffness [7]87 N/µm
Tilt Stiffness [7]0.18 Nm/µrad
Resolution (Standard) [8]Standard: 0.02 arc-sec (Analog)
Optional: 0.021 - 21.0 arc-sec (Digital)
Max Velocity [6]1800 deg/s
Max Axial Load [7]37 kg
Max Radial Load [7]14 kg
Assembly Mass9.6 kg
ModelAI-TM-104R-AB
StageRotary Stage
Travel360 deg continuous
Diameter104 mm
Dimensions (Length x Width x Height)123 mm x 104 mm x 94 mm
Aperture / Thru 32 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications 
Axial Runout +/- 1 µm
Radial Runout +/- 1 µm
Resolution [8]Standard: 0.02 arc-sec (Analog)
Optional: 0.021 - 21.0 arc-sec (Digital)
Max Velocity [7]1440  deg/s
Max Axial Load 8 kg
Max Radial Load4 kg
Assembly Mass3.1 kg
ModelAI-TM-104R
StageRotary Stage
Travel360 deg continuous
Diameter104 mm
Dimensions (Length x Width x Height)123 mm x 104 mm x 80 mm
Aperture / Thru32 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.6 arc-sec +/- 0.5 arc-sec +/- 0.3 arc-sec
Resolution [2]Standard: 0.02 arc-sec (Analog)
Optional: 0.005 - 21.0 arc-sec (Digital)
Axial Runout +/- 6.0 µm +/- 4.5 µm +/- 3.0 µm
Radial Runout +/- 6.0 µm +/- 4.5 µm +/- 3.0 µm
Wobble +/- 12.5 arc-sec +/- 7.5 arc-sec +/- 5.0 arc-sec
Max Velocity [3]>8000 deg/s
Max Acceleration [3]400000 deg/s²
Max Load (Axial)12 kg
Max Load (Radial)12 kg
Assembly Mass2.7 kg
ModelAI-TM-80R
StageRotary Stage
Travel360 deg continuous
Diameter80 mm
Dimensions (Length x Width x Height)96mm x 80 mm x 60 mm
Aperture / Thru6 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.7 arc-sec +/- 0.6 arc-sec +/- 0.4 arc-sec
Resolution [2]Standard: 0.027 arc-sec (Analog)
Optional: 0.007 - 27.0 arc-sec (Digital)
Axial Runout +/- 6.0 µm +/- 5.0 µm +/- 4.0 µm
Radial Runout +/- 6.0 µm +/- 5.0 µm +/- 4.0 µm
Wobble +/- 12.5 arc-sec +/- 10.0 arc-sec +/- 7.5 arc-sec
Max Velocity [3]>6000 deg/s
Max Acceleration [3]200000 deg/s²
Max Load (Axial)2.5 kg
Max Load (Radial)2.5 kg
Assembly Mass1.1 kg
ModelAI-TM-56R
StageRotary Stage
Travel360 deg continuous
Diameter56 mm
Dimensions (Length x Width x Height)72 mm x 56 mm x 62 mm
Aperture / Thru8 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.7 arc-sec +/- 0.6 arc-sec +/- 0.4 arc-sec
Resolution [2]Standard: 0.039 arc-sec (Analog)
Optional: 0.01 - 40.0 arc-sec (Digital)
Axial Runout +/- 7.5 µm +/- 6.0 µm +/- 5.0 µm
Radial Runout +/- 7.5 µm +/- 6.0 µm +/- 5.0 µm
Wobble +/- 12.5 arc-sec +/- 10.0 arc-sec +/- 7.5 arc-sec
Max Velocity [3]>3000 deg/s
Max Acceleration [3]60000 deg/s²
Max Load (Axial)2.5 kg
Max Load (Radial)2.5 kg
Assembly Mass0.65 kg
ModelAI-TM-154RA + AI-TM-208RA-GMB-CB
Stage2 Axis Rotary Gimbal
Travel (Theta Z) 360 degrees continuous (Theta Z)
Travel (Theta Y)+/- 100 degrees (Theta Y)
Optional: up to +/- 172 deg
Dimensions (Length x Width x Height)571 mm x 230 mm x 362.5 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
BearingsAngular Contact (Duplex Pair)
CounterbalanceCounterweight Capability (Adjustable with Provided Weights)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
AxisA (THETA Z)B (THETA Y)
Performance Specifications [2]STDULTRANANOSTDULTRANANO
Angular Accuracy With Compensationn/a +/-3 arc-secn/a +/-3 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec +/- 0.4 arc-sec
Resolution0.01 arc-sec (analog)0.01 arc-sec (analog)
Axial Runout10 µm4 µm2 µm10 µm5 µm3 µm
Radial Runout10 µm4 µm2 µm10 µm5 µm3 µm
Axis Wobble16 arc-sec10 arc-sec8 arc-sec10 arc-sec7 arc-sec5 arc-sec
B Axis To A Mount Surface Distance60 mm +/- 0.5 mm Nominal
(exact distance provided for each S/N at shipment)
Max Velocity [3]360 deg/s (~6.28 rad/s)360 deg/s (~6.28 rad/s)
Max Acceleration [3]`2300 deg/s (~40 rad/s)
Max Load (Axial)12 kg40 kg
Max Load (Radial)12 kg40 kg
Customer Specified Payload8 kg (+/- 4 kg or 12 kg maximum)
Assembly Mass (With Counterweight)39 kg
ModelAI-TM-104RA + AI-TM-208RA-GMB-CB
Stage2 Axis Rotary Gimbal
Travel (Theta Z) 360 deg continuous (Theta Z)
Travel (Theta Y)+/- 100 degrees (Theta Y)
Optional: up to +/- 172 deg
Dimensions (Length x Width x Height)571 mm x 230 mm x 362.5 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
BearingsAngular Contact (Duplex Pair)
CounterbalanceCounterweight Capability (Adjustable with Provided Weights)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
AxisA (THETA Z)B (THETA Y)
Performance Specifications [2]STDULTRANANOSTDULTRANANO
Angular Accuracy With Compensationn/a +/-3 arc-secn/a +/-3 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec +/- 0.4 arc-sec
Resolution0.02 arc-sec (analog)0.01 arc-sec (analog)
Axial Runout10 µm4 µm2 µm10 µm5 µm3 µm
Radial Runout10 µm4 µm2 µm10 µm5 µm3 µm
Axis Wobble12 arc-sec8 arc-sec6 arc-sec10 arc-sec7 arc-sec5 arc-sec
B Axis To A Mount Surface Distance60 mm +/- 0.5 mm Nominal
(exact distance provided for each S/N at shipment)
Max Velocity [3]360 deg/s (~6.28 rad/s)360 deg/s (~6.28 rad/s)
Max Acceleration [3]1600 deg/s (~28 rad/s)2300 deg/s (~40 rad/s)
Max Load (Axial)12 kg40 kg
Max Load (Radial)12 kg40 kg
Customer Specified Payload8 kg (+/- 4 kg or 12 kg maximum)
Assembly Mass (With Counterweight)39 kg
ModelAI-HH-60XY-15Z-56RT-LM
StageHybrid Hexapod 
Travel - XY60 mm (+/- 30 mm)
Travel - Z15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)170 mm x 163.5 mm x 224.5 mm
DrivesFrameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm +/- 70 nm
Z +/- 100 nm +/- 70 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.04 arc-sec
Yaw0.03 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]XY150 mm/s
Z15 mm/s
Max Linear Acceleration [3]XY0.3 G
Z0.3 G
Max Angular Velocity [3]Pitch And Roll30 deg/s
Roll360 deg/s
Max Angular Acceleration [3]Pitch And Roll>1000 deg/s²
Yaw>1000 deg/s²
Max Payload5 kg
Assembly Mass9.022 kg
ModelAI-HH-60XY-15Z-56R
StageHybrid Hexapod 
Travel - XY60 mm (+/- 30 mm)
Travel - Z15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)174 mm x 176.3 mm x 201 mm
DrivesFrameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm +/- 70 nm
Z +/- 100 nm +/- 70 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.04 arc-sec
Yaw0.03 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]XY100 mm/s
Z15 mm/s
Max Linear Acceleration [3]XY0.3 G
Z0.3 G
Max Angular Velocity [3]Pitch And Roll30 deg/s
Roll360 deg/s
Max Angular Acceleration [3]Pitch And Roll>1000 deg/s²
Yaw>1000 deg/s²
Max Payload5 kg
Assembly Mass5.7 kg
ModelAI-HH-30D-200XY-62Z-80R-LM
StageHybrid Hexapod (Angulares® )
Travel - XY200 mm (+/- 100 mm)
Travel - Z62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll  +/- 30 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)571 mm x 401 mm x 322.2 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
Rotary BrakeStandard: No Brake
Optional: Pneumatic Release, Spring Engage Brake (B)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 30 nm
Z +/- 200 nm
Pitch And Roll +/- 1 arc-sec
Yaw +/- 0.5 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout12 µm10 µm5 µm
Radial Runout12 µm10 µm5 µm
Wobble20 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.15 arc-sec
Yaw0.04 arc-sec
Max Linear Velocity [3]XY100  mm/s
Z15  mm/s
Max Linear Acceleration [3]XY0.3 G
Z0.3 G
Max Angular Velocity [3]Pitch And Roll20 deg/s
Roll>3000 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1000 deg/s²
YAW>2000 deg/s²
Max Payload5-10 kg
Assembly Mass30 kg
ModelAI-HH-30D-200XY-62Z-80R-CM
StageHybrid Hexapod (Angulares® )
Travel - XY200 mm (+/- 100 mm)
Travel - Z62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll  +/- 30 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)510 mm x 336.5 mm x 293.2 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
Rotary BrakeStandard: No Brake
Optional: Pneumatic Release, Spring Engage Brake (B)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 30 nm
Z +/- 200 nm
Pitch And Roll +/- 1 arc-sec
Yaw +/- 0.5 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout12 µm10 µm5 µm
Radial Runout12 µm10 µm5 µm
Wobble20 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.15 arc-sec
Yaw0.04 arc-sec
Max Linear Velocity [3]XY50  mm/s
Z15  mm/s
Max Linear Acceleration [3]XY0.1 G
Z0.3 G
Max Angular Velocity [3]Pitch And Roll20 deg/s
Roll>3000 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1000 deg/s²
YAW>2000 deg/s²
Max Payload5 kg
Assembly Mass14 kg
ModelAI-HH-30D-100XY-62Z-80R-LM
StageHybrid Hexapod (Angulares® )
Travel - XY100 mm (+/- 50 mm)
Travel - Z62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll  +/- 30 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)415.8 mm x 295.5 mm x 312.2 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
Rotary BrakeStandard: No Brake
Optional: Pneumatic Release, Spring Engage Brake (B)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 30 nm
Z +/- 200 nm
Pitch And Roll +/- 1 arc-sec
Yaw +/- 0.5 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout12 µm10 µm5 µm
Radial Runout12 µm10 µm5 µm
Wobble20 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.15 arc-sec
Yaw0.04 arc-sec
Max Linear Velocity [3]XY100  mm/s
Z15  mm/s
Max Linear Acceleration [3]XY0.3 G
Z0.3 G
Max Angular Velocity [3]Pitch And Roll20 deg/s
Roll>3000 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1000 deg/s²
YAW>2000 deg/s²
Max Payload5-10 kg
Assembly Mass15.29 kg
ModelAI-HH-30D-60XY-62Z-80R-BSD
StageHybrid Hexapod (Angulares® )
Travel - XY60 mm (+/- 30 mm)
Travel - Z62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll  +/- 30 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)199 mm x 208 mm x 285.2 mm
DrivesXY, Pitch & Roll: Frameless Torque Motor with Precision Ball Screw
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
Rotary BrakeStandard: No Brake
Optional: Pneumatic Release, Spring Engage Brake (B)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm
Z +/- 200 nm
Pitch And Roll#colspan# +/- 1 arc-sec
Yaw#colspan# +/- 0.5 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-secPitch And Roll
Yaw RunoutAxial Runout12 µm10 µm5 µm
Radial Runout12 µm10 µm5 µm
Wobble20 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
YawPitch And Roll~0.15 arc-sec
Yaw0.04 arc-sec
Max Linear Velocity [3]XY50  mm/s
Z15  mm/s
Max Linear Acceleration [3]XY0.1 G
Z0.3 G
Max Angular Velocity [3]Pitch And Roll20 deg/s
Roll>3000 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1000 deg/s²
YAW>2000 deg/s²
Max Payload5-10 kg
Assembly Mass 
ModelAI-HH-200XY-60Z-154RA
StageHybrid Hexapod 
Travel - XY200 mm (+/- 100 mm)
Travel - Z60 mm (+ 60 mm/- 0 mm)
Travel - Pitch & Roll  +/- 14 deg
Travel - Yaw360 deg continous
Dimensions (Length x Width x Height)443.2 mm x 410.1 mm x 378 mm
DrivesXY: Direct Drive (Ironless Core Linear Motor)
Pitch & Roll: Frameless Torque Motor with Precision Ball Screw
Yaw: Torque Motor
BrakePneumatic Release, Spring Lock
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm +/- 70 nm
Z +/- 100 nm +/- 70 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout10 nm7 nm4 nm
Radial Runout10 nm7 nm4 nm
Wobble20 arc-sec10 arc-sec6 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.02 arc-sec
Yaw~0.01 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]XY500  mm/s
Z30  mm/s
Max Linear Acceleration [3]0.3 G
Max Angular Velocity [3]Pitch And Roll60 deg/s
Yaw1800 deg/s
Max Angular Acceleration [3]Pitch And Roll>1000 deg/s²
Yaw>3600 deg/s²
Max Payload20 kg
Assembly Mass57 kg
ModelAI-HH-200XY-15Z-56RT-CM
StageHybrid Hexapod (6 DOF)
Travel - XY200 mm (+/- 100 mm)
Travel - Z15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continous
Dimensions (Length x Width x Height)336.5 mm  x 275 mm x 202.7 mm
DrivesXY: Direct Drive (Ironless Core Linear Motor)
Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm +/- 70 nm
Z +/- 100 nm +/- 70 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.04 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc/sec5 arc/sec1 arc/sec
XZ & YZ250 arc/sec200 arc/sec50 arc/sec
Max Linear Velocity [3]XY50 mm/s
Z15 mm/s
MAX LINEAR ACCELERATION [3]XY0.1 G
Z0.3 G
Max Angular Velocity [3]PITCH AND ROLL30 deg/s
YAW3000 deg/s
MAX ANGULAR ACCELERATION [3]PITCH AND ROLL>1000 deg/s²
YAW>7200 deg/s²
Max Payload5 kg
Assembly Mass16.3 kg
ModelAI-HH-100XY-15Z-56RT-LM
StageHybrid Hexapod (6 DOF)
Travel - XY100 mm (+/- 50 mm)
Travel - Z15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continous
Dimensions (Length x Width x Height)296 mm x 244 mm x 215.2 mm
DrivesXY: Direct Drive (Ironless Core Linear Motor)
Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm +/- 70 nm
Z +/- 100 nm +/- 70 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.04 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc/sec5 arc/sec1 arc/sec
XZ & YZ250 arc/sec200 arc/sec50 arc/sec
Max Linear Velocity [3]XY150 mm/s
Z15 mm/s
MAX LINEAR ACCELERATION [3]XY0.3 G
Z0.3 G
Max Angular Velocity [3]PITCH AND ROLL30 deg/s
YAW3000 deg/s
MAX ANGULAR ACCELERATION [3]PITCH AND ROLL>1000 deg/s²
YAW>7200 deg/s²
Max Payload5 kg
Assembly Mass8.9 kg
ModelAI-HH-60XY-15Z-56RT-LM
StageHybrid Hexapod (6 DOF)
Travel - XY60 mm (+/- 30 mm)
Travel - Z15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continous
Dimensions (Length x Width x Height)165 mm  x 215.2 mm x 222.7 mm
DrivesXY: Direct Drive (Ironless Core Linear Motor)
Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm +/- 70 nm
Z +/- 100 nm +/- 70 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.04 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]XY150 mm/s
Z15 mm/s
MAX LINEAR ACCELERATION [3]XY0.3 G
Z0.3 G
Max Angular Velocity [3]PITCH AND ROLL30 deg/s
YAW3000 deg/s
MAX ANGULAR ACCELERATION [3]PITCH AND ROLL>1000 deg/s²
YAW>7200 deg/s²
Max Payload5 kg
Assembly Mass7.3 kg
ModelAI-HH-60XY-15Z-56RT-BSD
StageHybrid Hexapod (6 DOF)
Travel - XY60 mm (+/- 30 mm)
Travel - Z15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continous
Dimensions (Length x Width x Height)171 mm x 177 mm x 191.7 mm
DrivesXY, Pitch & Roll: Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 100 nm +/- 70 nm
Z +/- 100 nm +/- 70 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll#colspan#  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.04 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]XY100 mm/s
Z15 mm/s
MAX LINEAR ACCELERATION [3]XY0.3 G
Z#colspan#0.3 G
Max Angular Velocity [3]PITCH AND ROLL30 deg/s
YAW3000 deg/s
MAX ANGULAR ACCELERATION [3]PITCH AND ROLL>1000 deg/s²
YAW>7200 deg/s²
Max Payload5 kg
Assembly Mass6 kg
ModelAI-HH-ST14-200XY-60Z-104R
Travel - XY200 mm (+/- 100 mm)
Travel - Z60 mm (+ 60 mm /- 0 mm)
Travel - Pitch & Roll  +/- 30 deg
Travel - Yaw360 deg continous
Dimensions (Length x Width x Height)292 mm x 275 mm x 400 mm
StageHybrid Hexapod 
DrivesXY, Pitch & Yaw: Stepper Motor
Yaw: Torque Motor
FeedbackStandard: No Encoder
Optional: Non-Contact Optical Linear Encoder, Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
Optional: Magnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications(STD)
Linear Resolution with Encoder OptionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution with Encoder Option ~0.01 arc-sec
Yaw Resolution with Encoder Option0.02 arc-sec
Max Linear Velocity [2]20 mm/s
Max Angular Velocity (Pitch & Roll) [2]10 deg/s
Max Angular Velocity (Yaw) [2]540 deg/s
Max Payload [3]10 kg
Assembly Mass28 kg
ModelAI-6D-250XY-92Z
StageHybrid Hexapod  (6 DOF)
Travel - XY250mm (+/- 125mm)
Travel - Z92mm (+ 92mm/ - 0mm) 
Travel - Pitch & Roll  +/- 20 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)435 mm x 435 mm x 707.5 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
Optional: Magnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications 
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.02 arc-sec
Yaw Resolution ~0.01 arc-sec
Max Linear Velocity [10]0.3 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]180 deg/s
Assembly Mass130 kg
Max Payload [11]35 kg
ModelAI-TRI-LM-10600-104R
StageLinear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll  +/- 18  deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)504.2 mm x 462.8 mm x 460 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications(STD)
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.01 arc-sec
Yaw Resolution0.02 arc-sec
Max Linear Velocity [10]0.2 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]720 deg/s
Assembly Mass30 kg
Max Payload [11]7 kg
ModelAI-TRI-LM-5500-104R
StageLinear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z 55 mm (+ 55 mm/- 0 mm)
Travel - Pitch & Roll  +/- 16  deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)403.1 mm x 373.5 mm x 310.9 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications(STD)
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.01 arc-sec
Yaw Resolution0.02 arc-sec
Max Linear Velocity [10]0.2 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]720 deg/s
Assembly Mass20.1 kg
Max Payload [11]5 kg
ModelAI-TRI-LM-4000-104R
StageLinear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z40 mm (+ 40 mm/- 0 mm)
Travel - Pitch & Roll  +/- 12  deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)399 mm x 359 mm x 250.5 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications(STD)
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.01 arc-sec
Yaw Resolution0.02 arc-sec
Max Linear Velocity [10]0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]720 deg/s
Assembly Mass18 kg
Max Payload [11]5 kg
ModelAI-TRI-LM-4000-56R
StageLinear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z40 mm (+ 40 mm/- 0 mm)
Travel - Pitch & Roll  +/- 16  deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)331.6 mm x 303.3 mm x 247.9 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications(STD)
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.02 arc-sec
Yaw Resolution0.04 arc-sec
Max Linear Velocity [10]0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]720 deg/s
Assembly Mass14.6 kg
Max Payload [11]2.5 kg
ModelAI-TRI-LM-2400-56R-MS
StageLinear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z24 mm (+ 24 mm/- 0 mm)
Travel - Pitch & Roll  +/- 12  deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)261 mm x 228.8 mm x 170.9 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications(STD)
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.02 arc-sec
Yaw Resolution0.04 arc-sec
Max Linear Velocity [10]0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]720 deg/s
Assembly Mass6.9 kg
Max Payload [11]2.5 kg
ModelAI-TRI-LM-2400-56R
StageLinear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z24 mm (+ 24 mm/- 0 mm)
Travel - Pitch & Roll  +/- 12  deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)241.1 mm x 219.1 mm x 176.7 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications(STD)
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.02 arc-sec
Yaw Resolution0.04 arc-sec
Max Linear Velocity [10]0.1 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]720 deg/s
Assembly Mass5.4 kg
Max Payload [11]2.5 kg
ModelAI-TRI-LM-600-56R
StageLinear Motor Tripod with Yaw Rotary Stage (4 DOF)
Travel - Z6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll  +/- 3  deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)200 mm x 191.3 mm x 143.6 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications(STD)
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.03 arc-sec
Yaw Resolution0.04 arc-sec
Max Linear Velocity [10]0.08 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]720 deg/s
Assembly Mass4.2 kg
Max Payload [11]2 kg
ModelAI-HH-300XY-206Z-154R
StageHybrid Hexapod (6 DOF)
Travel - XY300 mm (+/- 150 mm)
Travel - Z206 mm (+ 206 mm/- 0 mm)
Travel - Pitch & Roll  +/- 18 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)504.2 mm x 500 mm x 660 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.5 arc-sec +/- 0.3 arc-sec
Yaw +/- 0.5 arc-sec +/- 0.3 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z < 20  nm
Pitch And Roll  < 0.08 arc-sec
Yaw  < 0.08 arc-sec
Yaw RunoutAxial Runout10 µm7 µm4 µm
Radial Runout10 µm7 µm4 µm
Wobble20 arc-sec10 arc-sec6 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.01 arc-sec
Yaw~0.01 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.5 m/s
Max Linear Acceleration [3]0.3 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload20 kg
Assembly Mass122 kg
ModelAI-HH-300XY-106Z-154R
StageHybrid Hexapod (6 DOF)
Travel - XY300 mm (+/- 150 mm)
Travel - Z106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll  +/- 18 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)504.2
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.5 arc-sec +/- 0.3 arc-sec
Yaw +/- 0.5 arc-sec +/- 0.3 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z  < 20  nm
Pitch And Roll  < 0.08 arc-sec
Yaw  < 0.08 arc-sec
Yaw RunoutAxial Runout10 µm7 µm4 µm
Radial Runout10 µm7 µm4 µm
Wobble20 arc-sec10 arc-sec6 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.01 arc-sec
Yaw~0.01 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.5 m/s
Max Linear Acceleration [3]0.3 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll#colspan#180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload10 kg
Assembly Mass105 kg
ModelAI-HH-300XY-106Z-104R
StageHybrid Hexapod (6 DOF)
Travel - XY300 mm (+/- 150 mm)
Travel - Z106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll  +/- 18 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)504.2 mm x 500 mm x 519.9 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.5 arc-sec +/- 0.3 arc-sec
Yaw +/- 0.5 arc-sec +/- 0.3 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z  < 20  nm
Pitch And Roll  < 0.08 arc-sec
Yaw  < 0.08 arc-sec
Yaw RunoutAxial Runout12 µm9 µm6 µm
Radial Runout12 µm9 µm6 µm
Wobble25 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.01 arc-sec
Yaw0.02 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.5 m/s
Max Linear Acceleration [3]0.3 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload7.5 kg
Assembly Mass105 kg
ModelAI-HH-200XY-40Z-104R
StageHybrid Hexapod (6 DOF)
Travel - XY200 mm(+/- 100 mm)
Travel - Z20 mm (+ 20 mm/- 0 mm)
Travel - Pitch & Roll  +/- 11 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)399 mm x 359 mm x 318.9 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.5 arc-sec +/- 0.3 arc-sec
Yaw +/- 0.5 arc-sec +/- 0.3 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z  < 20  nm
Pitch And Roll  < 0.08 arc-sec
Yaw  < 0.08 arc-sec
Yaw RunoutAxial Runout12 µm9 µm6 µm
Radial Runout12 µm9 µm6 µm
Wobble25 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.01 arc-sec
Yaw0.02 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.5 m/s
Max Linear Acceleration [3]0.3 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload5 kg
Assembly Mass46 kg
ModelAI-HH-150XY-40Z-104R
StageHybrid Hexapod (6 DOF)
Travel - XY150 mm (+/- 75 mm)
Travel - Z20 mm (+ 20 mm/- 0 mm)
Travel - Pitch & Roll  +/- 11 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)399 mm x 350 mm x 308.9 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.5 arc-sec +/- 0.3 arc-sec
Yaw +/- 0.5 arc-sec +/- 0.3 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY< 20  nm
Z< 20  nm
Pitch And Roll< 0.1 arc-sec
Yaw< 0.1 arc-sec
Yaw RunoutAxial Runout12 µm9 µm6 µm
Radial Runout12 µm9 µm6 µm
Wobble25 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll#colspan#~0.01 arc-sec
Yaw0.02 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.5 m/s
Max Linear Acceleration [3]0.4 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload5 kg
Assembly Mass34 kg
ModelAI-HH-100XY-24Z-56R-MS
StageHybrid Hexapod (6 DOF)
Travel - XY100 mm (+/- 50 mm)
Travel - Z12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)262.5 mm x 246 mm x 250.8 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z#colspan#  < 20  nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.02 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.5 m/s
Max Linear Acceleration [3]0.5 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload2.5 kg
Assembly Mass20 kg
ModelAI-HH-100XY-24Z-56R-CM,MS
StageHybrid Hexapod (6 DOF)
Travel - XY100 mm (+/- 50 mm)
Travel - Z12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)262.5 mm x 246 mm x 218.8 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)

Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder

Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z  < 20  nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.02 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.05 m/s
Max Linear Acceleration [3]0.1 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload2.5 kg
Assembly Mass13.1 kg
ModelAI-HH-100XY-24Z-56R
StageHybrid Hexapod (6 DOF)
Travel - XY100 mm (+/- 50 mm)
Travel - Z12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll  +/- 11 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)244 mm x 244 mm x 233.8 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)

Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder

Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z  < 20  nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.02 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.05 m/s
Max Linear Acceleration [3]0.5 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload2.5 kg
Assembly Mass18.4 kg
ModelAI-HH-100XY-6Z-56R-CM
StageHybrid Hexapod (6 DOF)
Travel - XY100 mm (+/- 50 mm)
Travel - Z6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll  +/- 3 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)200 mm x 184 mm x 200.5 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z  < 20  nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096
Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.03 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.05 m/s
Max Linear Acceleration [3]0.1 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload2 kg
Assembly Mass10 kg
ModelAI-HH-100XY-6Z-56R
StageHybrid Hexapod (6 DOF)
Travel - XY100 mm (+/- 50 mm)
Travel - Z6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll  +/- 3 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)244 mm x 244 mm x 220.5 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidrectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Z
Pitch And Roll
Yaw
Minimum Incremental Step SizeXY  < 20  nm
Z  < 20  nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Z
Pitch And Roll~0.03 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.4 m/s
Max Linear Acceleration [3]0.5 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]PITCH AND ROLL>1800 deg/s²
YAW>3600 deg/s²
Max Payload2 kg
Assembly Mass17.2 kg