Brochure - Air Bearing Systems 2006-07-07 - Air Bearing Stages by ALIO Industries, Advanced Motion Control Systems

AI-ABL Series

Paten Pending

Ultra Precision Linear Air Bearing System - Alio Industries

Ultra Precision Linear Air Bearing System

The ALIO Advantage:

Planar Air Bearing for Superior Flatness (No Beam Sag)
Advance Ceramic Servo Motors or High Force Linear Motors
Decoupled Thermal Influences
Travel Options Over a Meter
Dual Y Axis Motion Control for Sub Arc Second Yaw Control
Willing to Customize for OEM Applications
Resolution: 5nm Standard, 38 picometer with Laser Interferometer
No Servo Dither (no oscillation)
No Hysteresis
No Backlash
Fast settling time

AI-ABL Series Specifications

System Travel	300 mm x 300 mm	500 mm x 500 mm	1 meter x 1 meter
Drive System	Advanced Ceramic Servo Motor or Ironless Core Linear Motor
Feedback System	Non Contact Optical Encoder or Laser Interferometer Feedback
Resolution – Linear Encoder	5 nanometers with 4096x Interpolation
Resolution – Laser Interferometer	38 picometers with 4096x Interpolation
Load	Load Capacity is Sized for the Application (Please Consult the Factory)
Accuracy – Linear Encoder (XY)	Better Than +/- 0.5 um	Better Than +/- 0.75 um	Better Than +/- 1.0 um
Accuracy – Laser Interferometer (XY)	+/- 10 ppm Standard, +/- 1.5 ppm Compensated
Repeatability – Linear Encoder (XY)	+/- 50 nm	+/- 60 nm	+/- 80 nm
Repeatability – Laser Interferometer (XY)	+/- 10 nm	+/- 20 nm	+/- 30 nm
Straightness	+/- 0.5 um	+/- 1.0 um	+/- 1.5 um
Flatness (XY, Dependant on the Granite)	< +/- 0.5 um	< +/- 0.5 um	< +/- 1.0 um
Pitch/Roll	< 1 arc-second
Yaw	1 arc-second
Orthogonality	1 arc-second

Performance specifications are dependant on the controller, motor, mapping, loads and require stringent environmental controls over short time periods.

The ALIO Industries Nano Precision Planar Air Bearing System has raised the bar to a new level of performance for air bearing motion. This engineered system was designed to exceed today’s demanding requirements in semiconductor wafer, flat panel display, nano-manufacturing and optical inspection.

Air Bearing Design
ALIO Industries incorporates simple engineering principals with our planar air bearing system. The three point vacuum preloaded air bearings of the platen ride directly on the granite surface for superior flatness of travel. There is no opportunity for the load to cause sag. This design also decouples any thermal propagation generated by the motors from the platen.

Motor Drive
ALIO Industries offers both advanced ceramic servo motors or ironless core linear motors on our air bearing systems. The ceramic servo motors offer nanometer level motion control while the linear motors offer high force and high speed.

Position Feedback
High resolution linear optical encoders come standard with resolutions down to 5nm. Laser interferometer closed loop motion control feedback is also available for 38 picometer resolution.

	Other Nano-Precision Air Bearing Solutions Offered By ALIO Industries	Paten Pending
	Made in the U.S.A. 07/07/06

ALIO Industries – 11919 W. I-70 Frontage Road North, Unit 119, Wheat Ridge, CO 80033 – 303.339.7500 – www.alioindustries.com

AI-ABL Series

Paten Pending

Ultra Precision Linear Air Bearing System

AI-ABL Series Specifications

Other Nano-Precision Air Bearing Solutions Offered By ALIO Industries