ALIO’s Low Profile Z-Wedge Stage delivers nanometer-class Z-axis precision, rapid move-and-settle and low-profile OEM integration for imaging and semiconductor.
3 mm
Up to 100 mm/sec
Down to 1 nm
+/- 0.5 µm
+/- 0.75 µm
3 mm
Up to 100 mm/sec
Down to 1 nm
+/- 0.5 µm
+/- 0.75 µm
As imaging systems become faster and manufacturing tolerances tighter, precision Z-axis motion has become a critical differentiator. Whether supporting automated microscopy, semiconductor wafer processing, or optical alignment, today’s OEMs need rapid focus control, exceptional stability and compact architectures that integrate easily into increasingly sophisticated systems.
ALIO’s Low Profile Z-Wedge Stage has been developed to meet these demands.
Using an innovative direct-drive wedge mechanism, the stage converts horizontal motion into highly precise vertical travel, delivering outstanding dynamic performance, rapid move-and-settle characteristics, and nanometer-class precision within an ultra-low-profile package. Combined with an ironless linear motor, dual encoder feedback and high-precision crossed roller bearings, the result is smooth, backlash-free motion with exceptional servo responsiveness and positioning stability.
Direct-Drive Wedge Architecture
A unique wedge mechanism converts horizontal direct-drive motion into precision vertical travel, eliminating backlash while improving servo response.
Ironless Linear Motor
Zero cogging ensures exceptionally smooth and repeatable motion, superior trajectory control, and reduced vibration.
Dual Encoder Feedback
Independent feedback from the linear motor and Z-axis delivers outstanding positioning accuracy and repeatability, while also providing superior servo control, maximizing bandwidth for improved tracking and disturbance rejection.
Low Profile, Low Mass Design
Compact construction reduces system height and moving mass, enabling faster acceleration, shorter settling times and easier OEM integration.
High-Precision Bearing System
Crossed roller bearings provide exceptional stiffness and stability for demanding imaging and positioning applications.
Life Sciences
Designed for automated microscopy, genome sequencing, spatial biology and digital pathology, where rapid autofocus and stable imaging directly improve throughput and image quality, and where vertical space is a premium in compact, table mounted machines.
Semiconductor
Ideal for wafer processing, autofocus imaging systems, thermal compression bonding and hybrid bonding, delivering fast, repeatable Z-axis motion that supports higher yield and process stability.
Photonics
Optimised for lens alignment, low-mass mirror positioning and fibre-to-fibre bonding, where smooth, precise focus motion is essential for optical performance.
As part of Allient Denver’s ALIO product line, the Low Profile Z-Wedge Stage is engineered for OEMs developing next-generation life science, semiconductor, and photonics systems. By combining innovative motion architecture with proven precision engineering, it delivers the Customer-Driven Precision and Tailored Precision that define every ALIO solution.
Find the right stage for your application using our intuitive product configurator.
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