Custom Motion Control Systems for Exacting Applications

For nearly 20 years, ALIO Industries has been working at the bleeding-edge of nanometer-level motion control. The company has set the standard for ultra-precise and repeatable motion control solutions, including the Hybrid Hexapod® which has less than 100 nm 3-Dimensional 6 axis Point Precision® repeatability, making it an essential technology for mission critical applications in the laser processing, optical inspection, photonics, semiconductor, metrology, and medical device sectors, and indeed all micro-machining projects.

However, it is the company’s ability to truly customize its core motion control solutions that sets it apart from alternative solution providers, offering significant value added by exactly matching OEM customers’ needs as well as pushing the envelope for new world nano-precision applications. ALIO’s on-going focus on exceeding OEM requirements helps its customers become leaders in their respective industry sectors.

Customers approach ALIO for unique applications due to the company’s long track record of successfully delivering complex prototypes that meet or exceed specifications the first time.

The company’s unwavering focus on honesty and integrity help customers understand the complex nature of precision applications. ALIO informs the customer of what they need to know and not just what they want to hear.


Laser Gimbal® Five-Axis Positioning Workstation. ALIO’s Laser Gimbal® Five Axis Positioning Workstation is the world’s only positioning system with 5-D vector path laser triggering. The system provides a novel solution for engineers and manufacturers that are using additive and subtractive laser processing techniques on cutting-edge materials to produce a variety of next generation products. (See video of workstation in action: VIDEO).

Additive Manufacturing – Phone Antenna Direct Printing. ALIO is capable of programmable path and contour control using its novel forward and inverse kinematic algorithms. This Hybrid Hexapod® operates at 100mm/sec 3D path velocity and is capable of micron-level path accuracy.  In this Hybrid Hexapod® system the nozzle proximity is kept to within 5 microns of surface and was designed for a 24/7 production environment. (See video of ALIO smart phone antenna printing: VIDEO).

Optical Camera Module Assembly/Test. ALIO’s MINI Hybrid Hexapod® is ideal for automated lens alignment/bonding to CCD arrays.  It has been helpful in building camera array modules, translational OIS, telescopic integrated lenses for miniature cameras used in every day products like cell phone cameras and drones.  Any application requiring 6- degrees of freedom positioning with nanometer/arc-sec levels of incremental motion and repeatability is a good fit for this product where product sensor resolution improvements are driving the need for higher precision. (See video of ALIO Mini Hybrid Hexapod in action: VIDEO).

Sensor Metrology. ALIO has experience providing systems to many of the world’s largest metrology companies for their internal measurement systems.  The company can provide solutions for even the most precise targets. (See video of ALIO Nano precision 6-Axis Nano Metrology® System: VIDEO).

Hybrid Hexapod® For Wafer Metrology. ALIO has supplied a 5-axis, open frame Hybrid Hexapod® design for wafer metrology.  It’s precision comes from precision crossed-roller bearings, and integrated frameless DC servo motors driving ballscrews.  It has a cubic travel range of 350mm “X” x 350mm “Y” x 75mm “Z” and tip/tilt travel ± 2 degrees.  ALIO was able to provide ± 0.1 micron bidirectional XYZ repeatability. (See video of ALIO’s Hybrid Hexapod® Large Open Center 5-Axis Platform in action: VIDEO).

Wafer Metrology Low-Profile XY-Theta With Large Open Aperture. ALIO’s vacuum expertise and broad selection of stages allowed the opportunity to couple four HV (10-7 Torr) stages to provide a nano-precision® solution. This R-XY-Z stack once again uses a pure linear based Z solution vs. the legacy Z-wedge design. (See video of ALIO’s semiconductor metrology XYR 300 mm open center system in action: VIDEO).

Application: Fiber/Optical Assembly (Private Label). ALIO’s metrology grade XY stage is the foundation for an exceptional three-axis alignment platform. ALIO’s unique design of the Z axis provides a completely linear based vertical solution with near air bearing performance. The Z stage with a high force linear motor, linear encoder, linear high-precision crossed roller bearings and integrated linear air counterbalance exceeds any mechanical based vertical axis on the market as well as some air bearing options. One major advantage to this unique solution allows for the customer’s payload to be mounted directly on the top of the stage in-line with the motor, encoder, bearings, and counterbalance thus minimizing overhanging brackets and greatly reducing potential Abbé errors. ALIO’s linear Z axis is 5 times order of magnitude more precise than old school z-wedge solutions.

Application: Nano Metrology. ALIO has taken its industry-leading, near air-bearing performance open center metrology stages, to the next level. This crossed roller bearing 300mm XY Nano Metrology® stage is DC Servo linear motor driven with 300mm open center, has unmatched motion performance with 3-Sigma, 6-D (linear, straightness, flatness, pitch, yaw and roll) and bi-directional repeatability of less than +/- 250nm. In other words, the volumetric bi-directional repeatability of any XY point is within a sphere of 500nm or less.

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Get in touch with ALIO: Expert solutions for your precision motion control needs