Pushing the Boundaries of Vacuum Motion Control with Nanometer-Level Precision

In an era where industries are striving for increasingly tighter tolerances, ALIO Industries stands out as a leader in delivering motion control systems that operate at nanometer-level precision, even under the most demanding vacuum conditions. ALIO’s vacuum-compatible nanometer-level precise robotic and stage systems are being deployed in fields as diverse as semiconductors, fiber optics, biomedical research, and aerospace, where precision is paramount.

The Importance of Nanometer-Level Precision in Vacuum Environments

Motion control under vacuum presents unique challenges. Not only do systems need to be built with ultra-low outgassing materials, but they must also be capable of maintaining precise motion even in high vacuum (HV) or ultra-high vacuum (UHV) environments. ALIO Industries has developed a range of motion control solutions, including linear, rotary, and hexapod stages, that are available in HV (10^-7 TORR) and UHV (10^-10 TORR) configurations. These systems have been engineered to function flawlessly in vacuum, providing extended travel, repeatability, and low-cost solutions.

At the core of ALIO’s success is its deep understanding of the interplay between various components in a vacuum motion system. From material selection to feedback systems, every detail is meticulously engineered. ALIO typically uses 6061 aluminum or stainless steel for the structure of its vacuum motion systems, and its crossed roller bearings are matched for size to reduce friction and ensure the smoothest motion possible.

Optical Encoders and Interferometers for Unmatched Accuracy

Achieving nanometer-level precision isn’t just about the physical movement of the system, it’s also about feedback. ALIO integrates advanced optical encoders that read directly onto etched scales or stainless-steel rings for rotary applications, delivering extreme accuracy. For linear applications, ALIO uses scales placed on invar, a material chosen for its near-zero thermal expansion, to further enhance precision. The company’s laser interferometer systems take accuracy even further, with resolutions down to 38 picometers, making ALIO’s systems the gold standard in nanometer-level motion control.

Robust Drive Mechanisms for Vacuum Applications

In vacuum environments, traditional motors can struggle to meet the exacting standards required. ALIO, however, can custom-design piezoelectric-driven stages and ceramic servo motors, which allow for nanometer-level precision without the issues of hysteresis. These drive mechanisms are also optimized for UHV environments, where outgassing must be minimized to maintain the integrity of the vacuum chamber.

Ceramic servo motors, in particular, offer the advantage of unlimited travel while maintaining precision, making them ideal for demanding applications such as semiconductor manufacturing or synchrotron research. The motors also have no drive inertia, which allows for rapid adjustments without overshoot — critical in applications that require extreme precision.

Lubrication and the Kinematic Structure

A key challenge in vacuum systems is lubrication, as traditional lubricants often cause unwanted friction or outgassing. ALIO uses specialized vacuum-compatible lubricants, such as Krytox and dry thin-film lubricants like Molybdenum Disulfide, to ensure smooth motion without contamination. These lubricants are carefully selected based on the specific application, ensuring optimal performance.

ALIO’s innovative approach to kinematic structures also plays a vital role in their success. For applications that require multi-axis motion, the company uses parallel kinematic structures that reduce errors commonly found in serial kinematic systems. This design reduces concerns over sine/cosine and orthogonality errors and minimizes space requirements in vacuum chambers.

With its unparalleled expertise in nanometer-level precision and vacuum-compatible systems, ALIO Industries is setting the standard for the future of motion control. Whether it’s providing ultra-precise systems for semiconductor applications or creating custom solutions for aerospace research, ALIO remains at the forefront of innovation, pushing the boundaries of what’s possible in the world of precision motion.