Model | AI-LM-50000-AB8 | ||
Stage | Air Bearing Linear Stage | ||
Travel | 500 mm (+/- 250 mm) | ||
Dimensions (Length x Width x Height) | 879.6 mm x 196.85 mm x 75.90 mm |
||
Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) |
||
Feedback | Non-Contact Optical Linear Encoder |
||
Bearings | Air Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
Structure | Anodized Aluminum 6061-T6 | ||
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
Environment | Ambient | ||
Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 1 µm per 100mm Travel | ||
Flatness [2] | +/- 1 µm per 100mm Travel | ||
Pitch | +/- 5 arc-sec | ||
Yaw | +/- 5 arc-sec | ||
Roll | +/- 5 arc-sec | ||
Max Velocity [3] | 2.0 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max Pitch Moment | 79 nm | ||
Max Roll Moment | 75 nm | ||
Max Yaw Moment | 37 nm | ||
Vertical Z Stiffness | 480 N/µm | ||
Horizontal Y Stiffness | 140 N/µm | ||
Max Payload Capacity | 60 kg | ||
Assembly Mass | 18.5 kg |
Model | AI-LM-40000-AB8 | ||
Stage | Air Bearing Linear Stage | ||
Travel | 400 mm (+/- 200 mm) | ||
Dimensions (Length x Width x Height) | 778 mm x 196.85 mm x 75.90 mm |
||
Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) |
||
Feedback | Non-Contact Optical Linear Encoder |
||
Bearings | Air Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
Structure | Anodized Aluminum 6061-T6 | ||
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
Environment | Ambient | ||
Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 1 µm per 100mm Travel | ||
Flatness [2] | +/- 1 µm per 100mm Travel | ||
Pitch | +/- 5 arc-sec | ||
Yaw | +/- 5 arc-sec | ||
Roll | +/- 5 arc-sec | ||
Max Velocity [3] | 2.0 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max Pitch Moment | 79 nm | ||
Max Roll Moment | 75 nm | ||
Max Yaw Moment | 37 nm | ||
Vertical Z Stiffness | 480 N/µm | ||
Horizontal Y Stiffness | 140 N/µm | ||
Max Payload Capacity | 60 kg | ||
Assembly Mass | 17 kg |
Model | AI-LM-50000-AB |
Stage | Air Bearing Linear Stage |
Travel | 500 mm (+/- 250 mm) |
Dimensions (Length x Width x Height) | 727.2 mm x 150 mm x 63.8 mm |
Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
Drive | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
Environment | Ambient |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
Max Pitch Moment [2] | 20 Nm |
Max Roll Moment [2] | 24 Nm |
Max Yaw Moment [2] | 10 Nm |
Vertical Z Stiffness | 250 N/µm |
Horizontal Y Stiffness | 105 N/µm |
Max Velocity [3] | 2.0 m/s |
Max Acceleration [3] | 2.0 G |
Max Load Capacity | 30 kg |
Assembly Mass | 10.4 kg |
Model | AI-LM-40000-AB |
Stage | Air Bearing Linear Stage |
Travel | 400 mm (+/- 200 mm) |
Dimensions (Length x Width x Height) | 625.6 mm x 150 mm x 63.8 mm |
Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
Drive | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
Environment | Ambient |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
Max Pitch Moment [2] | 20 Nm |
Max Roll Moment [2] | 24 Nm |
Max Yaw Moment [2] | 10 Nm |
Vertical Z Stiffness | 250 N/µm |
Horizontal Y Stiffness | 105 N/µm |
Max Velocity [3] | 2.0 m/s |
Max Acceleration [3] | 2.0 G |
Max Load Capacity | 30 kg |
Assembly Mass | 9.1 kg |
Model | AI-LM-50000-ABL |
Stage | XY Planar Air Bearing Stage |
Travel - XY | 500 mm (+/- 250 mm) |
Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
Dimensions (Length x Width x Height) | 1550 mm x 1100 mm x 145 mm |
Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
Drives | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Precision Lapped Black Granite |
Environment | Ambient Optional: Clean Room |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | #colspan# |
Accuracy | < +/- 0.5 µm |
Repeatability | < +/- 100 nm |
Straightness | < +/- 0.5 µm |
Flatness | < +/- 1 µm |
Max Velocity | > 1 m/s |
Max Acceleration | > 1 G |
Load Capacity | 20 kg Optional: 80+ kg |
Assembly Mass | Depending on specific Configuration - Ask ALIO |
Configurable Options | #colspan# |
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
Custom X and/or Y Travel | |
Custom User Mounting Interface Features | |
Custom Platen Designs (Open Center Options) | |
Custom Compact Designs for Small Footprint | |
Customer Cable Routing | |
Customizable Motor Forces | |
Custom High Payload Options | |
Custom Granite Features and Sizes | |
Various Material Options Throughout | |
Single Axis Versions Available (Y Axis Only) | |
Various Support and Vibration Isolation Options | |
Various Safety System Options | |
Various Control Chassis Options |
Model | AI-LM-40000-ABL |
Stage | XY Planar Air Bearing Stage |
Travel - XY | 400 mm (+/- 200 mm) |
Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
Dimensions (Length x Width x Height) | 1450 mm x 1000 mm x 145 mm |
Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
Drives | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Precision Lapped Black Granite |
Environment | Ambient Optional: Clean Room |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Accuracy | < +/- 0.5 µm |
Repeatability | < +/- 100 nm |
Straightness | < +/- 0.5 µm |
Flatness | < +/- 1 µm |
Max Velocity | > 1 m/s |
Max Acceleration | > 1 G |
Load Capacity | 20 kg Optional: 80+ kg |
Assembly Mass | Depending on specific Configuration - Ask ALIO |
Configurable Options | |
ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
Custom X and/or Y Travel | |
Custom User Mounting Interface Features | |
Custom Platen Designs (Open Center Options) | |
Custom Compact Designs for Small Footprint | |
Customer Cable Routing | |
Customizable Motor Forces | |
Custom High Payload Options | |
Custom Granite Features and Sizes | |
Various Material Options Throughout | |
Single Axis Versions Available (Y Axis Only) | |
Various Support and Vibration Isolation Options | |
Various Safety System Options | |
Various Control Chassis Options |
Model | AI-LM-50000-UII | ||
Stage | Cartesian Gantry | ||
Travel - X And/Or Travel - Y | 500 mm (+/- 250 mm) | ||
Dimensions (Length x Width x Height) | 800 mm x 1007 mm x 320 mm | ||
Max. Sample Width (Inner Width) | 634 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Dual Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient | ||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | STD | PRCSN | ULTRA |
Linear Displacement Accuracy | +/- 20 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 1.0 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Straightness | +/- 6 µm | +/- 4 µm | |
Flatness [2] | +/- 12 µm | +/- 8 µm | |
Pitch | 20 arc-sec | ||
Yaw | 20 arc-sec | ||
Roll | 20 arc-sec | ||
Max Velocity With AC Drive [3] | 2.5 m/s | ||
Max Velocity With 48VDC Drive [3] | 0.5 m/s | ||
Max Acceleration With AC Drive [3] | 2 G | ||
Max Acceleration With 48VDC Drive [3] | 0.4 G | ||
Max (Vertical) Payload Capability | 25 kg | ||
Max (Horizontal) Payload Capability | 30 kg | ||
Assembly Mass | 38 kg | ||
Configurable Options | |||
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements | Y Axis Top Down Mounting (Face Mounting Shown) | ||
Large or Small Cable Tracks | |||
Mix and Match Travel | |||
Risers Available (Custom Height) | |||
Multiple Cable Routing and Connectorization Options | |||
Customer Cable Routing Available | |||
Granite, Optical Table, and Breadboard Bases | |||
Single Axis Versions Available | |||
Z Axis Options Available | |||
X and X' Controlled Yaw Available | |||
Various Material Options Available | |||
Inch Spacing Versions Available (see page 3) | |||
*Increased Gap between X and X' stages without Increased Y Travel |
Model | AI-LM-40000-UII | ||
Stage | Cartesian Gantry | ||
Travel - X And/Or Travel - Y | 400 mm (+/- 200 mm) | ||
Dimensions (Length x Width x Height) | 700 mm 907 mm x 320 mm | ||
Max. Sample Width (Inner Width) | 534 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Dual Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient | ||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | STD | PRCSN | ULTRA |
Linear Displacement Accuracy | +/- 16 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 1.0 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Straightness | +/- 5 µm | +/- 3 µm | |
Flatness [2] | +/- 10 µm | +/- 6 µm | |
Pitch | 20 arc-sec | ||
Yaw | 20 arc-sec | ||
Roll | 20 arc-sec | ||
Max Velocity With AC Drive [3] | 2.0 m/s | ||
Max Velocity With 48VDC Drive [3] | 0.5 m/s | ||
Max Acceleration With AC Drive [3] | 2.2 G | ||
Max Acceleration With 48VDC Drive [3] | 0.5 G | ||
Max (Vertical) Payload Capability | 25 kg | ||
Max (Horizontal) Payload Capability | 30 kg | ||
Assembly Mass | 33 kg | ||
Configurable Options | |||
ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements | Y Axis Top Down Mounting (Face Mounting Shown) | ||
Large or Small Cable Tracks | |||
Mix and Match Travel | |||
Risers Available (Custom Height) | |||
Multiple Cable Routing and Connectorization Options | |||
Customer Cable Routing Available | |||
Granite, Optical Table, and Breadboard Bases | |||
Single Axis Versions Available | |||
Z Axis Options Available | |||
X and X' Controlled Yaw Available | |||
Various Material Options Available | |||
Inch Spacing Versions Available (see page 3) | |||
*Increased Gap between X and X' stages without Increased Y Travel |
Model | AI-LM-50000-UII-XB | ||
Stage | Linear Stage | ||
Travel | 500 mm (+/- 250 mm) | ||
Dimensions (Length x Width x Height) | 866 mm x 357 mm x 96.5 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Dual Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | ELITE |
Linear Displacement Accuracy | +/- 20 µm | +/- 5 µm | +/- 2 µm |
Bidirectional Linear Repeatability | +/- 1 µm | +/- 0.5 µm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Straightness | +/- 20 µm | +/- 15 µm | +/- 10 µm |
Flatness [2] | +/- 40 µm | +/- 15 µm | +/- 10 µm |
Pitch | +/- 30 arc-sec | +/- 15 arc-sec | |
Yaw | +/- 30 arc-sec | +/- 18 arc-sec | |
Max Velocity [3] | 2 m/s | ||
Max Acceleration [3] | 4.0 G | ||
Max (Vertical) Payload Capability | 100 kg | ||
Max (Horizontal) Payload Capability | 70 kg | ||
Assembly Mass | Depending on specific Application - Ask ALIO |
Model | AI-LM-40000-UII-XB | ||
Stage | Linear Stage | ||
Travel | 400 mm (+/- 200 mm) | ||
Dimensions (Length x Width x Height) | 766 mm x 357 mm x 96.5 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Dual Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | ELITE |
Linear Displacement Accuracy | +/- 16 µm | +/- 5 µm | +/- 2 µm |
Bidirectional Linear Repeatability | +/- 1 µm | +/- 0.5 µm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Straightness | +/- 18 µm | +/- 13 µm | +/- 10 µm |
Flatness [2] | +/- 30 µm | +/- 15 µm | +/- 10 µm |
Pitch | +/- 30 arc-sec | +/- 15 arc-sec | |
Yaw | +/- 30 arc-sec | +/- 18 arc-sec | |
Max Velocity [3] | 2 m/s | ||
Max Acceleration [3] | 4.0 G | ||
Max (Vertical) Payload Capability | 100 kg | ||
Max (Horizontal) Payload Capability | 70 kg | ||
Assembly Mass | Depending on specific Application - Ask ALIO |
Model | AI-XBS-50000-UII | |
Stage | Linear Stage | |
Travel | 500 mm (+/- 250 mm) | |
Dimensions (Length x Width x Height) | 863 mm x 388 mm x 100 mm | |
Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
(-Pbrk) Dimensions (Length x Width x Height) | 908 mm x 388 mm x 100 mm | |
Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
Feedback | Non-Contact Optical Linear Encoder | |
Bearings | Dual Recirculating Ball Rail Bearings | |
Cables | High Flex, 10M Cycle, 3m | |
Structure | Anodized Aluminum 6061-T6 | |
Environment | Ambient |
|
Operating Temperature | 0°C to 50°C | |
Humidity | 10% to 80% Non-Condensing | |
Performance Specifications [1] | (STD) | ULTRA |
Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm |
Backlash | 0 nm | |
Bidirectional Repeatability | +/- 1.0 µm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
Straightness In Y | +/- 8 µm | +/- 4 µm |
Flatness [2] | +/- 8 µm | +/- 4 µm |
Pitch [2] | +/- 18 arc-sec | |
Yaw | +/- 18 arc-sec | |
Roll | +/- 18 arc-sec | |
Max Velocity [3] | 0.3 m/s | |
Max Peak Acceleration [3] | 0.5 G | |
Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
Max Payload Capability With Axis Oriented Vertically | 80 kg | |
Assembly Mass | 38 kg |
Model | AI-XBS-45000-UII | |
Stage | Linear Stage | |
Travel | 450 mm (+/- 225 mm) | |
Dimensions (Length x Width x Height) | 813 mm x 388 mm x 100 mm | |
Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
(-Pbrk) Dimensions (Length x Width x Height) | 858 mm x 388 mm x 100 mm | |
Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
Feedback | Non-Contact Optical Linear Encoder | |
Bearings | Dual Recirculating Ball Rail Bearings | |
Cables | High Flex, 10M Cycle, 3m | |
Structure | Anodized Aluminum 6061-T6 | |
Environment | Ambient |
|
Operating Temperature | 0°C to 50°C | |
Humidity | 10% to 80% Non-Condensing | |
Performance Specifications [1] | (STD) | ULTRA |
Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm |
Backlash | 0 nm | |
Bidirectional Repeatability | +/- 1.0 µm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
Straightness In Y | +/- 8 µm | +/- 4 µm |
Flatness [2] | +/- 8 µm | +/- 4 µm |
Pitch [2] | +/- 18 arc-sec | |
Yaw | +/- 18 arc-sec | |
Roll | +/- 18 arc-sec | |
Max Velocity [3] | 0.3 m/s | |
Max Peak Acceleration [3] | 0.5 G | |
Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
Max Payload Capability With Axis Oriented Vertically | 80 kg | |
Assembly Mass | 36 kg |
Model | AI-XBS-40000-UII | |
Stage | Linear Stage | |
Travel | 400 mm (+/- 200 mm) | |
Dimensions (Length x Width x Height) | 763 mm x 388 mm x 100 mm | |
Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
(-Pbrk) Dimensions (Length x Width x Height) | 808 mm x 388 mm x 100 mm | |
Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
Feedback | Non-Contact Optical Linear Encoder | |
Bearings | Dual Recirculating Ball Rail Bearings | |
Cables | High Flex, 10M Cycle, 3m | |
Structure | Anodized Aluminum 6061-T6 | |
Environment | Ambient |
|
Operating Temperature | 0°C to 50°C | |
Humidity | 10% to 80% Non-Condensing | |
Performance Specifications [1] | (STD) | ULTRA |
Linear Displacement Accuracy | +/- 20 µm | +/- 2 µm |
Backlash | 0 nm | |
Bidirectional Repeatability | +/- 1.0 µm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
Straightness In Y | +/- 6 µm | +/- 4 µm |
Flatness [2] | +/- 6 µm | +/- 4 µm |
Pitch [2] | +/- 18 arc-sec | |
Yaw | +/- 18 arc-sec | |
Roll | +/- 18 arc-sec | |
Max Velocity [3] | 0.3 m/s | |
Max Peak Acceleration [3] | 0.5 G | |
Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
Max Payload Capability With Axis Oriented Vertically | 80 kg | |
Assembly Mass | 34 kg |
Model | AI-XBS-35000-UII | |
Stage | Linear Stage | |
Travel | 350 mm (+/- 175 mm) | |
Dimensions (Length x Width x Height) | 713 mm x 388 mm x 100 mm | |
Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
(-Pbrk) Dimensions (Length x Width x Height) | 758 mm x 388 mm x 100 mm | |
Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
Feedback | Non-Contact Optical Linear Encoder | |
Bearings | Dual Recirculating Ball Rail Bearings | |
Cables | High Flex, 10M Cycle, 3m | |
Structure | Anodized Aluminum 6061-T6 | |
Environment | Ambient |
|
Operating Temperature | 0°C to 50°C | |
Humidity | 10% to 80% Non-Condensing | |
Performance Specifications [1] | (STD) | ULTRA |
Linear Displacement Accuracy | +/- 16 µm | +/- 2 µm |
Backlash | 0 nm | |
Bidirectional Repeatability | +/- 1.0 µm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
Straightness In Y | +/- 5 µm | +/- 3 µm |
Flatness [2] | +/- 5 µm | +/- 3 µm |
Pitch [2] | +/- 18 arc-sec | |
Yaw | +/- 18 arc-sec | |
Roll | +/- 18 arc-sec | |
Max Velocity [3] | 0.3 m/s | |
Max Peak Acceleration [3] | 0.5 G | |
Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
Max Payload Capability With Axis Oriented Vertically | 80 kg | |
Assembly Mass | 32 kg |
Model | AI-SBS-50000-UII | |
Stage | Linear Stage | |
Travel | 500 mm (+/- 250 mm) | |
Dimensions (Length x Width x Height) | 793 mm x 258 mm x 69 mm | |
Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
(-Pbrk) Dimensions (Length x Width x Height) | 815 mm x 258 mm x 69 mm | |
(-Ebrk) Dimensions (Length x Width x Height) | 865 mm x 258 mm x 69 mm | |
Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
Feedback | Non-Contact Optical Linear Encoder | |
Bearings | Dual Recirculating Ball Rail Bearings | |
Cables | High Flex, 10M Cycle, 3m Length | |
Structure | Anodized Aluminum 6061-T6 | |
Environment | Ambient |
|
Operating Temperature | 0°C to 50°C | |
Humidity | 10% to 80% Non-Condensing | |
Performance Specifications [1] | (STD) | ULTRA |
Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm |
Backlash | 0 nm | |
Bidirectional Repeatability | +/- 1.0 µm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
Straightness In Y | +/- 8 µm | +/- 4 µm |
Flatness [2] | +/- 8 µm | +/- 4 µm |
Pitch [2] | +/- 18 arc-sec | |
Yaw | +/- 18 arc-sec | |
Roll | +/- 18 arc-sec | |
Max Velocity [3] | 0.3 m/s | |
Max Peak Acceleration [3] | 0.5 G | |
Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
Max Payload Capability With Axis Oriented Vertically | 40 kg | |
Assembly Mass | 15.5 kg |
Model | AI-SBS-45000-UII | |
Stage | Linear Stage | |
Travel | 450 mm (+/- 225 mm) | |
Dimensions (Length x Width x Height) | 743 mm x 258 mm x 69 mm | |
Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
(-Pbrk) Dimensions (Length x Width x Height) | 765 mm x 258 mm x 69 mm | |
(-Ebrk) Dimensions (Length x Width x Height) | 815 mm x 258 mm x 69 mm | |
Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
Feedback | Non-Contact Optical Linear Encoder | |
Bearings | Dual Recirculating Ball Rail Bearings | |
Cables | High Flex, 10M Cycle, 3m Length | |
Structure | Anodized Aluminum 6061-T6 | |
Environment | Ambient |
|
Operating Temperature | 0°C to 50°C | |
Humidity | 10% to 80% Non-Condensing | |
Performance Specifications [1] | (STD) | ULTRA |
Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm |
Backlash | 0 nm | |
Bidirectional Repeatability | +/- 1.0 µm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
Straightness In Y | +/- 8 µm | +/- 4 µm |
Flatness [2] | +/- 8 µm | +/- 4 µm |
Pitch [2] | +/- 18 arc-sec | |
Yaw | +/- 18 arc-sec | |
Roll | +/- 18 arc-sec | |
Max Velocity [3] | 0.3 m/s | |
Max Peak Acceleration [3] | 0.5 G | |
Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
Max Payload Capability With Axis Oriented Vertically | 40 kg | |
Assembly Mass | 15 kg |
Model | AI-SBS-40000-UII | |
Stage | Linear Stage | |
Travel | 400 mm (+/- 200 mm) | |
Dimensions (Length x Width x Height) | 693 mm x 258 mm x 69 mm | |
Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
(-Pbrk) Dimensions (Length x Width x Height) | 715 mm x 258 mm x 69 mm | |
(-Ebrk) Dimensions (Length x Width x Height) | 765 mm x 258 mm x 69 mm | |
Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
Feedback | Non-Contact Optical Linear Encoder | |
Bearings | Dual Recirculating Ball Rail Bearings | |
Cables | High Flex, 10M Cycle, 3m Length | |
Structure | Anodized Aluminum 6061-T6 | |
Environment | Ambient |
|
Operating Temperature | 0°C to 50°C | |
Humidity | 10% to 80% Non-Condensing | |
Performance Specifications [1] | (STD) | ULTRA |
Linear Displacement Accuracy | +/- 20 µm | +/- 2 µm |
Backlash | 0 nm | |
Bidirectional Repeatability | +/- 1.0 µm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
Straightness In Y | +/- 6 µm | +/- 4 µm |
Flatness [2] | +/- 6 µm | +/- 4 µm |
Pitch [2] | +/- 18 arc-sec | |
Yaw | +/- 18 arc-sec | |
Roll | +/- 18 arc-sec | |
Max Velocity [3] | 0.3 m/s | |
Max Peak Acceleration [3] | 0.5 G | |
Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
Max Payload Capability With Axis Oriented Vertically | 40 kg | |
Assembly Mass | 14.5 kg |
Model | AI-SBS-35000-UII | |
Stage | Linear Stage | |
Travel | 350 mm (+/- 175 mm) | |
Dimensions (Length x Width x Height) | 643 mm x 258 mm x 69 mm | |
Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
(-Pbrk) Dimensions (Length x Width x Height) | 665 mm x 258 mm x 69 mm | |
(-Ebrk) Dimensions (Length x Width x Height) | 715 mm x 258 mm x 69 mm | |
Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
Feedback | Non-Contact Optical Linear Encoder | |
Bearings | Dual Recirculating Ball Rail Bearings | |
Cables | High Flex, 10M Cycle, 3m Length | |
Structure | Anodized Aluminum 6061-T6 | |
Environment | Ambient |
|
Operating Temperature | 0°C to 50°C | |
Humidity | 10% to 80% Non-Condensing | |
Performance Specifications [1] | (STD) | ULTRA |
Linear Displacement Accuracy | +/- 16 µm | +/- 2 µm |
Backlash | 0 nm | |
Bidirectional Repeatability | +/- 1.0 µm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
Straightness In Y | +/- 5 µm | +/- 3 µm |
Flatness [2] | +/- 5 µm | +/- 3 µm |
Pitch [2] | +/- 18 arc-sec | |
Yaw | +/- 18 arc-sec | |
Roll | +/- 18 arc-sec | |
Max Velocity [3] | 0.3 m/s | |
Max Peak Acceleration [3] | 0.5 G | |
Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
Max Payload Capability With Axis Oriented Vertically | 40 kg | |
Assembly Mass | 13.5 kg |
Model | AI-LM-50000-UII-WL | ||
Stage | Linear Stage | ||
Travel | 500 mm (+/- 250 mm) | ||
Dimensions (Length x Width x Height) | 820 mm x 388 mm x 88 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Dual Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 20 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 6 µm | +/- 4 µm | |
Flatness [2] | +/- 6 µm | +/- 4 µm | |
Pitch | 18 arc-sec | ||
Yaw | 18 arc-sec | ||
Roll | 10 arc-sec | ||
Max Velocity [3] | 2.0 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max (Vertical) Payload Capability | 100 kg | ||
Max (Horizontal) Payload Capability | 70 kg | ||
Assembly Mass | 31 kg |
Model | AI-LM-40000-UII-WL | ||
Stage | Linear Stage | ||
Travel | 400 mm (+/- 200 mm) | ||
Dimensions (Length x Width x Height) | 720 mm x 388 mm x 88 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Dual Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 16 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 5 µm | +/- 3 µm | |
Flatness [2] | +/- 5 µm | +/- 3 µm | |
Pitch | 18 arc-sec | ||
Yaw | 18 arc-sec | ||
Roll | 10 arc-sec | ||
Max Velocity [3] | 2.0 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max (Vertical) Payload Capability | 100 kg | ||
Max (Horizontal) Payload Capability | 70 kg | ||
Assembly Mass | 27 kg |
Model | AI-LM-50000-UII-W | ||
Stage | Linear Stage | ||
Travel | 500 mm (+/- 250 mm) | ||
Dimensions (Length x Width x Height) | 720 mm x 388 mm x 88 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Dual Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 20 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 6 µm | +/- 4 µm | |
Flatness [2] | +/- 6 µm | +/- 4 µm | |
Pitch | 18 arc-sec | ||
Yaw | 18 arc-sec | ||
Roll | 10 arc-sec | ||
Max Velocity [3] | 2 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max (Vertical) Payload Capability | 100 kg | ||
Max (Horizontal) Payload Capability | 70 kg | ||
Assembly Mass | 31 kg |
Model | AI-LM-40000-UII-W | ||
Stage | Linear Stage | ||
Travel | 400 mm (+/- 200 mm) | ||
Dimensions (Length x Width x Height) | 620 mm x 388 mm x 88 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Dual Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 16 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 5 µm | +/- 3 µm | |
Flatness [2] | +/- 5 µm | +/- 3 µm | |
Pitch | 18 arc-sec | ||
Yaw | 18 arc-sec | ||
Roll | 10 arc-sec | ||
Max Velocity [3] | 2 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max (Vertical) Payload Capability | 100 kg | ||
Max (Horizontal) Payload Capability | 70 kg | ||
Assembly Mass | 27 kg |
Model | AI-LM-50000-UII-SN | ||
Stage | Linear Stage | ||
Travel | 500 mm (+/- 250 mm) | ||
Dimensions (Length x Width x Height) | 680 mm x 72 mm x 57 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 20 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Straightness | +/- 6 µm | +/- 4 µm | |
Flatness [2] | +/- 6 µm | +/- 4 µm | |
Pitch | 18 arc-sec | ||
Yaw | 18 arc-sec | ||
Roll | 10 arc-sec | ||
Max Velocity [3] | 2 m/s | ||
Max Acceleration [3] | 4.0 G | ||
Max (Vertical) Payload Capability | 40 kg | ||
Max (Horizontal) Payload Capability | 32 kg | ||
Assembly Mass | 6 kg |
Model | AI-LM-40000-UII-SN | ||
Stage | Linear Stage | ||
Travel | 400 mm (+/- 200 mm) | ||
Dimensions (Length x Width x Height) | 580 mm x 72 mm x 57 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 16 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Straightness | +/- 5 µm | +/- 3 µm | |
Flatness [2] | +/- 5 µm | +/- 3 µm | |
Pitch | 18 arc-sec | ||
Yaw | 18 arc-sec | ||
Roll | 10 arc-sec | ||
Max Velocity [3] | 2 m/s | ||
Max Acceleration [3] | 4.0 G | ||
Max (Vertical) Payload Capability | 40 kg | ||
Max (Horizontal) Payload Capability | 32 kg | ||
Assembly Mass | 5 kg |
Model | AI-LM-50000-UII-S | ||
Stage | Linear Stage | ||
Travel | 500 mm (+/- 250 mm) | ||
Dimensions (Length x Width x Height) | 720 mm x 208 mm x 82.5 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 20 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 6 µm | +/- 4 µm | |
Flatness [2] | +/- 6 µm | +/- 4 µm | |
Pitch | 18 arc-sec | ||
Yaw | 18 arc-sec | ||
Roll | 10 arc-sec | ||
Max Velocity [3] | 2 m/s | ||
Max Acceleration [3] | 4.0 G | ||
Max (Vertical) Payload Capability | 40 kg | ||
Max (Horizontal) Payload Capability | 32 kg | ||
Assembly Mass | 15 kg |
Model | AI-LM-40000-UII-S | ||
Stage | Linear Stage | ||
Travel | 400 mm (+/- 200 mm) | ||
Dimensions (Length x Width x Height) | 620 mm x 208 mm x 82.5 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 16 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 5 µm | +/- 3 µm | |
Flatness [2] | +/- 5 µm | +/- 3 µm | |
Pitch | 18 arc-sec | ||
Yaw | 18 arc-sec | ||
Roll | 10 arc-sec | ||
Max Velocity [3] | 2 m/s | ||
Max Acceleration [3] | 4.0 G | ||
Max (Vertical) Payload Capability | 40 kg | ||
Max (Horizontal) Payload Capability | 32 kg | ||
Assembly Mass | 13 kg |
Model | AI-LM-50000-UII | ||
Stage | Linear Stage | ||
Travel | 500 mm (+/- 250 mm) | ||
Dimensions (Length x Width x Height) | 720 mm x 258 mm x 82.5 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Dual Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 20 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness In Y | +/- 6 µm | +/- 4 µm | |
Flatness [2] | +/- 6 µm | +/- 4 µm | |
Pitch [2] | +/- 9 arc-sec | ||
Yaw | +/- 9 arc-sec | ||
Roll | +/- 5 arc-sec | ||
Max Velocity [3] | 4.5 m/s | ||
Max Peak Acceleration [3] | 10.0 G | ||
Max Payload Capability | 70 kg | ||
Assembly Mass | 19 kg |
Model | AI-LM-40000-UII | ||
Stage | Linear Stage | ||
Travel | 400 mm (+/- 200 mm) | ||
Dimensions (Length x Width x Height) | 620 mm x 258 mm x 82.5 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Dual Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 16 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness In Y | +/- 5 µm | +/- 3 µm | |
Flatness [2] | +/- 5 µm | +/- 3 µm | |
Pitch [2] | +/- 9 arc-sec | ||
Yaw | +/- 9 arc-sec | ||
Roll | +/- 5 arc-sec | ||
Max Velocity [3] | 4 m/s | ||
Max Peak Acceleration [3] | 10.0 G | ||
Max Payload Capability | 70 kg | ||
Assembly Mass | 17 kg |
Model | AI-SLM-395x320-XY | ||
Stage | Monolithic XY Stage (Asymmetrical) |
||
Travel - X | 395 mm | ||
Travel - Y | 320 mm | ||
Dimensions (Length X Width X Height) | 672 mm x 525 mm x 145 mm | ||
Drives | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | STD | ULTRA | NANO |
Linear Displacement Accuracy | +/- 5.0 µm | +/- 2.0 µm | +/- 1.0 µm |
Bidirectional Linear Repeatability | +/- 30 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 5.0 µm | +/- 2.0 µm | +/- 1.0 µm |
Flatness [2] | +/- 10.0 µm | +/- 5.0 µm | +/- 2.0 µm |
Pitch [2] | +/- 18.0 arc-sec | +/- 18.0 arc-sec | +/- 10.0 arc-sec |
Yaw | +/- 18.0 arc-sec | +/- 18.0 arc-sec | +/- 10.0 arc-sec |
Roll | +/- 10.0 arc-sec | +/- 10.0 arc-sec | +/- 10.0 arc-sec |
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 2.0 arc-sec |
Max Velocity [3] | 1.5 m/s | ||
Max Peak Acceleration [3] | 0.59 G | ||
Max Payload Capability | 200 kg | ||
Assembly Mass | 98 kg |
Model | AI-LM-40000-400-XY | ||
Stage | Monolithic XY Stage with Open Center | ||
Travel | 400 mm (+/- 200 mm) | ||
Dimensions (Length x Width x Height) | 650 mm x 650 mm x 120 mm | ||
Aperture / Thru | 400 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 16.0 µm | +/- 2.5 µm | +/- 1.5 µm |
Bidirectional Linear Repeatability | +/- 50 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 10.0 µm | +/- 2.5 µm | +/- 1.5 µm |
Flatness [2] | +/- 12.0 µm | +/- 5.0 µm | |
Pitch [2] | +/- 20.0 arc-sec | ||
Yaw | +/- 20.0 arc-sec | ||
Roll | +/- 20.0 arc-sec | ||
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
Top Axis Max Velocity [3] | 1.8 m/s | ||
Bot Axis Max Velocity [3] | 1.0 m/s | ||
Top Axis Max Peak Acceleration [3] | 1.8 G | ||
Top Axis Max Peak Acceleration [3] | 0.6 G | ||
Max Payload Capability | 50 kg | ||
Assembly Mass | 104 kg |
Model | AI-LM-35000-350-XY | ||
Stage | Monolithic XY Stage with Open Center | ||
Travel | 350 mm (+/- 175 mm) | ||
Dimensions (Length x Width x Height) | 550 mm x 550 mm x 120 mm | ||
Aperture / Thru | 350 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 10.0 µm | +/- 2.0 µm | +/- 1.5 µm |
Bidirectional Linear Repeatability | +/- 50 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 6.0 µm | +/- 2.0 µm | +/- 1.5 µm |
Flatness [2] | +/- 10.0 µm | +/- 4.0 µm | |
Pitch [2] | +/- 20.0 arc-sec | ||
Yaw | +/- 20.0 arc-sec | ||
Roll | +/- 20.0 arc-sec | ||
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
Top Axis Max Velocity [3] | 1.8 m/s | ||
Bot Axis Max Velocity [3] | 1.1 m/s | ||
Top Axis Max Peak Acceleration [3] | 2.0 G | ||
Top Axis Max Peak Acceleration [3] | 0.8 G | ||
Max Payload Capability | 50 kg | ||
Assembly Mass | 64 kg |
Model | AI-LM-45000-XY | ||
Stage | Monolithic XY Stage | ||
Travel | 450 mm (+/- 225 mm) | ||
Dimensions (Length x Width x Height) | 650 mm x 650 mm x 115 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) |
||
Feedback | Non-Contact Optical Linear Encoder |
||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length |
||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 12.0 µm | +/- 1.5 µm | +/- 1.0 µm |
Bidirectional Linear Repeatability | +/- 30 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 6.0 µm | +/- 1.5 µm | +/- 1.0 µm |
Flatness [2] | +/- 16.0 µm | +/- 8.0 µm | |
Pitch [2] | +/- 20.0 arc-sec | ||
Yaw | +/- 20.0 arc-sec | ||
Roll | +/- 14.0 arc-sec | ||
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
Top Axis Max Velocity [3] | 1.7 m/s | ||
Bot Axis Max Velocity [3] | 1 m/s | ||
Top Axis Max Peak Acceleration [3] | 1.4 G | ||
Bot Axis Max Peak Acceleration [3] | 0.5 G | ||
Max Payload Capability | 80 kg | ||
Assembly Mass | 135 kg |
Model | AI-LM-40000-XY | ||
Stage | Monolithic XY Stage | ||
Travel | 400 mm (+/- 200 mm) | ||
Dimensions (Length x Width x Height) | 650 mm x 650 mm x 115 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 12.0 µm | +/- 1.5 µm | +/- 1.0 µm |
Bidirectional Linear Repeatability | +/- 30 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 6.0 µm | +/- 1.5 µm | +/- 1.0 µm |
Flatness [2] | +/- 16.0 µm | +/- 8.0 µm | |
Pitch [2] | +/- 20.0 arc-sec | ||
Yaw | +/- 20.0 arc-sec | ||
Roll | +/- 14.0 arc-sec | ||
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 | +/- 1.0 arc-sec |
Top Axis Max Velocity [3] | 1.6 m/s | ||
Bot Axis Max Velocity [3] | 1 m/s | ||
Top Axis Max Peak Acceleration [3] | 1.4 G | ||
Bot Axis Max Peak Acceleration [3] | 0.5 G | ||
Max Payload Capability | 80 kg | ||
Assembly Mass | 135 kg |
Model | AI-LM-35000-XY | ||
Stage | Monolithic XY Stage | ||
Travel | 350 mm (+/- 175 mm) | ||
Dimensions (Length x Width x Height) | 500 mm x 500 mm x 115 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 8.0 µm | +/- 1.5 µm | +/- 0.8 µm |
Bidirectional Linear Repeatability | +/- 30 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 4.0 µm | +/- 1.5 µm | +/- 0.8 µm |
Flatness [2] | +/- 8.0 µm | +/- 4.0 µm | |
Pitch [2] | +/- 20.0 arc-sec | ||
Yaw | +/- 20.0 arc-sec | ||
Roll | +/- 14.0 arc-sec | ||
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
Top Axis Max Velocity [3] | 1.7 m/s | ||
Bot Axis Max Velocity [3] | 1.1 m/s | ||
Top Axis Max Peak Acceleration [3] | 1.9 G | ||
Bot Axis Max Peak Acceleration [3] | 0.7 G | ||
Max Payload Capability | 50 kg | ||
Assembly Mass | 75 kg |